Светодиоды

263

16.6. HPKOCTb H JIHHeHHOCTb BocrrpHHTHH CBeTa CHCTeMOH 'IeJIOBe'leCKOrO 3peHHH. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ..

346

16.7. UHpKa.D.HbIH pHTM H IJ.HpKa.D.HaH 'IYBcTBHTeJIbHOcTb. . . . . . . . . . ..

348

fiH6JIHOrpa
349

TIpHJIO)KeHHe 16.TIl. oTOrrH'IeCKaH
351

TIpHJIO)KeHHe 16.TI2. CKOTOrrH'IeCKaH
352

12.2. CBeTo.u.HO.D.b1 Ha OCHOBe AIGaAs/GaAs. . . . . . . . . . . . . . . . . . ..

r JI a B a

13.

r JI a B a

265

TBep.u.bIe pacTBopbI AlInGaN H HCTO'lHHKH YJIbTpa«pHOJIeTo-

16.

lJYBcTBHTeJIbHOCTb 'IeJIOBe'leCKOrO rJIa3a H «poToMeTpH1Je-

Boro H3JIyqeHHB Ha HX OCHOBe. . . . . . . . . . . . . . . . . . . . . . . . .

270

13.1. CrreKTpbI YJIbTpa
270

13.2. lliHpHHa 3arrpeIUeHHoH 30HbI TBep.D.bIX pacTBopoB AlInGaN. . . . . ..

271

13.3. TIOJIHpH3aIJ.HOHHble 3
272

KOJIOpHMeTpHB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

353

13.4. AKTHBaIJ.HH rrpHMeceH B HHTpH.D.aX III rpyrrrrbl . . . . . . . . . . . . . ..

275

17.1. YHKIJ.HH COrJIaCOBaHHH IJ.BeTa H IJ.BeTOBaH .D.HarpaMMa. . . . . . . . ..

353

13.5 . .ll.HCJIOKaIJ.HH B HHTpH.D.ax III rpyrrrrbl . . . . . . . . . . . . . . . . . . . ..

276

17.2. tIHcToTa IJ.BeTa . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ..

361

13.6. Y-cBeTO.D.HOAbI, H3JIY'lalOIUHe Ha .D.JIHHaX BOJIH 60JIbIIIe 360 HM

280

17.3. KooPAHHaTbI IJ.BeTHOCTH CBeTO.D.HO.D.OB. . . . . . . . . . . . . . . . . . . ..

363

13.7. Y-cBeTO.D.HOAbI, H3JIY'lalOIUHe Ha .D.JIHHaX BOJIH MeHbIIIe 360 HM . .. fiH6JIHOrpa

283

17.4. B3aHMocBH3b Me)K.D.Y IJ.BeTHOCTblO H IJ.BeTOM . . . . . . . . . . . . . . ..

364

287

fiH6JIHOrpa
364

TIpHJIO)KeHHe 17.TI1 UBeToBaH .D.HarpaMMa MKO 1931 r . . . . . . . . .

366

TIpHJIO)KeHHe 17.TI2 UBeToBaH .D.HarpaMMa MKO 1978 r. . . . . . . ..

367

r JI a B a

14.

CnOHTaHHOe H3JIyqeHHe B pe30HaTopax. . . . . . . . . . . . . .

14.1. Pa3HOBH.D.HOCTH crrOHTaHHoro H3JIY'leHHH . . . . . . . . . . . . . . . . ..

c

r JI a B a

292 292

r JI a B a

r1'

14.2. Pe30HaTopbl THrra a6pH-TIepo . . . . . . . . . . . . . . . . . . . . . . ..

294

3aKoH H3JIyqeHHB II.JIaHKa H D;BeTOBaB TeMnepaTypa. . . . .

368

14.3. TIJIOTHOCTb oIITH'Ieci
297

18.1. CrreKTp H3JIY'leHHH COJIHIJ.a. . . . . . . . . . . . . . . . . . . . . . . . . ..

368

14.4. CrreKTpaJIbHble xapaKTepHcTHKH YCHJIeHHH H3JIY'leHHH . . . . . . . . ..

301

18.2. CrreKTp H3JIY'leHHH a6COJIIOTHO 'IepHOrO TeJIa - H3JIY'laTeJIH TIJIaHKa

368

14.5. MHTerpaJIbHble xapaKTepHcTHKH YCHJIeHHH H3JIY'leHHH. . . . . . . . ..

302

18.3. UBeToBaH TeMrrepaTypa H KOppeJIHpOBaHHaH IJ.BeTOBaH TeMrrepaTypa

370

14.6. 3KcrrepHMeHTaJIbHble .D.aHHble 06 YCHJIeHHH H3JIY'leHHH Hero yrJIOBaH 3aBHCHMOCTb. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . fiH6JIHOrpa

r JI a B a

15.

18.

fiH6JIHOrpa
CBeTO,ll;HO,ll;bI C pe30HaTopoM . . . . . . . . . . . . . . . . . . . . .

310

15.1. BBe.D.eHHe H HCTOpH'IeCKHe CBe.D.eHHH .. . . . . . . . . . . . . . . . . . ..

310

15.2. TIpoeKTHpoBaHHe CBeTO.D.HO.D.OB C pe30HaTopoM . . . . . . . . . . . . . ..

312

373

TIpHJIO)KeHHe 18.TI. UBeToBaH TeMrrepaTypa H KOOp.D.HHaTbI IJ.BeTHOCTH a6COJIIOTHO 'IepHOrO TeJIa Ha IJ.BeTOBblX .D.HarpaMMax MKO 1931 r. H 1976 r. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .. 375

r JIaBa

CMemeHHe u;seTOB H D;BeTonepe,ll;a'la . . . . . . . . . . . . . . . .

376

19.1. A.D..D.HTHBHOe CMeIIIeHHe IJ.BeTOB. . . . . . . . . . . . . . . . . . . . . . . ..

19.

376

19.2. UBeTOrrepe.D.a'la. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ..

379

15.3. CBeTO.D.HO.D.bI C pe30HaTopoM InGaAs/GaAs C .D.JIHHOH BOJIHbI H3JIy'leHHH 930 HM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ..

316

15.4. CBeTO.D.HO.D.bI Ha OCHOBe AlInGaP/GaAs C pe30HaTopoM, H3JIY'lalOIUHe Ha .D.JIHHe BOJIHbI 650 HM . . . . . . . . . . . . . . . . . . . . . . . . . . ..

19.3. MH.D.eKC IJ.BeTOrrepe.D.a'lH .D.JIH H3JIY'laTeJIeH, pacrrOJIO)KeHHbIX Ha KPHBOH TIJIaHKa . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ..

386

322

15.5. CBeTO.D.HO.D.bI 60JIbIIIOH rrJIOIUa.D.H C rrepeH3JIY'leHHeM
325

19.4. MH.D.eKCbI IJ.BeTOrrepe.D.a'lH .D.JIH HCTO'lHHKOB CBeTa, pacrrOJIO)KeHHblX BHe KPHBOH TIJIaHKa . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ..

387

8

OeJlaBJLeHUe

oH6JIHOrpa
23.2. CBeto):(Ho):(b1 B BOJIOKOHHO-OITTHqeCKHX CHCTeMax CBH3H • . • • • • • ••

TIpHJIO)KeHHe 19.TI1 OTpa)KaTeJIbHaH CrrOC06HOCTb 3TaJIOHHbIX U:BeTOB

20.

HCTO'lHHKH 6eJIoro CBeTa Ha OCHOBe CBeTO):(HO):(OB

...

):(JIHHe BOJIHbI 870 HM . . . . • . • . . • . . • • • • • . . • • • . • • . . • •• 23.4. TIoBepxHocTHO-H3JIYQaIOmHe

CBeTO):(HO):(bI,

pa6oTaIOmHe

Ha

20.2. C03):(aHHe 6eJIoro CBeTa rrpH rrOMOmH ):(BYXU:BeTHbIX HCTOqHHKOB

453

):(JIHHe

BOJIHbI 1300 HM. • • • . • • • • • • • • . • • • • • • • • • • . . . . . . . . . .

20.1. C03):(aHHe 6eJIoro CBeTa rrpH rrOMOmH CBeTO):(HO):(OB . • . . . • . . .

453

23.3. TIoBepxHocTHO-H3JIyqaIOmHe CBeTO):(HO):(bI oappaca, pa6oTaIOmHe Ha

TIpHJIO)KeHHe 19.TI2 OTpa)KaTeJIbHaH CrrOC06HOCTb 3TaJIOHHbIX U:BeTOB

r JI a B a

9

OeJLaBJLeHUe

455

23.5. CBeTo):(Ho):(b1 ):(JIH CHCTeM CBH3H, pa6oTaIOmHe Ha ):(JIHHe BOJIHbI 650 HM

457

23.6. CyrrepJIIOMHHecu:eHTHble CBeTO):(HO):(b1 C Topu:eBbIM H3JIYQeHHeM •••

459

oH6JIHOrpa
463

20.3. C03):(aHHe 6eJIoro CBeTa C rrOMOmbIO Tpex pa3HoU:BeTHblx HCTOqHHKOB 20.4. TeMrrepaTYPHaH 3aBHCHMOCTb TpeXU:BeTHbIX HCTOqHHKOB 6eJIoro CBeTa, C03):(aHHbIX Ha OCHOBe CBeTO):(HO):(OB • • • . • . . . . • • • • . . . . . • 20.5. qeTblpex- H rrHTHU:BeTHbie HCTOqHHKH 6eJIoro CBeTa

24.

)luHaMU'IeCKHe xapaKTepHcTHKH CBeTO):(HO):(OB . . . . . . . . .

464

24.1. BpeMH HapaCTaHHH H crra):(a CHrHaJIOB, QaCTOTa rro ypOBHIO 3):(0 H

oH6JIHOrpa
r JI a B a

r JI a B a

rrOJIoca rrporrYCKaHHH B TeopHH JIHHeHHblX u:erreH • . • . . . • . . . . . .

464

24.2. BpeMH HapacTaHHH H crra):(a OrrTHQeCKOrO CHrHaJIa rrpH 60JIblIIOH eM21.

HCTO'lHHKU 6eJIoro CBeTa Ha OCHOBe npeo6pa30BaTeJIeii

):(JIUHbI BOJIHbI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

21.1. 3
HCrrOJIb3yeMblx ):(JIH

rrpeo6pa30BaHHII

):(JIHH BOJIH . . • • • . . . . • • . . . . • • • . . . . . . • • . . . . . . • . • . . 21.2. MaTepHaJIbI ):(JIH rrpeo6pa30BaTeJIeH ):(JIHHbI BOJIHbI . • • . • 21.3. JIIOMHHO
••..••.•.....•••...••••.....••

KOCTH CBeTO):(HO):(OB. . . . • • • • . . . . • • • • • • . • • • • • • • • . • • . .

466

24.3. BpeMeHa HapacTaHHH H crra):(a OITTHQeCKHX CHrHaJIOB rrpH MaJIOH eMKOCTH CBeTO):(HO):(OB. . . . . . . . . . . . . • • • • • • • • • •• • • • • • • • •

467

24.4. 3aBHcHMoCTb HarrpH)KeHHH OT BpeMeHH crra):(a H HapaCTaHHH OrrTHQeCKHX CHrHaJIOB

• . • • • • • • • . • • • • • . • • • . • . . . . • • . . • • . • •

24.5. Yxo):( HOCHTeJIeH H3 aKTHBHOH 06JIaCTH . • • • • • • . . . . . • . • .

469 470

21.4. CBeTo):(Ho):(bI 6eJIoro CBeqeHHH Ha OCHOBe JIIOMHHO
24.6. opMHpoBaHHe TOKa • • • • . . • • • • •

471

21.5. TIpocTpaHcTBeHHoe pacrrOJIO)KeHHe JIIOMHHo<popa • . . . . . • • •

24.7. qacToTa CBeTO):(Ho):(a rro ypOBHIO 3):(0. . . • . . . • • • •

473

21.6. CBeTo):(Ho):(b1 6eJIoro CBeqeHHH Ha OCHOBe Y KpHCTaJIJIOB C JIIOMHHO-

24.8. rJIa3-):(HarpaMMa • • • • • . . • • • . • • • . • • • . . . . • .

473

24.9. BpeMH )KH3HH HOCHTeJIeH H QaCTOTa rro ypOBHIO 3 ):(0

474


r JI a B a

22.

BOJIOKOHHO-OnTH'IeCKUe CHCTeMbI CBH3H

22.1. THrrbI OITTHqeCKHX BOJIOKOH . . • • . • . . . . . ••. 22.2. CrreKTp 3aTyxaHHH H3JIyqeHHH B KBapu:eBblx H rrOJIHMepHblx BOJIOKHaX 22.3. Me)KMo):(oBaH ):(HcrrepcHH B OITTHqeCKHX BOJIOKHax . • . 22.4. XpOMaTHqeCKaH ):(HcrrepCHH B OITTHqeCKHX BOJIOKOHaX . . • . • • . . . . 22.5. qHCJIOBaH arrepTypa OITTHqeCKHX BOJIOKOH • • . . . • • • • • . . . • • . . • 22.6. Coe):(HHeHHe CBeTO):(Ho):(a C OrrTHqeCKHM BOJIOKHOM rrpH rrOMOmH JIHH3 22.7. oecrrpoBo):(Hble OrrTHqeCKHe CHCTeMbI CBH3H . • • • • oH6JIHOrpa
r JI a B a . 23.

CBeTo):(Ho):(bI B cHcTeMaX CBH3H

23.1. CBeTo):(Ho):(bI B 6ecrrpoBo):(HbiX CHCTeMax CBH3H . • • •

oH6JIHOrpa
476

TIpHJIO)KeHHH • • • . • • • • • . . . • . . . . . . . qacTo HCrrOJIb3yeMble 0603HaQeHHH •

477 477

H3HQeCKHe rrOCTOHHHble (KoHcTaHTbI) • . • • • • • • • • • • • • •

481

CBoHcTBa apcHHH):(OB A III B v rrpH KOMHaTHOH TeMrrepaType. .

482

CBoHcTBa HHTPH):(OB

v AIIIB

rrpH KOMHaTHOH TeMrrepaType.

483

CBoHcTBa
484

CBoHcTBa Si H Ge rrpH KOMHaTHOH TeMrrepaType . • • •

485

TIepHo):(HQeCKaH CHCTeMa 3JIeMeHTOB (ocHoBHaH) •••

~

•.•

486

TIepHo):(HQeCKaH CHCTeMa 3JIeMeHTOB (pacIIIHpeHHaH) .•

487

TIpe):(MeTHbIH YKa3aTeJIb • • • • • • • • • • • • • • • • • • • • • • • • .

488

r

·11

ilpeaUCAOBue peaa/Cmopa nepeBOaa

,nHo,naM CTaJIH rrpOHBJIHTb IIIHpoKHe KpyrH HH)KeHepOB, pa3pa6aTbIBalOmHX arrrrapaTYPY ,nJIH OrrT03JIeKTpOHHKH H CBeTOTeXHHKH. CTaJIO ropa3,n0 60JIbIIIe B03MO)KHbIX qHTaTeJIeH KHHrH 0 CBeTo,nHo,nax. B

CIIlA,

SIrroHHH, KHTae,

3arra,nHoH EBporre 6bIJIH rrpHHHTbI IIIHpoKoMacIIITa6HbIe HaUHOHaJIbHble H ueJIeBble rrporpaMMbl rro rrp06JIeMe CBeTo,nHo,nHoro OCBemeHHH. CBeTo,nHo,nbI

npe)l;HCJIOBHe pe)l;aKTOpa nepeBO)l;a

BbIIIycKalOTcH COTHHMH MHJIJIHOHOB IIITyK B ro,n. CBeToBaH OT,naqa CBeTO,nHO,nOB 6eJIoro CBeqeHHH ,nOCTHrJIa 3HaqeHHH 130-150 JIM/BT, T. e. rrOqTH Ha rropH,noK rrpeBbICHJIa CBeTOOT,naqy JIaMrr HaKaJIHBaHHH. HHaHcoBble

nepBaH KHHra 0 CBeTO,nHO,naX A. oepra H n. ,UHHa BbIIIIJIa B 1976 r., a ee PYCCKHH rrepeBo,n -

B 1979 r. I). OHa rro,nBo,nHJIa HTOrH rrOqTH 15 JIeT

HCCJIe,noBaHHH H pa3pa60ToK rrOJIyrrpoBo,nHHKOBbIX HCTOqHHKOB H3JIyqeHHH -

CBeTo,nHo,nOB H HX rrpOMbIIIIJIeHHbIX rrpHMeHeHHH. C Tex rrop 0 CBe-

To,nHo,nax 6bIJIH orry6JIHKOBaHbI TbICHqH )KypHaJIbHbIX CTaTeH H ,nOKJIa,nOB

BJIO)KeHHH B 3TOM HarrpaBJIeHHH COCTaBJIHIOT COTHH MHJIJIHOHOB ,nOJIJIapOB B ro,n. 06mHH 06beM CBeTo,nHo,nHoro pbIHKa B MHpe B 2005 r. COCTaBHJI

4 8

MJIP,n ,nOJIJI.;

rrpe,nrrOJIaraeTCH,

qTO B 2010

r.

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6y,neT rrpeBblIIIaTb

MJIP,n ,nOJIJI. Oc06eHHocTb

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rrpo
Ha KOH
POM nOJIHTeXHHqeCKOrO HHCTHTYTa PeHHCJIaY3pa B YHHBepCHTeTe IIITaTa

,neCHTKH 0630pOB H 6POiliIOP, OT,neJIbHbIX rJIaB B yqe6HbIX rroc06HHX, HO

HblO-l1opK, H KHHra BO MHorOM HOCHT yqe6HbIH xapaKTep. KpOMe Toro,

CrreUHaJIbHbIX MOHorpa
aBTOp rrpOBo,nHJI HCCJIe,nOBaHHH B pa3HbIX HayqHblX HarrpaBJIeHHHX, H rJIa-

qHTaTeJIIO KHHra rrpope,na IIly6epTa «CBeTo,nHo,nbI» BOCrrOJIHHeT

BbI 0 CBeTo,nHo,nax C pe30HaTopaMH, 0 CBeTo,nHo,nax C JIIOMHHo<popaMH, 0

3TOT rrp06eJI. BTopoe H3,naHHe 3TOH KHHrH, BblIIIe,nIIIee Ha aHrJIHHCKOM

rrpHMeHeHHH CBeTo,nHo,nOB B BOJIOKOHHO-OrrTHqeCKOH CBH3H co,nep)KaT OPH-

H3bIKe B 2006 r. qepe3 TpH ro,na rrOCJIe rrepBoro H3,naHHH, BKJIlOqaeT aHaJIH3

rHHaJIbHble pe3YJIbTaTbI, eme )K,nymHe rrpaKTHqeCKOrO HCrrOJIb30BaHHH.

pa60T rro CBeTo,nHo,naM BrrJIOTb ,no caMoro rrOCJIe,nHero BpeMeHH, OHO Ha

HeCMOTpH Ha Bce Tpy,nHOCTH rrOCJIe,nHero rrepHo,na pa3BHTHSI OTeqe-

TpeTb 06IIIHpHee rrepBoro H3,naHHH. 3TO 06YCJIOBJIeHO 6YPHbIM pa3BHTHeM

CTBeHHOH HayKH H TeXHHKH, HCCJIe,nOBaHHSI H pa3pa60TKH rro CBeTo,nHo,nHOH

Ba)KHeHiliero HarrpaBJIeHHH B cOBpe-

TeMaTHKe B POCCHH He rrpeKpamaJIHCb. Pa3BHBalOTCSI pa60TbI rro TeXHO-

MeHHoH rrOJIyrrpoBo,nHHKOBOH 3JIeKTpOHHKe H OrrT03JIeKTpOHHKe, IIIHPOKO


JIOrHH 3rrHTaKCHaJIbHOrO BblpamHBaHHSI reTepOCTpYKTYP Ha OCHOBe GaN

rrpHMeHHlOmerocH B rrpOMbIIIIJIeHHOCTH H 06emalOmero HOBbIe rrpHMeHeHHH

Hero TBep,nbIX paCTBopOB. HCCJIe,nYIOTCSI CBOHCTBa rrpHMeceH, ,ne
B He,naJIeKOM 6y,nymeM. B
XX

H ,nHCJIOKaUHH. H3yqalOTCSI 3JIeKTpHqeCKHe H OrrTHqeCKHe CBOHCTBa MaB. rrpo-

TepHaJIOB H CTpyKTyp HH3KOH pa3MepHOCTH.

Pa3pa60TKH 3
H30IIIeJI rrpopbIB 6JIaro,napH C03,naHHIO reTepocTpYKTYP Ha OCHOBe HHTpH,na

CBeTo,nHo,nOB rrpOBo,nSlTCSI B rrpOMblIIIJIeHHbIX
raJIJIHH H 6JIH3KHX K HeMY TBep,nblx pacTBopoB. 3
rropTHblX qHrrOB, TaK H c06CTBeHHbIX BblpameHHblX CTpyKTyp. CBeTo,nHo,nbl

pa3pa60TaHHble Ha OCHOBe 3THX MaTepHaJIOB, rrepeKpbIJIH KOPOTKOBOJIHOBYIO

IIIHPOKO rrpHMeHSlIOTCSI B pa3HbIX 06JIaCTSlX CBeTOTeXHHKH. B POCCHH He06-

qaCTb crreKTpa -

xo,nHMa Koop,nHHaUHSI HayqHblX HCCJIe,nOBaHHH H TeXHHqeCKHX pa3pa60TOK

OT YJIbTpa
HO cymeCTBeHHO YJIyqIIIHJIaCb 3
CBeTo,nHo,nOB B rocy,napCTBeHHOM MaCIIITa6e. CBeTo,nHo,nbl H YCTpOHCTBa Ha HX OCHOBe ,nOJI)KHbl rrpOMblIIIJIeHHO rrpOH3Bo,nHTbCSI B POCCHH TaK, qT06bl

OT )KeJITO-3eJIeHOH ,no 6JIH)KHeH HH
6bITb KOHKypeHTHblMH B COBpeMeHHOM MHpe. n03TOMY MO)KHO Bblpa3HTb

JIH He TOJIbKO cpe,nCTBaMH CHrHaJIH3aUHH H rrepe,naqH HH<popMaUHH BO

YBepeHHOCTb B TOM, qTO pYCCKoe H3,naHHe KHHrH

BceM crreKTpaJIbHOM ,nHarra30HeOT 6JIH)KHeH YJIbTpa
CBoero qHTaTeJISI.

HH
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pblX CJIyqaSlX HCrrOJIb30BaHO COKpameHHe C,U. nO,nCTpOqHble rrpHMeqaHHSI

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SiO (r)+2C (TB)--+SiC (TB)+CO (r).

UoxolKe, qTO BbImeonHcaHHoe SIBJIeHHe H SIBJIeHHe BOSHHKHOBeHHSI s. A. C Ha nepexoAe MelKAY Kap60pYHAOM H APyrHM npoBoAHHKOM npH nponycKaHHH qepes KpHCTaJIJIbI nOCTOSIHHoro HJIH nepeMeHHoro TOKa CBSISaHbI

KaK H nOJIynpOBo.n:HI1KH THna AIIIBV, Kap60pYH.n: HBJIHeTCH I1CKYCCTBeHHO nOJIY'IaeMbIM MaTepHaJIOM, He CYlll.eCTBYIOllI.l1M B npHpo.n:e. SiC HMeeT TaKYIO )Ke KpHCTaJIJIH'IecKYIO peilieTKY, KaK H aJIMa3, n09ToMY 9TOT MaTepl1aJI xapaKTepH3yeTcH O'IeHb BbICOKOH TBep.n:ocTbIO, Ilo MHHepaJIOrH'IeCKOH IIIKaJIe TBep.n:ocTH (IIIKaJIe ~ooca) TBep.n:ocTb Kap60pYH.n:a paBHa 9,0, Tor.n:a KaK 'IHCTbIH SiC 06JIa.n:aeT TBep.n:ocTbIO 9,2-9,5, a aJIMa3 10,0. DJIaro.n:apH CBoeH BbICOKOH TBep.n:oCTI1 11 HH3KOH CTOHMOCTI1 CHHTe3a Kap60pYH.n: CTaJI IIIHPOKO HCnOJIb30BaTbCH B npoH3Bo.n:cTBe a6pa3HBHbIX MaTepHaJIOB. B 1907 r. feHpH .z:L)K03ecp PaYH.n: (1881-1966 rr.) npOBepHJI B03MO)KHOCTb npHMeHeHHH KpHCTaJIJIOB SiC B Ka'IeCTBe BbmpHMJIHIOllI.l1X TBep.n:oTeJIbHbIX .n:eTeKTopoB. Il03.n:Hee 9TH .n:eTeKTopbI nOJIytIHJIH Ha3BaHHe «KPHCTaJIJIHtIeCKHX .n:eTeKTopOB~. Hx HCnOJIb30BaJII1 KaK .n:eMo.n:YJIHTOPbI pa.n:HotIaCTOTHbIX CHrHaJIOB B nepBblx pa.n:HonpHeMHHKax. Pa60Ta KpHCTaJIJIHtIeCKHX .n:eTeKTopoB 6bIJIa BnepBble npo.n:eMoHCTpHpoBaHa B 1906 r. B Te ro.n:bI

Apyr C ApyroM, HO STa CBSISb SIBJISIeTCSI BTOPHqHOH, nOCKOJIbKY xopomo HSBeCTHO, qTO nOSIBJIeHHe s. A. c. 06'bSICHSIeTcSI TepMOSJIeKTpuqecKHMH npou:eCCaMH. AsTOP STOH CTaTbH 6YAeT 6JIarOAapeH sa CCblJlKH Ha ApyrHe ny6JIHKau:HH, nOCBSIw;eHHbIe STOMY HJIH nOA06HbIM eMY SIBJIeHHHM. HblO-HoPK,

PHC.

1.1.

Coo6meHHe 0 «JII06onblTHOM

r. )1;lK. PaYHA

lIBJIeHHH~, Ha3BaHHOM 3JIeKTpOJIIOMHHeCueH-

UHeH, 3aKJIIOqaIOmeMClI B H3JIyqeHHH CBeTa KpHCTaJIJIHqeCKHM Kap6opYH.D.OM npH nO.D.aqe Ha Heto Hanpll)!{eHHlI.

M3

CTaTbH BH.D.HO, 'ITO nepBbIH CBeTO.D.HO.D. 6b1JI CKopee

.D.HO.D.OM iIIOTTKH, qeM .D.HO.D.OM C p-n-nepeXO.D.OM (H.J.Round, Electrical World,

49,

309, 1907). PaYH.n: 6b1JI pa.n:HoHH)KeHepOM H BeCbMa ycneIIIHbIM H306peTaTeJIeM, K KOH~y cBoeH KapbepbI HMeBIIII1M 117 naTeHTOB. IlepBble YCTpoHcTBa, 113JIytIaIOIlI.He CBeT, 06JIa.n:aJII1 BbmpHMJIHIOIlI.HMI1 BOJIbTaMnepHbIMH xapaKTepI1CTHKaMH, T. e. HBJIHJIHCb .n:Ho.n:aMH. IlpHtIHHa I1cnycKaHHH CBeTa B HI1X

Dt. 1.

20

1.2. Hcmopuft coaaaftuft cBemOaUOaOB ICpacftoeo u uftcppalCpacftoeo CBe'leftUft 21

Hcmopuft coaaaftuft cBemOaUOaOB

06bHCHHeTCH B03HHKHOBeHHeM BbIIlpHMJIHlOmerO KOHTaKTa illOTTKH B MeCTe KOHTaKTa KpHCTaJIJIa SiC H 3JIeKTpo.n.oB. ,UeHcTBHe .n.Ho.n.a illOTTKH

B

1928 r. JIoceB (Lossev, 1928) orry6JIHKOBaJI pe3YJIbTaTbI CBOHX HC-

CJIe.n.oBaHHH HBJIeHHH JIIOMHHeCIIeHIIHH, Ha6JIIO.n.aeMoro B BbIIlpHMJIHlOmHX

06eCrreqHBaeTCH, KaK rrpaBHJIO, TOKOM OCHOBHbIX HOCHTeJIeH 3apH.n.a (3JIeK-

SiC-.n.Ho.n.ax, HCrrOJIb3yeMblx B KaqeCTBe .n.eMo.n.YJIHTOPOB B pa.n.HocxeMax,

TpOHOB).

Ha rrepexo.n.ax MeTaJIJI-rrOJIyrrpoBo.n.HHK. OH YCTaHOBHJI, qTO H3JIyqeHHe

O.n.HaKo rrpH

06paTHoM CMemeHHH,

CHJIbHOM rrpH

rrpHMoM CMemeHHH rrepexo.n.a HJIH

ero

KOTOPOM 3arrycKalOTcH rrpoIIeccbI JIaBHHHOro

CBeTa B O.n.HHX .n.Ho.n.ax B03HHKaeT TOJIbKO rrpH HX CMemeHHH B 06paTHOM

YMHO)KeHHH, B HeM MO)KeT 06pa30BaTbCH 60JIbiliOe KOJIHqeCTBO HeOCHOBHbIX

HarrpaBJIeHHH, a B .n.pymx -

HOCHTeJIeH (.n.b1pOK).

HarrpaBJIeHHHX. JIoceB rrbITaJICH HaHTH rrpHqHHY rrOHBJIeHHH JIIOMHHeCIIeH-

Ha pHC. 1.2 rrOKa3aH MexaHH3M H3JIyqeHHH CBeTa rrpH rrpHMOM CMemeHHH

.n.Ho.n.a

illOTTKH.

npe.n.CTaBJIeHbI

30HHble

.n.HarpaMMbI

rrepexo.n.a

MeTaJIJI-rrOJIyrrpOBo.n.HHK B Tpex COCTOHHHHX: B YCJIOBHH paBHOBeCHH rrpH He60JIbiliOM rrpHMOM CMemeHHH HHH

(8).

(6)

(a),

H rrpH CHJIbHOM rrpHMoM CMeme-

npe.n.rrOJIaraeTCH, qTO rrOJIyrrpOBo.n.HHK 06JIa.n.aeT rrpoBo.n.HMOCTblO

n-THrra. npH CHJIbHOM rrpHMoM cMemeHHH rrepexo.n.a B rrOJIyrrpoBo.n.HHK qepe3 rrOBepXHOCTHbIH rroTeHIIHaJIbHbIH 6apbep 3a CqeT TYHHeJIbHOrO 3cpcpeKTa HH)KeKTHpyeTcH 60JIbiliOe KOJIHqeCTBO HeOCHOBHbIX HOCHTeJIeH.

B pe3yJIbTa-

Te peKOM6HHaIIHH 3THX HOCHTeJIeH (.n.b1pOK) C 3JIeKTpOHaMH rrOJIyrrpoBo.n.HHKa rrpoHcxo.n.HT H3JIyqeHHe CPOTOHOB.

B

.n.Ho.n.ax illOTTKH .n.JIH ocymeCTBJIe-

HHH HH)KeKIIHH HeOCHOBHbIX HOCHTeJIeH Tpe6YlOTCH HarrpH)KeHHH, HaMHoro rrpeBbIIlIalOmHe 06b1qHO

HCrrOJIb3yeMbie HX 3HaqeHHH

Ha

p-n-rrepexo.n.ax

cBeTo.n.Ho.n.OB. PayH.n. B CBoeM .n.OKJIa.n.e (Round, 1907) YKa3aJI, qTO pa60qHe HarrpH)KeHHH .n.HO.n.OB illOTTKH Haxo.n.HTcH B .n.Harra30He

10-11 0 B.

rrpH CMemeHHH KaK B rrpHMOM, TaK H 06paTHOM

IIHH, .n.JIH qero OH KarraJI Ha CBeTHmYIOCH rrOBepXHOCTb 06pa3IIa )KH.n.KHH 6eH30JI H H3MepHJI CKOPOCTb ero HcrrapeHHH. HCXO.n.H H3 Toro, qTO 6eH30JI HCrrapHJICH OqeHb

Me.n.JIeHHO,

OH

c.n.eJIaJI

rrpaBHJIbHOe

3aKJIlOqeHHe, qTO

H3JIyqeHHe CBeTa HHKaK He CBH3aHO C CHJIbHbIM pa30rpeBOM rrOBepXHOCTH. OH TaK)Ke rrpe.n.rrOJIO)KHJI, qTO HBJIeHHe JIIOMHHeCIIeHIIHH ~OqeHb rrOXO)Ke Ha rrpOIIecc HcrrYCKaHHH XOJIO.n.HbIX 3JIeKTpOHOB». JIoceB 06HapY)KHJI, qTO rrOHBJIeHHe H HCqe3HOBeHHe CBeqeHHH B SiC-.n.Ho.n.ax rrpoHcxo.n.HJIO OqeHb 6bICTPO, qTO .n.eJIaJIO B03MO)KHbIM H3rOTOBJIeHHe Ha HX OCHOBe TaK Ha3bIBaeMbIX CBeTOBbIX peJIe 1). ,UaJIbHeHillee pa3BHTHe CBeTo.n.Ho.n.OB, BrrJIOTb .11.0 1960-x rr., rro.n.P06HO orrHcaHO B pa60Te JIe6Hepa (Loebner, 1976)

K

2).

KOHIIY 60-x rr. 6bIJIH pa3pa60TaHbI TeXHOJIOrHH rrOJIyqeHHH rrJIeHOK

SiC (Violin et ai., 1969) H H3rOTOBJIeHHH Ha HX OCHOBe rrOJIyrrpOBo.n.HHKOBbIX YCTPOHCTB C

p-n-rrepexo.n.OM 3).

,UHO.n.bI H3 Kap6H.n.a KpeMHHH 6bIJIH

rrpapo.n.HTeJIHMH COBpeMeHHbIX CBeTo.n.Ho.n.OB roJIy60ro CBeqeHHH, B KOTOPbIX 3cpcpeKTHBHOCTb rrpe06pa30BaHHH 3JIeKTpHqeCKOH 3HeprHH B OrrTHqeCKOe

H3JIyqeHHe CBeTa B .n.Ho.n.ax illOTTKH MO)KeT TaK)Ke rrpoHcxo.n.HTb rrpH HX

H3JIyqeHHe COCTaBJIHJIa Bcero 0,005% (Potter et ai., 1969).

B rrocJIe.n.YlOmHe

06paTHOM cMemeHHH B pe3YJIbTaTe JIaBHHHOro rrpo60H, cOrrpOBO)K.n.alOme-

.n.eCHTHJIeTHH He y.n.aJIOCb 3HaQHTeJIbHO YJIYQIlIHTb xapaKTepHCTHKH CBeTO-

rOCH y.n.aPHOH HOHH3aIIHeH aTOMOB rrOJIyrrpoBo.n.HHKa HOCHTeJIHMH 3apH.n.oB,

.n.HO.n.OB rOJIy60ro CBeQeHHH. 3TO 06bHcHHeTcH TeM, QTO SiC OTHOCHTCH K

06JIa.n.alOmHMH BbICOKHMH 3HeprHHMH.

B

rrpoIIecce HOHH3aIIHH B BaJIeHTHOH

30He 06pa3yeTcH 60JIbiliOe qHCJIO .n.b1POK, a B 30He rrpoBo.n.HMOCTH -

MHoro

HenpHMo30HHbIM rrOJIynpoBo.n.HHKaM, y KOTOPbIX OQeHb HH3KaH BepoHTHoCTb Me)K30HHbIX OnTHQeCKHX nepexo.n.oB.

K

HaQaJIY 90-x rr. BbIIlYCK CBeTo.n.H-

3JIeKTpOHoB, KOTopble, peKOM6HHHPYH .n.pyr C .n.pyroM, HcrrycKalOT CPOTOHbI.

O.n.OB SiC rOJIy60ro CBeQeHHH 6bIJI rrpaKTHQeCKH npeKpameH, nOCKOJIbKY

B pa60Te

SiC 60JIbille He Mor .n.aJIbille KOHKypHpOBaTb C nOJIynpOBo.n.HHKaMH THna

HCTM3Ha H .n.p. (Eastman et ai., 1964) rrpHBe.n.eHbI 60JIee rro.n.po6-

Hble .n.aHHble 0 rrpoIIeccax H3JIyqeHHH CBeTa B .n.Ho.n.ax illOTTKH B YCJIOBHHX

AIIIBV.

06paTHoro CMemeHHH.

H HMeJIH K. n . .n..

a

JIYQIlIHe CBeTo.n.Ho.n.bI SiC H3JIYQaJIH CBeT C .n.JIHHOH BOJIHbI 470 HM rv

0,03% (Edmond et ai., 1993).

6

1.2. HCTOPHR C03.n;aHHR CBeTo.n;Ho.n;OB KpacHoro H HHcppaKpacHoro CBeqeHHR H3 GaAs H AIGaAs K

1950-M rr. llOJIynpOBo.n.HHKOBble MaTepHaJIbi THna

AIIBvI,

'a

TaK)Ke

SiC, 6bIJIH Y)Ke .n.OBOJlbHO XOPOiliO H3YQeHbI, nOCKOJIbKY 3TO MaTepHaJIbI, BCTpeQalOmHeCH B npHpo.n.e. n03TOMY He CJIYQaHHO, QTO nepBble CBeTO-

MeTaJIJI rronynpoBO.lUlHK PHC. 1.2 . .ll.HarpaMMa 3HepreTHqeCKHX 30H KOHTaKTa lIloTTKH: a - B YCJlOBHHX paBHOBeCHH, 6 - rrpH He6oJlbIIIOM rrpHMoM CMellJeHHH H B - rrpH CHJlbHOM CMellJeHHH. B rrOCJleAHeM cJlyqae rrpOHCXOAHT HH)KeKIIHH HeOCHOBHbIX HOCHTeJleii, 06YCJlOBJlHBaIOlIJaH rrpoIIecc H3J1yqeHHH CBeTa

1) Pa60Tbl O. B. JIoceBa HeAaBHO 6blJlH rrepeH3AaHbI (CM. [1]). O. B. JIoceB YKa3aJl B 1939 r., 'ITO CBeqeHHe B03HHKaeT B KpHCTaJlJle Ha rpaHHIIe Me)KAY p- H n-06J1aCTHMH.

2) JIe6Hep, 6YAyqH aTTaIIIe rro HaYKe ilOCOJlbCTBa ClIlA B MOCKBe, CrreIIHaJlbHO 3HaKOMHJlCH C pa60TaMH O. B. JIoceBa B 6H6J1HOTeKe MfY. 3) ilpHopHTeTHbie pa60Tbl

H. B.

PbI)KHKOBa HAp. rro CBeTOAHOAaM SiC CM. B

[2].

Fit. 1. HcmopuR C03aaHuR c8emOaUOa08

22

.lI.HO.ll.bI 6bIJIH H3fOTOBJIeHbI H3 SiC B

1907 f.,

a B

1.2. HcmopuR C03aaHUR c8emOaUOa08 "'paCHOcO U uHljJpa"'paCHOcO C8e'leHUR 23

1936 f.

rrOHBHJIaCb

.lI.JIH JIa3epOB H orrpe.ll.eJIHJI HX xapaKTepHcTHKH. TaKoe TeCHoe COTpY.ll.HHqe-

rry6JIHKaU:HH 0 C03.l1.aHHH IPpaHU:Y3CKHM yqeHbIM )1(. ,UecTpHo CBeTO.ll.HO.ll.OB

CTBO yqeHbIX 6bICTPO rrpHHeCJIO CBOH rrJIO.ll.bI, 'ITO BbIpa3HJIOCb B pa3pa60TKe

Ha OCHOBe KpHCTaJIJIOB ZnS (Destriau, 1936).

JIa3epa GaAs, pa60TaIOIII.efO BHerrpepbIBHOM pe)KHMe rrpH

3pa rrOJIyrrpoBO.ll.HHKOBbIX COe.ll.HHeHHH THrra AIllBv HaqaJIaCb B 50-x ff. rrOCJIe orry6JIHKOBaHHH pa60T BeJIbKepa (Welker, 1952, 1953) I). noCKOJIbKY rroJIyrrpoBO.ll.HHKOBbIe MaTepHaJibI .lI.aHHOfO THrra C03.l1.aHbI HCKyC-

77

K

(Rup-

precht et aI., 1963). nOCJIe rrpHMeHeHHH MeTO.ll.a )I(3, rrpe.ll.JIO)KeHHOfO

r.

HeJIbCOHOM B JIa60paTopHH IPHpMbI RCA (npHHCTOH), Y.ll.aJIOCb H3fOTOBHTb JIa3ep H3 GaAs, pa60TaIOIII.HH rrpH 300 K, KOTOPbIH 06JIa.ll.aJI fOp a3.l1.0

CTBeHHO, HX .lI.O 3TOfO BpeMeHH rrpOCTO He CYIII.eCTBOBaJIO. COBpeMeHHbIe

MeHblIleH rropofoBOH rrJIOTHOCTbIO TOKa, qeM JIa3epbI, rrOJIyqeHHbIe MeTO.ll.OM

rrOJIyrrpOBO.ll.HHKH paCCMaTpHBaeMOH fpyrrrrbI 06JIa.ll.aIOT XOpOlIlHMH OITTHqe-

.lI.H IPIPY3HH U:HHKa. nOqeprrHYB HHIPOPMaU:HIO H3 rry6JIHKaU:HH 06 HCCJIe.ll.OBaHHHX .lI.PYfHX yqeHbIX, BY.ll.aJIJI 3aHHJICH BbIpaIII.HBaHHeM p-n-rrepexo.ll.OB

CKHMH xapaKTepHCTHKaMH, H .lI.JIH H3fOTOBJIeHHH CBeTO.ll.HO.ll.OB Ha HX OCHOBe rrpHMeHHIOTCH MHOfHe H3 COBpeMeHHbIX TeXHOJIOfHH.

B GaAs C rrpHMeHeHHeM aMIPoTepHbIx JIempYIOIII.HX rrpHMeceH KpeMHHH, B

B 1954 f., KOf.ll.a Y)Ke HayqHJIHCb rrOJIyqaTbH3 paCrrJIaBOB MOHOKpHCTaJI-

KOTOPbIX aTOMbI Si B Y3JIaX Ga HfpaJiH pOJIb .lI.OHOPOB, a B Y3JIaX As-

JIbI GaAs, HaqaJICH 6YM HCCJIe.ll.OBaHHH rrOJIyrrpOBO.ll.HHKOBbIX COe.ll.HHeHHH

pOJIb aKu:emOpOB. 3TO 6bIJIa rrepcrreKTHBHaH H.lI.eH, rrOCKOJIbKY .lI.O 3TOfO

THrra A IllBv. MOHoKpHCTaJIJIbI pa3pe3aJIH, a rrOJIyqaeMbIe rrJIaCTHHbI rro-

MeTO.ll. )I(3 HCrrOJIb30BaJiH .lI.JIH BbIpaIII.HBaHHH 3rrHTaKCHaJIbHbIX CJIOeB C

JIHpOBaJiH H HCrrOJIb30BaJiH B KaqeCTBe rrO.ll.JIO)KeK .lI.JIH IPopMHpoBaHHH Ha

2a30¢a3H.OU anu-

rrpOBO.ll.HMOCTbIO TOJIbKO O.ll.HOfO THrra. YCJIOBHH rrOJIyqeHHH TaKHXp-n-rrepeXO.ll.OB MeTO.ll.OM )l(cp3 6bIJiH HaH.lI.e-

HHX MeTO.ll.aMH

maKCUU

:JfCUaKO¢a3H.OU anumaKCUU

()I(3) H

(f3) rrOJIyrrpOBO.ll.HHKOBbIX CTpyKTyp C p-n-rrepeXO.ll.OM. B 1962 f.

HbI .lI.OBOJIbHO 6bICTPO: .lI.JIH 3TOfO paCrrJIaB Ga-As-Si OXJIa)K.lI.aJICH OT 900°C

rrOHBHJIOCb cpa3y HeCKOJIbKO rry6JIHKaU:HH 0 C03.l1.aHHH HHIPpaKpacHbIx CBe-

.lI.O 850°C. npH 3TOM 3rrHTaKCHaJIbHbIH CJIOH (HH)KHHH), BbIpaIII.eHHbIH rrpH

TO.ll.HO.ll.OB (870-980 HM) H JIa3epOB H3 GaAs (Pankove, Berkeyheiser, 1962;

900°C, OKa3bIBaJiCH CJIOeM n-THrra, f.ll.e KpeMHHH BbIrrOJIHHeT· pOJIb .lI.OHOpa,

Pankove, Massoulie, 1962; Hall et aI., 1962; Nathan et aI., 1962; QUist et

a BepxHHH CJIOH, BbIpaIII.eHHbIH rrpH 850°C, -

aI., 1962).

HBJIHeTCH aKu:errTopOM, 'ITO rrO.ll.TBep.ll.HJIOCb HCCJIe.ll.OBaHHeM rrOrrepeqHOfO

B

HaqaJIe

BXO-

pa3pe3a rrOJIyqeHHOfO rrepeXO.ll.a. HHKaKHX rrOTepb KaqeCTBa KpHCTaJIJIa

.lI.HJIH H3BeCTHbIe yqeHbIe H3 HCCJIe.ll.OBaTeJIbCKOfO u:eHTpa IBM «ToMac

rrpH TaKOM BbIpaIII.HBaHHH 06HapY)KeHO He 6bIJIO. BOJIee TOro, 6JIafO.ll.apH

,U)K. YOTCOH»

60-x

ff.

HayqHbIH

KOJIJIeKTHB,

B

COCTaB

KOTOPOfO

CJIOeM p-THrra, f.ll.e KpeMHHH

(pacrrOJIO)KeH B HopKTaYH XeHTc B 'lace e3.l1.bI Ha ceBep

BJIHHHHIO B 3arrpeIII.eHHOH 30He XBOCTOB· rrJIOTHOCTH COCTOHHHH, 06YCJIOB-

OT HbIO-HopKa) ,U)KeppH BY.ll.aJIJI, faHc PyrrrrpexT, MaHIPpe.ll. nHJIKYH,

JIeHHbIX CHJIbHbIM JIefHpOBaHHeM KOMrreHCHpOBaHHOH 06JIaCTH p-n-rrepexo-

MaplIlaJIJI HaTaH H .lI.p., rrpOBeJi 60JIblIlYIO HCCJIe.ll.OBaTeJIbCKYIO pa60TY rro

.lI.a, cBeTO.ll.HO.ll.bI H3 GaAs(Si) CTaJiH H3JIyqaTb B 60JIee .lI.JIHHHOBOJIHOBOH

C03.l1.aHHIO CBeTO.ll.HO.ll.OB H3 GaAs H AIGaAs H H3yqeHHIO HX xapaKTepH-

06JIaCTH (900-980 HM) C 3HepfHeH IPOTOHOB fQpa3.l1.0 HH)Ke KpaH rrOJIOCbI

CTHK.

rrOfJIOIII.eHHH GaAs (870 HM). n03TOMY 06'beMHaH rrO.ll.JIO)KKa GaAs H 3rrH-

B

cBoeH KHHfe, orry6JIHKOBaHHoH B 2000 f.

(Woodall J.M., 2000),

TaKCHaJIbHbIe CJIOH rrepeCTaJiH rrOfJIOIII.aTb 60JIblIlYIO qaCTb H3JIyqaeMofo

BY.ll.aJIJI OTMeqaJI, 'ITO B Te fO.ll.bI OH B OCHOBHOM 3aHHMaJiCH rrp06JIeMOH

CBeTa H CTaJiH BeCTH ce6H KaK rrp03paqHOe OKHO. CBeTO.ll.HO.ll.bI H3 GaAs(Si)

BbIpaIII.HBaHHH 06'beMHbIX KpM'cTaJIJIOB GaAs, HCrrOJIb3yeMbIx B .lI.aJIbHeH-

.lI.ep)KaJIH peKOp.ll. rro BeJIHqHHe BHellIHefO KBaHTOBOfO BbIX0.ll.a, KOTOPbIH

lIleM .lI.JIH C03.l1.aHHH rrOJIYH30JIHPYIOIII.HX rrO.ll.JIO)KeK .lI.JIH 3rrHTaKCHaJIbHbIX

COCTaBJIHJI '" 6% (Rupprecht et aI., 1963). B 2000 f. PyrrrrpexT rrHCaJI:

CTpyKTyp fepMaHHeBbIX YCTPOHCTB, H rrO.ll.JIO)KeK n-THrra .lI.JIH H3fOTOBJIeHHH

«C03.l1.aHHbIe HaMH BbIcoK03IPIPeKTHBHbIe CBeTO.ll.HO.ll.bI GaAs(Si) HBJIHIOT-

HH)KeKU:HOHHbIX JIa3epOB MeTO.ll.OM .lI.HIPIPY3HH U:HHKa. K TOMY BpeMeHH IPHP-

CH HpKHM .lI.OCTH)KeHHeM HayqHO-TeXHHqeCKOfO cO.ll.pY)KeCTBa». KBaHTOBbIH

MbI IBM, GEH JIa60paTopHH JIHHKOJIbH MTI1 Y)Ke rrpO.ll.eMOHCTpHpOBaJiH

BbIXO.ll. CBeTO.ll.HO.ll.OB H3 GaAs(Si) B rrHTb pa3 60JIblIle, qeM y CBeTO.ll.HO.ll.OB

pa60TY CBOHX HH)KeKU:HOHHbIX GaAS-JIa3epoB. PyrrrrpexT pa3pa6aTbIBaJi

GaAs, C03.l1.aHHbIX MeTO.ll.OM .lI.HIPIPY3HH U:HHKa. YpOBHH aKu:eITTOpOB Si fJIy6-

TeopHIO BBe.ll.eHHH rrpHMeceH MeTO.ll.OM .lI.HIPIPY3HH H CTaBHJI 3KcrrepHMeHTbI

)Ke YPoBHeH aKu:errTopoB Zn, rr03TOMY H3JIyqeHHe B KOMrreHcHpoBaHHbIx

C rrpHMeHeHHeM JIa3epOB H3 GaAs. OH TaK)Ke BXO.ll.HJI B fpyrrrry IPH3HKOB,

aKTHBHbIX CJIOHX, JIempOBaHHbIx KpeMHHeM, rrpoHCXO.ll.HT B 06JIaCTH 60JIee

B03fJIaBJIHeMYIO MaplIlaJIJIOM HaTaHoM,

.lI.JIHHHbIX BOJIH, B KOTOPOH GaAs rrp03paqeH I).

O.ll.HHM

H3

C03.l1.aTeJIeH rrepBofo

HH)KeKU:HOHHOfO JIa3epa (Nathan et aI., 1962). I1MeHHo B Te fO.ll.bI BY.ll.aJIJI pa3pa60TaJi MeTO.ll.HKY, KOTopaH BrrOCJIe.ll.-

Pa60TbI BbIlIleyrroMHHYTOfO KOJIJIeKTHBa yqeHbIX 6bIJIH HarrpaBJIeHbI Ha C03.l1.aHHe CBeTO.ll.HO.ll.OB BH.lI.HMOfO .lI.Harra30Ha OrrTHqeCKOfO crreKTpa. ,UJIH

CTBHH CTaJia rrpHMeHHTbcH .lI.JIH fOpH30HTaJIbHOfO BbIpaIII.HBaHHH MOHOKPH-

3TOfO 6bIJIH BbI6paHbI .lI.Ba KaH.lI.H.lI.aTa: GaAsP H AIGaAs. B

CTaJIJIOB GaAs MeTO.ll.OM BpH.lI.)KMeHa, a PyrrrrpexT C03.l1.aJI pH.lI. MaTepHaJIOB

KaK PyrrrrpexT rrbITaJiCH MeTO.ll.OM )I(3 rrOJIyqHTb 3rrHTaKCHaJIbHbIe CJIOH

I) 0630P HHKax THrra

rr~HO(lHTeTHbIX pa60T H. A. [OpIOHOBOH H A. P. PereJilI 0 rroJIyrrpOBO.ll.-

A IIBv

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1.2. HcmopuJl C03aanUJl cBemOaUOaOB ICpacnoeo U uncppaICpacnoeo CBe'lenUJl 25

FA. 1. HcmopuJl C03aanUJl cBemOaUOaOB

24

6

a GaAsP, BY)l.aJIJI npHMeHHJI 9nHTaKCHaJIbHYIO YCTaHOBKY )l.JIH BbIpaIII.HBaHHH AlGaAs. 06a HCCJle)l.OBaTeJIH CTOJIKHYJIHCb C cepbe3HbIMH np06JIeMaMH. 113-3a HeCOOTBeTCTBHH napaMeTpoB KpHCTaJIJIHqeCKHX pellIeToK GaP H GaAs, COCTaBJIHIOIII.erO rv 3,6

%,

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6b1JIO TPY)l.HO C
C AlGaAs

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Te rO)l.b1 CYIII.eCTBOBaJIO y6e2K)l.eHHe, qTO AlGaAs -

nJIOXOH MaTepHaJI,

nOTOMY qTO OH JIerKO OKHCJIHeTCH: no BbIpa2KeHHIO BY)l.aJIJIa «aJIIOMHHHH JII06HT KHCJIOpO)l.~. ATOMbI KHCJIOpO)l.a )l.eHCTBOBaJIH KaK u.eHTpbI TYllIeHHH JIIOMHHecu.eHu.HH. Oc06eHHo 9TO npOHBJIHJIOCb B CTpYKTypax, BbIpaIII.eHHbIX MeTO)l.OM f3; B cTpyKTypax, nOJIyqeHHbIX no TeXHOJIOrHH )1(<1>3, BJIHHHHe KHCJIOpO)l.a 6bIJIO HeCKOJIbKO cJIa6ee. PynnpexT H BY)l.aJIJI BblIIOJIHHJIH qaCTb HCCJIe)l.OBaHHH «nO)l.nOJIbHO», 6e3

1.3.

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MHKpocHHMoK IIoIIepeLIHoro ceLIeHHlI CBeTOAHOAa H3 AIGaAs, BblpameH -

(a).

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Horo Ha IIpo3paLIHoH IIOAJIO:lKKe GaP

9nHTaKCHaJIbHbIX CJIOeB AlGaAs no TeXHOJIOrHH )I(3 nOCJIe pa60TbI H

B aKTHBHoH 06JIaCTH (o6JIaCTH HH:lKeKII:HH), paCIIOJIO:lKeHHOH IIOA KOHTaKTHoH IIJIO-

no BbIXO)l.HbIM. BY)l.aJIJI cnpoeKTHpOBaJI H H3rOTOBHJI annapaT )l.JIH npoBe-

maAKoH, Ha6JIIOAaeMall LIepe3 IIpo3paLIHYIO IIOAJIO:lKKY GaP

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(6)

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<pa-

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nepBbIx onbITax OH )l.06aBJIHJI

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HHe 6bIJIH IlpaBbJ. IlepBbIe CBeTO)l.H-

JI02KKY GaAs Ha BpeMH OXJIa2K)l.eHHH paCIlJIaBa C 925°C )1.0 850°C. IlocJIe

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9Toro IlO)l.JI02KKa C 9IlHTaKCHaJIbHblM CJIOeM H3BJIeKaJIaCb H TeMIlepaTypa

qeCTBe HH)l.HKaTOpOB Ha MOHTa2KHbIX

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p-n-IlepeXO)l.,

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TO)l.HO)l.OB

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Texas

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Instruments

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c 60JIbllIHM cO)l.ep2KaHHeM aJIIOMHHHH. B pe3YJIbTaTe 6bIJIH C03)1.aHbI CBeTO-

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1)

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D/,. 1.

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1.3. HcmopUJl C03aaHUJl c8emOaUOa08 U3 GaAsP

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27

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1965). TaK:>Ke 6bIJlO YCTaHOBJleHO, LITO npH Jl.OCTH:>KeHHH 44 % KOHueHTpa-

COOTBeTCTBYIOIII.eH OCHOBHOH MOJl.e KOJle6aHHH B pe30HaTope. YCHJleHHe

UHH <poc<popa K. n.

H3J1YLIeHHH CBH3aHO C H3MeHeHHHMH nJlOTHOCTH 3HeprHH CBeTOBOH BOJlHbI

Jl.a:>Ke HH:>Ke (Maruska, Pankove, 1967).

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JI.. GaAsP YCTpoikTB npH 300 OK naJl.aeT Jl.0 0,005 % H

CBeTOJl.HOJl.bI

BbInycK nepBbIx CBeTOJl.HOJl.OB H3 GaAsP 6bIJi HaLIaT KopnopaUHeH GE

C pe30HaTopaMH 06J1aJl.a1OT MaKCHMaJlbHOH HHTeHCHBHOCTblO H3J1YLIeHHH

B HaLIaJle 1960-x rr. OHH H3J1YLIaJlH CBeT B KpacHoH 06J1aCTH BHJl.HMO-

BJl.OJlb OCH pe30HaTopa, LITO n03BOJIHeT nOBbIIIIaTb 3
ro onTHLIeCKoro cneKTpa. floCKOJlbKY l1.eHa Jl.HOJl.OB 6bIJIa OLIeHb BbICOKOH

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(260 Jl.OJlJl. CIllA 3a OJl.HY IIITYKY), HX BbInYCTHJlH COBceM MaJlO H B

HaCTOHIII.ee BpeMH CBeTOJl.HOJl.bI H3 AIGaAs/GaAs HH
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AsP /GaAs KpaCHoro CBeLIeHHH, HO HH:>Ke, LIeM Y AlInGaP /GaAs.

TaKHX CBeTOJl.HOJl.OB B 1968-1970 rr. cTpeMHTeJlbHO POCJlH, YJl.BaHBaHcb Ka:>KJl.bIe HeCKOJlbKO MeCHl1.eB (Rostky, 1997). CBeTOJl.HOJl.HbIe KpHCTaJlJlbI,

1.3.

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B

Ha nOJl.JlO)KKaX GaAs. 3TOT MeTOJl. nOJl.XOJl.HT Jl.JlH
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M.

GaAs 3nHTaKCHaJlbHbIX CJlOeB GaAsP HeKOTopbIe CBOHCTBa TaKHX CHCTeM

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LIaCTb CBOHX pa60T (BKJlIOLIaH HanpaBJleHHe no pa3pa60TKe CBeTOJl.HOJl.OB)

COOTHOIIIeHHH npHMbIX H HenpHMbIX Me)K30HHbIX onTHLIeCKHX nepeXOJl.OB B

KopnopaUHH Agilent, KOTopaH B TOM :>Ke roJl.Y 06beJl.HHHJlaCb C KOpnOpal1.HeH

HP

nepeJl.aJla

28

Phillips H rrpeo6pa30BaJIaCb B Lumileds Lighting.

B

29

1.4. HcmopuR cOaaaftUR cBemo8uo8oB ua GaAsP U GaP

Fit. 1. HcmopuR cOa8aftUR cBemOaUOaOB 2005

r.

Agilent

CTpaHCTBe HMrrYJIbCOB He COBrra.ll.aIOT. BBe.ll.eHHe B GaP onmUtteCKU aKmUB-

Hoii U303AeKmpoHHoii npUMecu, HarrpHMep a30Ta, rr03BOJIHeT 3HaqHTeJIbHO

rrpO.ll.aJIa CBOIO .lI.OJIIO aKll,HM Lumileds KOprrOpall,HH Phillips. BCKope 6bIJIO o6HapY2KeHO, qTO Me2K.lI.Y rrO.ll.JI02KKaMH GaAs H 3rrHTaK-

rrOBbICHTb BepOHTHOCTb H3JIyqaTeJIbHOM peKOM6HHall,HH B rroJIyrrpOBO.ll.HHKe

CHaJIbHbIMH CJIOHMH GaAsP cymecTByeT CHJIbHOe paccOrJIaCOBaHHe rrapa-

(Thomas et aI., 1965) 3a CqeT C03.l1.aHHH 3TOM rrpHMeCblO B 3arrpemeHHoM

MeTpoB peIIIeTKH, rrpHBO.ll.Hmee K BbICOKOM rrJIOTHOCTH .lI.HCJIOKall,HM (Wolfe

30He rrpOMe2KYTOqHOrO 3HepreTHqeCKOrO ypOBHH, C KOToporo 3JIeKTpoHy

et aI., 1965; Nuese et aI., 1966). B pe3YJIbTaTe 3Toro BHeIIIHHM KBaHTOBbIM

ropa3.l1.0 JIerqe peKoM6HHHpoBaTb C .lI.b1PKOM.

113

GaP, JIerHpOBaHHoro Ta-

%

KHMH rrpHMeCHMH, 6bIJIH C03.l1.aHbI CBeTO.ll.HO.ll.bI, pa60Ta KOTOPbIX OCHOBaHa

(Isihamatsu, Okuno, 1989). HIOH3 (Nuese et aI., 1969) rrOKa3aJI, KaK CHJIb-

Ha coomHOUleHUU Heonpe8eAeHHocmeii reii3eH6epea. B .lI.aHHOM CJIyqae

BbIXO.ll. TaKHX CBeTO.ll.HO.ll.OB OKa3bIBaeTCH .lI.OBOJIbHO HH3KHM, He 60JIee 0,2

HO BJIHHIOT Ha rrapaMeTpbI CBeTO.ll.HO.ll.OB YCJIOBHH BblpamHBaHHH H TOJImHHa

rrpHHll,Hrr reM3eH6epra Bblpa2KaeTCH B TOM, qTO rrpHMeCb CO CTporo JIOKaJIH-

6y¢epHoeo CAO}/,. OH rrpo.ll.eMoHcTpHpOBaJI, KaK 6y~epHbIM CJIOM GaAsP

30BaHHOM BOJIHOBOM ~yHKll,HeM B rrpOCTpaHCTBeHHOM CHCTeMe KOOp.ll.HHaT,

C rrepeMeHHoM KOHll,eHTpall,HeM rrpHMeceM rr03BOJIHeT 3HaqHTeJIbHO YJIyq-

T. e. 06JIa.ll.alOmaH MaJIOM HeOrrpe.ll.eJIeHHOCTblO KOOp.ll.HHaTbI

IIIHTb HPKOCTb CBeTO.ll.HO.ll.OB KpaCHoro CBeqeHHH. CeMqaC Y2Ke .lI.OKa3aHO, qTO

rrOJIaraTbCH Ha 3HepreTHqeCKOM ypoBHe B rrpocTpaHcTBe KBa3HHMrrYJIbCOB

bop

= hbok.

box,

6Y.ll.eT pac~

3TOT 3~~eKT CBH3aH C TeM, qTO rpa.ll.HeHTHbIM CJIOM CHH2KaeT rrJIOTHOCTb

C 60JIbiliOM HeOrrpe.ll.eJIeHHOCTblO

.lI.HCJIOKall,HM B 3rrHTaKCHaJIbHOM CJIoe GaAsP B 06JIaCTH, pacrrOJI02KeHHOM

rrpHMecHblx ll,eHTpOB rrOBbliliaeT BepoHTHoCTb OIITHqeCKHX rrepeXO.ll.OB 1) .

PH.lI.OM C rpaHHll,eM Me2K.lI.Y 3THM CJIOeM H rrO.ll.JIO)KKOM GaAs. npHMble H HerrpHMbIe Me2K30HHble rrepeXO.ll.bI, KaK H BblCOKaH rrJIOTHOCTb .lI.HCJIOKall,HM, OrpaHHqHBalOT HPKOCTb CBeTO.ll.HO.ll.OB H3 GaAsP. B

HaJIHqHe TaKHX «rJIy6oKHX»

6

a

IlaCTO-

Hmee BpeMH CTpyKTYPbI GaAsP /GaAs HCrrOJIb3YlOTCH B OCHOBHOM .lI.JIH H3rOTOBJIeHHH CBeTO.ll.HO.ll.OB KpaCHoro CBeqeHHH, 06JIa.ll.alOmHX HeBbICOKOM HPKOCTblO H rrpHMeHHeMbIX B KaqeCTBe HH.lI.HKaTOpHbIX JIaMrr.

1.4.

HCTOPHB C03)l;aHHB CBeTO)l;HO)l;OB H3 GaAsP H GaP, IIonoiKeHHe

JIerHpOBaHHhlx OnTHQeCKH aKTHBHhIMH npHMecBMH nepBble CBeTO.ll.HO.ll.bI H3 GaP KpaCHoro H 3eJIeHOrO CBeqeHHH 6bIJIH C03.l1.aHbI rpyrrrroM yqeHbIX rro.ll. PYKOBO.ll.CTBOM PaJIb~a JIoraHa B Bell Laboratories B MlOppeM XHJIJI (HblO-)l2KepcH) B HaqaJIe 1960-x

r.

B Te rO.ll.bI

PHC.

1.5.

CHCTeMa KOOP.lI.HHaT B peaJIbHOM npocTpaHcTBe

KBa3HHMnYJIbCOB

B KaqeCTBe KJIlOqeM H YCHJIHTeJIeH. I1MeHHo TOr.ll.a HH2KeHepbI H HCCJIe.ll.OBaTeJIH OC03HaJIH, qTO rroJIyrrpOBO.ll.HHKH HBJIHIOTCH JIyqIIIHMH MaTepHaJIaMH .lI.JIH H3roTOBJIeHHH H3JIyqalOmHX YCTPOHCTB. JIoraH B 2000 r. rrHCaJI, qTO OH 3aHHTepeCOBaJICH rrp06JIeMOH C03.l1.aHHH CBeTO.ll.HO.ll.OB 3Toro THrra· rrOCJIe rrOHBJIeHHH rrepBblx rry6JIHKall,HH 0 rrOJIyqeHHH p-n-rrepeXO.ll.OB B GaP (Allen et aI., 1963, Grimmeiss, Scholz, 1964), H3JIyqalOmHX CBeT KpaCHoro ll,BeTa, KOTOPbIH M02KHO Ha6JIIO.lI.aTb HeBoopY2KeHHbIM rJIa30M .lI.a2Ke B YCJIOBHHX .lI.HeBHOro OCBemeHHH. nepexo.lI.bI rpHMMeHcca-llloJIbll,a 6bIJIH rrOJIyqeHbI rrYTeM JIerHpOBaHHH rrO.ll.JI02KKH p-THrra GaP rrpHMecblO n-THrra -

(a)

H B npocTpaHcTBe

CBeTO.ll.HO.ll.bI Ha OCHOBe GaP, JIempOBaHHoro OnTH'IeCKH aK-

N

HJIH 0, H3JIyqalOT CBeT B KpacHoH HJIH 3eJIeHOH

06JIaCTHX BH.lI.HMorO OIITH'IeCKOro .lI.Hana30Ha

)lJIH ~OpMHpoBaHHH CBeTO.ll.HO.ll.OB GaP HCrrOJIb30BaJIHCb rrJIaCTHHbI C rrorrepeqHbIMH pa3MepaMH 0,5 CM x 1 CM H TOJImHHOH 1 MM, BblpameHHble H3 pacTBopa, cO.ll.ep2Kamero raJIHM H ~oc~op. TaKoM crroco6 rrOJIyqeHHH CTPYKTyp GaP rr03BOJIHJI H36e2KaTb rrp06JIeMbI, cBH3aHHoH C Heo6xo.ll.HMOCTblO C03.l1.aHHH H36bITOqHOrO .lI.aBJIeHHH rrapoB ~oc~opa BO BpeMH BbIpamHBaHHH GaP rrpH BbICOKOH TeMrrepaType. HHKOMY H3 JIa60paTopHH oeJIJI He Y.ll.aJIOCb cpa3y 2Ke BocrrpOH3BeCTHpe3YJIbTaTbI rpHMMaHcca H llloJIbll,a. O.ll.HaKO 3TO CO.ll.eHCTBOBaJIO pacIIIHpeHHIO

HCCJIe.ll.0BaTeJIbCKHX pa60T B 06JIaCTH

3JIeKTpOJIIOMHHeCll,eHll,HH B JIa60paTopHHx Bell AT&T . npH BblpamHBaHHH rrJIaCTHH GaP H3 pacTBopa B KaqeCTBe JIerHpylO-

OJIOBOM.

GaP OTHOCHTCH K HerrpHMo30HHbIM rroJIyrrpOBO.ll.HHKaM, B KOTOPbIX BepoHTHOCTb Me2K30HHbIX rrepeXO.ll.OB, rrpOHCXO.ll.HmHX C coxpaHeHHeM HMrrYJIbCa, rrpeHe6pe2KHMO MaJIa, rr03TOMY H3JIyqaTeJIbHaH peKOM6HHall,HH B HHX rrpoXO.ll.HT, KaK rrpaBHJIO, qepe3 rrpHMecHble ll,eHTpbI. Ha pHC.

(6).

THBHbIMH npHMeCHMH, HanpHMep

rroJIyrrpOBO.ll.HHKOBble MaTepHaJIbI Y2Ke rrpHMeHHJIHCb .lI.JIH C03.l1.aHHH 6HrroJIHPHbIX H rrOJIeBbIX TpaH3HcToPOB, HCrrOJIb3yeMblx B 3JIeKTpOHHbIX cxeMax

x ____

1.5 rrOKa3aHa

°

mHX rrpHMeceH HCrrOJIb30BaJIH ll,HHK H KHCJIOPO.ll., KOTOPbIH rroJIyqaJICH H3 Ga203.

TOM, qTO 06blqHbIH aTMoc~epHbIH B03.l1.YX CO.ll.ep2KHT .lI.OCTaTOqHOe

KOJIHqeCTBO cepbI, HBJIHlOmeHCH rrpHMeCblO n-THrra, .lI.Ora.ll.aJIHCb He cpa3y. npH TaKOM BbIpamHBaHHH rrJIaCTHH OKa3aJIOCb, qTO B KOMrreHCHpOBaHHbIX

30HHaH .lI.HarpaMMa GaP, H3 KOTOPOH BH.lI.HO, qTO OCHOBHble TOqKH CHMMeTpHH .lI.JIH 3KcTpeMYMoB 30HbI rrpOBO.ll.HMOCTH H BaJIeHTHOH 30HbI B rrpo-

1) 0630P pa60T no H3JIYQaTeJIbHOH peKOM6HHall,HH B GaP -

CM.

[7].

-j Fit. 1.

30

HcmopuJl C03aanUJl c8emOaUOa08

1.4. HcmopuJl C03aanUJl c8emOaUOa08 U3 GaAsP U GaP

1

31

paCTBopax CJIOH n-THna
p-n-nepeXO.Zl.bI

pacnOJIaralOTCH no.Zl. nOBepxHocTblO nO.Zl.JIO)J{KH GaP. 3TO

H 6bIJIO o6bHcHeHHeM pe3YJIbTaTOB rpHMMeHcca. JIoraH cpa3Y JKe ony6JIHKOBaJI .ZI.aHHble CBOHX HCCJIe.Zl.OBaHHH (Logan et al., JIoraH (Logan et al.,

1967 b)

1967 a).

OnHCaJI TeXHOJIOrHlO H3rOTOBJIeHHH 3

paCTBopOB.

B

3TOH JKe pa60Te JIoraH OTMeTHJI,

OTJKHr CTpyKTyp nOCJIe BblpaIII.HBaHHH B .ZI.Hana30He CYIII.eCTBeHHO CqHTaeTCH,

nOBblCHTb K. n • .ZI..

qTO npH

400-725

qTO

°C n03BOJIHeT

CBeTO.Zl.HO.Zl.OB, C.ZI.eJIaB ero 60JIblIle

2 %.

OTJKHre npOHCXO.Zl.HT .ZI.H
aTOMOB KHCJIOpO.Zl.a, B pe3YJIbTaTe qero nOBhllIlaeTCH nJIOTHOCTb H303JIeK-

GaP

TPOHHbIX KOMnJIeKCOB Zn-O, cnoc06cTBYIOIII.HX YBeJIHqeHHIO 3JIeKTpOJIIOMHHecueHUHH. B KOHue

1960-x

rr. 6bIJIa pa3pa60TaHa TeXHOJIOrHH nOJIyqeHHH nJIaCTHH

113

GaP H3 paCnJIaBOB npH BbICOKHX TeMnepaTypax H .ZI.aBJIeHHHX.

TaKHX

1.6.

CBeTo.n:Ho.n: GaP, Bblpam:eHHbIH MeTo.n:OM

)K3,

nJIaCTHH npH nOMOIII.H pe3KH
PHC.

KaKHe HCnOJIb3YlOTCH B HaCTOHIII.ee BpeMH. TIPH JIerHpOBaHHH GaP H30-

ro JIerHpOBaH UHHKOM H KHCJIOPO.n:OM, H3JIYQaeT «H3YMHTeJIbHbIH»

H3rOTOBJIeHbI CBeTO.Zl.HO.Zl.bI 3eJIeHOrO CBeqeHHH, K. n . .ZI.. KOTOPbIX npeBbICHJI (Logan et al.,

1968, 1971).

XOTH BHelIlHHH KBaHToBbIH BbIXO.Zl. CBeTO-

.ZI.HO.Zl.OB 3eJIeHOrO CBeqeHHH MeHblIle, qeM CBeTO.Zl.HO.Zl.OB KpacHoro CBeqeHHH, BoCnpHHMqHBOCTb qeJIOBeqeCKOrO rJIa3a K 3eJIeHoMY UBeTY B

10

pa3 BbIlIIe,

qeM K KpacHoMY, n03ToMY 06a THna CBeTO.Zl.HO.Zl.OB HMelOT cpaBHHMylO KaJKYIII.YIOCH (cy6beKTHBHYIO) HpKOCTb. Ha.Zl.

pa3pa60TKoH

cBeTo!f.HO.Zl.OB

cneKTpa C K. n . .ZI.. BbIlIIe, qeM y .ZI.pYrHe KOMnaHHH -

BH.ZI.HMOrO

.ZI.Hana30Ha

OmHqeCKOrO

CBeTO.Zl.HO.Zl.OB H3 GaAsP, TPY.Zl.HJIHCb H

IBM, RCA H GE. B IBM pa60Thl no C03.Z1.aHHlO CBe-

TO.Zl.HO.Zl.OB H3 GaP. npOBO.Zl.HJIHCb B HCCJIe.Zl.OBaT~JIbCKOM ueHTpe HM. TOMaca ,[{JK. YOTcoHa B 110pKTaYH XeHTC (lIlT. HblO-l1opK). MaH
JK3.

Ha pHC.

1.6

nOKa3aHa <poTorpa
H HHJKHHM KOHTaKTaMH.

B

CTaTbe,

ony6JIHKOBaHHoH

B IBM Research

Journal, 6bIJIO rop.Zl.O 3aHBJIeHO, qTO .ZI.aHHbIH CBeTO.Zl.HO.Zl. H3JIyqaeT «H3YMHTeJIbHbIH KpacHbIH CBeT». 3.Z1.eCb CJIe.Zl.yeT OTMeTHTb, qTO B

1960- x

rr. MOHO-

xpOMaTHqeCKHe UBeTa B OCHOBHOM nOJIyqaJIHCb npH
«H3YMHTeJIbHbIM».

AKTHBHaH 06JIaCTb CBeTO.Zl.HO.Zl.a GaP TIHJIKYHa 6bIJIa JIerHpOBaHa O.Zl.HOBpeMeHHO H .ZI.OHOpaMH, H aKuemopaMH. B POJIH aKuemopa BblcTynaJI UHHK,

KpacHbIH CBeT

(Pilkuhn, 2000)

3JIeKTpOHHhlMH npHMeCHMH, cO.Zl.epJKaIII.HMH a30T, TaKHMH KaK GaN, 6bIJIH

0,6%

p-n-rrepexo.n: KOTOPO-

nap. 3HeprHH H3JIyqaeMbIX
KHCJIOPO.Zl.OM npHBO.Zl.HT K

C.ZI.BHry .ZI.JIHHbI BOJIHbI H3JIyqeHHH,

3HaqHTeJIbHoMY

n03ToMY OHH H3JIyqalOT B KpacHoM

.ZI.Hana30He cneKTpa (Foster, Pilkuhn,

1965).

KHCJIOPO.Zl., BBe.Zl.eHHbIH B GaP,

He HBJIHeTCH HH MeJIKHM .ZI.OHOPOM, HH aKuenTopOM, HO C03.Z1.aeT rJIy60KHH .ZI.OHOPHbIH ypOBeHb -

CM., HanpHMep, (Pilkuhn,

1981)

1).

JIoraH Hero KOJIJIerH, a TaKJKe BCH KOMaH.ZI.a AT&T cpa3y OC03HaJIH lIIHpOKHe nepcneKTHBbI npHMeHeHHH CBeTO.Zl.HO.Zl.OB, oc06eHHO B TeJIe
1960-x

rr. OqeHb MO.Zl.HbIM H npeCTHJKHbIM CqHTaJICH TeJIe<poH

MapKH ~Princess». 3TOT TeJIe<poH npe.Zl.Ha3HaqaJICH .ZI.JIH HCnOJIb30BaHHH B CnaJIbHe H OTJIHqaJICH TeM, qTO ero naHeJIb 3arOpaJIaCb, KaK TOJIbKO ero BbIHHMaJIH H3 .ZI.epJKaTeJIH. ,[{JIH nO.Zl.CBeTKH naHeJIH npHMeHHJIHCb HH.ZI.HKaTopHble JIaMnbI, pa60TaIOIII.He OT

110

B. ,[{JIH 3aMeHhl 3THX JIaMn npH HX

BbIXO.Zl.e H3 CTPOH KaJK.ZI.bIH pa3 npHXO.Zl.HJIOCb 3BOHHTb B cepBHcHYIO CJIYJK6y. TIPH CMeHe HH.ZI.HKaTOpHbIX JIaMn Ha CBeTO.Zl.HO.Zl.bI Y.Zl.aJIOCb H36aBHTbcH OT .ZI.OnOJIHHTeJIbHOrO HCTOqHHKa nHTaHHH

110

B, nOCKOJIbKY .ZI.JIH HOBbIX

3JIeMeHTOB .ZI.OCTaTOqHQ 6bIJIO HanpHJKeHHH TeJIe<poHHoH ceTH H K TO My JKe CpOK CJIYJK6bI CBeTO.Zl.HO.Zl.OB H3 GaP npH HCnOJIb30BaHHH B TeJIe
50

JIeT,

T. e.

6bIJI

HaMHoro .ZI.OJIblIle, qeM y

HH.ZI.HKaTOpHbIX

JIaMn. TaKoe YCOBeplIleHCTBOBaHHe npHBeJIO K 3HaqHTeJIbHOMY CHHJKeHHIO ce6eCTOHMOCTH TeJIe<poHoB KOMnaHHH Bell HJIH npocTo «Ma Bell» (TaK B Te

a .ZI.OHOpaMH 6bIJIH TeJIJIYP, cepa HJIH CeJIeH, n03TOMY H3JIyqeHHe reHepHpoBaJIOCb npeHMYIII.eCTBeHHO 3a CqeT peKOM6HHaUHH .ZI.OHOpHO-aKuenTopHhlx

I)

0

BJIHHHHH rrpHMeceH Ha H3JIYQaTeJIbHYIO peKoM6HHaUHIO B GaP -

eM.

[7].

32

Fit. 1. Hcmopufl cos8anufl ceemo8uo8oe

33

1.5. Hcmopufl cos8anufl ceemo8uo8oe us GaN

rO)1.bI Ha3bIBaJIaCb KOMrraHHSI AT&T) rrpH O)1.HOBpeMeHHoM rrOBbIUIeHHH HX

a30Ta B GaAsP H GaP. ,nJISI BblpamHBaHHSI Tpe6yeMblx CJIOeB rrpHMeHSlJICSI

Ha)1.e)KHOCTH.

MeTO)1. rCD3, rrOCKOJIbKY TOJIbKO OH rr03BOJISlJI JIerHpOBaTb a30TOM 06JIaCTb

Eme 60JIee 3HatIHTeJIbHbIM CTaJIO rrpHMeHeHHe CBeTO)1.HO)1.0B B MHorOKa-

B oKpecTHocTH

p-n-rrepexo)1.a,

tITO )1.aBaJIO B03MO)KHOCTb CHH)KaTb rrorJIO-

HaJIbHbIX TeJIecpoHHbIX CHCTeMax. 3TH CHCTeMbI CTOSlJIH B 60JIbUIHX OcpHCaX,

meHHe H3JIytIeHHSI rrpHJIeraIOmHMH K

HCrrOJIb30BaJIHCb B OCHOBHOM CeKpeTapSlMH H OrrepaTOpaMH, HH)1.HKaTOpHble

K. rr.)1.. CBeTO)1.HO)1.0B (Groves et aI., 1977, 1978 a, 1978

JIaMrrbI B HHX YKa3bIBaJIH Ha COCTOSlHHe BbI3bIBaeMOM JIHHHH: 3aHSITa OHa

BpeMSI GaP:N HCrrOJIb3YIOT )1.JISI H3rOTOBJIeHHSI CBeTO)1.HO)1.0B 3eJIeHOrO CBe-

HJIH CBo60)1.Ha. ,nJISI rrepeKJIIOtIeHHSI TeJIeqJOHHbIX JIHHHM H HH)1.HKaTOpHbIX

tIeHHSI, 06JIa)1.aIOmHx )1.0BOJIbHO HH3KHMH CBeTOBbIMH xapaKTepHcTHKaMH,

JIaMrr 110 B rrpHMeHSlJIH )1.HCTaHI,(HOHHble rrepeKJIIOtIaTeJIH, OT KOTOPbIX K

KOTopble rrpHMeHSIIOT B KatIeCTBe HH)1.HKaTopoB.

Ka)K)1.0MY TeJIecpoHHoMY arrrrapaTY TSlHYJIOCb MHO)KeCTBO rrpOBO)1.0B. YCTa-

p-n-rrepexo)1.y

,npyrHMH 06JIaCTSlMH rrpHMeHeHHSI

)1.0B CTaJIH II.HcppoBble )1.HCrrJIeH )1.JISI KapMaHHblx

HbIX MHorOKaHaJIbHbIX CHCTeMax, BbIIIOJIHSlIOmHX Te )Ke CPYHKII.HH, BMeCTO

KaJIbKYJISITOPOB H HapytIHbIX tIaCOB. nepBble tIaCbI

JIaMrr HCrrOJIb3YIOT CBeTO)1.HO)1.bI, rrHTaIOmHecSi OT HarrpSl)KeHHSI TeJIecpoHHoM

C II.HCPPOBbIM )1.HCrrJIeeM 6bIJIH BbIIIymeHbI Koprro-

ceTH, a 3JIeKTpOHHble MHKpocxeMbI, pa3MemaIOmHecSi BHYTPH TeJIecpoHHbIX

paII.HeM Hamilton B 1972 r. OHH BbI3BaJIH HaCTO-

TPy60K, yrrpaBJISIIOT rrepeKJIIOtIeHHeM JIHHHM H HH)1.HKaTopoB. npH 3TOM

SlmHM CPypop B o6mecTBe, H TOJIbKO OtIeHb BbICO-

pe3Ko rrOHH3HJIaCb CTOHMOCTb npOH3BO)1.CTBa, YCTaHoBKH H 06CJIY)KHBaHHSI

KaSi CTOHMOCTb C)1.ep)KHBaJIa HX pacrrpoCTpaHeHHe.

TaKHX CHCTeM.

Ha pHC. 1.8 rrOKa3aHbI tIaCbI Pulsar C II.HCPPOBbIM

nOCKOJIbKY 3cpcpeKTHBHoCTb CBeTO)1.HO)1.0B H3 GaP 3eJIeHOrO H KpacHoro HSlJIO peUIeHHe 06 opraHH3aII.HH HX rrpOH3BO)1.CTBa B neHCHJIbBaHHH. 06bltIHO Ha TeJIecpoHHble JIHHHH rv

rrO)1.aeTCSI

40 B H TOK HeCKOJIbKO MHJIJIHaMrrep. TOJIbKO OT 3aMeHbI HH)1.HKaTOpHbIX

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35

)KaJIeHRIO, OH HerrpaBRJIbHO RCTOJIKOBaJI ,n:aHHble JIopeHua R DRHKOBCKR, orry6JIRKOBaHHble B 1962 r., 0 pa3JIO)KeHRR GaN B BaKYYMe rrpR TeMrrepaType rv 600°C, R ,n:JIll rrpe,n:oTBpaIIJ.eHRll 3Toro CBOR :rrepBble rrJIeHKR GaN BblpaIIJ.RBaJI rrpR TeMrrepaTypax HR)Ke 600 o~;B pe3YJIbTaTe lJero OHR rrOJIYlJaJIRCb He MOHO-, a rrOJIRKpRCTaJIJIRlJeCKRMR.11 JIRIIIb B MapTe 1969 r. MapycbKa rrOHllJI, lJTO B aMMRalJHOH cpe,n:e rrpoueCCbI pOCTa CJIOeB rrpe06JIa,n:aIOT Ha.lI. rrpoueccaMR RX pa3JIO)KeHRll, R rrOBbICRJI TeMnepaTYPY B TRrJIe ,n:o 850°C, rrpR KOTOPOH 06bIlJHO 0pMRpOBaJIHCb CJIOR GaAs. Ilo OKOHlJaHRR rrpouecca BblpaIIJ.RBaHRll Ka3aJIOCb, lJTO carrRpoBall rro,n:JIO)KKa OCTaJIaCb HerrOKpbITOH, HO MapycbKa rrOMlJaJICll B aHaJIRTRlJecKYIO JIa60paTOPRIO RCA, r,n:e rrpR rrOMOIIJ.R KaMepbl JIaY3 ,n:JIll peHTreHoBcKoro aHaJIR3a KpRCTaJIJIOB Ha HeH y,n:aJIOCb o6HapY)KRTb TOHKRH CJIOH rrp03palJHOH MOHOKpRCTaJIJIRlJeCKOH rrJIeHKR GaN C OlJeHb rJIa.lI.KOH rroBepxHocTbIO (Maruska, Tietjen, 1969). HCCJIe,n:oBaHRe 3TOH rrJIeHKR rrOKa3aJIO, lJTO 6e3 BCllKoro JIerRpOBaHRll OHa 06JIa.lI.aeT rrpoBo,n:RMOCTbIO n-TRrra, R ,n:JIll rrOJIYlJeHRll p-n-rrepexo,n:a Tpe60BaJIOCb rro,n:06paTb cooTBeTcTBYIOIIJ.YIO rrpRMecb p-TRrra. MapYCbKa ,n:YMaJI, lJTO ,n:JIll 3TRX ueJIeH XOPOIIIO rro,n:OH,n:eT URHK, rrpRMeHlleMbIH rrpR pa60Te C GaAs R GaP. O,n:HaKO OKa3aJIOCb, lJTO rrpR BbICOKRX KOHueHTpaURllX URHKa rrJIeHKR GaN CTaHOBllTCll ,n:R3JIeKTpRKaMR, a He rrpOBo,n:HRKaMR p-TRrra (Maruska, 2000). B 1969 r. iKaK IlaHKoB Haxo,n:RJICll B TBOplJeCKOM OTIIYCKe, B TelJeHRe KOToporo OH pa60TaJI B DepKJIeeBCKOM YHRBepcRTeTe, r,n:e m~caJI ylJe6HHK rro OIITHlJeCKRM rrpoueccaM B rrOJIyrrpOBo,n:HRKax. BepHYBIIIRCb B RCA B llHBape 1970 r., OH HeMe,n:JIeHHO BKJIIOlJRJICll B pa60TY rro C03,n:aHRIO CBeTo,n:Ro,n:OB Ha OCHOBe rrJIeHOK R3 GaN. IlaHKoB 3aHllJICll RCCJIe,n:OBaHReM rrpoueccoB OrrTRlJeCKOrO rrOrJIOIIJ.eHRll R OTOJIIOMRHeCueHURR B TOHKRX rrJIeHKaX GaN (Pankove et a!., 1970a, 1970b). JIeToM 1971 r. RCA BrrepBble orry6JIRKOBaJIa C006IIJ.eHRe 0 llBJIeHRR 3JIeKTpOJIIOMRHeCueH URR, Ha6JIIO,n:aeMoM Ha o6pa3ue R3 rrJIeHKR GaN (Pankove et a!., 1971a). HCCJIe,n:yeMbIH o6pa3eu, COCTOllBIIIRH R3 CRJIbHO JIerRpOBaHHoro URHKOM CJIOll GaN C ,n:BYMll rroBepxHocTHbIMR 3JIeKTpo,n:aMR, R3JIYlJaJI rOJIy6oH CBeT C ,n:JIRHOH BOJIHbI 475 HM. IlocJIe 3Toro IlaHKoB C KOJIJIeraMR C03,n:aJIR CTPYKTYPY R3 HeJIerRpOBaHHoro CJIOll GaN (n-TRrra), CJIOll, CRJIbHO JIerRpOBaHHoro URHKOM (,n:R3JIeKTpRlJeCKOrO CJIOll), R rroBepxHocTHoro KOHTaKTa R3 RH,n:Rll (Pankove et a!., 1971b, 1972). TaKOH ,n:RO,n: co CTPYKTYPOH MemaAA-8u3AeKmpUfc-noAynpo808HUK (M.llIl) 6bIJI rrepBbIM CBeTo,n:RO.lI.OM R3 GaN, R3JIYlJaIOIIJ.RM 3eJIeHbIH R rOJIy6oH CBeT. 3aTeM B RCA rrpe,n:rrOJIO)KRJIR, lJTO MafHRH JIYlJIIIe, lJeM URHK, R HalJaJIR BblpaIIJ.RBaHRe MeTo,n:OM Mff3 rrJIeHOK GaN, JIerRpOBaHHblx MafHReM. B pe3YJIbTaTe 3Toro B 1972 r. y,n:aJIOCb rrOJIYlJRTb CTPYKTYPY (pRC. 1.10), R3JIYlJaIOIIJ.YIO rOJIy60e R ROJIeTOBOe CBelJeHRe, ueHTpaJIbHall ,n:JIRHa BOJIHbI KOToporo COCTaBJIllJIa 430 HM(Maruska et a!., 1972). TaKRe CBeTo,n:Ro,n:bI co CTPYKTYPOH M.llIl RCrrOJIb3YIOT R B HaCTOllIIJ.ee BpeMll. B CBoeH KHRre (Maruska et a!., 1973) MapycbKa rrO.lI.P06HO OrrRCaJI BeCb rrpouecc pa3pa60TKR CBeTo,n:Ro,n:OB R3 GaN. CJIe,n:yeT OTMeTRTb, lJTO rrJIeHKR GaN, ,n:a)Ke 2*

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rOTOBbIX rrJIeHOK (Nakamura et al., 1994a) . .ll.orrOJIHI1TeJIbHOe JIenIpOBaHl1e

CBeTO)l.110)l.bI GaP:N 3eJIeHOrO CBeQe-

(Schubert et al., 1996) rr03BOJIHeT YJIYQIIIaTb 3cpcpeKTI1BHOCTb aKTI1BaUl111

HI1H 113-3a CBoeH HI13KOH HPKOCTI1 )l.JIH

rJIy6oKI1x

3TI1X ueJIeH He rrO)l.XO)l.HT.

aKueIITOpOB.

3TOT

rrpopbIB

B

BbIpaml1BaHl111

JIerl1pOBaHHbIx

CJIOeB p-Tl1rra OTKPbIJI rryTb K C03)l.aHI1IO CBeTO)l.110)l.OB C p-n-rrepeXO)l.aMI1 11

JIa3epHbIX

)l.110)l.OB.

B

JIerl1pOBaHHbIx MarHl1eM,

HaCTOHmee

BpeMH

113rOTaBJII1BaIOT Bce

Ha

OCHOBe

rrJIeHOK

CBeTO)l.110)l.bI

GaN,

11 JIa3epHbIe

0630PbI paHHero neplfO.ll.a pa60T no GaN -

CM.

r.

[8,9].

I1plfoplfTeTHble pa60TbI B. CanaplfHa, M. B. qYKlfqeBa If .lI.p. no aKTIfBaUIfIf JIIOMIfHeCUeHUlf1f B GaN -.CM. [10, 11]. CM. TaK)Ke nplfoplfTeTHble pa60TbI

B. r.

Clf.ll.OpOBa If .lI.p.

[12,13].

1990

3aHHJICH

.

r.,

KOr)l..a

pa3pa6oTKoH

HaKaMypa CBeTO)l.110)l.OB

113 GaN B KOMrraHl111 NCIC, OH 6bIJI 36-JIeTHI1M

)l.110)l.bI, cO)l.ep)Kaml1e HI1Tpl1)l.bI.

1) 2)

B

1)

I1H)KeHepOM

6e3

PIfC. 1.11. MaTplfua 1f3 CBeTO.ll.lfO.ll.OB InGaN/GaN roJIy60KO CBeqeHlfll, 1f3rOTOBJIeHHall qmpMoH Nichia (Nakamura, Fasol, 1997)

YQeHOH


B036Y)K.lI.eH1f1l JIIOMIfHOCPOPOB, pa60TbI no 3cpcpeKTlfBHbIM roJIy6bIM CBeTO.ll.lfO.ll.aM 6bIJIIf IfHIfUlflfpOBaHbI III. HaKaMypoH.

2)

.

CM. TaK)Ke 0630pHble CTaTblf A.3.IOHoBlfqa

[15-18]

If P.3. EaXTlf3lfHa

[19].

r

Dl. 1. Hcmopufl coaaaHufl c8emOaUOa08

38

PHC.

1.12.

CHrHaJIbl 3eJIeHbiX cBeTo<jlopoB -

1.7. HcmopUfl coaaaHufl c8emOaUOa08 8UaUM020 auanaaoHa ua AlinGaP

39

O.l(HO H3 caMblX pacnpocTpaHeHHblx

npHMeHeFIHH CBeTO.l(HO.l(OB InGaN/GaN 3eJIeHOrO U;BeTa CBeqeHHlI PHC.

CTeneHH,

6e3

e.lViHOH

ny6JIHKauJ-ul

H

BbIcTynJIeHHH

Iia

KOHepeHI1.HHX

1.13.

ITpHMepbl npHMeHeHHH CBeTO.l(HO.l(OB KpacHoro H JKeJITOrO CBeqeHHlI H3 AlInGaP

(Nakamura, Fasol, 1997). B KOHI1.e 1990-x rr. OH Y)Ke CTaJI npoeccopoM KaJIHopHHHcKoro KOMnaHHH

Cree

B

KHHre

cBoeH

YHHBepCHTeTa

Lighting

B

CaHTa-5ap6ape

Corporation,

(Nakamura,

2001)

NCIC H HnOHCKoe 06meCTBO:

OCHOBHoro HaKaMypa

H

KOHcYJIbTaHTOM

KOHKypeHTa )KeCTKO

NCIC.

KPHTHKOBaJI

«lITO-TO He B nopH)J.Ke C 3TOH CTpaHoH.

TIpoMbIIIIJIeHHOCTb H ymlBepcHTeTbI B HeH Y)KaCHO 60JIbHbI ... »

60JIee pacnpocTpaHeHHbIx npHMeHeHHH CBeTO)J.HO)J.OB H3 AlInGaP KpacHoro H )KeJITOrO CBelJeHHH. MaTepHaJIbI Ha OCHOBe AlInGaP 6bIJIH pa3pa60TaHbI B HnoHHH )J.JIH JIa3epOB,

pa60TaIDmHx

B

BH)J.HMOM

OKa3aJIOCb, lJTO CHCTeMa InGaN/GaN TaK)Ke nO)J.XO)J.HT )J.JIH nOJIYlJeHHH

OllTHlJeCKOrO

cneKTpa

1990). Bce HalJaJIOCb C H3rOTOBJIeHHH JIa3epa AlInGaP/InGaP C )J.BOHHOH

CBeTO)J.HO)J.OB 6eJIoro CBelJeHHH. CymecTByeT HeCKOJIbKO nO)J.XO)J.OB K H3ro-

reTepocTpYKTYPOH,

TOBJIeHHID TaKHX CBeTO)J.HO)J.OB. O)J.HH H3 HHX OCHOBaH Ha HCnOJIb30BaHHH

Ino,5Gao.5P, napaMeTpbI peIIIe),KH

JIIDMHHOOPOB, npe06pa3YIDmHX )J.JIHHy BOJIHbI (Nakamura,

iHana30He

(Kobayashi et aI., 1985; Ohba et aI., 1986; Ikeda et aI., 1986; Itaya et aI.,

F~sol,

1997),

GaAs I).

HCnOJIb3YIDmero

TIOCKOJIbKY

IIIHpHHa

B

KalJeCTBe

aKTHBHoro

MaTepHaJIa

KOToporo COBna)J.aIDT C napaMeTpaMH

3anpemeHHoH

30HbI

InGaP

COCTaBJIHeT

)J.pyroH Ha npHMeHeHHH nOJIynpoBo)J.HHKOBbIX npe06pa30BaTeJIeH )J.JIHH BOJIH

OKOJIO

(Guo et aI., 1999). O)KH)J.aeTcH, lJTO B 6JIH)KaHilieM 6Y)J.ymeM npoH30H)J.eT

H3rOTOBJIeHHH JIa3epOB, H3JIYlJaIDmHX CBeT B KpacHoH 06JIaCTH BH)J.HMoro

60JIbiliOH

cneKTpa. TaKHe JIa3epbI npHMeHHIDT, HanpHMep, B JIa3epHbIX YKa3Kax H

npopbIB B

06JIaCTH

C03)J.aHHH

H HCnOJIb30BaHHH

CBeTO)J.HO)J.OB

6eJIoro CBelJeHHH, nOCKOJIbKY no CBeTOBOH OT)J.alJe OHH BnOJIHe MoryT KOH-

1,9 3B

(650

HM),

3TOT

MaTepHaJI

MO)KeT HCnOJIb30BaTbCH )J.JIH

DVD-npoHrpbIBaTeJIHx.

KypHpoBaTb C 06bIlJHbIMH JIaMnaMH HaKaJIHBaHHH H JIIDMHHeCI1.eHTHbIMH HC-

.u06aBJIeHHe aJIIDMHHHH K aKTHBHOH 06JIaCTH In GaP n03BOJIHeT CMe-

TOlJHHKaMH. B TO BpeMH KaK CBeTOBaH OT)J.alJa Tpa)J.HI1.HOHHbIX HCTOlJHHKOB

CTHTb H3JIYlJeHHe B CTOPOHY 60JIee KOPOTKHX BOJIH, 3aXBaTbIBaH OpaH)Ke-

CBeTa COCTaBJIHeT 15-100 JIMhBT, Y CBeTO)J.HO)J.OB 6eJIoro CBelJeHHH OHa

BbIH H )KeJITbIH cneKTpaJIbHbIe )J.Hana30HbI. O)J.HaKo (AlxGal-x)O.5Ino.5P

MO)KeT )J.OCTHraTb 300 JIMjBT. )

npH

x

~ 0,53 CTaHOBHTCH HenpHM030HHbIM nOJIynpOBO)J.HHKOM, lJTO npH-

BO)J.HT K CHJIbHOMY CHH)KeHHID ero K. n.)J. Ha )J.JIHHaX BOJIH, ). :::;; 600 HM. CJIe)J.oBaTeJIbHO, 3TOT MaTepHaJI He nO)J.XO)J.HT )J.JIH H3rOTOBJIeHHH BbICOKO-

1.7.

HCTOPHB C03,1l;aHHB CBeTO,ll;HO,ll;OB BH,Il;HMoro

,Il;Hana30Ha OnTH'IeCKOrO cneKTpa H3 AlInGaP

3eKTHBHbIX CBeTO)J.HO)J.OB, H3JIYlJaIDmHX CBeT C )J.JIHHaMH BOJIH MeHbilie 570 HM. TIepBbIe JIa3epbI AlInGaP nOHBHJIHCb B HalJaJIe 1980-x rr., a pa3BHTHe

CHCTeMa MaTepHaJIOB AlInGaP nO)J.XO)J.HT )J.JIH nOJIYlJeHHH HpKoro CBe-

CBeTO)J.HO)J.OB AlInGaP HalJaJIOCb B KOHI1.e 1980-x (Kuo et aI., 1990; Fletcher

lJeHHH B KpacHoM (626 HM), OpaH)KeBOM (610 HM) H )KeJITOM (590 HM!

et aI., 1991; Sugawara et aI., 1991). B OTJIHlJHe OT JIa3epOB AlInGaP B

cneKTpaJIbHbIX )J.Hana30Hax H B HaCTOHmee BpeMH HBJIHeTCH OCHOBHOH )J.JIH H3rOTOBJIeHHH CBeTO)J.HO)J.OB nOBbIIIIeHHoH HPKOCTH, H3JIYlJaIDmHX CBeT

CTpyKTypy CBeTO)J.HO)J.OB 06bIlJHO BXO)J.HT CJIOH pacTeKaHHH TOKa, BBO)J.HMble

B )J.aHHOM HHTepBaJIe )J.JIHH BOJIH. Ha pHC. 1.13 npHBe)J.eHbI npHMepbI HaH-

JIaCb 06JIaCTb, pacnOJIO)KeHHaH HH)Ke BepXHeH lJaCTH OMHlJeCKOrO KOHTaKTa.

1) no

150

JIM/BT, CM.

[21).

)J.JIH Toro, lJT06bI CBeTHJIaCb TOJIbKO nJIOCKOCTb

1) ITpHopHTeTHbie pa60TbI

JI. M.

nOJIrHHOBa, IT.

f.

p-n-nepexo)J.a

H He CBeTH-

EJIHCeeBa H .l(p. -

CM.

[14).

Til. 1. HcmopuJl C03aaHUJl c8emOaUOa08

40

.ll.aJIbHeHIIIHe ycoBepIIIeHcTBoBaHIHI CBeTO,D.HO,D.OB AlinGaP 6bIJIH cBH3aHbI C C03,D.aHHeM B aKTHBHoH 06JIaCTH, <.:ocToHmeH H3 HeCKOJIbKHX KBaHTOBbIX HM (Huang, Chen, 1997; Chang, Chang, 1998a, 1998b), pacnpe,D.eJIeHHbIX OTpa)KaTeJIeH Bp3rra (Huang, Chen, 1997; Chang et aI., 1997) H pa3pa60TKoH TeXHOJIOrHH H3rOTOBJIeHHH np03paqHbIX GaP nO,D.JIO)KeK (Kish, Fletcher, 1997). B KHHrax pH,D.a aBTopoB (Stringfellow, Craford, 1997; Mueller, 2000; Krames et aI., 2002) MO)KHO HaHTH cpaBHHTeJIbHbIH aHaJIH3 CHCTeM AlinGaP H CBeTO,D.HO,D.OB Ha HX OCHOBe.

1.S.

HOBbIe 06JIaCTH npHMeHeHHB CBeTO.ll.HO.ll.OB

r

1.8. H08ble o61lacmu npUMeHeHUJl c8emOaUOa08

41

PHC. 1.15. I1epBbIH aBTOM06HJIb co CBeTO.D.HO.D.HbIMH
no Mepe B03pacTaHHH HHTeHCHBHOCTH H3JIyqeHHH CBeTO,D.HO,D.OB Bce llIHpe CTaHOBHTCH c
PHC. 1.14. I1epBble xHpyprHqeCKHe OqKH co BCTpoeHHblMH CBeTO.D.HO.D.aMH 6eJIoro CBeqeHHlI (a), HCnOJIb3yeMbIe .D.JIlI OCBemeHHlI 30HbI onepau.HH (6) (Shimada et al., 2001; Shimada et al., 2003)

PHc.1.16. ,UHCnJIeH, COCTOllmHH H3 18 MHJIJIHOHOB CBeTO.D.HO.D.OB, pa3MemeHHblH Ha CTeHe ceMH3Ta)KHOrO 3.D.aHHlI B HbIO-l1opKe

PHC. 1.17. CBeTo
B 2004 r.
p . .ll.YHaH B HeMeu.KOM ropo,D.e PereHc6ypr, ,D.JIH OCBemeHHH KOToporo HCrrOJIb3yeTcH 21900 CBeTO,D.HO,D.OB KpacHoro CBeqeHHH. ll.errOqKa H3 HpKO ropHmHX CBeTO,D.HO,D.OB, rrpoTHHYTaH B,D.OJIb MOCTa, KaK 6bI 06be,D.HHHeT ,D.Ba 6epera peKH. nOCKOJIbKY ropo,D. OCHOBaH B 179 r., a MOCT nocTpoeH B 2004 r., Ka)K,D.bIH CBeTO,D.HO,D. CHMBOJIH3HpyeT O,D.HH MecHu. cymecTBoBaHHH ropo,D.a (Os ram Opto Semiconductors, 2004). Ha pHC. 1.19 rrOKa3aHa rrO,D.CBeTKa BXO,D.a B HayqHO-rrpOMbIIIIJIeHHbIH rrapK, HaXO,D.HmHHCH Ha TaHBaHe B ropo,D.e XCHH Illy. B 3TOM rrapKe pacrrOJIO)KeHO MHoro KOMrraHHH, crreu.HaJIH3HpYlOmHXcH Ha pa3pa60TKe TexHOJIOrHH H3rOTOBJIeHHH rrOJIyrrpOBO,D.HHKOBbIX YCTPOHCTB 1).

1) 1000 CBeT0.D.HO.D.HbIX cBeTo
1) I1PHM. pe.D..: CM.
I

42

FIt. 1. Hcmopufl c03aaHufl cBemoauoaoB

I

II "

PHc.1.18. KaMeHHbIH MOCT B ropo.n;e PereHc6ypre (fepMaHHH), OCBeIIl,aeMbIH rrpH rrOMOIIl,H CBeTo.n;Ho.n;OB (Focus Magazine, 2004)

PHC. 1.19. Xy.n;O}l{eCTBeHHaH rro.n;CBeTKa Bxo.n;a B HayqHO-rrpOMblIIIJIeHHblH rrapK, Haxo.n;HIIl,HHCH B TaHBaHe B ropo.n;e XCHH Illy (K.R. Wang, L.-W. Tu, 2005)

BH6JIHOrpa4>HlIecKHH cnHCOK Akasaki 1., Amano H., Itoh K., Koide N., and Manabe K. «GaN based UV/blue light-emitting devices» GaAs and Related Compounds conference, Inst. Phys. Con!. Ser. 129, 851 (1992). Allen J. W., Moncaster M. E., and Starkiewicz J. «Electroluminescent devices using carrier injection in gallium phosphide» Solid State Electronics 6, 95 (1963). Amano H., Kito M., Hiramatsu K., Akasaki 1. «P-type conduction in Mg-doped GaN treated with low-energy electron beam irradiation (LEEBI») Jpn. J. Appl. Phys. 28, L2112 (1989). Chang S. J., Chang C. S., Su Y.K, Chang P. T., Wu Y. R., Huang K. H. and Chen T. P. «AlGaInP multiquantum well light-emitting diodes» lEE Proc. Optoelectronics 144, 1 (1997). Chang S. J. and Chang C. S. «AlGaInP-GaInP compressively strained multiquantum well light-emitting diodes for polymer fiber applications» IEEE Photonics Technol. Lett. 10, 772 (1998a). Chang S. J. and Chang C. S. «650 nm AlGaInP/GaInP compressively strained multi-quantum well light-emitting diodes» Jpn. J. Appl. Phys 37, L653 (1998b). Craford M. G., Shaw R. W., Herzog A. H., and Groves W. O. «Radiative recombination mechanisms in GaAsP diodes with and without nitrogen doping» J. Appl. Phys. 43, 4075 (1972). Destriau G. «Scintillations of zinc sulfides with alpha-rays» J. Chimie Physique 33, 587 (1936). Duke C. B. and Holonyak Jr. N. «Advances in light-emitting diodes» Physics Today, December issue, p. 23 (1973). Eastman P. C., Haering R. R., and Barnes P. A. «Injection electroluminescence in metal-semiconductor tunnel diodes» Solid-State Electronics 7, 879 (1964). Edmond J. A., Kong H. S., and Carter Jr. C. H. «Blue LEDs, UV photo diodes and high-temperature rectifiers in 6 H-SiC» Physica B 185,453 (1993).

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r

I.B. Bu6AuoepafjJU'leCKUU cnUCOK

45

Maruska H. P., personal communication. The photograph of a GaN MIS LED is gratefully acknowledged (2000). Maruska H. P. and Pankove J. I. «Efficiency of GaAsl-xP x electroluminescent diodes» Solid State Electronics 10, 917 (1967). Maruska H. P. and Tietjen J. J. «The preparation and properties of vapourdeposited single-crystalline GaN» Appl. Phys. Lett. 15, 327 (1969). Maruska H. P., Rhines W. C., Stevenson D. A. «Preparation of Mg-doped GaN diodes exhibiting violet electroluminescence» Mat .. Res. Bull. 7, 777 (1972). Maruska H. P., Stevenson D. A., Pankove J. I. «Violet luminescence of Mg-doped GaN (light-emitting diode properties») Appl. Phys. Lett. 22,303 (1973). Maruska H. P., Anderson L. J., Stevenson D. A. «Microstructural observations on gallium nitride light-emitting diodes» l. Electrochem. Soc. 121, 1202. (1974a) Maruska H. P. and Stevenson D. A. «Mechanism of light production in metalinsulator-semiconductor diodes; GaN:Mg violet light-emitting diodes» Solid State Electronics 17, 1171 (1974b). Mueller G. (Editor) Electroluminescence I Semiconductors and Semi metals 64 (Academic Press, San Diego, 2000). Mukai, Takashi, personal communication (2005). Nakamura S., Senoh M., and Mukai T. «Highly p-type Mg doped GaN films grown with GaN buffer layers» lpn. l. Appl. Phys. 30, L 1708 (1991). Nakamura S., Senoh M., and Mukai T. «P-GaN/n-InGaN/n-GaN doubleheterostructure blue-light-emitting diodes» lpn. l. Appl. Phys. 32, L8 (1993a). Nakamura S., Senoh M., and Mukai T. «High-power InGaN/GaN doubleheterostructure violet light-emitting diodes» Appl. Phys. Lett. 62, 2390. (1993b) , Nakamura S., Iwasa N., and Senoh M. «Method of manufacturing p-type compound semiconductor» US Patent 5,306,662 (1994a). Nakamura S., Mukai T., and Senoh M. «Candela-class high-brightness InGaN/AlGaN double-heterostructure blue-light-emitting diodes» Appl. Phys. Lett. 64, 1687 (1994b). Nakamura S., Senoh M., Iwasa N., Nagahama S. «High-brightness InGaN blue, green, and yellow light-emitting diodes with quantum well structures» lpn. l. Appl. Phys. 34, L797 (1995). Nakamura S., Senoh M., Nagahama S., Iwasa N., Yamada T., Matsushita T., Sugimoto Y., and Kiyoku R «Room-temperature continuous-wave operation of InGaN multi-quantum-well structure laser diodes» Appl. Phys. Lett. 69, 4056 (1996). Nakamura S. and Fasol G. The Blue Laser Diode (Springer, Berlin, 1997). Nakamura S. Breakthrough with Anger (Shueisha, Tokyo, 2001). See also Compound Semiconductors 7, No.7, 25 (Aug. 2001) and 7, No.9, 15 (Oct. 2001). Nathan M. I., Dumke W. P., Burns G., Dill Jr. F. H., and Lasher G.J. «Stimulated emission of radiation from GaAs p-n junctions» Appl. Phys. Lett. 1, 62 (1962).

46

Fit. 1. Hcmopu51. c030aHU51. cBemoouoooB

Nichia Corporation Remarkable Technology edited by I. Matsushita and E. Shibata (Nichia Company, Tokushima, Japan, 2004). Nuese C. J., Stillman G. E., Sirkis M. D., and Holonyak Jr. N. «Gallium arsenidephosphide: crystal, diffusion, and laser properties.) Solid State Electronics 9, 735 (1966). Nuese C. J., Tietjen J. J., Gannon J. J., and Gossenberger H. F. «Optimization of electroluminescent efficiencies for vapor-grown GaAsP diodes~ 1. Electrochem. Soc.: Solid State Sci. 116, 248 (1969). Ohba Y., Ishikawa M., Sugawara H., Yamamoto T., and Nakanisi T. «Growth of high-quality InGaAIP epilayers by MOCVD using methyl metalorganics and their application to visible semiconductor lasers.) !. Cry st. Growth 77, 374 (1986). Osram Opto Semiconductors «LEDs bridge time and space.) press release, June 17 (2004). Pankove J. I. and Berkeyheiser J. E. «A light source modulated at microwave frequencies.) Proc. IRE, 50, 1976 (1962). Pankove J. I. and Massoulie M. J. «Injection luminescence from GaAs.) Bull. Am. Phys. Soc. 7, 88 (1962). Pankove J. I., Berkeyheiser J. E., Maruska H. P., and Wittke J. «Luminescent properties of GaN.) Solid State Commun. 8 1051 (1970a). Pankove J. I.. Maruska H. P., and Berkeyh'eiser J. E. «Optical absorption of GaN.) Appl. Phys. Lett. 17, 197 (1970b). Pankove J. I., Miller E. A., Richman D., and Berkeyheiser J. E. «Electroluminescence in GaN.) !. Luminescence 4, 63 (1971a) Pankove J. I., Miller E. A., and Berkeyheiser J. E. «GaN electroluminescent diodes.) RCA Review 32,383 (1971b). Pankove J. I., Miller E. A., and Berkeyheiser J. E. «GaN blue light-emitting diodes.) !. Luminescence 5, 84 (1972). Pankove J. I. and Lampert M. A. «Model for electroluminescence in GaN.) Phys. Rev. Lett. 33, 361 (1974). Perry T. S. «M. George Craford.) IEEE Spectrum, February issue, p. 52 (1995). Pilkuhn M. H. and Rupprecht H. «Light emission from GaAs",Pl-", diodes.) Trans. Metallurgical Soc. AIME 230, 282 (1964). Pilkuhn M. H. and Rupprecht H. «Electroluminescence and lasing action in GaAs",P 1_",.) 1. Appl. Phys. 36, 684 (1965). Pilkuhn M. H. «Light-emitting diodes.) in Handbook of Semiconductors edited by T. S. Moss, 4, edited by C. Hilsum, p. 539 (1981). Pilkuhn M. H., personal communication. The photograph of GaP:Zn-O LED is gratefully acknowledged (2000). Potter R. M., Blank J. M., and Addamiano A. «Silicon carbide light-emitting diodes~ !. Appl. Phys. 40, 2253 (1969). Quist T.M., Rediker R.H., Keyes R.J., Krag W.E., Lax B., McWhorter A.L. and Zeigler H. J. «Semiconductor maser of GaAs.) Appl. Phys. Lett. 1, 91 (1962).

r

I.B. Bu6Jtuoepat/JU'l.eCKUU cnUCOK

47

Rostky G. «LEDs cast Monsanto in unfamiliar role.) Electronic Engineering Times (EETimes) on the internet, see http://eetimes.com/anniversary/designciassics/monsanto.html, Issue 944, March 10 (1997). Round H. J. «A note on carborundum.) Electrical World, 19, 309 (1907). Rupprecht H., Pilkuhn M., and Woodall J. M. «Continuous stimulated emission from GaAs diodes at 77 K.) (First report of 77 K cw laser) Proc. IEEE 51, 1243. (1963). Rupprecht H., Woodall J. M., Konnerth K., and Pettit D. G. «Efficient electroluminescence from GaAs diodes at 300 K.) Appl. Phys. Lett. 9, 221 (1966). Rupprecht H., Woodall J. M., and Pettit G. D. «Efficient visible electroluminescence at 300 K from AIGaAs pn junctions grown by liquid phase epitaxy,) Appl. Phys. Lett. 11, 81 (1967). Rupprecht H., Woodall J. M., Pettit G. D., Crowe J. W., and Quinn H. F. «Stimulated emission from AIGaAs diodes at 77 K.) Quantum Electron. 4,35 (1968). Rupprecht H., personal communication (2000). Schubert E. F., Wang Y.-H., Cho A. Y., Tu L.-W., and Zydzik G. J. «Resonant cavity light-emitting diode.) Appl. Phys. Lett. 60, 921 (1992). Schubert E.F., Hunt N.E.J., Micovic M., Malik R.J., Sivco D.L., Cho A.Y., and Zydzik G. J. «Highly efficient light-emitting diodes with microcavities.) Science 265, 943 (1994). Schubert E. F., Grieshaber W., and Goepfert I. D. «Enhancement of deep acceptor activation in semiconductors by superJattice doping.) Appl. Phys. Lett. 69, 3737 (1996). Seiko Corporation «Pulsar - it's all in the details.) www.pulsarwatcheseurope. com (2004). Shimada J., Kawakami Y., and Fujita S. «Medical lighting composed of LEDs arrays for surgical operation.) SPIE Photonics West: Light Emitting Diodes: Research, Manufacturing, and Applications, 4278, 165, San Jose, January 24-25 (2001). Shimada J., Kawakami Y., and Fujita S. «Development of lighting goggle with power white LED modules.) SPIE Photonics West: Light Emitting Diodes: Research, Manufacturing, and Applications, 4996, 174, San Jose, January 28-29 (2003) Stringfellow G. B. and Craford M. G. (Editors) High Brightness Light-Emitting Diodes Semiconductors and Semimetals 48 (Academic Press, San Diego, 1997). Sugawara H., Ishikawa M., Kokubun Y., Nishikawa Y., and Naritsuka S. «Semiconductor light-emitting device.) US Patent 5,048,035 (1991). Thomas D. G" Hopfield J. J., and Frosch C. J. «Isoelectronic traps due to nitrogen in gallium phosphide.) Phys. Rev. Lett. 15, 857 (1965). Violin E. E., Kalnin A. A., Pasynkov V. V., Tairov Y. M., and Yaskov D. A. «Silicon Carbide - 1968.) 2nd International Conference on Silicon Carbide, published as a special issue of the Materials Research Bulletin, p. 231 (1969). Welker H. «On new semiconducting compounds (translated from German).) Zeitschrift far Naturforschung 7a, 744 (1952).

48

Til.

1. Hcmopufl C03aaliUfl c8emOaUOa08

Welker H. «On new semiconducting compounds II (translated from German») Zeitschrift fur Naturforschung 8a, 248 (1953). Wolfe C. M., Nuese C. J., and Holonyak J r. N. «Growth and dislocation structure of single-crystal Ga(AsP») !. Appl. Phys. 36, 3790 (1965). Woodall J. M., personal communication (2000). Woodall J. M., Potemski R. M., Blum S. E., and Lynch R. «AlGaAs LED structures grown on GaP substrates» Appl. Phys. Lett. 20, 375 (1972).

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.~

2

Ha pHC. 2.3 rrOKa3aHhI TeOpeTHqeCKHe H 3KcrrepHMeHTaJIhHhle 3aBHCH-

cpopMyJIe (2.10) rrpH

55

1016

1017

KOHII.eHrp8II.HlI JIerHpYIOIII.eii npHMeCH

lOIS

N,

CM-

3

HOMHHaJIhHO HeJIempOBaHHoM

MaTepHaJIe BpeMH 2KH3HH HeOCHOBHhIX HOCHTeJIeH, H3MepeHHoe B GaAs

PHC. 2.3.

rrpH KOMHaTHOH TeMrrepaType, COCTaBHJIO 15 MKC (Nelson, Sobers, 1978a; 1978b) 1).

II.HH JIempYIOlIl.HX IIpHMeceH, IIOJIyqeHHali .D,JIli GaAs IIpH TeMIIepaType 300 K. BpeMli

3aBHcHMoCTb BpeMeHH JKH3HH HeOCHOBHblX HOCHTeJIeH OT KOHII.eHTpa-

JKH3HH

OIIpe.D,eJIlIJIOCb

IIO pe3YJIbTaTaM

H3MepeHHH

BpeMeHH

3aTyxaHHlI

JIIOMHHeCII.eHII.HH. TOqKH Ha rpa!jJHKe COOTBeTCTBYIOT .D,aHHbIM (Nelson, Sobers,

YnpalKHeHHe. OnpeaeJleHUe BpeMeHU JlCU3HU HeOCHOBHblX HOCUmeJleU Tpe6yeTcli Orrpe.D,eJIHTb BpeMli JKH3HH HeOCHOBHbIX HOCHTeJIeH B GaAs p-THIIa 15 CM- 3 H lOIS CM- 3 . K03!jJqmII.HeHT IIpH KOHII.eHTpaII.HlIX JIempYIOlIl.HX IIpHMeCeH 10 6HMOJIeKYJIlipHOH peKOM6HHaII.HH CqHTaeTCli paBHblM

B = 1O-lOcM3/c.

1978a, 1978b) H (Ahrenkiel, 1993), IIOJIyqeHHblM Ha HOMHHa~bHo H eJIerH p OBaHHoM 3 MaTepHaJIe C KOHII.eHTpaII.HeH IIpHMeceH ~ 10 CM-

npe.D,IIO-

Tor.n.a ypaBHeHHe (2.3) M02KHO 3arrHcaTh B BH.n.e

JIaraeTClI, 'ITO y.D,aJIOCb IIOJIyqHTb 6eCIIpHMeCHbIH GaAs. OII.eHHTe BpeMli JKH3HH HOCHTeJIeH B TaKOM MaTepHaJIe, eCJIH HX KOHII.eHTpaII.HlI COCTaBJIlIeT: 2. 106 cM- 3 .

(2.16)

PemeHHe npH npH

15

3

NA = 10 CM- , NA = 1O IS CM- 3 ,

Tn Tn

= 10 = 10

B HeJIempOBaHHOM GaAs T

=

MKC.

PeIIIHM 3TO .n.HcpcpepeHU;HaJIhHOe ypaBHeHHe MeTo.n.OM pa3.n.eJIeHHH rrepeMeH-

HC.

HhIX rrpH HaqaJIhHhIX YCJIOBHHX ~n(O)

2500 c.

= ~no:

06CY.D,HTe, KaK BpeMli JKH3HH HOCHTeJIeH H KOHII.eHTpaII.HlI JIempYIOlIl.eH IIpH-

~n(t) =

MeCH BJIHlIlOT Ha CKOPOCTb MO.D,YJIlIII.HH CBeTO.D,HO.D,OB, HCIIOJIb3yeMblx B CHCTeMax CB1I3H.

B

2.3.

H3JIyqaTeJIbHaB peKOM6HHa:U;HH npH BbICOKOM ypOBHe B036YJK~eHHH

TIPH BhICOKOM ypoBHe B036Y2K.n.eHHH KOHu;eHTpaU;HH HOCHTeJIeH, o6pa30BaHHhIX 3a CqeT B036Y2K.n.eHHH rro.n. B03.n.eHcTBHeM CBeTa, HaMHoro 60JIhllIe paBHoBecHoH KOHu;eHTpaU;HH HOCHTeJIeH, T. e. ~n

I) eM. IIpHopHTeTHble pa60TbI JJ:.3. fap6Y30Ba [3].

:» (no + po).

1 Bt

-I.

+ .6.110

(2.17)

OTJIHqHe OT CJIyqaH HH3Koro ypOBHH B036Y2K.n.eHHH 3.n.eCh CHH2KeHHe

KOHu;eHTpaU;HH HOCHTeJIeH rrpOHcxo.n.HT He rro 3KcrrOHeHU;HaJIhHOMY 3aKOHY. TIPH C06JIro.n.eHHH 3KcrrOHeHU;HaJIhHOrO 3aKOHa .n.JIH YMeHhllIeHHH KOHu;eHTpaU;HH CO 3HaqeHHH

~no

.11.0 3HaqeHHH

~noe-l

Tpe6yeTcH BpeMH T.

I1crroJIh3YH TO 2Ke caMoe orrpe.n.eJIeHHe .n.JIH CJIyqaH He3KcrrOHeHU;HaJIhHOrO CHH2KeHHH KOHu;eHTpaU;HH, «rrOCTOHHHYro BpeMeHH» M02KHO BhlqHCJIHTh H3 HaKJIOHa 3aBHCHMOCTH (2.17):

T(t)

=

.6.n(t) (d.6.n(t)/dt) .

(2.18)

Fit. 2. H3ltytf.ameltbHaJl U 6e3bl3ltYtf.ameltbHaJl pelwM6uHau,UJl

56

nO,nCTaBIfB Bblpa2KeHHe

(2.17)

B

(2.18),

rrOJIyqHM CJIe,nYlOmee orrpe,neJIeHHe

rrOCTOHHHOH BpeMeHH ,nJIH CJIyqaH He3KcrrOHeHUHaJIbHOrO 3aTyxaHHH:

1

r(t) = t+ B.D. .

TaKHM o6pa30M «rrOCTOHHHaH 2KeHHH

(2.19)

BpeMeHH~

no

.

rI \

57

2.5. 3amyxanue 1t1OMUnecu,enu,uu CillIbHoe B036)')K.l1;eHHe .D.n~NA «pacnIHyroe 3KCIIOHeHWiaJThHOe 3aryxaHHe» /)/ cna60e B036)')K.l1;eHHe

a

(2.19)

/

-

.D.n«NA

3aBHCHT OT BpeMeHH. 113 Bblpa-

TaK2Ke CJIe,nyeT, qTO C TeqeHHeM BpeMeHH BpeMH 2KH3HH

HeOCHOBHblX HOCHTeJIeH pacTeT. Qepe3 ,nOCTaTOqHO 60JIbIIIOH rrpOMe2KYToK BpeMeHH cHTyaUHH CTaHeT TaKOH 2Ke, KaK rrpH HH3KOM ypoBHe B036Y2K,neHHH, a rro3ToMY H BeJIHqHHa Bblpa2KeHHeM (2.11).

r

BpeMH

rrpH6JIH3HTCH K 3HaqeHHIO, orrpe,neJIHeMoMY

6

Q '--' ~

=:

2.4.

~

YpaBHeHHe CKOPOCTH 6HMOJIeKYJUlpHOH

peKoM6HHaU;HH ,lI;JI.H CTPYKTYP C KBaHTOBbIMH .HMaMH KBaHTOBble HMbI rrpe,nCTaBJIHIOT C060H Y3KHe 06JIaCTH, pacrrOJI02KeHHble Me2K,ny ,nByMH 6apbepHbIMH CJIOHMH, Ha3HaqeHHe KOTOPbIX 3aKJIIOqaeTCH B OrpaHHqeHHH cBo6o,nHbIX HOCHTeJIeH.

L Qw ,

a rrJIOTHOCTH HOCHTe-

JIeH B ee 30He rrpoBo,nHMOCTH H BaJIeHTHOH 30He -

COOTBeTCTBeHHO n2D

npe,nrrOJI02KHM, qTO IIIHpHHa HMbI paBHa

(3D) KOHueHTpaUHH 3JIeKTpOHoB n 2D / L QW H p2D / LQw. nO,nCTaBHB

H p2D. Tor,na 3
(2.5),

~

~

r=const

~:.:

~

BpeMH

~ ~~~~~~~~~~~~~~~~~~~---P C 24

3aTyxaHHe JIIOMHHeCueHUHH B CJIyqae HH3Koro H BblCOKoro ypoBHe~ (a). I1ocToHHHble BpeMeHH B cJIyqae HH3Koro H BblCOKoro ypoBHeH B036y)!{.n:eHHH (6)

B~36y~;eHHH

HaH,neM ,nJIH ,naHHoro CJIyqaH CKOPOCTb OrrTHqeCKOrO B036Y2K,neHHH. I1HTeHcHBHoCTb JIIOMHHeCueHUHH rrporropUHo-

(2.20) 3TO ypaBHeHHe HJIJIIOCTpHpyeT ,nOCTOHHCTBa CHCTeM C KBaHTOBbIMH HMa-

HaJIbHa CKOPOCTH peKoM6HHaUHH. BblqHCJIHTb rrOCJIe,nHIOIO COOTBeTCTBeHHO rrpH HH3KOM H· BbICOKOM ypoBHe B036Y2K,neHHH M02KHO C rrOMOmblO cJIe,nylOmHX Bblpa2KeHHH -

CM. ypaBHeHHH

(2.17)):

R=---dt

Ha pHC.

2.4

(2.21)

r -B (Bt

+ .D.noI)

(2.22)

2

CXeMaTHqHO rrOKa3aH crra,n JIIOMHHeCueHUHH rrOCJIe B036Y2K,ne-

3TOM CJIyqae

HHH KOPOTKHM OIITHqeCKHM HMrrYJIbCOM. npH HH3KOM ypoBHe B036Y2K,neHHH

M02KHO 3aMeHHTb Ha IIIHPHHY
JIIOMHHeCueHUHH YMeHbIIIaeTCH rro 3KcrrOHeHUHaJIbHOMY 3aKOHY C rrOCTO-

rrepeCTaeT COOTBeTCTBOBaTb ee
LQW

dt dn(t) _

CM. ypaBHe-

npH ,nOCTaTOqHO MaJIOH IIIHpHHe KBaHTOBOH HMbI BOJIHOBaH
H

R = _ dn(t) = _ .D.no e-t/r,

MH H ,nBOHHbIX reTepocTpYKTyp. YMeHbIIIeHHeM IIIHpHHbI KBaHTOBOH HMbI y,naeTCH rrOJIyqaTb BblCOKHe 3HaqeHHH o6beMHoH (3D) KOHueHTpaUHH HO3 CHTeJIeH (qHCJIO HOCHTeJIeH B 1 CM ). B pe3YJIbTaTe YCHJIeHHH H3JIyqaTeJIbHOH peKoM6HHaUHH BpeMH 2KH3HH HOCHTeJIeH COKpamaeTcH HHe (2.11), qTO rrpHBo,nHT K pOCTy KBaHTOBoro BbIxo,na.

(2.9)

KOTopaH rrpH

B

MaJIOH rrpOTH2KeHHOCTH HMbI rrpeBblIIIaeT 3HaqeHHe

L Qw ,

rrOCKOJIbKY BOJIHOBaH
100

A.

MaTepHaJIO~

HHHOH BpeMeHH

B

CJIyqae BblCOKoro ypOBHH B036Y2K,neHHH 3aTyxaHHe

UHaJIbHble
2.5.

r.

JIIOMHHeCueHUHH HOCHT He3KcrroHeHUHaJIbHbIH xapaKTep. Bce He3KcrrOHeH-

[-t/r(t)].

B 60JIbIIIHHCTBe CJIyqaeB rrOCTOHHHble BpeMeHH pacTyT co

BpeMeHeM. TaKoH THrr
3aTyxaHHe JIIOMHHecu;eHU;HH

motl 3K.CnOHeHI,fUaJlbHotl cfJYHK.I,fUetl, HbIH, qeM 3KcrroHeHUHaJIbHbIH.

YMeHbIIIeHHe KOJIHqeCTBa HOCHTeJIeH B rrOJIyrrpOBo,nHHKax M02KeT 6bITb orrpe,neJIeHO rro 3aTyxaHHIO JIIOMHHecueHUHH rrOCJIe KopOTKoro HMrryJIbCa

paCm51HY-

orrHCbIBalOmeH crra,n 60JIee Me,nJIeHu

CaMoe pacrrpocTpaHeHHoe Bblpa2KeHHe ,nJIH pacTHHYTOH 3KcrrOHeHUHaJIbHOH
f3 -

napaMemp, xapaK.-

58

FIt. 2. H3JlY'tameJlbHafl U 6e3bt3JlY'lameJlbHafl peKoM6uHau,ufl

mepU3Y1OUfUU cmeneHb ynopflaO
f3

~ 1/2 -

CI1JIbHO HeyrropH,no'IeHHoH CTPYKTYPOH. 3Ha'IeHI1H

f3

MaTepl1aJI o6JIa,naeT

r

2.6. Ee3bt3JlY'lameJlbHafl peKoM6uHau,Ufl

59

8 06'beMe MamepUalla

l

!

!

~ 1/2 xapaKTepHbI

,nJIH TaKI1X MaTepl1aJIOB, KaK CTeKJIO (Phillips, 1996) 11 HeyrropH,no'IeHHble rrOJIyrrpoBo,nHI1KI1. He3KcrrOHeHUl1aJIbHOe 3aTyxaHI1e 6bIJIO OTKPbITO
3amyxaHueM KOllbpaYUta. napaMeTPbI ,nI1HaMI1'IeCKI1X rrpoueccOB peKoM611HaUl111 HOCI1TeJIeH B CBeTo,n110,nax orrpe,neJIHIOT I1X 6bIcTpo,neHcTBl1e, T. e. BpeMH I1X BKJIIO'IeHI1H 11 BbIKJIIO'IeHI1H (CKOpOCTb MO,nYJIHUI1I1). CKOPOCTb rrepeKJIIO'IeHI1H CBeTo,n110,nOB, I1CrrOJIb3yeMblx B CI1CTeMaX CBH311, OrpaHI1'II1BaeTCH BpeMeHeM )K113HI1 HeOCHOBHbIX HOCI1TeJIeH, KOTopoe MO)KeT 6bITb YMeHbIIleHO JII160 rrOBbIIIleHl1eM CTerreHI1 JIempOBaHI1H aKTI1BHOH 06JIaCTI1, JII160 YBeJII1'IeHl1eM B HeH

PIfC. 2.6. 30HHble .D.lfarpaMMbI, HJIJIIOCTPlfpYIOru;He pa3Hble TIfIIbI. JIIOMHHeCueHUHIf: 6e3bI3JIYQaTeJIbHaH peKOM6lfHaUlfH Qepe3 rrpHMecHble UeHTpbl, 6 - 6e3b13JIyQaTeJIbHaH.OJKe-peKOM6IfHaUIfH, 8 - 1f3JIYQaTeJIbHaH peKOM6lfHaUHH

a_

KOHueHTpaUl111 I1H)KeKTl1pOBaHHbIX HOCI1TeJIeH. ,UJIH rrOJIY'IeHI1H BbICOKI1X KOHueHTpaUI1H HOCI1TeJIeH 11, CJIe,nOBaTeJIbHO, CHI1)KeHI1H I1X BpeMeHI1 )K113-

CymecTByeT HeCKOJIbKO cpI1311'IeCKI1X MeXaHI13MOB 6e3bI3JIyqaTeJIbHOH

HI1 I1CrrOJIb3YlOTCH reTepOCTpYKTypbI, y,nep)KI1BalOml1e cBo6o,nHble HOCI1TeJII1

peKOM6I1HaUI1I1. npl1'II1HOH ee 'IaCTO HBJIHeTCH HaJII1'Il1e B KpI1CTaJIJII1'IeCKOH peIIleTKe pa3JII1'IHbIX ,necpeKTOB -

B Y3KI1X KBaHTOBbIX HMax.

,necpeKTOB, Kax

2.6.

Be3bI3J1YQaTeJlbHaB peKoM6HHaU;HR B 06'beMe

,nI1CJIOKaUI1H

co6CTBeHHbIMI1

aTOMOB rrpl1MeCeH,

11 I1X CKOrrJIeHI1H.

,necpeKTaMI1

MoryT

B

6bITb

CJIO)KHbIX

Me)K,nOY3JII1H

aTOMOB rrOJIyrrpOBo,nHI1Ka. Co6CTBeHHble u ,necpeKTbI 'IaCTO PeKOM611HaUl1H B rrOJIyrrpOBo,nHI1KaX 6bIBaeT B OCHOBHOM ,nByX BI1,nOB: 11

6e3bl3IlY
Ha PI1C. 2.5

11

BaKaHCl111

(Longini, Greene, 1956; Baraff, Schluter, 1985). no cTpyKType 3HepreTI1'IeCKI1X ypoBHeH TaKl1e ,necpeKTbI CI1JIbHO OTJII1'IaIOTCH OT 3aMemaeMbIX

MaTepHaJia

U3llY
co6CTBeHHbIX

rrOJIyrrpOBo,nHI1-

rroKa3aHo, 'ITO B

o6pa~YIOT

O,nI1H

I1JII1 HeCKOJIbKO 3HepreTI1'IeCKI1X ypOBHel1 BHyTPI1 3arrpemeHH0l1 30HbI rro-

Ka)K,nOM aKTe 113JIY'IaTeJIbHOH peKOM611HaUl111 rrpOI1Cxo,nI1T B036Y)K,neHl1e

JIyrrpOBo,nHI1Ka. 3HepreTI1'IeCKl1e ypOBHI1 B 3arrpemeHHOH 30He ~OJIyrrpOBo,nHI1Ka HBJIH-

o,nHoro cpOTOHa C 3HepmeH, paBHOH IIll1pl1He 3arrpemeHHOH 30HbI. B XO-

IOTCH 3cpcpeKTI1BHbIMI1 ueHTpaMI1 6e3bI3JIY'IaTeJIbH0I1 peKOM6I1HaUI1I1,

OCO~

,ne 6e3bI3JIY'IaTeJIbHOH peKOM611HaUl111 3HepmH 3JIeKTpOHa pacxo,nyeTcH Ha

6eHHO eCJII1 3TI1 ypOBHI1 pacrrOJIaralOTCH rrpl16JII1311TeJIbHO B cepe,nI1He

3TO~

B036Y)K,neHl1e KOJIe6aHI1H aTOMOB KpI1CTaJIJII1'IeCKOH peIIleTKI1, T. e. rrpeo6-

30HbI. Ha Pl1c. 2.6 CXeMaTI1'IHO rrpe,nCTaBJIeHa peKoM611HaUI1H HOCI1TeJIel1

pa3yeTcH B TerrJIO. no 3TOH rrpl1'II1He B 113JIY'IalOm11X YCTpoHCTBax aKTbI

'Iepe3 rrpl1MeCHble ypOBHI1. TaKl1e rrpl1MeCHble ypOBHI1 'IaCTO Ha3bIBalOT

6e3bI3JIY'IaTeJIbHOH peKoM611HaUl111 C'II1TaIOTCH He)KeJIaTeJIbHbIMI1.

ueHTpaMI1 mYUteHUfl IlIOMUHectfeHtfuu. PeKoM611HaUI11O cBo6o,nHbIX HOCI1TeJIeH ypOBHI1 rrepBbIMI1

'Iepe3

rJIy6oKI1e

Ha'IaJII1 113Y'IaTb lIIoKJII1, PI1,n 11 XOJIJI

rrpl1MeCHble (Hall,

1952;

Shockley, Read, 1952), rr03TOMY ee 'IaCTO TaK 11 Ha3bIBa1OT: peKoM611HaUI1H lIIoKJII1-PI1,na-XoJIJIa

1).

B pa60Te IIIOKJII1 11 PI1,na (Shockley, Read, 1952)

rrpl1Be,neHo Bblpa)KeHl1e ,nJIH CKOPOCTI1 6e3bI3JIY'IaTeJIbHOH 'Iepe3 ueHTpbI 3aXBaTa (JIOBYIIlKI1) C 3Heprl1HMI1 rrpl1MeCeH

RSR

r,ne PI1C. 2.5. I13JIyqaTeJIbHaH peKOM6HHaUlfH 3JIeKTpOHHO-.D.bIPOqHoil: IIapbI, COIIpOBOJK~ .D.aIOru;aHCH B036YJK.D.eHlfeM
=

I)

peKoM611HaUI1~

11 KOHueHTpaUl1el1

NT: (NTVp(Jp)-I

tln = tlp,

11 O"p -

ET

Vn 11

(no

potln + notlp + tlntlp + nl + tln) + (NTVn(Jn)

(2.23) I

(po

+ PI + tlp)'

vp - TerrJIOBble CKOPOCTI1 3JIeKTpOHoB 11 ,nbIPOK, O"n

rrorrepe'IHbIe Ce'IeHI1H 3aXBaTa JIOByIIleK. BeJII1'II1HbI nl 11 PI orrpe-

eM. KHlffH

[1-2] .

~!

I~ I

.n:eJHlIOT KOHu;eHTpaU;IUI 3JIeKTpOHOB M .n:h1POK, .n:JIH KOTOPhlX BhIIIOJIHHIOTCH COOTHOllleHMH

nl r.n:e

EFi -

= nieXp (

ET - EFi) kT '

PI = ni exp (

EFi - ET) kT '

(2.24)

ypOBeHh epMM C06CTBeHHOrO rrOJIyrrpOBO.n:HMKa.

BpeMH 2KM3HM M36hITOqHhiX 3JIeKTpOHOB B CJIyqae 6e3hI3JIyqaTeJIhHOii peKOM6MHaU;MM M02KHO rrOJIyqMTh

.!. _ T

(NT l/p (Jp)

npe.n:rrOJI02KMM,

I

qTO

M3

ypaBHeHMH

Po + no + L\n (no + nl + L\n) + (NTl/n(Jn)-1 (Po

»

OCHOBHhle HOCMTeJIM -

61

06'beMe MamepUaJla

)lJIH c06cTBeHHhlx rrOJIyrrpoB0.n:HMKOB, y KOTOPhIX

I

I i

Ti = Tno ( 1 + PI+nl) ~ = Tna EFi -

r.n:e

ypoBeHh

epMM

B

B6JIM3M

06hlqHO pacrrOJI02KeH

ET = EFi,

+ PI + L\p) .

B

no

= Po = ni,

3TO ypaB-

HeHMe yrrp0l!l-aeTcH:

ch

rYMeHT
[1 + h(ET-EFi)] kT '

(2.31)

C

c06CTBeHHoM

rrOJIyrrpoBo.n:HMKe,

KOTOPhlii

cepe.n:MHhI 3arrpemeHHoii 30HhI. Kor.n:a ap-

paBeH HyJIIO, OHa MMeeT MMHMMyM. n03TOMY rrpM

T. e. Kor.n:a rrpMMeCHhlii ypOBeHh pacrrOJI02KeH

B6JIM3M

cepe.n:MHhI

(2.25)

3arrpemeHHoii 30HhI, BpeMH 2KM3HM HeOCHOBHhIX HOCMTeJIeii rrpM COBepllle-

MaTe-

TaKMX

HMM aKTOB 6e3hI3JIyqaTeJIhHOii peKOM6MHaU;MM MMHMMaJIhHO. npM HaJIMqMM

paCCMaTpMBaeMhlii rrOJIyrrpOBo.n:HMK HBJIHeTCH

p-TMrra. 113 3Toro CJIe.n:yeT, qTO no, Po »PI. npM He60JIhlllMX T. e. Po COCTOHHMH, rrpM KOTOPhIX tln «: Po, BpeMH pMaJIOM

RSR = tln/T:

r

2.6. Be3bl3JlYliameJlbH.aJl pelwM6uH.a/{uJl

.n:hIPKM,

u;eHTpOB 3aXBaTa BpeMH 2KM3HM HOCMTeJIeii orrpe.n:eJIHeTCH Bhlpa2Ke-

T

HMeM

~

2Tno.

113 ypaBHeHMH

OTKJIOHeHMHX OT paBHOBeCHoro

ypOBHM -

2KM3HM HeOCHOBHhIX HOCMTeJIeii

OHM paCrrOJI02KeHhI

orrpe.n:eJIHeTCH Bhlpa2KeHMeM

(2.31)

CJIe.n:yeT, qTO rJIy60KMe rrpMMeCHhle

3
113 Bhlpa2KeHMH

B6JIM3M

(2.31)

Cepe.n:MHhI 3arrpemeHHOii 30HhI.

.~

M02KHO TaK2Ke rrOJIyqMTh TeMrrepaTypHYIO

3aBMCM-

MOCTh peKOM6MHaU;MM 1Il0KJIM-PM.n:a: rrpM YBeJIMqeHMM TeMrrepaTyphI BpeMH

(2.26)

2KM3HM HOCMTeJIeii B xo.n:e 6e3hI3JIyqaTeJIhHOii peKOM6MHaU;MM cOKpaUfaemCR. B pe3YJIhTaTe 3TOrO rrpM BhICOKMX TeMrrepaTypax 3
ECJIM

3JIeKTpOHhI HBJIHIOTCH OCHOBHhIMM HOCMTeJIHMM, .n:JIH HaX02K.n:eHMH

BpeMeHM 2KM3HM HeOCHOBHhIX HOCMTeJIeii (.n:h1pOK) MCrrOJIh3yeTCH aHaJIOmqHoe Bhlpa2KeHMe

M3-

JIyqaTeJIhHOii Me2K30HHOii peKOM6MHaU;MM YMelibUlaemCR. MaKCMMaJIhHaH MHTeHCMBHOCTh M3JIyqeHMH B npRM030lilibiX nOJlynpoBOaliUKaX Ha6JIIO.n:aeTCH rrpM HM3KMX TeMrrepaTypax. O.n:HaKO HeKOTophle CBeTOM3JIyqalOmMe YCTpoiiCTBa CTPOHTCH MMeHHO

(2.27)

Ha

rrpMHU;Mrre

M3JIyqaTeJIhHOii

peKOM6MHaU;MM

Ha rJIy60KMX

rrpMMeCHhIX

ypOBHHX. CaMhIM HpKMM rrpMMepOM HBJIHIOTCH CMCTeMhI Ha OCHOBe GaP,

113 3TMX

Bhlpa2KeHMii BM.n:HO, qTO CKOPOCTh peKOM6MHaU;MM, Haii.n:eHHaH rro

JIempOBaHHoro a30TOM. 113 Mo.n:eJIM 1Il0KJIM-PM.n:a CJIe.n:yeT, qTO C POCTOM

ypaBHeHMHM 1Il0KJIM-PM.n:a, orrpe.n:eJIHeTCH CKOPOCThlO 3aXBaTa HeOCHOBHhIX

TeMrrepaTyphI CKOPOCTh peKOM6MHaU;MM qepe3 rJIy60KMe u;eHTphI 3aXBaTa

HOCMTeJIeii. npe.n:rrOJIaraH, qTO BepOHTHOCTh 3aXBaTa OCfWBliblX HOCMTeJIeii

YBeJIMqMBaeTCH.

HaMHoro rrpeBhllllaeT BepOHTHOCTh 3aXBaTa lieOCIiOBliblX HOCMTeJIeii, M02KeM rreperrMcaTh ypaBHeHMe (2.25) B BM.n:e

liUKax,

npM

tln

«: Po

TpO (no

(2.28)

+ nl + L\n) + Tno (Po + PI + L\p).

+ r.

Po

3TO

03HaqaeT,

peKoM6MHaU;MH

~

eM MJIM McrrYCKaHMeM
Po + PI r. nOpo+no·

(2.29)

113 rrOCJIe.n:Hero ypaBHeHMH BM.n:HO, qTO rrpM He60JIhlllMX OTKJIOHeHMHX OT paBHOBeCHoro COCTOHHMH BpeMH 2KM3HM HeOCHOBHhIX HOCMTeJIeii B co6CTBeHHhIX rrOJIyrrpOBo.n:HMKax rrpaKTMqeCKM He M3MeHHeTCH. Terreph rrp e.n:rrOJI02KMM, qTO rrpMMeCHhle u;eHTphI 3aXBaThIBalOT .n:h1pKM M

T = Tno


M3JIyqaTeJIhHaH

Bcer.n:a cOrrpOB02K.n:aeTcH rrOrJIOmeHM-

no + nl + L\n Po+no

3JIeKTpOHhI C o.n:MHaKOBoii CKOPOCThlO, T. e. M3 ypaBHeHMH (2.29) CJIe.n:yeT, qTO

HarrpMMep GaP, rrocpe.n:HM-

HBJIHIOTCH qTO

OHO yrrpomaeTcH .n:o

Po + PI T -".. - 'no--po+no

lienpRM030lilibiX nOJlynpoBoa-

KaMM B M3JIyqaTeJIhHhIX rrepexo.n:ax

Po +no +L\n T

B

VnO"n

(1 + po+no Po + PI).

= VpO"p

MTnO

= TpO.

Tor.n:a

CKOJIhKY KOJIMqeCTBO
M ·qMCJIO aKMX

TOB peKOM6MHaU;MM, CBH3aHHhIX C rrOrJIOmeHMeM. B OT

Herrocpe.n:CTBeHHoii

rJIy60KMX

rrpMMeCHhIX

6JIM30CTM u;eHTpOB

MHTeHCMBHOCTh JIIOMMHeCu;eHU;MM rra.n:aeT. 113-3a OTHOCMTeJIhHO He60JIh-

(2.30)

1II0ro HhIX

3
BJIMHHMe aecfJeKmoB

e.n:MHMqOTCJIe-

PHC.

2.7.

MHKPOCHHMOK

MHHecueHUHH

KaTO.l(OJIIO-

9ITHTaKCHaJIbHOrO

CJIOH

GaAs. TeMHble ITHTHa YKa3bIBaIOT Ha 60JIbllIHe CKOITJIeHHH UeHTPOB 6e3bI3JIyqaTeJIbHOH

peKoM6HHaUHH

bert, 1995)

(Schu-

2.6. Be3bt3AY'lameAbl-taR peKoM6uflau,UR

62

63

8 06'beMe MamepuaAa

OpHqHHaMH'B03HHKHOBeHHH rJIy60KHX ueHTpOB 3aXBaTa 3JIeKTpOHOB MoryT 6bITb

GaN n-nrna/cam}lMp T=295 K

co6cmBelilibte aecpeKmbt -

BaKaHCHH aTOMOB raJIJIH5.I, He)!{e-

JIaTeJIbHbIe npHMeCH, ,n:HCJIOKaUHH, 06be,n:HHeHH5.I npHMeCb-,n:e

1992)

npHBe,n:eHo ,n:OBOJIbHO no,n:po6Hoe

onHcaHHe pa3JIHqHbIX ,n:e
6,5HM

(60 M3B)

yaapliafl O:JICe-peKoM6uliaI1Ufl. JIIOMHHeC~eHIJ;IDI Ha my60Iillx

5.lBJIHeTCH

npH peKoM6HHaUHH nap 3JIeKTpoH-,n:bIpKa, npH6JIH3HTeJIbHO paBHaH pacceHBaeTC5.I

npHMeCHbIX YPOBIDIX

peKoM6HHaUHH

OpH ee npoTeKaHHH 3HeprHH, BbI,n:eJIHeMaH

Ha

B036y)!{,n:eHHe

JIH60

cBo6o,n:Horo

3JIeKTpOHa

B

Eg , 30He

npoBo,n:HMOCTH, JIH60 ,n:bIpKH B BaJIeHTHOH 30He. CXeMaTHqHO 3TOT npouecc nOKa3aH Ha pHC.

2.6,6.

B036y)!{,n:eHHbIe HOCHTeJIH nOCTeneHHO TepHIOT

CBOIO 3HeprHIO npH CTOJIKHOBeHHH C aTOMaMH peIIIeTKH: BbI,n:eJIHH npH 3TO~

500

400

,[(lllfHa BOJIHbI

600

700

A, HM

30HbI (npOBo,n:HMOCTH HJIH BaJIeHTHoH). CKOPOCTb O)!{e-peKOM6HHaUHH onpe,n:eJI5.leTCH CJIe,n:yIOIIJ.HMH COOTHOIIIe-

PHc.2.8. CneKTpbI OTOJIIOMHHeC~eH~HH B GaN: nepBbIH nHK - MeJK30HHble onTHQeCKHe nepexo.QbI Ha .QJIHHe BOJIHbI 365 HM, BTOPOH nHK - nepexo.QbI Qepe3 fJIy60KHe npHMecHble ~eHTPbl Ha .QJIHHaX BOJIH OKOJIO 550 HM (Grieshaber, 1996)

, ,n:HTb OqeHb Tpy,n:HO. O,n:HaKo Ha npaKTHKe ,n:e

npocmpalicmBelilibte aecpeKmbt. K

HHM TaK)!{e

OTHOC5.lTC5.I npOT5.I)!{eHHbIe ,n:HCJIOKaUHH H ,n:HCJIOKaUHH HeCOOTBeTCTBH5.I, no5.lBJI5.lIOIIJ.HeCH npH BbIpalIJ.HBaHHH nOJIynpoBo,n:HHKOB Ha no,n:O)!{KaX, nOCT05.lH-

HH5.lMH:

(2.32)

Ro1Ke = Cp • n . p2, Ro1Ke = Cn . n 2 • p.

(2.33)

CKOPOCTb O)!{e-peKOM6HHaUHH nponopUHOHaJIbHa KBa,n:paTY KOHueHTpaUHH HOCHTeJIeH (3JIeKTpOHOB HJIH ,n:b1POK), nOCKOJIbKY B HeH yqaCTBYIOT napbI HOCHTeJIeH o,n:Horo THna (,n:Ba 3JIeKTpOHa HJIH ,n:Be ,n:bIpKH). 113-3a H36bITKa ,n:bIPOK B nOJIynpOBo,n:HHKax

p-THna O)!{e-peKOM6HHaUHH qalIJ.e npOTeKa-

Hble peIIIeTKH KOTOPbIX OTJIHqaIOTCH OT nOCT05.lHHbIX peIIIeTKH 3nHTaKCHaJIb-

eT no MexaHH3MY, onHcaHHOMY ypaBHeHHeM

HbIX CJIOeB. CYlIJ.eCTByeT MHO)!{eCTBO ,n:pyrHx npOCTpaHCTBeHHbIX ,n:e
n-THna ,n:JI5.I O)!{e-peKOM6HHaUHH cnpaBe,n:JIHBO Bblpa)!{eHHe

2.7

(2.32).

B

nOJIynpoBo,n:HHKax

(2.33).

nOKa3aH MHKPOCHHMOK KaTo,n:OJIIOMHHeCueHUHH CJIOH GaAs,

B xo,n:e O)!{e-peKOM6HHaUHH ,n:OJI)!{HbI BblilOJIHHTbC5.I 3aKOHbI coxpaHeHH~

nOJIyqeHHbrH npH KOMHaTHOH TeMnepaType, ,n:JIH HJIJIIOCTpaUHH TOro, 'ITO

3HeprHH H HMnyJIbca. BCJIe,n:cTBHe pa3JIHqHH B CTpYKTypax BaJIeHTHOH

TaKHe ,n:e
30HbI H 30HbI npoBo,n:HMOCTH K03
HecueHUHH. BH,n:HO HeCKOJIbKO TeMHbIX n5.lTeH, n05.lBJIeHHe KOTOPbIX CB5.l3aHO

Ha pHC.

Cp

H

Cn

B nOJIynpoBo,n:HHKax

C 3aTyxaHHeM JIIOMHHeCueHUHH B OKpecTHOCTH ,n:e
06bIqHO HMeIOT pa3HbIe 3HaqeHH5.I. OpH BbICOKOMypoBHe B036y)!{,n:eHHH HepaBHoBecHble KOHueHTpaUHH HO-

KaHaJIOB 6e3bI3JIyqaTeJIbHOH peKOM6HHaUHH. Pa3Mep 3THX nHTeH 3aBHCHT

CHTeJIeH HaMHoro IIpeBbIIIIaIOT paBHoBecHbIe 3HaqeHH5.I, n03TOMY ypaBHeHHe

OT pa3MepOB ,n:e
CKOPOCTH O)!{e-peKOM6HHaUHH MO)!{HO ynpocTHTb ,n:o BH,n:a

HeCMOTp5.1 Ha TO, 'ITO 60JIbIIIHHCTBO nepexo,n:OB qepe3 rJIy60KHe npH-

Ro1Ke = (Cn + Cp )

MeCHbIe ueHTpbl OTHOCHTC5.I K 6e3bI3JIyqaTeJIbHbIM, HeKOTopbIe H3 HHX Bce )!{e 5.lBJI5.lIOTC5.I H3JIyqaTeJIbHbIMH. Ha pHC.

2.8

nOKa3aH npHMep H3JIyqa-

TeJIbHOH peKoM6HHaUHH qepe3 npHMeCHbIe ueHTpbl

1996).

B GaN

(Grieshaber,

Ope,n:cTaBJIeHbI cneKTpbl JIIOMHHeCueHUHH Me)!{30HHblX nepexo,n:OB Ha

,n:JIHHe BOJIHbI

365

HM H nepexo,n:oB qepe3 rJIy60KHe npHMeCHbIe ypOBeHH

r,n:e

C - KoacpcpUI1Uelim O:J/Ce.

•n

3

= C· n 3 ,

(2.34)

QHCJIeHHble 3HaqeHHH K03
C

Moryr 6bITb Haii,n:eHbI H3 ypaBHeHHii KBaHToBoii MexaHHKH, yqHTbIBaIOIIJ.HX 30HHYIO CTpyKTyPY nOJIywoBo,n:HHKa (Agrawal, DuUa, npoBo,n:HHKOB THna AIIIB

1986).

)lJIH nOJIy-

3HaqeHHH K03
npHMeCHbIe ueHTpbl COOTBeTcTByeT )!{eJITOH 06JIaCTH BH,n:HMoro cneKTpa,

B npe,n:eJIax 1O-28_1O-29 cM 6jc (Olshansky, 1984; Agrawal, Dutta, 1986). B nOJIynpoBo,n:HHKaXOR<e-peKOM6HHaUHH CHH)!{aeT HHTeHCHBHOCTb JIIO-

'ITO 06b5.lCHHeTC5.I BaKaHCHHMH aTOMOB raJIJIH5.I -

HaH60JIee pacnpOCTpaHeH-

MHHecueHUHH TOJIbKO npH OqeHb BbICOKOM ypOBHe B036y)!{,n:eHH5.I u HJIH IIpH

HbIMH TOqeqHbIMH ,n:e
OqeHb 60JIbIIIOii HH)!{eKUHH 3JIeKTpOHOB, 'ITO CBH3aHO C Ky6HqeCKOH 3aBHCH-

1996;

MOCTbIO CKOPOCTH peKOM6HHaUHH OT KOHueHTpaUHH HOCHTeJIeii

B ,n:Hana30He ,n:JIHH BOJIH OKOJIO

Schubert,

1997;

550

Saarinen,

HM. I-f3JIyqeHHe npH nepexo,n:ax qepe3

1997).

(2.34).

OPH

64

2.7. Be3bt3JtY'lameJtbltaR. peICoM6U1-taI1UR. Ita n08epXltOCmu noJtynpoBoaltulCa 65

HH3KHX KOHueHTpaUHHX HOCHTeJIeH CKOPOCTh O)Ke-peKOM6HHaUHH OqeHh MaJIa, rr03TOMY B 60JIhIlIHHCTBe rrpaKTHqeCKHX CJIyqaeB eIO MO)KHO rrpeHe6pe1Jh.

r)J,e

In

-

rrJIOTHOCTh TOKa, orrpe)J,eJIHeMaH rrOTOKOM 3JIeKTpOHoB Ha rroBepx-

HOCTH rrOJIyrrpOBO)J,HHKa. B CTaUHOHapHhIX YCJIOBHHX B rJIy6HHe O)J,HOPO)J,-

(2.14),

Bhlpa)KeHHe

2.7.

G = R.

I1crrOJIh3YH

orrpe)J,eJIHIOIll.ee CKOPOCTh peKoM6HHa~HH

B 06beMe,

HOro rrOJIyrrpOBO)J,HHKa 3TO ypaBHeHHe CBO)J,HTCH K BH)J,y

Be3bI3JIYQaTeJIbHaH peKoM6HHan;HSI Ha nOBepxHocTH nOJIynpOBO,lJ;HHKa

Oe3hI3JIyqaTeJIhHaH

peKoM6HHaUHH

MO)KeT

HaH)J,eM 06beMHYIO KOHueHTpaUHIO H36hlTOqHhIX HOCHTeJIeH rroKa3aHHYIO Ha pHC.

2.9.

D.n(X) = GTn,

I1pe)J,rrOJIaraeM, 'ITO TOK 3JIeKTpOHOB )J,HCPCPY3HOH-

HhIH, T. e. )J,JIH Hero crrpaBe)J,JIHBO Bhlpa)KeHHe rrpOHCXO)J,HTh

He

- D a!ln(x, t) J n-en ax·

TOJIhKO

B 06beMe, HO H Ha rrOBepXHOCTH rrOJIyrrpOBO)J,HHKOB, TaK KaK HMeHHO 3)J,eCh qaCTO HapYiliaeTCH rrepHO)J,HqHOCTh KpHCTaJIJIHqeCKOH peIlIeTKH. MO)J,eJIh 3HepreTHqeCKHX 30H OCHOBhIBaeTCH Ha CTporOM C06JIIO)J,eHHH rrepHO)J,HqHOCTH peIlIeTKH. I10CKOJIhKY Ha rrOBepXHOCTH rrepHO)J,HqHOCTh 3aKaHqHBaeTCH,

Tor)J,a, rrO)J,CTaBHB 3TO Bhlpa)KeHHe B ypaBHeHHe

(2.35),

rrOJIyqHM ypaBHeHHe

HerrpephIBHoCTH )J,JIH )J,HCPCPY3HoHHoro TOKa:

)J,JIH rrOBepXHOCTeH 3Ty MO)J,eJIh He06xo)J,HMO MO)J,HCPHUHpOBaTh, )J,06aBHB

a!ln(x, t) = G _ !In(x, t) at Tn

)J,orrOJIHHTeJIhHhle 3JIeKTpOHHhle ypOBHH B 3arrpeIll.eHHOH 30He rrOJIyrrpOBO)J,HHKa. Terreph paCCMOTpHM rrOBepXHOCTh rrOJIyrrpOBO)J,HHKa C XHMHqeCKOH TOq-

(2.36)

+ Dn 0 2 !In(x, t) I n .

(2.37)

aX2

Ha rrOBepXHOCTH rrOJIyrrpOBO)J,HHKa H3-3a CYIll.eCTBOBaHHH )J,OrrOJIHHTeJIhHhIX

KH 3peHHH. ATOMhI, pacrrOJIO)KeHHhle Ha rrOBepXHOCTH, H3-3a OTCYTCTBHH CO-

3HepreTHqeCKHX ypOBHeH Ha6JIIO)J,aeTCH BhICOKaH CKOPOCTh peKOM6HHaUHH.

ce)J,HHX aTOMOB He MoryT HMeTh TaKYIO )Ke CTpyKTypy CBH3eH, KaK aTOMhI B

I103TOMY )J,JIH rrOBepXHOCTH CrrpaBe)J,JIHBO CJIe)J,YIOIll.ee 2paHUti1iOe YCJl08Ue:

I

rJIy6HHe rrOJIyrrpOBO)J,HHKa, H qaCTh HX BaJIeHTHhIX CBH3eH OCTaeTCH CB060)J,060p8aHHblMU (c806o8HblMU) C8fl3flMU. 3TH CBH3H HBJIHIOTCH 3JIeKTpOHHhIMH ypOBHHMH, pacrrOJIO)KeHHhIMH B 3arrpeIll.eHHOH 30He rrOJIyrrpOBO)J,HHKa, KOTophle MoryT HrpaTh POJIh ueHTpOB peKOM6HHaUHH. B 3aBHCHMOCTH OT 3HaKa 3apH)J,a 3TH

Op6HTaJIH

MorYT 6hITh

ypOBHHMH-aKueIITOpaMH HJIH

ypOBHHMH-)J,OHopaMH.

I,

eDn a!ln(X, t) = eSD.n(x, t) ax x=o x=o

HOH. Op6HTaJIH, He rrOJIHOCThIO 3arrOJIHeHHhle 3JIeKTpOHaMH, Ha3hIBaIOTCH

r)J,e

S-

(2.38)

CKOPOCTh rroBepxHocTHOH peKOM6HHaUHH. 113 3Toro YCJIOBHH CJIe-

)J,yeT, 'ITO HeOCHOBHhle HOCHTeJIH, )J,HCPCPYH)J,HpYIOIll.He K rrOBepXHOCTH, Ha HeH )Ke H peKOM6HHHPYIOT. CqHTaH, 'ITO CKOPOCTh reHepaUHH rrOCTOHHHa BO BpeMeHH, HaXO)J,HM, 'ITO KOHueHTpaUHH HeOCHOBHhIX HOCHTeJIeH TaK)Ke

CB060)J,Hhle CBH3H MoryT 3aMhIKaThCH O)J,Ha Ha )J,pyryIO, CPOPMHPYH XHMHqeCKHe CBH3H Me)K)J,y coce)J,HHMH aTOMaMH, pacrrOJIO)KeHHhIMH Ha rrOBepxHOCTH rrOJIyrrpOBO)J,HHKa. TaKaH nepecmpOUKa n08epXHocmu Be)J,eT K C03)J,a-

He 3aBHCHT OT BpeMeHH. PeIlIeHHe CTaUHOHapHoro )J,HcpcpepeHUHaJIhHOrO ypaBHeHHH C BhIIlIerrpHBe)J,eHHhIM rpaHHqHhIM YCJIOBHeM HMeeT BH)J,

HHIO HOBOH JlOKaJlbHOU aTOMHOH CTpyKTyphI C 3HepreTHqeCKHMH ypOBHHMH,

n(x) = no

CHJIhHO OTJIHqaIOIll.HMHCH OT COCTOHHHH B rJIy6HHe. I1pe)J,CKa3aTh pacrroJIO)KeHHe 3HepreTHqeCKHX ypOBHeH rrOBepXHOCTHhlX CTpyKTyp )J,a)Ke rrpH HCrrOJIh30BaHHH MOIll.HhIX TeOpeTHqeCKHX MO)J,eJIeH OqeHh TPY)J,HO. I103TOMY qaIll.e Bcero rrpHMeHHIOTCH cpeHOMeHOJIOrHqeCKHe MO)J,eJIH rrOBepXHOCTHOH peKOM6HHaUHH. oap)J,HH H illOKJIH ,(Shockley,

1950)

rrepBhIMH )J,ora)J,aJIHCh 0 rrOHBJIeHHH

HOBhIX 3HepreTHqeCKHX ypoBHeH B rrOBepXHOCTHhIX cTpyKTypax H 06 HX POJIH KaK ueHTpoB peKoM6HHaUHH. OueHHM BJIHHHHe rroBepxHocTHOH peKoM6HHaUHH Ha pacrrpe)J,eJIeHHe HOCHTeJIeH B rrOJIyrrpoBo)J,HHKe p-THrra, rro)J,BeprilieMcH B03)J,eHcTBHIO 06JIyqeHHH. I1pe)J,rrOJIO)KHM, 'ITO BO BpeMH 06JIyqeHHH CKOPOCTh reHepaUHH

G

B JII060H TOqKe rrOJIyrrpOBO)J,HHKa O)J,HHaKOBaH. Tor)J,a )J,OJI)KHO BhIIIOJIHHThCH ypaBHeHHe HerrpephIBHOCTH, KOTopoe B O)J,HOMepHOM rrpe)J,CTaBJIeHHH )J,JIH 3JIeKTpOHOB HMeeT CJIe)J,YIOIll.HH BH)J,:

Ha pHC.

2.9

+ D.n(x) =

no

+ D.n(X)

[1 -

TnSexp(-x/Ln)] Ln + TnS .

(2.39)

rrOKa3aHhI KOHueHTpaUHH HOCHTeJIeH B6JIH3H rroBepxHocTH rro-

JIyrrpOBO)J,HHKa rrpH pa3HhIX CKOPOCTHX peKoM6HHaUHH. I1pH

S

---t

0 KOHueH-

TpaUHH HeOCHOBHhlX HOCHTeJIeH Ha rrOBepXHOCTH paBHa HX KOHueHTpaUHH B 06beMe, T. e.

n(O)

---t

no + D.n(X). I1pHS

---t 00 KOHueHTpaUHH HeOCHOBHhIX

HOCHTeJIeH Ha rrOBepXHOCTH rrpH6JIH)KaeTCH K paBHOBeCHOMY COCTOHHHIO,

T.

e. n(O)

---t

no.

I1oBepxHOCTHaH peKOM6HHaUHH Be)J,eT K CHH)KeHHIO KBaHTOBoro BhIXO)J,a JIIOMHHeCueHUHH H K HarpeBY rrOBepXHOCTH BCJIe)J,CTBHe aKTOB 6e3hI3JIyqaTeJIhHOH peKOM6HHaUHH Ha HeH. B

H3JIyqaIOIll.HX YCTpOHCTBax 06a 3TH X

rrOCJIe)J,CTBHH HBJIHIOTCH He)KeJIaTeJIhHhIMH. B Ta6JI. o

2.1

rrpHBe)J,eHhI )J,aHHhle

CKOPOCTHX peKoM6HHaUHH )J,JIH HeCKOJIhKHX THrrOB rrOJIyrrpOBO)J,HHKOB.

BH)J,HO, 'ITO oc06eHHO BhICOKOH CKOPOCThIO rrOBepXHOCTHOH peKOM6HHaUHH 06JIa)J,aeT GaAs.

a!ln(x, t) at

= G - R + !~J

e ax n,

(2.35)

Ha pHC.

2.10

rrOKa3aH MHKPOCHHMOK KpHCTaJIJIa GaAs C rrOJIOC~OBhIM

MeTaJIJIHqeCKHM KOHTaKTOM )J,JIH HH)KeKUHH TOKa, HJIJIIOCTPHPYIOIll.HH 3KC-

3 <1>. E. IIIy6epT

2.8. KOI'IKypeftI1UJl u3JtY'lameJtbftOU U 6e3bt3JtY'lameJtbftOU peKOM6uftal1ueu

66

67

KOHTaKT Ha nO,ll.lIO)l(J(e

I. nOJIOCKOBLIH KOHTaKT

Ec

6 '.

'

KOHTaKT

Ev

!

,is:

6

PHc.2.10. MHKPOCHHMOK B peJKHMe HHJKeKUHH TOKa CTpyKTYPbI InGaAs/GaAs, Ha BepxHIOIO 'IaCTb KOTOPOH HaHeceH rrOJIOCKOBbIH KOHTaKT, a Ha HHJKHIOIO 'IaCTb co CTOPOHbI rro,n:JIOJKKH -

~

n=no+Don(x)

I~ ""L----~HU:

::::

'ITO 6JIaro,n:apll rrOBepXHOCTHOH peKOM6HHaUHH rrpH rrpH6JIHJKeHHH K rrOBepXHOCTH JIIOMHHeCueHUHll OCJIa6JIlleTCll

Dono = GTn

tl , r.:: __n 9_______________________

BLICOKlUIL CKOPOCTh nOBepXHOCTHOH

3KlUIJ peKOMfiHHarum: g __________________________________________

HMTb, 'ITO aKTMBHaH 06naCTb,B KOTopoHcyruecTBYIOT o6a TMrra HOCMTeneH, ,n:onJKHa pacrronaraTbCH Ha 3HattUmeJlbHOM paccmORHUU' om Jl1060U no-

. 6epXHocmu. 3Toro MOJKHO ,n:06MTbCH MHJKeKIl,MeH HocMTeneH rro,n: KOHTaKT,

bO

.Q

x=O

x

PHC. 2.9. ITOJIynpoBo,n:HHK p-nma, rro,n:BeprnIHHcll Bos,n:elkTBHIO CBeTa

(6).

(a).

30HHall

KOHIJ;eHTpaUHH OCHOBHblX H HeOCHOBHblX HOCHTeJIeH B6JIHSH rro-

BepXHOCTH rrOJIyrrpOBo,n:HHKa (8). ITpe,n:rrOJIaraeTCll, 'ITO B peSYJIbTaTe Bos6YJK,n:eHHll CKOPOCTb reHepaUHH HOCHTeJIeH 6bIJIa o,n:HHaKOBOH B JII060H TO'lKe MaTepHaJIa. KOHueHTpaUHH Hs6bITO'lHbIX HOCHTeJIeH 060SHa'leHbI KaK

T a 6 JI H U a

eme O,n:HH KOHTaKT. JIIOMHHecueHUHll rrpoTeKaeT B aK-

THBHOM CJIoe, pacrrOJIOJKeHHOM rro,n: rrOJIOCKOBbIM KOHTaKTOM. OT'IeTJIHBO BH,n:HO,

is:

,n:HarpaMMa

Ha nO,ll.lIO)l(J(e

Don, Dop

rrnorua,n:b KOToporo HaMHoro MeHbilie rrnorua,n:M KpMcTanna rronyrrpoBo,n:HMKa. KpoMe Toro, 9TOT KOHTaKT cne,n:yeT pa3MeruaTb Ha 3Ha'lMTenbHOM paccToHHMM OT 60KOBbIX rrOBepXHocTeH KpMcTanna. EcnM TOK 6y,n:eT BTeKaTb B 06naCTb, pacrrOnOJKeHHYIO rro,n: KOHTaKToM, HOCMTenM He 6y,n:YT «BM,n:eTb» rrOBepXHOCTeH rronyrrpOBo,n:HMKa. 3,n:ecb Ha,n:o OTMeTMTb, 'ITO B MOHorronHpHbiX 06naCTHX rronyrrpOBo,n:HMKOBbIX YCTPOHCTB M3-3a HeXBaTKM HeOCHOBHbIX HOCMTeneH rrOBepXHOCTHaH peKOM6MHaIl,MH rrpaKTM'IeCKM OTCYTCTByeT. .llnH CHMJKeHMH rrOBepXHOCTHOH peKOM6MHaIl,MM pa3pa6oTaHO HeCKonbKO

2.1. CKOPOCTH peKoM6HHaUHH Ha rrOBepXHOCTH HeKOTopbIX rroJIyrrpo-

MeTo,n:OB rraCCMBMpOBaHMH, BKnIO'IaIOruMX o6pa6oTKY rrOBepXHOCTeH cepOH

BO,n:HHKOB

MnM ,n:pyrMMM XMMM'IeCKMMM peareHTaMM (Lipsanen, ITOJIyrrpOBo,n:HHK

CKOPOCTb rroBepxHocTHOH peKoM6HHaUHH, CM/C

GaAs

106

InP

103

Si

10

2.8.

6MHaIl,MM. ,JIIOMMHeCIl,eHIl,MH Ha6nIO,n:aeTCH co CTOPOHbI rro,n:nOJKKM, a KOHTaKT pacrronaraeTCH C3a,n:M M3nY'laIOrueH 06naCTM. OT'IeTnMBO BM,n:HO, 'ITO B 06naCTM PH,n:OM C rrOBepxHOCTbIO nIOMMHeCIl,eHIl,MH ocna6nHeTCH. nOBepXHOCTHaH peKOM6MHaIl,MH MOJKeT rrpOMcxo,n:MTb TonbKO rrpM HanM'IMM HOCMTeneH 060MX TMrrOB. npM pa3pa6oTKe CBeTo,n:Mo,n:OB BaJKHO rrOM-

KOHKypeHD:H.SI Me1K)l.y H3JIyqaTeJIbHOii

H 6e3bI3JIyqaTeJIbHOii peKoM6HHau:Heii

B rrepMMeHTanbHoe ,n:OKa3aTenbCTBO cyrueCTBOBaHMH rrOBepXHOCTHOH peKOM-

1999).

rrpe,n:bI,n:yruMX pa3,n:enax 6blno paCCMOTpeHO HeCKonbKO MexaHM3MOB

6e3bI3nY'laTenbHoH peKOM6MHaIl,MM:

lIIoKnM-PM,n:a, OJKe- M rrOBepXHOCT-

HblH. ne3bI3nY'laTenbHYIO peKOM6MHaIl,MIO MOJKHO TonbKO YMeHbIlIMTb, HO YCTpaHMTb rronHOCTbIO HeB03MOJKHO. HarrpMMep, rrOBepXHOCTHYIO peKoM6MHaIl,MIO MOJKHO 3Ha'lMTenbHO CHM3MTb, rrpOCTpaHCTBeHHO OT,n:enHH aKTMBHYIO o6nacTb M3nY'leHMH OT nI06bIX rroBepxHocTeH. O,n:HaKO ,n:aJKe rrpM O'leHb 60nbIlIMX paCCTOHHMHX MeJK,n:y ,noH o6nacTbIO M 6nMJKaHIlIeii: rroBepxHo-

3*

68

D1-. 2. HaltyttameltbHaR u 6eabtaltyttameltbHaR peICoM6uHau,uR

CTbIO HeKoTopble HOCHTeJHI 3a CqeT .lI.Hq)(PY3HH Bce )Ke .lI.06epYTcH .lI.O noBepxHocTH H TaM peKOM6HHHPYIOT.

r

2.8. Bu6ltuoepaf/JUtteCKuU cnUCOK B XO.ll.e

6e3bl3JIyqaTeJIbHOH

peKoM6HHaIIHH.

KaK H OT nOBepXHOCTHOH peKOM6HHaIIHH, OT 6e3bI3JIyqaTeJIbHOH peHOCTbIO H36aBHTbCH. B JII060M nOJIynpOBO.ll.HHKOBOM KpHCTaJIJIe HMeIOTCH eCTeCTBeHHble .lI.ecpeKTbI. )J.a)Ke eCJIH HX OqeHb MaJIO, HX KOHIIeHTpaIIHH Bce-TaKH He paBHa HYJIIO. 113 TepMO.ll.HHaMH'-iecKHx paCqeTOB CJIe.ll.yeT, qTO nOCKOJIbKY .lI.JIH C03.l1.aHHH B KpHCTaJIJIHqeCKOH: peIIIeTKe TOqeqHOrO .lI.ecpeKTa

Ea ,

Tor.ll.a nOJIHaH BepoHTHoCTb

peKoM6HHaIIHH .lI.ByX THnOB onpe.ll.eJIHeTCH CYMMOH 9THX BepoHTHOCTeH::

KOM6HHaIIHH B o6beMe H O)Ke-pe,KOM6HHaIIHH HHKOr.ll.a He Y.lI.aeTCH nOJI-

Tpe6yeTcH 3aTpaTHTb 9HeprHIO

69

BepOHTHOCTb 9Toro Ha KOHKpeTHOM Y3JIe

T

-1

=

-1

Tr

+ T nr -1 •

(2.40)

OTHOCHTeJIbHYIO BepOHTHOCTb H3JIyqaTeJIbHOH: peKOM6HHaIIHH MO)KHO HaH:TH KaK OTHOIIIeHHe BepOHTHOCTH H3JIyqaTeJIbHOH: peKOM6HHaIIHH K CYMMapHOH BepOHTHOCTH. TaKHM 06pa30M, BepOHTHOCTb H3JIyqaTeJIbHOH: peKOM6HHaIIHH HJIH 8ftympeftftUU K8aftm08blU 8blXOO U3J1.YlI.eftUll onpe.ll.eJIHeTCH

peIIIeTKH onpe.ll.eJIHeTCH nOCTOHHHOH: DOJIbIIMaHa: exp ( - Ea/kT). npOH3Be-

(2.41)

.lI.eHHe KOHIIeHTpaIIHH Y3JIOB peIIIeTKH Ha 9Ty nOCTOHHHYIO paBHO KOHIIeHTpaIIHH .lI.ecpeKTOB. Co6CTBeHHble TOqeqHble .lI.ecpeKTbI, a TaK)Ke JII06ble npoCTpaHCTseHHble .lI.ecpeKTbI, MorYT npHBO.ll.HTb K C03.l1.aHHIO rJIy60KHX YPOBHeH:

BHYTpeHHHH KBaHTOBblH BblXO.ll. paBeH OTHOIIIeHHIO qHCJIa CPOTOHOB, Hcnyc-

B 3anpelIleHHOH: 30He H, 3HaqHT, HBJIHTbCH IIeHTpaMH 6e3bI3JIyqaTeJIbHOH

KaeMblX BHyTpH nOJIynpOBO.ll.HHKOBOro MaTepHaJIa, K qHCJIY 9JIeKTpOHHO-

peKOM6HHaIIHH.

.lI.blPOqHbIX nap, yqaCTBYIOlIlHX B aKTax peKOM6HHaIIHH.

YnpalKHeHHe. OnpeaeJteHue ICoHu,eHmpau,uu mOttettHbtX aef/JeICmo8 Ct:llnaeM, qTO ,nJIlI BHe,npeHHlI nocTopoHHero aToMa B KpHCTaJIJIHqecKYIO pellIeTKy Tpe6yeTcH 3aTpaTHTb 3HeprHIO Ea = 1,1 38. Onpe,neJIHTe paBHoBecHYIO KOHueHTpaUHIO BHe,npeHHblX ,neIPeKTOB B npoCToH Ky6HqeCKOH pellIeTKe C nOCToHHHOH ao = 2,5 A. PemeHHe: KOHueHTpaUHlI aTOMOB, pacnOJIOJKeHHblX B Y3JIaX npocToH Ky6HQeCKOH pellIeTKH, paBHa N = a(j3 = 6,4 x 1022 CM- 3 • B paBHOBeCHOM COCTOlIHHH npH KOMHaTHOH TeMnepaType KOHueHTpaUHH BHe,npeHHblX ,neIPeKTOB onpe,neJIHeTClI BbI-

H3-3a np06JIeM, CBH3aHHbIX C nOrJIOlIleHHeM CBeTa, .lI.aJIeKO He Bce Hcny-

N~erfJ. = N· exp (-Ea/kT) = 2,7 x 104 CM- 3.

OTMeTHM, QTO BblQHCJIeHHaH no 3TOH IPopMyJIe KOHueHTpaUHlI ,neIPeKTOB HaMHoro MeHbllIe THnHQHbIX KOHueHTpaUHH 3JIeKTpOHoB H ,nblPOK. ECJIH ,neIPeKTbI IPOPMHPYIOT B 3anpemeHHOH 30He ,nonOJIHHTeJIbHble ypOBHH, Ha HHX npOHcxo,nlIT aKTbI 6e3bI3JIYQaTeJIbHOH peKOM6HHaUHH. )J.pyroH: np06JIeMOH HBJIHeTCH XHMHqeCKaH qHCTOTa nOJIyrrpOBO.ll.HHKOB. OqeHb TPY.ll.HO BblpaCTHTb MaTepHaJIbI, CO.ll.ep)KaHHe npHMeCeH: B KOTOPbIX 6blJIO 6bl

MeHbIIIe HeCKOJIbKHX aTOMOB Ha

MHJIJIHa~.lI.. )J.a)Ke y

qHCTblX nOJIyrrpOBO.ll.HHKOB B 1 CM 3 CO.ll.ep)KHTCH 10

1

caMblX

aTOMOB rrpHMeCeH:,

qaCTb H3 KOTOPblX o6pa3yeT rJIy60KHe 9HepreTHqeCKHe ypOBHH, CHH)KaIOlIlHe HHTeHCHBHOCTb JIIOMHHeCIIeHIIHH. B

KOHIIe 1950-x rr., KOr.ll.a 6blJIH BnepBble rrpO.ll.eMOHCTpHpoBaHbl no-

JIynpOBO.ll.HHKH rpynnbl

AHIBv,

BHYTpeHHHH KBaHTOBblH: BblXO.ll. JIIOMHHeC-

IIeHIIHH, Ha6JIIO.lI.aeMOH: rrpH KOMHaTHOH TeMnepaType, 6blJI OqeHb HH3KHH .lI.OJIH npOIIeHTa. B HaCTOHlIlee BpeMH BHYTpeHHHH: KBaHTOBblH: BblXO.ll. KaqeCTBeHHblX 06beMHblX nOJIynpOBO.ll.HHKOB H CTpyKTyp C KBaHTOBblMH HMaMH qaCTO npeBblIIIaeT 90

%,

a HHOr.ll.a .lI.OCTHraeT 99

%.

TaKOH: nporpecc CTaJI

B03MO)KHbIM 6JIarO.ll.apH YJIyqIIIeHHIO KaqeCTBa KpHCTaJIJIOB H YMeHbIIIeHHIO B HHX KOHIIeHTpaIIHH: .lI.ecpeKTQB H npHMeceH. nepeH.lI.eM K OIIeHKe BHYTpeHHero KBaHTOBoro BblXO.ll.a rrOJIynpOBO.ll.HHKOB C IIeHTpaMH 6e3bl3JIyqaTeJIbHOH: peKoM6HHaIIHH. 0603HaqHM T r H3JIyqaTeJIbHOe BpeMH )KH3HH HOCHTeJIeH: H Tnr -

BpeMH )KH3HH HOCHTeJIeH:

OTMeTHM, qTO

lIleHHble CPOTOHbl nOKH.lI.aIOT npe.ll.eJIbl nOJIynpOBO.ll.HHKa.

Agrawal G. P. and Dutta N. K. Long Wavelength Semiconductor Lasers (John Wiley and Sons, New York, 1986). Ahrenkiel R. K. "Minority-carrier lifetime in III-V semiconductors" in Minority Carriers in //l- V Semiconductors: Physics and Applications edited by R. K. Ahrenkiel and M. S. Lundstrom, Semiconductors and Semi metals 39, 40 (Academic Press, San Diego, 1993). Aleksiejunas R., Sudzius M., Malinauskas T., Vaitkus J., Jarasiunas K. and Sakai S. "Determination of free carrier bipolar diffusion coefficient and surface recombination velocity of undoped GaN epilayers" Appl. Phys. Lett. 83, 1157 (2003). Baraff G. A. and Schluter M. "Electronic structure, total energies, and abundances . of the elementary point defects in GaAs" Phys. Rev. Lett. 55, 1327 (1985). Ehrhardt A., Wettling W., and Bett A. "Transient photoluminescence decay study of minority carrier lifetime in GaAs heteroface solar cell structures" Appl. Phys. A (Solids and Surfaces) A53, 123 (1991). Grieshaber W., Schubert E. F., Goepfert I. D., Karlicek R. F. Jr., Schurman M. J. and Tran C. "Competition between band gap and yellow luminescence in GaN and its relevance for optoelectronic devices" l. Appl. Phys. 80, 4615 (1996) . Hall R. N. "Electron-hole recombination in germanium" Phys. Rev. 87, 387 (1952). Hwang C. J. "Doping dependence of hole lifetime in n-type GaAs" l. Appl. Phys. 42, 4408 (1971). Lipsanen H., Sopanen M., Ahopelto J., Sandman J., and Feldmann J. "Effect of InP passivation on carrier recombination in InxGal-xAs/GaAs surface quantum wells" lpn. l. Appl. Phys. 38, 1133 (1999).

70

FA. 2. H3AyttameAbiiaR u 6e3bl3AyttameAbiiaR peKoM6uHau,uR

r

Longini R. L. and Greene R. F. "Ionization interaction between impurities in semiconductors and insulators" Phys. Rev. 102, 992 (1956). Nelson R. J. and Sobers R. G. "Interfacial recombination velocity in GaAIAs/GaAs heterostructures" Appl. Phys. Lett. 32, 761 (1978a).

II II

Nelson R. J. and Sobers R. G. "Minority-carrier lifetime and internal quantum efficiency of surface-free GaAs" Appl. Phys. Lett. 49, 6103 (1978b). Neugebauer J. and Van de Walle C. "Gallium va~ancies and the yellow luminescence in GaN" Appl. Phys. Lett. 69, 503 (1996). Olshansky R., Su C. B., Manning J., and Powazinik W. "Measurement of radiative and non-radiative recombination rates in InGaAsP and AIGaAs light sources" IEEE 1. Quantum Electronics QE-20, 838 (1984). Pantelides S. T. (Editor) Deep Centers in Semiconductors (Gordon and Breach, Yverdon, Switzerland, 1992).

r JIaBa

3

MO,nEJIH H3JIYQATEJIbHOH PEKOMBHHAII.HH

B

3TOH rJIaBe paCCMaTpHBaIDTClI MO.ll.eJIH H3JIyqaTeJIbHOH peKoM6HHa-

UHH. nepBoH 6Y.ll.eT onHcaHa .lI.OCTaTOqHO TOqHall TeOpeTHqeCKall MO.ll.eJIb, OCHOBaHHall Ha ypaBHeHHlIX KBaHTOBOH MexaHHKH. BTopall paCCMaTpHBaeMall MO.ll.eJIb

6bwa

pa3pa6oTaHa BaH POC6pYKOM H illOKJIH (Van Roos-

Phillips J. C. "Stretched exponential relaxation in molecular and electronic glasses" Rep. Prog. Phys. 59, 1133 (1996). ..

broeck, Shockley,

Saarinen K. et al. "Observation of native Ga vacancies in GaN by positron annihilation" Phys. Rev. Lett. 79, 3030 (1997).

.lI.bIPOqHbIX nap HaXO.ll.lITClI B onpe.ll.eJIeHHOM paBHoBecHH. B

Schubert E. F. Doping in 1I/- V Semiconductors (Cambridge University Press, Cambridge UK, 1993).

HaUHH paccMaTpHBaeTclI C TOqKH 3peHHlI CIIOHTaHHblX H BbIHY)K.lI.eHHbIX

Schubert E. F., unpublished (1995)

HlIMH.

1954).

B OCHOBe 3TOH IIOJIYKJIaCCHqeCKOH MO.ll.eJIH JIe:amT

npe.ll.IIOJIO)KeHHe, qTO IIpoueccbI reHepauHH H peKoM6HHauHH 3JIeKTpOHHOKOHue maBbI

6Y.ll.eT IIpe.ll.CTaBJIeHa MO.ll.eJIb 3HHIIITeHHa, B KOTOPOH MexaHH3M peKoM6H(HH.lI.yuHpoBaHHblx) nepeXO.ll.OB B aTOMe C .lI.ByMlI 3HepreTHqeCKHMH ypOB-

Schubert E. F., Goepfert I., and Redwing J. M. "Evidence of compensating centers as origin of yellow luminescence in GaN" Appl. Phys. Lett. 71, 3224 (1997). Shockley W. Electrons and Holes in Semiconductors (D. Van Nostrand Company, New York, 1950). Shockley W. and Read W. T. "Statistics of the recombinations of holes and electrons" Phys. Rev. 87, 835 (1952). Tu L. W., Kuo W. C., Lee K. H., Tsao P. H., and Lai C. M., Chu A. K., and Sheu J. K. "High-dielectric-constant Ta205/n-GaN metal-oxide-semiconductor structure" Appl. Phys. Lett. 77, 3788 (2000).

,lI;onOJlHeHHe pe.ll.aKTOpa 1. BOHQ-BpyeBHq B. JI., KaJIalllHHKOB C. r.
3.1.

KBaHTOBO-MeXaHH1:IeCKaH MO,ll;eJIb peKOM6HHau.HH

B KHHrax (Bebb, Williams, Thompson,

1980

1972;

Agrawal, Dutta,

1986;

Dutta, 1993;

et al.) I) MO)KHO HaHTH ypaBHeHHlI KBaHTOBOH MexaHHKH,

nO.ll.P06HO onHCbIBaIDIUHe MexaHH3MbI CIIOHTaHHOH peKoM6HHauHH, KOTOPYID MbI KpaTKO paccMoTpHM. B KBaHTOBOH MexaHHKe HHTeHCHBHOCTb cnOHTaHHOro H3JIyqeHHlI HaX0.ll.lIT no HHTeHCHBHOCTH BbIHY)K.lI.eHHOrO H3JIyqeHHlI, OIIpe.ll.eJIlIeMOrO 30AomblM npa8UAOM K8anm080U MexanUKU, UAU npa8UAOM CPepMu. npaBHJIO epMH onpe.ll.eJIlIeT BepOllTHOCTb IIepeXO.ll.OB B e.ll.HHHUY BpeMeHH (qaCTO Ha3bIBaeMYID CKOPOCTbID nepeXO.ll.OB) H3 COCTOllHHlI

j

B COCTOllHHe m no.ll. .lI.eHCTBHeM B03MYIUeHHlI:

Wj->m me

H:"j -

=

1t la~(t)12 = 2; 'IH:"jI2 . p(E = E j + hwo),

(3.1)

MampUtf,nblU 3AeMenm nepexoaa. B O.ll.HOMepHOM CJIyqae (O.ll.Ha

npOCTpaHCTBeHHall KOOp.ll.HHaTa qaJIbHOe COCTOllHHe

j

x)

3JIeMeHT MaTpHUbI, CB1I3bIBaIDIUHH Ha-

C KOHeqHbIM m, OIIHCbIBaeTClI Bblpa)KeHHeM 00

H:"j =

(7f;?n

·IH'I· 7f;J) =

J 7f;~(x). A(x) . 7f;J(x) dx,

-00

I) CM: KHHrH [1, 2].

(3.2)

72

r

FIt. 3. MoaeJtu u3JtY'lameJtbHou peKoM6uHau,uu

r.n;e

H' -

raMI1JIbTOHl1aH

B03MymeHI1H.

rrpe.n;rroJIaraJIOCb,

qTO

rapMOHl1qeCKI1M,

rro3ToMY

H' =A(x)·

B036Y2K.n;eHl1e,

H'

I1pl1

BbIBo.n;e

I1cxo.n;Hmee

Orrl1CbIBaeTCH

rrpaBI1JIa

OT

<poToHa,

rapMOHl1qeCKOH

[exp(iwot)+exp(-iwot)]. 113 ypaBHeHI1H

(3.2)


HBJIHeTCH
CJIe.n;yeT, qTO

.n;JIH cymecTBoBaHI1H peKOM611HalI.I111 Me2K.n;y 3JIeKTpOHaMI1 11 .n;blpKaMI1 I1X

f

.n;blPOK, rro.n;30HbI JIerKI1X .n;blPOK 11 8-0-rro.n;30HbI). I1HTerpl1pOBaHl1e ypaBHeHI1H

(3.4)

rsp (E)

rrpl1Bo.n;I1T K CJIe.n;YlOmeMY pe3YJIbTaTY:

=

BOJIHOBble
73

3.1. KBaHmOBO-MeXaHU'leCKaR MOaeJtb peKoM6uHau,uu

I

2 •E 2 2 7r·m e ·co·h ·c

2·n·e

31 Mbl 2 (2mr)3/2 -2 VE 1i

5)

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r.n;e

peKOM611HalI.I111 He MorYT.

Ee = (mr/m:) . (E - Eg) , Ee = (mr/m:) . (E - Eg) ,

KBa31111MrrYJIbCbI 3JIeKTpOHOB rrpl1 OrrTI1QeCKI1X rrepexo.n;ax Me2K.n;y 30HOH rrpOBo.n;I1MOCTI1 11 BaJIeHTHOH 30HOH .n;OJI2KHbI OCTaBaTbCH HeI13MeHHbIMI1; 3TO

(3.6) (3.7)

(p = 11, • k). YCJIOBI1H npaBUJLaMU om60pa no

CBH3aHO C OQeHb MaJIOH BeJII1QI1HOH I1MrryJIbCa
BOflHOBOMY BeKmopy k.

,lI.aJIee B 3TOM pa3.n;eJIe MbI 6y.n;eM rrpl1.n;ep2KI1BaTb-

CH ypaBHeHI1H KBaHTOBOH MeXaHI1KI1 B
1986).

11 ,lI.YTTOH (Agrawal, Dutta,

K I1X KHl1re MbI peKOMeH.n;yeM o6pa-

maTbCH .n;JIH rrOJIYQeHI1H 60JIee rro.n;po6HOH I1H
1957),

IMbl

M02KeT 6bITb BbIBe.n;eHO 113 30HHOH Mo.n;eJII1

B KOTOPOH paCCMaTpl1BalOTCH

BO.n;I1MOCTI1 11 Tpl1 rro.n;30HbI BaJIeHTHOH 30HbI -

4

30HbI: 30Ha rrpo-

eM (Kane,

1957;

Casey, Panish,

M 12 _

1 r.n;e

me -

b

-

m:

= 0,067me

E.

peKOM611HalI.I111 rrap 3JIeKTpOH-TH2KeJIaH .n;blpKa B e.n;I1Hl1lI.e 06beMa M02KHO 3arrl1CaTb B BI1.n;e 00

(8-0-

R

=

f rsp (E) dE =

2

A ·IMbI . I,

(3.9)

Eg r.n;e

m;. Eg . (Eg + ~)

12m:. (Eg

rrOJIYQI1M

orrpe.n;e-

pYlOmee ypaBHeHl1e .n;JIH CYMMapHOH CKOPOCTI1 crrOHTaHHOH 113JIYQaTeJIbHOH

1978)

Macca cBo6o.n;Horo 3JIeKTpOHa,

= 0,33 3B,

(3.5)

,lI.JIH rrOJIYQeHI1H CYMMapHOH CKOPOCTI1 peKOM611HalI.I111 3TO Bblpa2KeHl1e Ha.n;o

IMbl2 orrpe.n;eJIHeTCH Bblpa2KeHI1+ 2~/3)'

(3.3)

Eg -

.Do-

3arrpemeHHaH 30Ha,

3HeprHH crrl1H-op6l1TaJIbHOrO paCmerrJIeHI1H. ,lI.JIH GaAs rrpl1

.Do

3
JIHeT CKOPOCTb crrOHTaHHOH peKOM611HalI.I111 .n;JIH
rro.n;30Ha TH2KeJIbIX .n;blPOK,

rro.n;30Ha JIerKI1X .n;blPOK 11 crrl1H~op6l1TaJIbHO OTmerrJIeHHaH rro.n;30Ha rro.n;30Ha). B 06beMHblx rrOJIyrrpOBo.n;HI1Kax

mhh -

rrpOI1HTerpl1pOBaTb BO BceM .n;l1arra30He .n;orrYCTI1MbIX 3Heprl1H. Pe3YJIbTI1-

Cpe.n;Hee 3HaQeHI1e MaTpl1QHOrO 3JIeMeHTa .n;JIH COCTOHHI1H, Orrl1CbIBaeKeHHa (Kane,

(3.8)

Eg

= 1,424 3B,

IMbl2 = 1,3me . E g .

00

1=

f VE - Eg . Ie (Ee) . Iv (Ev) dE,

(3.10)

Eg MH02KI1TeJIb

A-

KOHCTaHTbI, OCTaBIIIl1eCH 113 ypaBHeHI1H

(3.5).

AHaJIorl1QHO

M02KHO BbIBeCTI1 Bblpa2KeHl1e .n;JIH CKOPOCTI1 peKOM611HalI.I111 rrap 3JIeKTpOH-

I1crroJIb3YH rrpaBI1JIa oT6opa rro BOJIHOBOMY BeKTopy, HaH.n;eM Bblpa2Ke-

JIerKaH .n;blpKa. OHO 6y.n;eT a6COJIIOTHO TaKI1M 2Ke, TOJIbKO B HeM 3
Hl1e .n;JIH cYMMapHoH CKOPOCTI1 crroHTaHHoH 113JIYQaTeJIbHOH peKOM611HalI.I111

HaH Macca TH2KeJIOH .n;blpKI1

B e.n;I1Hl1lI.e o6beMa:

Maccy JIerKOH .n;blpKI1

mth.

m hh

.n;OJI2KHa 6b1Tb 3aMeHeHa Ha 3
,lI.JIH K03
1986),

I1CrrOJIb3YH rrpI1Be.n;eH-

Hble BblIIIe paccy2K.n;eHI1H, M02KHO 3arrl1CaTb CJIe.n;YlOmee Bblpa2KeHl1e:

(3.4) r.n;e

Ie

n-

rrOKa3aTeJIb rrpeJIOMJIeHI1H, QJIeH

11

Iv -


8

(ke - kv)

Hl1e rrpaBI1JI oT6opa rro BeKTOpy K. ~H02KI1TeJIb Crrl1HOBbIM COCTOHHI1HM. B

ypaBHeHl111

(3.4)

06eCrreQl1BaeT BbIIlOJIHe-

2

COOTBeTcTByeT .n;ByM

3HaK CYMMbI 03HaQaeT CYM-

Ml1pOBaHl1e B.n;OJIb Bcex. Tpex rro.n;30H BaJIeHTHOH 30HbI (rro.n;30HbI TH2KeJIbIX

KBaHTOBO-MeXaHI1QeCKaH Mo.n;eJIb peKOM611HalI.I111 HBJIHeTCH caMOH TOQHOH 113 Bcex cymeCTBYlOml1X. O.n;HaKO 113-3a ee CJI02KHOCTI1 11 Tpy.n;oeMKOCTI1 paCQeTOB rro 3TOH Mo.n;eJII1 Ha rrpaKTI1Ke OHa rrpl1MeHHeTCH .n;OBOJIbHO pe.n;KO. Orrl1CaHHaH B CJIe.n;YlOmeM pa3.n;eJIe Mo.n;eJIb, 6a311pYlOmaHCH Ha rrOJIyKJIaCCI1QeCKI1X rrpe.n;CTaBJIeHI1HX, 60JIee y.n;o6Ha .n;JIH pa60TbI.

r

3.2. MO)J.eJIh BaH Poc6pYKa-mOKJIH ~o~enb BaH Poc6pYKa-UUOKnH rr03BonHeT oueHHTb CKOPOCTb crrOH-

.l1.nH

9KcrrepHMeHTanbHhlMH

~

rrpenoMneHHH.

rronyrrpoBo~HHK,

K09
rrornOmeHHH

PHC. 3.1. BpeMH npOJleTa cPoToHa Me}KAY ero reHepaIIHeii H nOrJlOIIIeHHeM,.a TaK}Ke paccToHHHe, KOTopoe ycneBaeT npOJleTeTb cP0TOH 3a 3TO BpeMH nO~CTaBnHH 9TO 3HaqeHHe B ypaBHeHHe

(v) =

()

v Vgr

,

2

2

N ()..) d)" = 87rv

1

a

3

•n

•

c

(3.12)

d (nv). hV/k~ dv. dv e - 1

CKOPOCTb rrornomeHHH
r~e Vgr -

rpyrrrroBaH CKOPOCTb pacrrpocTpaHeHHH
rrpoBo~HHKa: Vgr

3~ecb

,I

2KeHHe

n-

dv

d!.JJ =

dv

~Harra30He

(3.17)

OT

v ~o

V

+ dv

B e~HHHue 06beMa paBHa rrnOTHOCTH
(3.13)

dk = d(I/>..) = c d(nv)"

rroKa3aTenbrrpenoMneHHH - rronyrrpoBo~HHKa. nO~CTaBHB Bhlpa-

(3.13)

B

(3.12), 1

Iii T

1,1

(v)

rronyqHM

= a (v) . Vgr

l1HTerpHpYH 9TO Bblpa2KeHHe BO BceM ~Harra30He qaCTOT, HaXO~HM CKOPOCTb

dv = a (v) . c· d (nv)"

(3.14)

rrornomeHHH
3TO ypaBHeHHe orrpe~enHeT

o6pamfwe apeM5l J1CU3IiU c/Jomolia HnH aep05lmliOCmb n08Jlol4eliU5l c/Jomolia 3a e~HHHUY BpeMeHH. npOH3Be~eHHe

Ro =

meHHH
e~HHHqHOM

f Ro

00

(v) dv

o

BepoHTHoCTH rrornOmeHHH Ha rrnOTHOCTb
rronyqaeM pacrrpe~eneHHe

(3.15),


cpe~Hee BpeMH ~o rrornOmeHHH
.1

-I

KOToporo

a(v) orrpe~enHeTcH B e~HHHuax CM- 1. Ha pHC. 3.1 rrOKa3aH
3JIeIcrpOH-ro>IpKa)

paccToHHHe = a BpeMH= (avgr)-I

MeTo~a­

MH: nmpHHy 3arrpemeHHOH 30HbI, K09
MecTO rrOrJIOIIIeHIDI cPOTOHa (reHeparrIDI rrapbI

r

3JIeIcrpOH-,l\hIpKa)

:noro Heo6xo~HMO 3HaTb OCHOBHble xapaKTepHcTHKH rrony-

rrpoBo~HHKa, orrpe~enHeMble CTaH~apTHbIMH

PaCCMOTpHM

MecTO reHepaIJ;llH cP0ToHa (peKoM6HHaIIIDI rrapbI

I ...

TaHHOH: H3nyqaTenbHOH: peKOM6HHaUHH B paBHoBecHblx H HepaBHoBecHblx ycnoBHHx .

75

3.2. MOaeJtb Bim Poc6pYKa-llloKJtu

TJt. 3. MoaeJtu u3JtyttameJtbftOU peKOM6uftau,uu

74

paBHOBeCHbIX ycnoBHHX rrnOTHOCTb

n


B

e~HHHue 06beMa-

HaXO~HTCH rro <popMyne nnaHKa,

3Ta <popMyna Ha3bIBaeTCH HHe

(3.19)

2

a (v)

e

hv/kT

-1

(3.19)

dv.

0

06beMe I).

B cpe~e C rrOKa3aTeneM rrpenOMneHHH

f

= 87rV~2' n

ypaBlieliueM Bali Poc6pYlw-llloKJlu. Bblpa2Ke-

M02KHO yrrpocTHTb, 3arrHcaB K09
orrHCbIBalOmeH crreKTp H3nyqeHHH a6conIOTHO qepHOrO Tena:

(3.20)

N

87r - 1 ( ).. ) d)" = 4"' hv/kT

>..

e

\

- 1

dA.

(3.15) TaKOH: BH~
N (v) dv, orrpe~enH­ ~Harra30He OT v ~o V + dv.

113 9Toro Bblpa2KeHHH M02KHO BblqHCnHTb BenHqHHY IOmylO KOnHqeCTBO
= cj (n· v), d)" = _ _c_. d(n,v)dv. (n. v)2 dv

K09
(3.20)

06bHCHHeTCH rrporropUHoHanbHocTblO Me2K~y

rrornOmeHHH

OT 9HepWH; B

Ta6n.

ao

3.1

HBnHeTCH K09
rrpHBe~eHbI rrpH6nH3HTenbHble 3HaqeHHH

ao

a hv = 2Eg .

~nH HeCKonb-

KHX THrrOB rronyrrpoBo~HHKOB, paCCqHTaHHble rro H3BeCTHbIM 3HaqeHHHM

(3.16)

nmpHHbI3arrpemeHHOH: 30HbI, K09
BpeMH 2KH3HH

H3nyqaTenbHOH: peKoM6HHaUHH

I) eM. TaK}Ke [4]

H rrnOTHOCTblO 9HepreTHqeCKHX ypoBHeH:,

qTO B CBOIO Oqepe~b Be~eT K KOpHeBOH: 3aBHCHMOCTH K09
HeOCHOBHbIX HOCHTeneH rrpH

orrpe~enHnocb

rro <popMyne 18 3 KOHueHTpaUHH OCHOBHbIX HOCHTeneH: 10 CM- .

crrOHTaHHOH

B-1 . ND,~

rrpH

'I

r

i~

, !'

76

FA. 3. MOaeAu u3AY'lameAbHoii pelwM6uHau,uu

T a 6 JI H U a 3.1.

K09<j><j>HUHeHTbI 6HMOJIeKYJIlIpHOH peKoM6HHaUHH npH ClO, CM- I

MaTepHaJl E g , 38 GaAs 1,42 1,35 InP 3,4 GaN 2,26 GaP

n Ro, CM- 3 C- 1

2.104

3,3

2.104 2.105 2.103

Si

1,12

1.103

Ge

0,66

1.103

ni, CM- 3

B,

CM 3 C- 1

300

K

'Tspont, C

7,9· 1()2

2.106

2,0. 10- 10 5,1.10- 9

3,4

1,2. 104

1.107

1,2.10- 10 8,5.10- 9

2,5

8,9.10- 30

2.

10- 10

2,2.10- 10

4,5.10- 9

3,0

1,0. 10- 12

1,6· 10°

3,9. 10- 13 2,6.10- 6

3,4

3,3.106

1.1010

3,2. 10- 14 3,0· 10- 5

4,0

1,1 . 10 14

2.10 13

2,8.10- 13 3,5.10- 6

peKOM6HHaUHH JIe)!{aT B .n:Harra30He HerrpHM030HHble rrOJIyrrpOBo.n:HHKH -

MeTO.n: XOJIJIa (Hall,

-

2

-

·V X- Xg dx eX - I

(3.21)

.

MeTO.n: rap6Y30Ba (Garbuzov,

eM

x

=

=

1982) 1).

10- 13

X

• • -3/2 (mh + me) me me X (1 + m: + m:) . (300 K)3/2 . ( Eg )2 . n, mh me T 19B

CM 3 . c- I •

r.n:e

m: -

KH,

me -

x

9cpcpeKTHBHa51 Macca 9JIeKTpOHa,

m'h -

(3.24)

9cpcpeKTHBHa51 Macca .n:b1p-

Macca cBo6o.n:Horo 9JIeKTpOHa. MeTo.n: rap6Y30Ba OCHOBaH Ha

rrpOCTbIX KBaHTOBO-MeXaHHqeCKHX pacqeTaX .n:JIH rrpHM030HHbIX rrOJIyrrpo-

Xg

3.n:eCb

B:

1960);

B rrepBOM MeTo.n:e HCrrOJIb3yeTc5I .n:BYX30HHaH Mo.n:eJIb:

6peqb 3aBHCHMOCTbIO rrOKa3aTeJIH rrpeJIOMJIeHHH OT qaCTOTbI H HCrrOJIb30-

Ro

GaP, KpeMHHH, repMaHHH H .n:p. o6JIa-

6HHaUHH. CYIlI.eCTBYIOT H .n:pyrHe crroco6bI pacqeTa 3HaqeHHH K09cpcpHUHeHTa

BaTb 3HaqeHHe rrOKa3aTeJI5I rrpeJIOMJIeHHH Ha KpalO 3arrpeIlI.eHHOH 30HbI: 00

IIpH 9TOM paCqeT-

.n:alOT 3HaqHTeJIbHO MeHbWHMH K09cpCPHUHeHTaMH 6HMOJIeKYJI5IpHOH peKOM-

YpaBHeHHe BaH Poc6pYKa-IlloKJIH MO)!{HO yrrpocTHTb, eCJIH rrpeHe-

flT(kT)3fX Eg ch

10-9 -10- 11 CM3I C.

Hble pe3YJIbTaTbI XOPOIllO corJIaCYIOTC5I C 9KcrrepHMeHTaJIbHbIMH .n:aHHbIMH.

B = 5,8

-8 -2 0:0 - ?fen

77

3.3. 3aBucuMocmb pelwM6uHau,uu om meMnepamypbt U AezupOBaHUR.

BO.n:HHKOB:

=

x hv/ (kT) E/(kT), Xg E g / (kT). IIOCKOJIbKY C YBeJIHqeHH9KcrrOHeHUHaJIbHa51 CPYHKUHH pe3KO B03paCTaeT, BKJIa.n: B HHTerpaJI

B -30 ,

X

10-10

3 -1 CM·C·

(300 K)3/2 .(_ Eg-T 1,59B

)2

(3.25)

BHOCHT TOJIbKO Y3Ka51 06JIaCTb 9HeprHH B6JIH3H KpaH 3arrpeIlI.eHHOH 30HbI. Y 9Toro HHTerpaJIa HeT rrpOCToro aHaJIHTHqeCKOrO peWeHH5I, ero BeJIHqHHY

Bce orrHcaHHble crroco6bI rr03BOJI5IIOT rrOJIyqaTb rrpH6JIH3HTeJIbHO o.n:HHa-

MO)!{HO oueHHTb qHCJIeHHblMH MeTo.n:aMH.

KOBble 3HaqeHH5I K09cpcpHUHeHToB

B paBHOBeCHblX YCJIOBHHX CKOPOCTb reHepaUHH HOCHTe~eH (CKOpOCTb rrOrJIOIlI.eHHH CPOTOHOB) paBHa CKOPOCTH HX peKOM6HHaUHH (CKOpOCTH H3JIY-

B.

HarrpHMep, .n:JIH GaAs K09CPCPHUH-

B, paCCqHTaHHble .n:JIH TeMrrepaTypbl 300 K rro (3.23)-(3.25), rrpH6JIH3HTeJIbHO paBHbl 10- 10 CM 3 /c.

eHTbl H

cpopMyJIaM

(3.21)

qeHH5I CPOTOHOB). IIo9TOMY Mo.n:eJIb BaH Poc6pYKa-IlloKJIH .n:aeT B03MO)!{HOCTb oueHHTb TOJIbKO

paBfloBecflYIO clwpocmb peICoM6uflal1Uu. B rrpe.n:bI-

.n:YIlI.HX rJIaBaX 6bIJIO rrOKa3aHO, 'ITO H3 ypaBHeHHH CKOPOCTH 6HMOJIeKYJI5Ip-

3.3.

3aBHCHMOCTb peKOM6HHa:U;HH OT TeMnepaTypbI H JIerHpOBaHHB

HOH peKOM6HHaUHH MO)!{HO HaHTH qHCJIO aKTOB peKOM6HHaUHH B e.n:HHHue 06beMa 3a e.n:HHHUY BpeMeHH, rrpOHcxo.n:51IlI.HX B paBHOBeCHbIX H HepaBHOBeCHbIX YCJIOBHHX:

R=B·n·p. Terrepb

rrOKa)!{eM,

KaK

rro

Mo.n:eJIH

(3.22)

BaH

Poc6pYKa-IlloKJIH

MO)!{HO

orrpe.n:eJIHTb 3HaqeHHe K09CPCPHUHeHTa 6HMOJIeKYJIHpHOH peKoM6HHaUHH B paBHoBecHblx YCJIOBHHX crrpaBe.n:JIHBO COOTHoweHHe KOToporo H Haxo.n:HTCH BeJIHqHHa K09CPCPHUHeHTa

B:

R = Ro = B .

n;,

3aBHCHMOCTb Bep05lTHOCTH peKoM6HHaUHH OT TeMrrepaTypbI rrpe.n:CTaBJIeHa Ha pHC.

E(k)

3.2,

KOTOPblH rrOKa3blBaeT rrapa60JIHqecKYlO 3aBHCHMOCTb

rrpH HH3KHX H BblCOKHX TeMrrepaTypax. IIpH ee aHaJIH3e MO)!{HO

BbIHBHTb YMeHbweHHe qHCJIa HOCHTeJIeH B HHTepBaJIe 3HaqeHHH KBa3HHM-

dk

B.

rryJIbCa

H3

peKoM6HHaUHH BbIITOJIHHeTCH 3aKOH coxpaHeHHH KBa3HHMrrYJIbCa H BepoHT-

C YBeJIHqeHHeM TeMrrepaTypbI. TaK KaK rrpH H3JIyqaTeJIbHOH

HOCTb peKoM6HHaUHH 9JIeKTpOHOB rrporropUHOHaJIbHa KOJIHqeCTBY cBo6o.n:HblX .n:blPOK C paBHblM 3HaqeHHeM KBa3HHMrrYJIbCa, BepoHTHoCTb peKoM6H-

(3.23)

HaUHH YMeHbwaeTcH C POCTOM TeMrrepaTypbI. 9TOT cpaKT rro.n:TBep)!{.n:aeTC5I COOTHOIlleHH5IMH

B

Ta6JI.

3.1

rrpHBe.n:eHbI 3HaqeHHH K09CPCPHUHeHToB 6HMOJIeKYJIHpHOH

peKoM6HHaUHH, paCCqHTaHHble .n:JI5I pa3HbIX rrOJIyrrpoBo.n:HHKOB rro ypaBHeHHHM

(3.21)

H

(3.24)

H

(3.25),

KOTopble rrOKa3bIBa1OT, 'ITO K09cpCPHUHeHT

6HMOJIeKYJIHpHOH peKOM6HHaUHH 3aBHCHT OT TeMrrepaTypbl 06paTHO rrpo-

(3.23).

rropUHOHaJIbHO

T 372 .

.

Bce xapaKTepHCTHKH MaTepHaJIOB, HCrrOJIb30BaHHble

B paCqeTaX, TaK)!{e rrpe.n:CTaBJIeHbI B HeH.

1'13

9TH X .n:aHHblX BH.n:HO, 'ITO .n:JI5I

rrp5lM030HHbIX rrOJIyrrpOBo.n:HHKOB THrra AIIIBV 3HaqeHH5I K09cpcpHUHeHTOB

I) DH6JIHOrpa<j>HIO co CCblJIKaMH Ha UHKJI 0pHrHHaJIbHbIX pa60T C coaBTopaMH CM. B

[5].

,U. 3.

fap6y30Ba

78

rI

FA. 3. MOaeAu u3AyttameAbiiou pelwM6ulia11uu

6

a

3.3. 3a8ucUMocmb pelwM6ulia11uu om meMnepamypbl U Ae2up08aliUft

I

--

t)

pacqer

R. p

79

c nOMOmblO KBaHTOBO-MeXaHH'IecKOro

nO){XO,!l;a (T.e. npaBHJIa OT6opa no

k)

00

Rsp =

JZ(E)B dc(E) [1- /v(E)] Pred(E) dE 2

Eg - - pacqer

R. p

P

c nOMOJTIl>1O ypaBHeHIDl

P

,nIDI CKOPOCTH 6HMOJIeKy.JIllpHoii:

P

peKoM6HHaUHH

Rsp=Bnp B = 2,3x 10- 10 Z(E)=TIJIOTHOCTb r){e

1 3 CM ·C- ,

"

o~eCKHXMO,!l;

PHC.

3.2.

PaCIIpe){eJIeHHe HOCHTeJIeH 3aplI){a IIpH HH3KOH

(a)

H BbICOKOH

(6)

Nv=

TeM-

IIepaType. BepolITHoCTb peKoM6HHaUHH YMeHblIIaeTClI IIpH BbICOKOH TeMIIepaType H3-3a cOKpameHHlI qHCJIa HOCHTeJIeH B HHTepBaJIe 3HaqeHHH KBa3HHMIIYJIbCa

= 1,8 . 1019

GaNp-Tlma

dk

n = 10 CMT=300K 15

CM-

3

3

3aBHCHMOCTb Bep05lTHOCTH peKoM6HHaUHH OT KOHueHTpaUHH JIerHpyIO-

3.3,

Ha KOTOPOM rrOKa3aHbI CPYHK-

HeBbIpO)!{.D.eHHOrO H

BbIpO)!{.D.eHHOrO JIempOBaHH5I.

lIl.HX rrpHMeceH rrpe.D.CTaBJIeHa Ha pHC. UHH

E(k)

B CJIyqae

113 HHX CJIe.D.yeT, qTO qHCJIO .D.bIPOK B HHTepBaJIe 3HaqeHHH KBa3HHMrrYJIbca

dk

KOHueHTPaUIDI ,!I;bIpOK

Po,

CM-

3

OCTaeTC5I rrOCT05lHHbIM B BbIPO)!{.D.eHHOM CJIyqae. n03TOMY B BbIPO)!{-

.D.eHHOM rrOJIyrrpOBO.D.HHKe Bep05lTHOCTb peKOM6HHaUHH He YBeJIHqHBaeTC5I. ElTo rrO.D.TBep)!{.D.aeTC5I KBaHTOBO-MeXaHHqeCKHM paCqeTOM K03cpcpHUHeHTa 6HMOJIeKYJI5IpHOH peKoM6HHaUHH, 3aBHCHMOCTb KOToporo OT KOHueHTpaUHH.D.bIPOK rrpe.D.CTaBJIeHa Ha pHC.

3.4

(Waldron,

2002).

I1x Hero CJIe.D.yeT,

PHC.

3.4.

Type

300 K

3aBHcHMoCTb CKOPOCTH cIIoHTaHHoH peKoM6HHaUHH B GaN IIpH TeMIIepaH KOHueHTpaUHH IIpHMeceH p-THIIa, paCCqHTaHHOH C IIOMOmbJO KJIaCCH-

qeCKOrO H KBaHTOBO-MeXaHHqeCKOrO IIO){XO){OB. B cJIyqae KBaHTOBO-MeXaHHqeCKOrO IIO){XO){a (HCIIQJIb3YlI IIpaBHJIa oT6opa IIO

k)

CKOPOCTb HCIIblTblBaeT HaCblmeHHe

B CJIyqae BblpO}l{){eHHOrO IIOJIYIIPOBO){HHKa (WaldroII,

qTO K03cpCPHUHeHT 6HMOJIeKYJI5IpHOH peKOM6HHaUHH B CJIyqae BbIPO)!{.D.eHHOro JIempOBaHH5I HaCbIlIl.aeTC5I. MO.D.eJIb BaH Poc6pYKa-lIIoKJIH TaKoH

a

3aBHCHMOCTH

He rrpe.D.CKa3b1BaeT,

TaK KaK ee

2002)

rrpHMeHeHHe

OrpaHHqeHO

HeBbIpO)!{.D.eHHbIM CJIyqaeM. YpaBHeHHe (3.22) crrpaBe.D.JIHBO B cJIyqae HeBblpO)!{.D.eHHbIX rroJIyrrpo-

6

BO.D.HHKOB, .D.JI5I KOTOPbIX xapaKTepHa cpaBHHTeJIbHO MaJIa51 KOHueHTpaUH5I HOCHTeJIeH. CJIe.D.OBaTeJIbHO, H ypaBHeHH5I .D.JI5I paCqeTa K03cpcpHUHeHToB 6HMOJIeKYJI5IpHOH peKoM6HHaUHH TaK)!{e rrpHMeHHMbI TOJIbKO .D.JI5I HeBbIpO)!{.D.eHHbIX rrOJIyrrpoBO.D.HHKOB. B

3TOM cJIyqae K03cpCPHUHeHT

B

He 3aBHCHT

OT KOHueHTpaUHH HOCHTeJIeH. O.D.HaKO rrpH OqeHb BbICOKHX KOHueHTpaUH5IX HOCHTeJIeH BeJIHqHHa K03cpcpHUHeHTa

B

YMeHbiliaeTC5I, qTO CB5I3aHO

C YBeJIHqeHHeM paCCOrJIaCOBaHH5I Me)!{.D.Y KBa3HHMrrYJIbCaMH 3JIeKTpOHOB H .D.bIpOK. n03TOMY .D.JI5I BbIpO)!{.D.eHHbIX rrOJIyrrpOBO.D.HHKOB crrpaBe.D.JIHBO BbIpa)!{eHHe

D = B - (n/ N c ) . B*,

KOTopoe rrOKa3b1BaeT, qTO C POCTOM

KOHueHTpaUHH HOCHTeJIeH K03cpCPHUHeHT peKoM6HHaUHH rra.D.aeT. DOJIee rro.D.p06HOe orrHcaHHe rrOBe.D.eHH5I K03cpCPHUHeHTa peKoM6HHaUHH rrpH BbICOKHX KOHueHTpaUH5IX HOCHTeJIeH, a TaK)!{e qHCJIeHHbIe 3HaqeHH5I BeJIHqHHbI PHC.

3.3.

PaCIIpe){eJIeHHe HOCHTeJIeH 3aplI){a B CJIyqae HeBblpO}l{){eHHOrO

pO}l{){eHHOrO

(6)

(a)

H BbI-

MO)!{HO HaHTH B pa60Tax (Agrawal, Dutta,

IIOJIYIIPOBO){HHKa p-THIIa. B cJIyqae BblpO}l{){eHHorO JIerHpOBaHHlI

IIepeKpblTHe Me}l{){Y 9JIeKTpOHaMH H ){b1pKaMH C O){HHaKOBbIMH 3HaqeHHlIMH KBa3HHMIIyJIbCa He YBeJIHqHBaeTClI

I) eM. TaK}I{e CTaTbJO BaplIIHH B

[6].

1986;

Olshansky,

1984)

1).

B*

80

Fit. 3. MoaeJlu u3J1Y'lameJlbHou peIC0M.6uHau,uu YnpalKHeHHe.

3.4. Bu6J1uoepal/Ju'leclCuu cnucolC

OnpeaeJleHUe al/Jl/JelCmuBHocmu u3J1Y'lameJlbHou peIC0M.6uHa-

u,uu Ha OCHOBe aHaJIH3a TeMnepaTypHblx 3aBHCHMOCTeM CKopocTeM H3JIyqaTeJIbHOM H 6e3bl3JIyqaTeJIbHOM peKoM6HHaUHH no Mo.n:eJIlIM BaH Poc6pYKa-IIIoKJIH H IIIoKJIH-PH.n:a npe.n:cKa}KHTe TeMnepaTypHYIO 3aBHCHMOCTb aljlljleKTHBHoCTH H3JIYQaTeJIbHOM peKOM6HHaUHH B pa3JIHQHblX nOJIynpoBo.n:HHKax.

3.4.

MO)l.eJIb 3HHmTeHHa

nepBall TeopHlI OnTH'IeCKHX nepeXO.ll.OB 6bIJIa pa3pa60TaHa AJIb6epTOM 9HHillTeHHOM. MO.ll.eJIb 9HHillTeHHa OCHOBaHa Ha onHcaHHH cnOHTaHHbIX H BbIHY:>K.ll.eHHbIX (HH.ll.YUHpOBaHHbIX) nepeXO.ll.OB. CnOHmaHHble nepexo8bl npOTeKaIOT 6e3 BHeillHHX B03.ll.eHCTBHH, TOr.ll.a KaK 8bLHlj:JIC8eHHble nepexo8bl HH.ll.YUHPYIOTClI cpOTOHaMH. n03TOMY KOJIH'IeCTBO BbIHY:>K.ll.eHHbIX nepeX0.ll.0B nponopUHOHaJIbHO nJIOTHOCTH CPOTOHOB HJIH nJIOTHOCTH H3JIY'IeHHlI. K03CPCPHUHeHTbI A H 8 onHCbIBaIOT cnOHTaHHbIe H BbIHY:>K.ll.eHHble nepeXO.ll.bI B aTOMe C .ll.BYMlI KBaHTOBbIMH y'POBHlIMH. CXeMaTH'IHO 3TH nepeXO.ll.bI nOKa3aHbI Ha pHC. 3.5. KBaHToBble ypOBHH 0603Ha'leHbI 1 H 2. 9HHillTeHH npe.ll.nOJIO:>KHJI, 'ITO BepOllTHOCTH nepeXO.ll.OB C O.ll.HOrO ypOBHlI Ha .ll.PyroH B e.ll.HHHUY BpeMeHH onpe.ll.eJIlIIOTClI CJIe.ll.YIOIIJ.HMH Bblpa:>KeHHlIMH:

W2-+1 = 8 2-+ 1P(V) + A, Wl-+2 = 8 1-+ 2P(V).)

'I

(3.26) (3.27)

"

Bblpa:>KeHHe, onHCbIBaIOIIJ.ee BepollTHoCTb nepexo.ll.a ~cBepxy BHH3» (.ll.JIlI O.ll.HOrO aToMa), COCTOHT H3 .ll.BYX 'IJIeHOB, O.ll.HH H3 KOTOPbIX cooTBeTcTByeT BbIHY:>K.ll.eHHbIM nepeXO.ll.aM, a .ll.PyroH - cnOHTaHHbIM. CJIaraeMOe, onHCbIBaIOIIJ.ee BbIHY:>K.ll.eHHOe H3JIY'IeHHe, 8 2-+ 1p(v) nponopUHOHaJIbHO nJIOTHOCTH H3JIY'IeHHlI p(v). BepOllTHOCTb cnOHTaHHoro nepeXO.ll.a «CBepxy BHH3~ onpe.ll.eJIlIeTClI KOHCTaHTOH A. BepOllTHOCTb nepeXO.ll.OB ~CHH3Y BBepx~ npOCTO paBHa 8 1-+ 2p(v). K03CPCPHUHeHT 9HHillTeHHa A 6HMOJIeKYJIlIpHOH peKoM6HHaUHH TpaUHH 3JIeKTpOHOB H .ll.bIPOK no peKoM6HHaUHH R = B . n . p He

B aTOMe COOTBeTcTByeT K03CPCPHUHeHTY B nOJIynpOBO.ll.HHKe. B aTOMe KOHueHypaBHeHHIO CKOPOCTH 6HMOJIeKYJIlIpHOH HrpaIOT HHKaKOH POJIH, nOCKOJIbKY .ll.JIlI

81

OCYIIJ.eCTBJIeHHlI nepeXO.ll.a «CBepxy BHH3» BepxHHH ypOBeHb .ll.OJI}KeH 6bITb 3aHlIT (n = 1), a HH}KHHH - cB060.ll.eH (p = 1). 9HHillTeHH .ll.OKa3aJI Ha OCHOBaHHH YCJIOBHH .ll.eTaJIbHOrO paBHOBeCHlI, QTO 8 = 8 2-+ 1 = 8 1-+ 2 . I13 3Toro CJIe.ll.yeT, 'ITO HH.ll.YUHpOBaHHoe norJIOIIJ.eHHe H BbIHY:>K.ll.eHHOe H3JIY'IeHHe lIBJIlIIOTClI B3aHMHO .ll.OnOJIHlIIOIIJ.HMH (KOMnJIeMeHTapHbIMH) npoueccaMH. 9HHillTeHH TaK:>Ke nOKa3aJI, 'ITO OTHOilleHHe K03CPCPHUHeHToB A H 8 Ha 'IaCTOTe v B H30TponHOH cpe.ll.e C nOKa3aTeJIeM npeJIOMJIeHHlI n lIBJIlIeTClI KOHCTaHTOH, paBHOH 8nn3 hv 3 / c3 . 30JIOTOe npaBHJIO epMH H3 KBaHToBoH MexaHHKH TaK:>Ke .ll.OKa3bIBaeT 3KBHBaJIeHTHOCTb K03cpcpHUHeHTOB 8 2-+ 1 H 8 1-+ 2. DOJIee nO.ll.P06HO TeopHlI 9HHillTeHHa B.D.aHHOH KHHre He paCCMaTpHBaeTClI.

BH6JIHOrpa
Semiconductor Lasers Chapter 3

Casey Jr. H. C. and Panish M. B. Heterostructure demic Press, New York, 1978).

Lasers, Part A, Cap. 3 (Aca-

Bebb H. B. and Williams E. W. "Photoluminescence I: Theory" in Transport and Optical Phenomena edited by R. K. Willardson and A. C. Beer, Semiconductors and Semi metals 8, p. 181 (Academic Press, New York, 1972). Dutta N. K. "Radiative transitions in GaAs and other III-V compounds" in Minority Carriers in ///- V Semiconductors: Physics and Applications edited by R. K. Ahrenkiel and M. S. Lundstrom, Semiconductors and Semi metals 39, p. 1 (Academic Press, San Diego, 1993). Garbuzov D. Z. "Radiation effects, lifetimes and probabilities of band-to-band transitions in direct A3B5 compounds of GaAs type" J. Luminescence 27,

109 (1982). Hall R. N. "Recombination processes in semiconductors" 106 B, Supp!. 17,983 (1960). Kane E. O. "Band structure of indium antimonide"

Proc. Inst. Electr. Eng .

J. Phys. Chem. Solids 1, 249

(1957). Olshansky R., Su C. B., Manning J., and Powazinik W. "Measurement of radiative and non-radiative recombination rates in InGaAsP and AIGaAs light sources"

IEEE J. Quantum Electron. QE-20, 838 (1984). Semiconductor Laser Devices (John Wiley and

Thompso,n G. H. B. Physics of Sons, New York, 1980).

CIIOHTaHHOe

Van Roosbroeck W. and Shockley W. "Photon-radiative recombination of electrons and holes in germanium" Phys. Rev. 94, 1558 (1954). Waldron E. L. "Optoelectronic properties of AIGaN/GaN superlattices" Ph.D. Dissertation, Boston University (2002).

"1" PHC. 3.5. CnoHTaHHoe H3JIYQeHHe, IIOfJIOmeHHe H BbIHY}K.n:eHHoe H3JIYQeHHe B .n:ByXYPoBHeBoM Mo.n:eJIH aTOMa

.n;onOJIHeHHe pe,lf.aKTOpa

1. JIaH.n:ay JI. ,ll., JIHljlnIHU E. M. KBaHToBall MexaHHKa. HepeJIlITHBHCTcKall TeopHlI. - M.:
r TA. 3. MOaeAu u3Ayt.tameAbHou pelwM6uHau,uu

82 2. 3. 4.

,llaBbI.lI.OB

5.

Eepf

A. C.

KBaHTOBali MexaHHKa. -

M.:


EJIOXHHueB ,ll.M. OCHOBbI KBaHTOBOH MexaHHKH.

A. 3. OTITHqeCKHe lIBJIeHHlI 1988 (qaCTb 1); 1991 (qaCTb 2).

IOHOBw'I

A.,

,llHH

TI.

-M.:

1973.

HaYKa,

B rrOJIyrrpOBO.ll.HHKax. -

CBeTO.ll.HO.ll.b1: rrep. C aHfJI. rro.ll. pe.ll..

M.:

A.3.

1983. 113.l1.-Bo.

MfY,

IOHoBHqa. -

r JIasa

M.:

MHP, 1979. - 688 c.

6.

BapIIIHH 11. TI. C06cTBeHHali H3JIyqaTeJIbHali peKoM6HHaUHlI B rrOJIyrrpOBO.D.HHKax / / 113JIyqaTeJIbHali peKoM6HHaUHlI B rroJIyrrpoBO.ll.HHKax. - M.: HaYKa,

4

9JIEKTPHQECKHE CBOHCTBA CBETO,llHO,llOB

1972. C. 9-124.

4.1.

BOJIbTaMnepHbIe xapaKTepHcTHKH CBeTO,ZJ;HO,ZJ;OB

B 9TOH fnaBe o6cY)K.lI.aIDTCli 9neKTpHqeCKHe CBOHCTBa p-n-rrepeXO.ll.OB. OCHOBHble COOTHOIlIeHHlI rrpHBO.ll.lITCli 6e3 rrO.ll.p06HOro BbIBO.ll.a. PaCCMaTpHBaIDTCli

pe3Kue p-n-nepexo8bl

uerrTopOB

NA .

T. e.

C KOHueHTpaUHlIMH .lI.OHOPOB

KOHueHTpaUHlI CBo60.ll.HbIX 9neKTpOHOB

CBo60.ll.HbIX .lI.b1POK H .lI.ecpeKTbI B

ND

H aK-

Bce rrpHMeCH CqHTaIDTCli rronHOCTbID HOHH3HpOBaHHbIMH,

p = NA .

n = N D,

a

KOHueHTpaUHlI

npe.ll.rrOnaraeTclI, qTO cnyqaHHble BKnIDqeHHlI

He KOMneHcupYlOm

crreuHanbHO BBe.ll.eHHble rrpHMeCH I).

paBHOBeCHH B OKpeCTHOCTH p-n-rrepeXO.ll.a 9JIeKTpOHbI co CTOPOHbI

MaTepHana n-THrra .lI.HCPCPYH.lI.HPYIDT OT .lI.OHOPOB B 06naCTb p-THrra, r.ll.e OHH, BCTpeqall .lI.b1pKH B 60nbIlIHX KOHUeHTpauHlIX, peKOM6HHHPYIDT C HHMH. AHanOmqHble rrpoueccbI rrpOHCXO.ll.lIT C .lI.b1pKaMH, .lI.HCPCPYH.lI.HPYIDIII.HMH B 06naCTb n-THrra. B pe3ynbTaTe 9Toro 06naCTb B OKpeCTHOCTH p-n-rrepeXO.ll.a OKa3bIBaeTCli 06e.ll.HeHHOH CBo60.ll.HbIMH HOCHTenllMH, rr09TOMY OHa TaK H Ha3bIBaeTCli -

o6e8HeHHaR. 06JlaCmb.

npH OTCYTCTBHH CBo60.ll.HblX HOCHTeJJeH B 06e.ll.HeHHOH o6nacTH e.ll.HHCTBeHHbIMH 3apll)KeHHblMH UeHTpaMH B HeH lIBnllIDTCli HOHH3HpoBaHHble .lI.OHOPbI H aKuerrTOpbI. 3TH nempYIDIII.He rrpHMeCH 06pa3YIDT 3apll)KeHHble 06naCTH, .lI.OHOPHYID -

Ha CTopOHe n-THrra H aKuerrTopHYID -

Ha CTopOHe

p-THrra. TaKali 06naCTb rrpOCTpaHCTBeHHoro 3apll.ll.a CPopMHPyeT pa3HOCTb rrOTeHuHanOB, Ha3bIBaeMYID

KOHmaKmHoii pa3Hocmb1O nomeHl{uaJl08 VD:

TT

_

kTl NA·ND

VD--n

e

r.ll.e

NA

H

ND -

2 ni'

'

KOHueHTpauHH aKuemopOB H .lI.OHOPOB, ni -

(4.1) co6CTBeH-

Hall KOHueHTpauHlI HOCHTeneH B rronyrrpOBO.ll.HHKe. Ha 30HHOH .lI.HarpaMMe (pHC.

4.1)

rrOKa3aHa KOHTaKTHali pa3HOCTb rrOTeHUHanOB. 3TO rrOTeHUHanb-

HbIH 6apbep, KOTOPbIH .lI.On)KHbI rrpeO.ll.OneTb cBo6o.ll.Hble HOCHTenH TOKa .lI.nll rrOrra.ll.aHHlI B HeHTpanbHYID o6nacTb C rrpOBO.ll.HMOCTbID rrpoTHBOrrOnO)KHOrO THrra. 1) CM. KHHfy

[1]

I 84

Fit. 4.

I

3JteKmpUtteCKue C80ucm8a c8emo8uo808

a

I

---------..::------------------_.

I

,,

p-n-nepeXO.ll.a

85

BoJtbma~tnep1tbte xapaKmepucmuKu c8emo8uo808

4.1.

f

ypa8fleflueM llloKJLu.

HHOr.ll.a Ha3bIBalOT

ma.ll.blO nOnepeqHOrO CeqeHH5I

A

)l.JI5I .lI.HO.ll.a C nJIO-

OHO HMeeT BH.lI.

i

1= eA (

~,~--~-r----------Ee

:

,~WD----'

Ee-EF

-TE;~-E~----:==1J--'C---=:-- E,

r.ll.e Dn,p H Tn,p -

fQ; .

VT;

+ [JJ.:.

n;

V-:;:;:

ND

1) ,

n; ) . (eeV/kT NA

(4.3)

K03CPCPHUHeHTbI .lI.HCP$Y3HH H BpeMeHa )KH3HH .lI.JI5I 3JIeK-

TPOHOB H .lI.b1POK -

HeOCHOBHbIX HOCHTeJIeH.

npH o6paTHoM CMemeHHH .lI.HO.ll. BXO.ll.HT B pe)KHM HaCblmeHH5I no TOKy. ~----------------Ev

BeJIHqHHa

TOKa

HaCblmeHH5I

BOJIbTaMnepHa51 xapaKTepHCTHKa

6

______________- - - - - -....-=-=--'__________

,,

~.-.-

_.-EFp

PHC.

4.1.

J eVD -eV

---:-----r------------Ee '' _._(._._._._._._._._._._._._. EFn '' ,

,,

COcTollHHe

CMelIl,eHHH.

(V

< 0) I

_._._._._._._._._.-l-._. e.~.l , '

------------------~--

onpe.ll.eJI5IeTC5I

K03cpCPHUHeHTOM,

CT05l-

mHM B ypaBHeHHH illOKJIH nepe.ll. 3KcnOHeHUHaJIbHOH cpYHKUHeH. n03TOMY

=

p-n-nepexO.ll.a

npH 06paTHOM CMemeHHH

HMeeT CJIe.ll.YlOmHH BH.lI.:

Is' (eeV/kT -

1), Is =

npH np5lMOM CMemeHHH

eA (

. n; + [JJ.:. n;). VfQ; T; ND V-:;:;: NA

p-n-nepexo.ll.a

Hanp5l)KeHHe

V

(4.4)

Ha .lI.HO.ll.e 06blq-

kTje, n03ToMY [exp(eVjkT) - 1] ~ ~ exp(eVjkT). I1cnoJIb3Y51 Bblpa)KeHHe (4.1), nOJIyqaeM ypaBHeHHe illOKJIH

HO

HaMHoro

60JIbllIe

BeJIHqHHbI

.lI.JI5I .lI.HO.ll.a npH np5lMOM CMemeHHH B BH.lI.e

------------------Ev

~~'

p-n-rrepexoAa: a - rrpH HYJIeBOM CMelIl,eHHH, 6 - rrpH rrpllMoM p-n-rrepeXOAa HeOCHOBHble HOCHTeJIH TOKa

1= eA

TIpH rrpllMoM CMelIl,eHHH

(~ . NA + ~ . ND)

. ee(V-VD)/kT.

(4.5)

AHlPYHAHpYIOT B HeHTpaJIbHble 06JIaCTH, rAe peKOM6HHHPYIOT C OCHOBHblMH HOCH-

nOKa3aTeJIb 3KcnoHeHUHaJIbHOH CPYHKUHH: B cpopMyJIe

TeJIlIMH

(4.5)

CBH.lI.eTeJIbCTBY-

eT 0 TOM, qTO npH npH6JIH)KeHHH Hanp5l)KeHH5I Ha .lI.HO.ll.e K KOHTaKTHOH illHpHHa 06e.ll.HeHHOH 06JIaCTH, ee 3ap5l.ll. H KOHTaKTHa51 pa3HOCTb no-

pa3HOCTH

nOTeHUHaJIOB,

T. e.

npH

V ~ VD,

TOK qepe3 nepexo.ll. pe3KO

TeHUHaJIOB CB5I3aHbI ypaBHeHHeM nyaccOHa. 3Ha51 KOHTaKTHYIO pa3HOCTb

B03paCTaeT. Hanp5l)KeHHe, npH KOTOPOM npOHCXO.ll.HT pe3Koe YBeJIHqeHHe

nOTeHUHaJIOB, MO)KHO onpe.ll.eJIHTb umpHHy 06e.ll.HeHHOro CJI05l:

TOKa, Ha3bIBaeTC5I

WD

= J2E: (V _ VD) . (_1 + _1 )', e

NA

nopOC!08blM flanpJl:JICeflueM.

)KeHHe Vnop . ~ VD. Ha 30HHOH .lI.HarpaMMeHeBblpO)K.lI.eHHOrO

(4.2)

ND

OqeBH.lI.HO, qTO 3TO Hanp5l-

p-n-nepeXO.ll.a

(CM. pHC.

4.1)

nOKa3aHO, qTO ypoBeHb epMH HaXO.ll.HTC5I Ha onpe.ll.eJIeHHOM paCCT05lHHH OT rpaHHU BaJIeHTHOH 30HbI H 30HbI npOBO.ll.HMOCTH. BeJIHqHHa pa3HocTH

r.ll.e a

C

V-

=

cr . co -

.lI.H3JIeKTpHQeCKa51

npOHHuaeMOCTb

nOJIynpOBO.ll.HHKa,

3HepmH Me)K.lI.Y ypoBHeM epMH H rpaHHuaMH 3THX 30H onpe.ll.eJI5IeTC5I CTaTH:CTHKOH DOJIbUMaHa:

Hanp5l)KeHHe Ha .lI.HO.ll.e.

n Nc

06e.ll.HeHHa51 06JIaCTb 06JIa.ll.aeT BbICOKHM conpOTHBJIeHHeM, nOCKOJIbKY B HeH

MaJIO

CBo60.ll.HbIX HOCHTeJIeH.

BHeUIHee Hanp5l)KeHHe

B 3aBHCH-

MOCTH OT npHJIO)KeHHOH nOJI5IpHOCTH n03BOJI5IeT JIH60 YBeJIHqHTb, JIH60 YMeHbllIHTb nOTeHUHaJIbHbIH 6apbep

p-n-nepeXO.ll.a.

npOTHBOnOJIO)KHblX THnOB, qTO npHBO.ll.HT K

Y8eJLUtteflU1O

TOKa. HOCHTeJIH

.lI.HCPCPYH.lI.HpylOT B 06JIaCTH C npOTHBOnOJIO)KHbIM THnOM npOBO.ll.HMOCTH, r.ll.e OHH peKOM6HHHPYIOT, HcnYCKa51 CPOTOHbI (B CJIyqae H3JIyqaTeJIbHOH peKOM6HHaUHH) . nepBbIM BOJIbTaMnepHYIO

30Ha n-THna,

EF - Ev = -kTln.J!....

30Ha

Nv

npH IIP~MOM CMeme-

HHH 3JIeKTpOHbI H .lI.b1pKH HH)KeKTHpYIOTC5I B 06JIaCTH C npOBO.ll.HMOCT5IMH

Eo - EF = -kT In -

p-TH:na.

(4.6) (4.7)

30HHa51 .lI.HarpaMMa nOKa3bIBaeT, qTO CJIe.ll.YlOma51 cyMMa 3HepmH paBHa HYJIIO:

eVD - Eg

+ (EF -

Ev)

+ (Eo -

EF)

= O.

(4.8)

B JIempOBaHHbIX nOJIynpOBO.ll.HHKaX paCCT05lHHe Me)K.lI.Y ypOBHeM
(I-V)

illOKJIH, n03TOMY Bblpa)KeHHe .lI.JI5I

p-n-nepeXO.ll.a OnHCaJI I-V-xapaKTepHcTHKH TOHKoro pe3Koro xapaKTepHCTHKY

MH H rpaHHuaMH COOTBeTCTBYlOmH:X 30H HaMHoro MeHbllIe llIH:pHHbI 3anpemeHHOH 30HbI, T. e. co CTOPOHbI 06JIaCTH n-THna

Eo - EF «Eg,

a co

86

CTOPOHbI 06JIacTl-1 p-Tl-ma

(4.6)

(4.7)

H

EF - Ev «Eg .

CJIe)I.yeT, "ITO 3TH BeJIHqHHbI rroqTH He 3aBHCHT OT KOH-

(4.8),

rrpeHe6pe% TpeTbHM H qeTBepTbIM CJIaraeMbIMH B ypaBHeHHH

H )I.JIH

Oll.eHKH KOHTaKTHOH pa3HocTH rrOTeHlI.HaJIOB (H rroporOBoro HarrpH)KeHHH) HCrrOJIb30BaTb CJIe)I.YIOllI.ee Bblpa)KeHHe:

0,35 MKM

0,4

0,9

4,0

§

T=295K

Eiill oj

•

ttl ~....

3,0 3eneHLIii GaP1 HHIapHLIii A1InGaP-.

~~ ~ 0

(4.9)

4.2

),=2,01,5 1,2

KpoMe Toro, H3 Bblpa)KeHHH

lI.eHTpall.HH rrpHMeceH (JIOrapH
Ha pHC.

87

4.2. OmlCAOHeHUJl om UaeaAbHbtX BOAbmaMnepHbtX xapaICmepucmuIC

Dt. 4. 3AeICmpUttecICue cBoiicmBa cBemOaUOaOB

~ ~ g

2,0 L - - - - KpaCHO-OpaIDKeBbIiiAlInGaP HI< GaAs (870 HM)

[

J t ~r

+HHTapHLIiiAIInGaP

opaIDKeBbIii AIInGaP KpacHLIiiAlGaAs

+

~ ~ 1,0 rrpe)I.CTaBJIeHbI BOJIbTaMrrepHble xapaKTepHcTHKH pa3Hblx rro-

JIyrrpOBO)I.HHKOBbIX MaTepHaJIOB, )I.JIH KOTOPbIX rrpHBe)I.eHbI 3HaqeHHH llIH-

~

HarrpH)KeHHH, rrOJIyqeHHble H3 3KcrrepHMeHTaJIbHbIX 3aBHCHMOCTeH, rrpH6JIH3HTeJIbHO paBHbI 3HaqeHHHM

°

°

0,0 ILL-..L..-..L.-...l..-.L---L---I----1---1...-L--L..--L--L--1---:-13-=-0--1----1---1...--'---:-'4 1,0 2,0 , ,

pHHbI 3arrpelll.eHHOH 30HbI. BH)I.HO, "ITO )I.JIH 3TH X MaTepHaJIOB rroporOBble

lliHpHHa 3arrpeIlleHHoH 30HbI

Eg • PHC.

0,8

Eg~O,73B

0,6

«-

Eg~

2 -

Eg~

GaAs GaAsP

0- InGaN

.....;- 0,4

THnH"IHaSl 3aBHCHMOCTb npSlMoro HanpSl)!{eHHSI Ha .lI.HO.ll.aX OT llIHpHHhl

3anpemeHHoH 30Hhl .lI.JISI pa3Hblx THnOB CBeTO.ll.HO.ll.OB (Krames,

T=295K a- Ge 6- Si

~

4.3.

E!J' 3B

1,13B 1,43B

Eg~2,03B Eg~2,93B

2000;

Emerson,

2002) )I.JIH 3THX CHCTeM He)I.OCTaTOqHO oTpa60TaHa TeXHOJIOrHH HaHeceHHH KOHTaKTOB, "ITO TaK)Ke rrpHBO)I.HT K rrOBblIIIeHHIO rra)I.eHHH HarrpH)KeHHH Ha HHX; MaTepHaJIbI

THrra

GaN

06bIqHO

06JIa)I.aIOT

HH3KOH

rrpOBO)I.HMOCTbIO

~

~

p-THrra;

0,2

B 6y
0,0

4.2.

° PHC.

4.2.

HarrpIDKeHHe Ha ,!I;HO,!l;e

V,

OTKJIOHeHHH OT H,lJ.eaJIbHbIX BOJIbTaMnepHbIX xapaKTepHCTHK

B

BOJIbTaMnepHble xapaKTepHcTHKH p-n-nepeXO,!l;OB pa3HbIX nOJIynpOBO.ll.HHKOBbIX MaTepHaJIOB, nOJIY"leHHble npH KOMHaTHOH TeMnepaType

113 ypaBHeHHH 1II0KJIH CJIe)I.yeT TeOpeTHqeCKOe Bblpa)KeHHe rrpe)I.rroJIaraeMOH BOJIbTaMrrepHOH xapaKTepHCTHKH p-n-rrepeXO)I.a • .lI.JIH orrHcaHHH 3KcrrepHMeHTaJIbHO Ha6JIIO)I.aeMbIX xapaKTepHCTHK HCrrOJIb3YIOT ypaBHeHHe

Ha pHC.

4.3

rrOKa3aHa 3aBHCHMOCTb rrpHMoro HarrpH)KeHHH Ha )I.HO)I.e or

llIHpHHbI 3arrpelll.eHHOH 30HbI rrpH TOKe qepe3 )I.HO)I.

20

YJIbTpa
(4.9),

COOTBeTCTByeT rrpe)I.-

rrOJIaraeMbIM 3HaqeHHHM rrpHMoro HarrpH)KeHHH. 113 pHC.

4.3

CJIe)I.yeT, "ITO

xapaKTepHCTHKH 60JIbIIIHHCTBa rrOJIyrrpOBO)I.HHKOBbIX CBeTO)I.HO)I.OB .JIe)KaT Ha 3TOH JIHHHH. I1cKJIIOqeHHe COCTaBJIHIOT CBeTO)I.HO)I.bI Ha OCHOBe HHTPH)I.OB

III

I = Is . eeV/(nidealkT),

MA )I.JIH CBeTO)I.HO)I.OB

rpyrrrrbI. .lI.JIH 06bHcHeHHH 3THX OTKJIOHeHHH HMeeTCH HeCKOJIbKO

rrpHqHH:

r)I.e nideal -

CmUKU

(4.10)

Koatj)(jJUI1Ueflm fleu8eaJlbflOCmU 80JlbmaMnepflOU xapaKmepu-

)I.HO)I.a • .lI.JIH H)I.eaJIbHbIX )I.HO)I.OB OH paBeH

1. .lI.JIH

peaJIbHbIX )I.HO)I.OB

JIe)KHT B )I.Harra30He .1,1-1,5. O)I.HaKO v Ha OCHOBe apceHH)I.OB H
K03
K03
2,

a )I.JIH GaN/GaIrtN-)I.Ho)I.oB nideal

=: 6.

DOJIee rrO)I.p06HbIH aHaJIH3 K03
1988)

1).

)I.JIH HHTpH)I.HbIX CHCTeM xapaKTepHbI
1) 06CY)!{.lI.eHHe HeH.lI.eaJIbHbIX BOJIbTaMnepHbIX xapaKTepHCTHK CBeTO.ll.HO.ll.OB C reTepOCTpYKTypaMH InGaN/GaN CM. B

[2-5].

88

FA.

i iT i

a T=300K

-

conpOTHBJIeHIDI o 0

BKJDOQeHHe

2,0

Rp ,

.. - .. -""

_.. -.. -

-0,0

I

4.5

"

BJIllJlllHe

HarrpIDKeHHe Ha )J;Ho)J;e

I -

I._._' .,,,.

CTHKH CTP05lT B JIHHeHHOM H JIOrapHcpMHqeCKOM MaCllITa6ax. Ha pHC.

~,'

I I I

•

BpeMeHHbIM BKJIIOqeHHeM. ,lI.JI5I HX BbI5lCHeHH5I BOJIbTaMrrepHble xapaKTepH-

npelK,lleBpeMeHHoe

~ ~ei\OBaTeJILHoro ~-r;-'I i "_

'

0,0

corrpOTHBJIeHHH (rrOCJIe,n:oBaTeJIbHblX HJIH rrapaJIJIeJIbHblx), TaK H rrpe)!{,n:e-

BAX

I I

• I

BJIllJlllHe

.....·40 ~

• I

Rp

~

O,n:OB OT H,n:eaJIbHbIX MoryT 6b1Tb 06YCJIOBJIeHbI KaK HaJIHqHeM rrapa3HTHbIX

I

I Hi\eaJlLH3JI

~

6,0

:.:

I

KOHKpeTHble rrpHqHHbI OTKJIOHeHHH peaJIbHbIX !-V-xapaKTepHcTHK ,n:H-

6

'~i/

i\HOi\GaAs

8,0

89

4.2. OmKAOfteftUJl om UaeaJlbftblX 80AbmaMnepftblX xapaKmepucmuK

4. 3AeKmpUtteCKue c8oucm8a c8emOaUOa08

I

I

V

conpOTHBJIeHIDI

o--;Wv--+f-o

I I

hfA

.J

Rs

~

J

./

V

V lHA

I

o

0,5

1,0

1,5 2,0 V, B

2,5

PHC.

HarrpIDKeHHe Ha )J;Ho)J;e

l1.l1.eaJIbHali I-V -xapaKTepHcTHKa .lI.HO)J;a, orrHcblBaeMall ypaBHeHHeM 1ll0KJIH

4.5, a. HaeaAbftblU aUoa.

PHC. 4.4. BJIHlIHHe rrOCJIe)J;OBaTeJIbHblX H rrapaJIJIeJIbHbIX rrapa3HTHbIX corrpOTHBJIeHHH Ha BAX p-n-rrepexo.ll.a (a). BOJIbTaMrrepHali xapaKTepHcTHKa C qeTKO Bblpa2KeHHbIM rrpe2K.lI.eBpeMeHHbIM BKJIIOqeHHeM CBeTO.ll.HO.ll.a, CB1I3aHHoro JIH60 C )J;e
06JIa,n:aIOT

npOmU8JleflURMU. Ha pHC.

He)!{eJIaTeJIbHbIMH

4.4

HJIH

napaaumflblMU CO-

I

I

®

~I

I

) ®

)

lMA

V

rrOKa3aHO BJIH5IHHe rrOCJIe,n:OBaTeJIbHbIX H

V lHA

,.=-----/

rrapaJIJIeJIbHbIX rrapa3HTHbIX corrpOTHBJIeHHH Ha BOJIbTaMrrepHble xapaKTePHCTHKH (BAX)

p-n-rrepexo,n:a.

nOCJIe,n:oBaTeJIbHble corrpOTHBJIeHH5I MoryT

~

3a corrpOTHBJIeHH5I HeHTpaJIbHOH 06JIaCTH. JII06ble KaHaJIbI B

......

-=·:::-·F

rr05lBJI5ITbC5I H3-3a CJIHllIKOM 60JIbllIOrO corrpOTHBJIeHH5I KOHTaKTOB HJIH H3-

p-n-rrepexo,n:e,

BbI3BaHHble pa3pYllIeHH5IMH ero 06JIaCTeH HJIH ,n:ecpeKTaMH Ha rroBepxHocTH,

00000

- - -

rrpHBo,n:51T K CPOpMHpoBaHHIO rrapa3HTHbIX rrapaJIJIeJIbHbIX corrpOTHBJIeHHH. ,lI.JI5I yqeTa rrapa3HTHbIX corrpOTHBJIeHHH BOJIbTaMrrepHYIO xapaKTepHCTHKY ,n:Ho,n:a,

orrpe,n:eJI5IeMyIO

CPHll.HpOBaTb. CqHTa5l, "ITO H,n:eaJIbHOMY ,n:HO,n:y,

a

Rs -

ypaBHeHHeM

Rp -

1ll0KJIH,

corrpOTHBJIeHHe,

corrpOTHBJIeHHe,

He06xo,n:HMO

MO,n:H-

CT05llll.ee rrapaJIJIeJIbHO

CT05llll.ee

rrOCJIe,n:OBaTeJIbHO

C H,n:eaJIbHblM ,n:HO,n:OM H llIYHTOM, Bblpa)!{eHHe ,n:JI5I BOJIbTaMrrepHoH xapaKTepHcTHKH p-n-rrepexo,n:a rrpH rrp5lMOM CMelll.eHHH MO)!{HO 3arrHcaTb B BH,n:e

! _ (V - IRs) =! . ee(V-1Rs)/(nideal kT ) Rp s • npH

Rp

--+ 00,

Rs

--+

0

(4.11)

3TO Bblpa)!{eHHe CTpeMHTC5I K ypaBHeHHIO 1ll0KJIH.

O,n:HaKO HHOr,n:a BKJIIOqeHHe CBeTo,n:Ho,n:a rrpOHcxo,n:HT He MrHOBeHHO ITO ,n:OCTH)!{eHHH rroporOBoro

Harrp5l)!{eHH5I,

,n:Harra30H Harrp5l)!{eHHH. Ha pHC.

4.4,6

a

paCT5IrHBaeTC5I Ha HeKOTopbIH

rrOKa3aHbI 06a pe)!{HMa BKJIIOqeHH5I

,n:Ho,n:a. nJIaBHOe BKJIIOqeHHe CBeTo,n:Ho,n:a qaCTO Ha3bIBaIOT npe:HCOeBpeMefl-

flblM 81CJllOtleflueM. n05lBJIeHHe TOKa qepe3 ,n:HO,n: ,n:o ,n:OCTH)!{eHH5I rroporoBoro Harrp5l)!{eHH5I 06b5lCH5IeTC5I JIH60 rrepeHOCOM HOCHTeJIeH qepe3 rroBepxHOCTHble COCT05lHH5I (rroBepxHocTHbIMH TOKaMH YTeqKH), JIH60 HaJIHqHeM rJIy60KHx rrpHMecHblx ypoBHeH B 06beMe rrOJIyrrpoBo,n:HHKa.

'By H)'JIeBoe CMelI\eHHe repMH'leCKOe paBHOBeCHe

MaJIOe CMelI\eHHe (TOK peKOM6HHal\HH)

o6parnoe CMelI\eHHe (TOK reHepaI\HH)

PHC. 4.5,6. flpou.eccbl eeftepau.uu u peKOM6uftau.uu 8 o6eafteftftOU 06Aacmu. B ypaBHeHHH 1ll0KJIH He yqHTbIBaIOTCli aKTbI reHepaD;HH H peKOM6HHaD;HH HOCHTeJIeH, 'rrpOHCXO.ll.lIll1.He B 06e.ll.HeHHOH 06JIaCTH. O.ll.HaKO B peaJIbHbIX .lI.HO.ll.aX B 9TOH 06JIaCTH rrpaKTHqeCKH BCer.ll.a CYlll.eCTBYIOT rrpHMeCHble ypOBHH - JIOBYIIIKH, rrOBblIIIaIOllI.He BepOliTHOCTb peKOM6HHaD;HH, KOTopble rrpHBO.ll.lIT K rrOllBJIeHHIO H36bITOqHOrO TOKa KaK rrpH rrpliMOM, TaK H rrpH 06paTHOM CMelll.eHHH. B pe2KHMe rrpliMoro CMelll.eHHlI B03HHKHOBeHHe H36bITOqHOrO TOKa 06bllCHlieTCli aKTaMH peKOM6HHaD;HH HeOCHOBHbIX HOCHTeJIeH B 06e.ll.HeHHOH 06JIaCTH. 3TOT TOK CKa3b1BaeTClI, B OCHOBHOM rrpH HH3KHX Harrpll2KeHHlIX H rrpHBO.ll.HT K rrOBblIIIeHHIO K09
90

91

4.2. OmKJLOHeHUR om UaeaJLbHblX BOJLbmaMnepHblX xapaKmepucmuK

Fit. 4. 3JLeKmpU'leCKUe CBoucmBa cBemOaUOaOB

I

I

~~~

lMA

)

,,

V

@)-®-~""I-<®

V

lIlA

4.5, e. JI.uoa c napaaumHblMU napaJLJLeJLbHblM u nOCJLeaOBameJLbHblM conpOmUBJLeHURMU. HaJIHqHe TaKHX corrpOTHBJIeHHH rrpHBo,n:HT K HCKa)KeHHlIM I-V-

PHC. PHC.

4.5, B. C/JomomoK.

Koprryc,

TIPH OCBeru:eHHH B ,n:Ho,n:e, rrOMeru:eHHOM B rrp03paqHbIH

6y,n:eT B036Y)K,n:aTbcli
TI03TOMY Bce H3MepeHHlI Heo6xo,n:HMO

xapaKTepHcTHKH CBeTo,n:Ho,n:a, KaK rrpH MaJIblX, TaK H rrpH 60JIblllHX TOKax

rrpoBo,n:HTb B TeMHOTe. ECJIH BbIKJIIOqHTb CBeT HJIH HaKpbITb YCTaHoBKY rrJIOTHOH TKaHbIO, rrapa3HTHbIH
I

H3MepHTeJIbHali arrrrapaTypa rrpH 3TOM
10-

rrpH6JIH3HTeJIbHO paBHbIH

15

A. 3TOT TOK, KaK rrpaBHJIO, He CB1I3aH C ,n:HO,n:OM.

CaMble TOqHble H3MepHTeJIbHble rrpH60pbI rrpH HYJIeBOM CMeru:eHHH H rrOJIHOH TeMHOTe 6y,n:YT rrOKa3bIBaTb TOK rropll,n:Ka

10-

15

A

(10-

15

A

= 10-

3

ITA)

~

I

Y I

I

I I I I I I I I I

/

V

Rs/ PHC.

4.5, e. JI.uoa

C

,'D2

)'

lMA

)

V

> Vih2

4.5, JIC.

PHC.

lMA

I

IIJIO~a.z\bl »IIJIO~a.z\b2

I

I I I I I I I I

I

I I I

D2

Vihl

I

DI

)1.HO,n: C rrapaJIJIeJIbHbIM rrapa3HTHbiM p-n-rrepexo,n:OM MeHbllleH rrJIoru:a-

)

,n:H H C MeHbllleH BbICOTOH rroTeHUHaJIbHOrO 6apbepa, qeM OCHOBHOH rrepexo,n:. )1.JIli

V lllA

JIH60 qepe3 rroBepxHocTHble COCTOllHHlI rro rrepHMeTpy KpHCTaJIJIa, JIH60 BHYT-

TaKHX ,n:HO,n:OB xapaKTepHo rrpe)K,n:eBpeMeHHoe BKJIIOqeHHe, 06bllcHlieMoe YTeqKaMH peHHHMH ,n:e
napaaumHblM nOCJLeaOBameJLbHblM conpOmUBJLeHueM. HaJIHqHe

rrOCJIe,n:OBaTeJIbHOrO corrpOTHBJIeHHlI Be,n:eT K OTKJIOHeHHIO I-V-xapaKTepHcTHKH

C MeHbllleH, ·qeM Y OCHOBHoro ,n:Ho,n:a, BbICOTOH rroTeHUHaJIbHOrO 6apbepa. OTMeTHM, qTO B 3TOM cJIyqae HCKpHBJIeHHe
I-V -xapaKTepHcTHKH

CBeTo,n:Ho,n:a Ha

CBeTo,n:Ho,n:a OT H,n:eaJIbHOH 3KcrrOHeHTbI B 06JIaCTH 60JIblllHX 3HaqeHHH rrpliMoro

rpa
TOKa. B

COOTBeTCTBHH C rrpaBHJIOM KHpxro<pa 3HaqeHHlI Harrpll)KeHHH Ha ,n:Ho,n:e

TOKax rrpliMoro CMeru:eHHlI, qeM ypoBeHb o6paTHoro TOKa HaCblru:eHHlI. 3TO H eCTb

I-V -xapaKTepHcTHKa rrpocToro

OCHOBHoe OTJIHqHe OT CJIyqall ,n:Ho,n:a C rrapaJIJIeJIbHbIM rrapa3HTHbIM corrpOTHBJIeHHeM

H Ha corrpOTHBJIeHHH CKJIa,n:b1BaIOTCli. OTMeTHM, qTO

corrpOTHBJIeHHlI lIBJIlieTCli JIHHeHHOH rrpH rrOCTpoeHHH Ha rpaaKTopaMH

I-V -xapaKTe-

PHCTHK CBeTo.n.Ho.n.OB. npHBe.n.eHHble .n.HarpaMMbI MorYT rrOMOqb qHTaTeJIHM pa306paTbcH Ha rrpaKTHKe B rrp06JIeMaX, B03HHKalOIlI.HX B peaJIbHbIX ,n:HO.n.ax.

YnpaJKHeHHe: KpUmU'leCKUe mO'lKU Ha BOJLbmaMnepHou xapaKmepucmUKe CBemoaUoaa BOJIbTaMrrepHble xapaKTepHCTHKH CBeTo,n:Ho,n:a qaCTO 3a,n:aIOT qeTblpbMlI TOqKaPHC.

4.5, a. JI.uoa

C

napaaumHblM napaJLJLeJLbHblM conpOmUBJLeHUeM (utYHmoM).

B COOTBeTCTBHH C rrpaBHJIOM KHpxro<pa TOKH qepe3 ,n:HO,n: H corrpOTHBJIeHHe CKJIa,n:bI-

npRMblM HanpRJlCeHUeM 1- Vfl, npRMblM HanpRJlCeHUeM 2- Vf2' npRMblM HanpRJlCeHUeM 3 - Vf3 H o6pamHbiM mOKOM Hacblw.eHuR Is. OHH orrpe,n:eJIliIOTCli MH:

COOTBeTCTBeHHO rrpH pa60qeM TOKe (HarrpHMep

BaIOTCli. OTMeTHM, qTO <popMa HCKpHBJIeHHlI xapaKTepHcTHKH rrpH rrpliMoM CMeru:e-

(10

HHH ,n:Ho,n:a, Ha6JIIO,n:aeMali Ha rpa
3TH KpHTHqeCKHe TOqKH rrOKa3aHbI Ha _pHC.

3HTeJIbHO COBrra,n:aeT C o6paTHbIM TOKOM HaCblru:eHHlI. I1MeHHo rro 3TOH oco6eHHOCTH MO)KHO pacrro3HaTb HaJIHqHe rrapa3HTHoro rrapaJIJIeJIbHOrO corrpoTHE!JIeHHlI

MKA), OqeHb HH3KOM rrpliMOM TOKe

(I

100

MA), He6oJIblllOM rrpliMOM TOKe

MKA) H 06paTHOM Harrpll)KeHHH

(-5

B).

4.6.

Tpe6yeTcli 06ocHoBaTb Bbl60p KpHTHqeCKHX TOqeK Ha BOJIbTaMrrepHblX xapaKTepHcTHKax CBeTo,n:Ho,n:OB

(a)

H orrpe,n:eJIHTb, KaiwH H3 CJIe,n:YIOru:HX ,n:BYX CBeTo,n:Ho,n:OB

IrrGaN o6JIa,n:aeT JIyqlllHMH xapaKTepHCTHKaMH

(6): I) Vfl

= 3,2

B,

Vf2

= 2,5

B,

92

Tit. 4. T

T

T

1

1

j

1

100MA

__ C___'___

J

I

OTMeTHM, 'ITO .n.JIH 60JIbIlIHHCTBa .n.HO.n.OB rrapaJIJIeJIbHOe corrpOTHBJIeHHe HaMHoro rrpeBbliliaeT rrOCJIe.n.OBaTeJIbHOe, rr03TOMY rrpH oueHKe rrapaJIJIeJIbHOro corrpOTHBJIeHHH HeT Heo6xo.n.HMOCTH Y'IHTblBaTb rrOCJIe.n.OBaTeJIbHOe

I

corrpOTHBJIeHHe. nOCJIe.n.OBaTeJIbHOe corrpOTHBJIeHHe CJIe.n.yeT oueHHBaTb TOJIbKO rrpH Bbl-

IOMKA=L IMKA't, ---'---'-0;0 1

-SB

•

93

4.3. O~eftKa BeltU'lUftbt napaaUmftbtX conpOmUBlteftUU auoaa

3lteKmpU'leCKUe CBoucmBa cBemOaUOaOB

COKHX HarrpH)I{eHHHX, Kor.n.a

V ~( l., Vf3 Vf2 Vfl

Is

V> Eg/e. B

3THX CJIY'IaHX BOJIbTaMrrepHaH

xapaKTepHCTHKa .n.Ho.n.a CTaHOBHTCH JIHHeHHOH H

rr03TOMY .n.JIH oueHKH

rrOCJIe.n.OBaTeJIbHOrO COrrpOTI-IBJIeHHH MO)KHO HCrrOJIb30BaTb COOTHOIlIeHHe

(4.13)

Rs = dV/ dI. O.n.HaKO PHc.4.6. KpHTH'ieCKHe TOqKH BAX CBeTo,n:Ho,n:a: npllMoe Hanpll)l{eHHe 1, Vfl (H3MeplleMoe npH pa60qeM TOKe, HanpHMep 100 MA), npllMoe Hanpll)l{eHHe 2, Vf2 (H3MeplleMoe npH He60JIbIlIOM npllMOM TOKe, 10 MKA), npllMoe Hanpll)l{eHHe 3, Vf3 (H3MeplleMoe npH OqeHb HH3KOM npllMOM TOKe, 1 MKA), H 06paTHbIH TOK HaCblIUeHHlI, Is (onpe,n:eJIlIeMbIH npH 06paTHoM Hanpll)l{eHHH, -5 B)

Vf3 = 2,3 B, Is Is = 0,8 MKA.

=

0,8 MKA; 2)

VfI

=

3,4 B,

Vf2

=

2,0 B,

Vf3

=

1,8 B,

(4.11)

BOJIbTaMrrepHYro xapaKTepHCTHKY

(Rp ~ 00)

MO)KHO 3arrHcaTb B BH.n.e:

(4.14) PeIlIHB 3TO ypaBHeHHe OTHOCHTeJIbHO rro

PemeHHe. (a) nJIlI CBeTo,n:Ho,n:OB, H3JIyqaIOIUHX Ha O,n:HOH H TOH )I{e nHKOBOH ,n:JIHHe BOJIHbI, Vfl ,n:OJI)I{HO 6bITb· KaK MO)l{HO MeftbUle, nOCKOJIbKY ero BblCOKHe 3HaqeHHlI YKa3bIBaIOT Ha 60JIbIlIOe nOCJIe,n:OBaTeJIbHOe conpOTHBJIeHHe. Hanpll)l{eHHe Vf2 ,n:OJI)I{HO 6bITb KaK MO)l{HO 60ltbUle H KaK MO)l{HO 6JIH)I{e Vfl, nOCKOJIbKY HH3Kall BeJIHqHHa Vf2 CBH,n:eTeJIbCTByeT 0 qpe3MepHbIX YTeqKaX, npHBo,n:lIIUHX K npe)l{,n:eBpeMeHHOMY BKJIIOqeHHIO CBeTo,n:Ho,n:a. TaKHe )I{e paCCY)I{,n:eHHlI cnpaBe,n:JIHBbI H ,n:JIlI Vf3. 06paTHblH TOK HaCblIUeHHlI ,n:OJI)I{eH 6b1Tb KaK MO)l{HO MeftbUle, nOCKOJIbKY ero BblCOKHe 3HaqeHHlI YKa3bIBaeT Ha HaJIHqHe MexaHH3MOB YTeqKH TOKa (HanpHMep YTeqKH no nOBepXHOCTH HJIH no 06beMY, CB1I3aHHble C nOBepXHOCTHblMH COCTOllHHlIMH, TOqeqHbIMH ,n:ecpeKTaMH H ,n:HCJIOKaUHlIMH B 06beMe nOJIynpOBo,n:HHKa). HH3KHe 3HaqeHHlI Vfl H Is COBMeCTHO C BbICOKHMH 3HaqeHHlIMH Vf2 H Vf3, KaK npaBHJIO, cooTBeTcTBYIOT CBeTo,n:Ho,n:aM, 06JIa,n:aIOIUHMH BbICOKOH Ha,n:e)l{HOCTbIO. (6) ITepBblH ,n:HO,n: 06JIa,n:aeT JIyqIlIHMH xapaKTepHcTHKaMH, qeM BTOPOH, 6JIaro,n:apH 60JIee HH3KOMY nOCJIe,n:oBaTeJIbHoMY conpOTHBJIeHHIO H He60JIbIlIHM YTeqKaM, npHBO,n:HIUHM K npe)l{,n:eBpeMeHHoMY BKJIIOqeHHIO ,n:Ho,n:a.

HHor.n.a H3-3a HarpeBa OUeHKY corrpOTHI~JIeHHH .n.Ho.n.a CJIe.n.yeT

rrpOBo.n.HTb rro-.n.pyroMy. .lJ.JIH .n.HO.n.OB C 60JIbllIHM rrapaJIJIeJIbHblM corrpOTHBJIeHHeM

I,

V

H rrpo.n.Hlp
rrOJIY'IaeM Bblpa)KeHHe

dV _ R

df -

s

kT 1 + -nideal - e - . I'

(4.15)

r.n.e BTopoe CJIaraeMOe B rrpaBoH 'IaCTH ypaBHeHHH rrpe.n.cTaBJIHeT C060H .n.H
I,

p-n-rrepexo.n.a.

YMHO)KHB 3TO ypaBHeHHe

MO)KHO HaHTH rrOCJIe.n.OBaTeJIbHOe corrpOTHBJIeHHe .n.Ho.n.a H3 HaKJIOHa

3aBHCHMOCTH
a

dI

OT

1

I,

rroKa3aHHoH Ha pHC.

4.7,6.

6 IdV/dI=RsI+kT/e

,I

4.3.

HaKlIOH = 1/Rs ~

Ou.eHKa BeJIHqHHbI napa3HTHbIX conpOTHBJIeHHH

o

.n;Ho.n;a

I

napaJIJIeJIbHOe corrpOTHBJIeHHe .n.Ho.n.a MO)KHO oueHHTb rro TepHCTHKe B .n.Harra30He HarrpH)KeHHH KOOp.n.HHaT.

B

V

«:

Eg/e,

T. e.

I-V-xapaK-

B6JIH3H Ha'IaJIa

3TOM .n.Harra30He HarrpH)KeHHH TOKOM 'Iepe3 p-n-rrepexo.n.

MO)KHO rrpeHe6pe'Ib, a rrapaJIJIeJIbHOe corrpOTHBJIeHHe HaHTH H3 Bblpa)KeHHH

Rp

=

dV/dI.

(4.12)

I

I I I

o HanpH)l{eHHe Ha ,UHo,n:e V

TOK qepe3 ,UH0,l(

I

PHC. 4.7. MeTo,n: oueHKH nOCJIe,n:OBaTeJIbHOrO conpOTHBJIeHHH ,n:Ho,n:a: a - Rg onpe,n:eJIHeTCH no TaHreHCY yrJIa HaKJIOHa BAX CBeTo,n:Ho,n:a npH V > vth; 6 - ypaBHeHHe kT / e B paMKe cnpaBe,n:JIHBO ,n:JIH ,n:Ho,n:a npH npHMoM CMeIUeHHH, Kor,n:a V

:»

94

FA. 4. 3AeKmpU'leC1We CBoucmBa cBemo8uo8oB

B GaAs p-THrra

4.4. 3HeprHR H3JIYQeHHR

HO,

3HeprH5I CPOTOHOB, H3JIY'IaeMbIX rrOJIyrrpOBO,lI.HHKOM, orrpe,lI.eJI5IeTC5I IIIHPHHOH ero 3arrpemeHHoH 30HbI

95

4.6. Pacnpe8eAeftUe ftOCUmeAeu B p-n-zemeponepexo8ax

Ln = (220 CM2/c

HeOCHOBHbIe

HOCHTeJIH

MKM. CJIe,lI.OBaTeJIb-

HeCKOJIbKHX MHKpOMeTpOB.

Eg :

Ha pHC.

4.8, a

H

6

rrOKa3aHO pacrrpe,lI.eJIeHHe HOCHTeJIeH B p-n-rrepexo,lI.e

B YCJIOBH5IX HYJIeBOrO H

(4.16)

1O-8 c ) 1/2 ~ 15

X

pacrrpOCTpaH5IIOTC5I Ha paCCT05lHHe rrOp5l,lI.Ka

rrp5lMOrO

CMemeHH5I.

BH,lI.HO,

'ITO HeOCHOBHbIe

HOCHTeJIH crroco6HbI ,lI.HCPCPYH,lI.HpOBaTb Ha ,lI.OBOJIbHO 60JIbIIIHe paCCT05lHH5I. KpoMe Toro, 'IeM ,lI.aJIbIIIe HeOCHOBHble HOCHTeJIH rrpOHHKalOT B COCe,lI.HHe

B

H,lI.eaJIbHOM ,lI.HO,lI.e HH)KeKII.H5I B aKTHBHYIO 06JIaCTb O,lI.HOrO 3JIeKTpOHa

rrpHBO,lI.HT K reHepaII.HH O,lI.HOrO cpoToHa.

M3

3aKOHa coxpaHeHH5I 3HeprHH

CJIe,lI.yeT, 'ITO 3HeprH5I 3JIeKTpOHa rrpH 3TOM ,lI.OJI)KHa paBH5ITbC5I 3HeprHH cpOTOHa, T. e.

eV = hll. M3

(4.17)

3Toro BbIpa)KeHH5I BH,lI.HO, 'ITO 3HeprH5I cpOTOHa paBHa rrpOH3Be,lI.eHHIO

06JIaCTH, TeM CHJIbHee CHH)KaeTC5I HX KOHII.eHTpaII.H5I. CJIe,lI.OBaTeJIbHO, aKTbI peKOM6HHaII.HH rrpOHCXO,lI.51T B ,lI.OCTaTO'IHO IIIHPOKOH 06JIaCTH, ,lI.JI5I KOTOPOH xapaKTepHO CHJIbHOe H3MeHeHHe KOHII.eHTpaII.HH HeOCHOBHblX HOCHTeJIeH. .LI.aJIee 6Y,lI.eT rrOKa3aHO, 'ITO paCIIIHpeHHe 06JIaCTH peKOM6HHaII.HH B rOMOreHHbIX rrepeXO,lI.ax OTpHII.aTeJIbHO CKa3bIBaeTC5I Ha 3cpcpeKTHBHOCTH H3JIy'IeHH5I.

Harrp5l)KeHH5I, rrpHJIO)KeHHOrO K CBeTO,lI.HO,lI.y, Ha BeJIH'IHHY 3ap5l,lI.a 3JIeKTpO-

a

Ha . .LI.aJIee 6Y,lI.YT o6CY)K,lI.aTbC5I 51BJIeHH5I, crroco6HbIe rrOBJIH5ITb Ha COOTHO-

----------~,~

IIIeHHe

(4.17).

P-THII

TOKa

B

,lI.OBOJIbHO

TPY,lI.HO.

88U:JICIiOCmb liOCUmeJleu, a

rrpome

rOMoreHHbIX

p-n-rrepeXO,lI.ax,

HOCHTeJIeH H3MepHTb

3KcrrepHMeHTaJIbHO

orrpe,lI.eJIHTb

no-

HCrrOJIb3Y51 ,lI.JI5I 3Toro, HarrpHMep, 3cpcpeKT XOJIJIa,

K03cpcpHII.HeHT ,lI.HCPCPY3HH

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H3

H

:

...

:::::::::::::.:-

_.~._. ___________._._._.

::

---------

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hv

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~Lp~

................................1f.

coomliOUleliUJl 3UliUlmeUlia,

PHC.

6

....

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----------,~!!!~.......... ~

kT Dp = -J.Lpe

..

----~----

..

KOTopoe ,lI.JI5I HeBbIpO)K,lI.eHHbIX rrOJIyrrpOBO,lI.HHKOB HMeeT BH,lI.

kT Dn = -J.Ln e

hv

Tn

000000000

.................................

Koa¢¢JUl{uelim 8u¢¢y3uu

rOpa3,lI.O

C

:

~Ln~

~ ~ "

::::::::::::::::::••••••••••••••• EV ~~~~~~~~~~~~~~~ •••••••••••••

T. e. B rrepeXO,lI.ax B rrpe,lI.eJIax O,lI.HOrO MaTepHaJIa, 3aBHCHT OT K03cpcpHII.HeHTa ,lI.HCPCPY3HH HOCHTeJIeH.

:"-WD~

••••••••••••••••

p-n-nepexo.z:r.ax HOCHTeJIeH

............... ••••••••••••• E

:,

---------------------t----- ------:--------------------- EF "Qoo~OQiO~O~O~OOO~~o~ooQiO[·0::-:'0 : n-TIm

4.5. Pacnpe.z:r.eJIeHHe HOCHTeJIeH.B rOMoreHHbIX Pacrrpe,lI.eJIeHHe

6

Pacrrpe,lI.eJIeHHe

HOCHTeJIeH

H rrpHMoro

(6)

(a)

CMemeHHH, p-n-reTeporre-

peXO,lI. rrpH rrpHMOM CMemeHHH

(B). B

ro-

MoreHHblX rrepexo,lI.ax HOCHTeJIH ,lI.O peKOM6HHaUHH rrpOJIeTalOT B Cpe,lI.HeM pacCTOHHHH, paBHbIe,lI.HCPCPY3HOHHblM ,lI.JIH-

~~~~~~~~~~~~~~~~~.~.~.~.~.~.~~.~.~.~.

(4.18)

4.8.

B p-n-rrepexo,lI.e B YCJIOBHHX HYJIeBOrO

•••••••••••••••••••••••••••••••••

HaM

Ln

HJIH

Lp. B

reTeporrepeXO,lI.ax

HOCHTeJIH 3aKJIIO'IeHbI B 06JIaCTH Me)l{,lI.Y ,lI.BYMH 6apbepHblMH CJIOHMH

HOCHTeJIH, HH)KeKTHpOBaHHbIe B HeHTpaJIbHbIH rrOJIyrrpOBO,lI.HHK B OTCYTCTBHe BHeIIIHHX 3JIeKTpH'IeCKHX rrOJIeH, rrepeMemalOTC5I 3a C'IeT ,lI.HCPCPY3HH. I1PH HH)KeKTHpOBaHHH HOCHTeJIeH B 06JIaCTb C rrpOBO,lI.HMOCTblO rrpOTHBOrrOJIO)KHOrO THrra HeOCHOBHbIe HOCHTeJIH Ha'IHHaIOT' peKoM6HHHpoBaTb

4.6. Pacnpe.z:r.eJIeHHe HOCHTeJIeH B p-n-reTeponepexo.z:r.ax

CJIY'IaHHbIM o6pa30M. Cpe,lI.Hee paCCT05lHHe, KOTopoe rrpOJIeTalOT HeOCHOB-

8U¢¢y3UOliliOU 8JlUliou.

Bce COBpeMeHHbIe CBeTO,lI.HO,lI.bI pa3pa6aTbIBalOTC5I Ha OCHOBe reTeporre-

3JIeKTpOHbI, HH)KeKTHpyeMbIe B 06JIaCTb p-THrra, ,lI.O peKOM6HHaII.HH C ,lI.bIp-

peXO,lI.OB. YCTpOHCTBa Ha reTeporrepeXO,lI.ax COCT05lT H3 rrOJIyrrpOBO,lI.HHKOB

HbIe HOCHTeJIH ,lI.O peKOM6HHaII.HH, Ha3bIBaeTC5I

KaMH ,lI.HcpcpYH,lI.HPYIOT B Cpe,lI.HeM Ha paCCT05lHHe, paBHoe ,lI.HCPCPY3HOHHOH ,lI.JIHHe

Ln . .LI.JI5I

HaXO)K,lI.eHH5I ,lI.HCPCPY3HOHHOH ,lI.JIHHbI HCrrOJIb3YlOT BbIpa)Ke-

,lI.ByX TImOB: C Y3KOH 3arrpemeHHOH 30HOH ,lI.JI5I C03,lI.aHH5I aKTHBHOH 06JIaCTH H C IIIHPOKOH 3arrpemeHHOH: 30HOH: ,lI.JI5I CPOpMHpOBaHH5I 6apbepHbIX CJIOeB. ECJIH B COCTaB CTpyKTYPbI BXO,lI.51T ,lI.Ba 6apbepHbIX CJI05l, OHa Ha3bIBaeT-

HH5I

(4.19)

C5I

880U1WU eemepocmpYKmypou

('IaCTO HCrrOJIb3yeTc5I COKpameHHe .LI.rC

HJIH DH). r,lI.e 'Tn H 'Tp -

BpeMeHa )KH3HH HeOCHOBHblX HOCHTeJIeH: 3JIeKTpOHOB HJIH

Ha pHC.

4.8,8

rrOKa3aHO BJIH5IHHe reTeporrepeXO,lI.OB Ha pacrrpe,lI.eJIeHHe

,lI.bIpOK. B THrrH'IHbIX rrOJIyrrpOBO,lI.HHKaX ,lI.HCPCPY3HOHHa51 ,lI.JIHHa paBH5IeTC5I

HOCHTeJIeH. B ,lI.BOHHbIX reTepocTpYKTypax 6apbepHbIe CJIOH OrpaHH'IHBalOT

HeCKOJIbKHM MHKpOMeTpaM. HarrpHMep, ,lI.HCPCPY3HOHHa51 ,lI.JIHHa 3JIeKTpOHOB

HH)KeKTHpOBaHHbIe HOCHTeJIH B aKTHBHoH 06JIaCTH. I103TOMY BeJIH'IHHa

Fit. 4. 3AeKmpUtteClwe cBoiicmBa cBemo8uo8oB

96

06JIaCTI1

peKoM611HaUI111

onpeaeJlRemCR

fte

97

4.7. BAuRflue eemeponepexo8oB fla conpomuBAeflue ycmpoiicmB

aUc/Jc/JY3UOftftOU aJlUftOU,

a

mOJllJ,fUftOU aKmUBft020 CJlOR.

flOKa3aHHoro

Ha

Pl1c.

4.9,a.

3apfl,lJ,aM,

flepeMemaIOml1MCfI

113

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MaTepl1aJIa B ,lJ,pyroH, flPI1XO,lJ,RTCfI flpeO,lJ,OJIeBaTb 3TOT 6apbep 3a CqeT JII160

3TO OqeHb cymecTBeHHoe 113MeHeHl1e. I1pe,lJ,flOJIO)KI1M, 'ITO TOJIml1Ha

TYHHeJIbHOrO 3cpcpeKTa, JII160 TeflJIOBOH 3Hepml1. COflpOTI1BJIeHl1e flepeXO,lJ,-

aKTI1BHOH 06JIaCTI1 HaMHoro MeHbIIle TI1f1l1qHOH ,lJ,I1CPCPY3110HHOH ,lJ,JII1Hbi.

HbIX 06JIaCTeH OTpl1uaTeJIbHO OTpa)KaeTCfI Ha xapaKTepl1CTI1KaX ,lJ,110,lJ,OB,

1-20

3HaqeHI1f1 ,lJ,I1CPCPY3110HHbIX ,lJ,JII1H 06blqHO JIe)KaT B ,lJ,l1afla30He

MKM,

a pa3MepbI aKTI1BHOH 06JIaCTI1 B ,lJ,BOHHbIX reTepocTpYKTypax COCTaBJIflIOT

0,01-1,0

MKM. 3TO 03HaqaeT, 'ITO KOHueHTpaUI1f1 HOCI1TeJIeH B aKTI1BHOH

oco6eHHO MOmHhlX CBeTO,lJ,110,lJ,OB. TeflJIOBafl MOmHOCTb, COflpOTI1BJIeHl111 reTepOflepeXO,lJ,OB,

Bhl,lJ,eJIfleMafl Ha

Be,lJ,eT K HarpeBY aKTI1BHOH 06JIaCTI1,

'ITO CHI1)KaeT KBaHTOBbIH BbIXO,lJ, 113JIyqeHI1f1

06JIaCTI1 ,lJ,BOHHbIX reTepoCTpYKTYP HaMHoro flpeBbIIIlaeT I1X KOHueHTpa-

6

a

UI1IO B rOMoreHHbIX flepeXO,lJ,ax, r,lJ,e HOCI1TeJII1 paCflpe,lJ,eJIeHbI B I1HTepBaJIe HeCKOJIbKI1X ,lJ,I1CPCPY3110HHbIX ,lJ,JII1H. 113 ypaBHeHI1f1,lJ,JIfI CKOPOCTI1 6I1MOJIe-

CTpytcrypa c nOCTeneHHblM H3MeHeHHeM_illHpHHLI 3anpemeHHoH 30HLI (sapH30HHalI)

KYJIflPHOH 113JIyqaTeJIbHOH peKOM611HaUI111

(4.20)

R=B·n·p

•

e

CJIe,lJ,yeT, 'ITO BbICOKafl KOHueHTpaUI1f1 HOCI1TeJIeH B aKTI1BHOH 06JIaCTI1 yBe-

t

JlUtf,UBaem CKOPOCTb 113JIyqaTeJIbHOH peKOM611HaUI111 11 CHI1)KaeT peKOM611-

Eg

HaUI10HHOe BpeMfI )K113HI1. I103TOMY Bce BbICOK03cpcpeKTI1BHble CBeTO,lJ,110,lJ,bI

1

~

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Eg

j

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reTepOCTpYKTYP

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~~

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Y3K030HHblH nonynpoBO,l\HHK

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60JIbIIll1e paCCTOflHI1f1.

,UJIfI

HaflpaBJIeHI1f1

CBeTa B BOJIHOBO,lJ, qaCTO

flpl1MeHflIOT CBeTO,lJ,110,lJ,bI C TopueBbIM BbIBO,lJ,OM 113JIyqeHI1f1, TaK)Ke, KaK flpaBI1JIO, Ha OCHOBe reTepoCTpyKTyp. B COCTaB 60JIbIIll1HCTBa COBpeMeHHbIX flOJIYflPOBO,lJ,HI1KOBhlX CBeTO,lJ,110,lJ,OB 11 JIa3epOB BXO,lJ,flT HeCKOJIbKO reTepo-

pe3KalI IpaHHUa pa3,l\ena

mHpOK030HHhIH nonynpoBO,l\HHK

Y3K030HHhlH nonynpOBO,l\HHK

mHpOK030HHhlH nonynpOBO,l\HHK

saPH30HHalI o6naCTL

PHc.4.9. 30HHaH ,lJ,HarpaMMa pe3Koro reTeporrepexo,lJ,a (a) H BapH30HHoro reTeporrepexo,lJ,a (6) Me}!{AY ABYMH rroJIyrrpoBoAHHKaMH C 3arrpemeHHbIMH 30HaMH pa3HoH llIHpHHbI. Pe3KHH rrepeXOA 06JIaAaeT 60JIbIIIHM corrpOTHBJIeHHeM, '1eM rrJIaBHblH, 'ITO CBH3aHO C cjJOpMHpOBaHHeM B HeM rrOTeHIJ:HaJIbHOrO 6apbepa -(Schubert, 1992)

flepeXO,lJ,OB: Me)K,lJ,y KOHTaKTHbIMI1 CJIOflMl1, aKTI1BHbIMI1 06JIaCTflMI1 11 BOJIDbIJIO ,lJ,OKa3aHO, 'ITO flJIaBHbIM 113MeHeHI1eM XI1Ml1qeCKOrO COCTaBa flO-

HOBO,lJ,aMI1. HeCMOTpfl Ha TO, 'ITO reTepOCTpYKTypbI fl03BOJIflIOT YJIyqIIlaTb xapaKTepl1CTI1KI1 CBeTO,lJ,110,lJ,OB, I1X flpl1MeHeHl1e CBfl3aHO C Pfl,lJ,OM flpo6JIeM. O,lJ,HOH Pl1c.

4.9, a

113

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4.9,6

YCTpaHI1Tb

1992).

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flOKa3aHa 30HHafl ,lJ,l1arpaMMa CTpyKTYPbI C flOCTefleHHbIM 113Me-

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n-TI1f1a.

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C HI13KI1MI1 3HaqeHI1f1MI1 3Hepml1.

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pOCTpyKTYPbI C flapa60JII1qeCKI1M 113MeHeHI1eM IIll1pl1HbI 3aflpemeHHOH 30Hhl CpaBHI1MO C 06beMHbIM COflpOTI1BJIeHHeM MaTepl1aJIa. TaKI1M 06pa30M, ,lJ,O-

3JIeKTpOHOB

flOJIHI1TeJIbHOe COflpOTI1BJIeHl1e, BHOCI1MOe pe3KI1M reTepOflepeXO,lJ,OM, MO)KeT 6hlTb flOJIHOCTbIO KOMfleHCl1pOBaHO 113MeHeHHeM COCTaBa flOJIYflPOBO,lJ,HI1Ka

3apfl)KeHHOrO

B6-!l11311 caMoro flepeXO,lJ,a flO flapa60JII1qeCKOMY 3aKOHY.

06e,lJ,HeHHOro

CJIOfl

flOJIYflPOBO,lJ,HI1Ke

C 11

pe3YJIbTaTe flepeHoca

B

ypOBHI1

o6pa3yeTcfI 3JIeKTpOCTaTI1qeCKI1H ,lJ,11f10JIb, COCTOflml1H 113 flOJIO)KI1TeJIbHO IIll1POK030HHOM

B

MaTepl1aJIa

flPOBO,lJ,I1MOCTI1

110HI1311pOBaHHbIMI1 OTpl1uaTeJIbHO

,lJ,OHOpaMI1

3apfl)KeHHOrO

B

CJIOfl

3JIeKTpOHOB, HaKOflJIeHHbIX B Y3K030HHOM flOJIYflPOBO,lJ,HI1Ke, 'ITO flPI1BO,lJ,I1T K

I1CKpl1BJIeHI1IO

3HepreTI1qeCKI1X

30H

11

CPOpMl1pOBaHI1IO

6apbepa,

'

IlIl1pl1Ha 3aflpemeHHOH 30HbI ,lJ,OJI)KHa 113MeHflTbCfI flO flapa60JIe TaK)Ke 11

flO

CJIe,lJ,YIOmeH

flpl1ql1He.

B

IIll1POK030HHOM

flOJIYflPOBO,lJ,HI1Ke BCJIe,lJ,-

CTBl1e Ml1rpaUl111 3JIeKTpOHOB B Y3K030HHbIH flOJIYflPOBO,lJ,HI1K Ha6JIIO,lJ,aeTCfI

4 <1>. E. lIly6epT

4.7. BAUJI-flue eemeponepeXOa08 fla conpomu8Aeflue ycmpoucm8

98

Fl/.. 4. 3AeKmpUtteCKue c8oucm8a c8emOaUOa08

HeXBaTKa cBo6o,n:HbIX HOCHTeJIeH. TI03TOMY KOHueHTpaUHH 3apH,n:oB B HeM orrpe,n:eJIHeTCH KOHueHTpaUHeH ,n:OHOpOB. CtII1TaH, qTO KOHueHTpaUHH ,n:OHOpOB

ND

rrOCTOHHHa rro BceH reTepocTpyKType, H3 ypaBHeHHH TIyaccoHa

MO)KHO HaHTI'! BeJIHqHHY 3JIeKTpOCTaTHqeCKOro rrOTeHUHaJIa:

=

e~D

Jl.JllI lfJopMHpoBaHHlI rpaJl.HeHTHOro reTeporrepeXOJl.a, o6J1aJl.alOIII.ero MHHHMaJlbHbIM corrpOTHBJleHHeM.

PemeHHe. 113 ypaBHeHHlI (4.22) HaHJl.eM TOJlIII.HHY 06eJl.HeHHOro CJlOll WD = 30 HM. CJleJl.OBaTeJlbHO, Jl.JllI CHH:lKeHHlI rrepeXOJl.HOrO corrpOTHBJleHHlI Heo6xoJl.HMO lfJOPMHpOBaTb rrJlaBHbIH reTeporrepexoJl. Ha rrpOTlI:lKeHHH 30 HM. PHC. 4.9,6 rrOKa3bIBaeT,

. x 2•

(4.21)

qTO 06J1aCTb rrJlaBHOrO reTeporrepexoJl.a Jl.OJl:lKHa COCTOllTb H3 a8YX rrapa60JlHqeCKHX 06J1aCTeH.
H3 ypaBHeHHH BH,n:HO, qTO rrOTeHUHaJI CBH3aH C rrpocTpaHcTBeHHoH KOOP,n:HHaToH

x KBaopamUt/.H.oCi 3aBUCUMocmblO,

99

T. e. 3aBHCHMOCTb rrOTeHUHaJIa

TepocTpyKTypax. PHC.

0'1' paCCTOHHHH HMeeT rrapa60JIHqecKYIO tPOPMY. ,lJ.JIH KOMrreHcaUHH rrapa-

4.10

rrOKa3bIBaeT BJIHHHHe TaKHX rrepexo,n:oB Ha rro-

a

oouHaKoBozo nomeHupa;/.a B,n:OJIb maK:HCe OOA:HCeH U3MeHflmbCfl no napa60AUtteCKoMY aaKOHY. TIpH 3TOM CqHTaeTCH, qTO

60JIHqeCKOH 3aBHCHMOCTH H rrOJIyqeHHH

'lSi

BceH CTpyKTYPbI XHMHqeCKHH COCTaB rrOJIyrrpoBo,n:HHKa

~~

rrapa60JIHqeCKHe H3MeHeHHH XHMHqeCKOrO COCTaBa rrpHBe,n:yT K rrapa60-

p~ ~ ~.

B 3aBHCHMOCTH llIHpHHbI 3arrpeIII.eHHOH 30HbI 0'1' COCTaBa. BbIBe,n:eM paCqeTHOe COOTHOIlIeHHe ,n:JIH rrOJIyqeHHH Tpe6yeMbIx BapH30HHbIX reTepocTpyKTyp. TIpe,n:rrOJIO)KHM, qTO pa3pbIB 30HbI rrpOBo,n:HMO-

AEe

H qTO CTpyKTypa

WD

- EFp

06e,n:HeHHOH 06JIaCTH TOJIIII.HHOH

----;:::-,t';--------

AEe/ e,

3JIeKTpOHbI rrepeCTaIOT rrepeMeIII.aTbCH

B Y3K030HHbIH MaTepHaJI. H3 ypaBHeHHH 06e,n:HeHHoH 06JIaCTH:

(4.21)

WD=

6

MO)KHO HaHTH TOJIIII.HHY

26' flEe e2 .ND .

B

rrepexo,n:HOH

06JIaCTH

~ g~~~ 1----,-------"'.

(4.22)

TOJIIII.HHOH

WD

Bap.ll30HHaJI rrepeXO.l\HaJI o6naCTh

'lSi

He06xo,n:HMO

rrJIaBHO H3MeHHTb CTerreHb JIerHpOBaHHH rrOJIyrrpOBo,n:HHKa ,n:JIH rrOJIyqeHHH rrJIaBHOrO reTeporrepexo,n:a. XO'I'H BbIpa)KeHHe TOJIbKO rrpH6JIH3HTeJIbHYIO BeJIHqHHY

W D,

(4.22)

rr03BOJIHeT rrOJIyqHTb

OHO OqeHb rrOJIe3HO rrpH rrpoeK-

p-nm

THpoBaHHH H3JIyqaIOIII.HX YCTPOHCTB. ,lJ.JIH 60JIee TOqHbIX paCqeTOB MO)KHO rrpHMeHHTb MeTO,n: rrOCJIe,n:OBaTeJIbHbIX rrpH6JIH)KeHHH. HarrpHMep, MO)KB03HHKHOBeHHH

CJIOH

HaKOrrJIeHHH

3JIeKTpoHoB.

CYIII.eCTByeT

Atlas, pa3pa60-

TaHHbIH tPHPMOH CHJIbBaKo.

YnpalKHeHHe. IIpoeKmupo8aflue epaaueflmflblx eemeponepexOa08 CqHTaeM, qTO pa3pbIB 30HbI rrpOBOJl.HMOCTH reTepOCTpYKTypbI AIGaAs/GaAs paBeH flEe = 300 M9B H qTO CTPYKTyga paBHOMepHO JlerHpOBaHa Jl.OHOPHOH rrpH3 MeCblO C KOHII.eHTpaII.HeH N D = 5 . 10 7 CM- . Tpe6yeTclI HaHTH TOJlIII.HHY rrepeXOJl.HOrO CJlOll, BKOTOPOM CJleJl.yeT H3MeHlITb XHMHqeCKHH COCTaB rroJlyrrpOBOJl.HHKa

Ey

~/-------------

______________ fny6.l1Ha

__-_-_-_-_-__Ee

----------------r---

HeCKOJIbKO

rrporpaMMHbIx rraKeTOB, rr03BOJIHIOIII.HX paCCqHTbIBaTb rrOJIyrrpoBo,n:HHKoBbIe reTepocTpYKTYPbI qHCJIeHHbIMH MeTo,n:aMH. O,n:HH H3 HHX -

Bap.ll30HH~_ _ _ __

'l. . -.;. . ._-_"f- -J- ;:=_=_: :-_~ ~_-_-_-

..

HO yqeCTb H3MeHeHHe rrOTeHUHaJIa B Y3K030HHOM rrOJIyrrpoBo,n:HHKe H3-3a

n-nm

rrepeXOmIaJI o6naCTb

~ 1:> ~8 L-________~======~ ~

CJIe,n:OBaTeJIbHO, ,n:JIH MHHHMH3aUHH corrpOTHBJIeHHH, BHOCHMoro pe3KHM reTeporrepexo,n:OM,

1

~.

B IlIHPOK030HHOM rrOJIyrrpOBo,n:HHKe. ECJIH rrOTeHUHaJI B 06e,n:HeHHOH

06JIaCTH CTaHOBHTCH paBHbIM

-~---':"'-EFn--- Ee

----

ND .

TaK)Ke 6y,n:eM CqHTaTb, qTO MHrpaUHH HOCHTeJIeH B Y3K030HHbIH rrOJIyrrpOBo,n:HHK rrpHBeJIa K tPOpMHpOBaHHIO

...,

0

cYIII.eCTByeT JIHHeHHaH CBH3b H MO)KHO rrpeHe6pe% KBa,n:paTHqHbIM qJIeHOM

CTH, BbI3BaHHbIH pe3KHM reTeporrepexo,n:OM, paBeH

6apbep~ cnOM:

aKT.lIBHaJI 06naCTh

~~ lSi ~ 8 LAl_x_G_al::..._.::.~_S__-======G=aA==s=======--__Al_x_G_a:...l-:~_S____

JIHqeCKHM H3MeHeHHHM llIHpHHbI 3arrpeIII.eHHOH 30HbI, T. e. Me)K,n:y HHMH

paBHOMepHO JIerHpOBaHa ,n:OHOPHbIMH rrpHMeCHMH C KOHueHTpaUHeH

6apbepHLlM: cnOM:

~r---- --~~""'r

n-THII

~ '-------'----Ey

PHc.4.10. 30HHall Jl.HarpaMMa Jl.BOHHOH reTepocTpYKTypLi C pe3KHMH rrepeXOJl.aMH (a) H rpaJl.HeHTHbIMH rrepeXOJl.aMH (6). Pe3KHe rrepeXOJl.bI 06J1aJl.a1OT 60JlbIIIHM corrpoTHBJleHHeM! qeM rrJlaBHbIe, qTO CB1I3aHO C lfJopMHpoBaHHeM B HHX rrOTeHII.HaJlbHbIX 6apbepoB 4*

FA. 4. 3AeKmpUtteCKue CBoucmBa cBemOaUOaOB

100

Be)l,eHHe )l,BOHHOH reTepocTpYKTypbI. Ha pHC.

4.10, a

4.8. llomepu HocumeAeu B aBOUHbtx eemepocmpYKmypax

101

H306pa)KeHbI 30HHaH BblXO.ll. HOCmeJIeii: H3 KBaHTOBOii: }lMbI

)l,HarpaMMa H )l,HarpaMMa H3MeHeHHH XHMHqeCKOrO COCTaBa CTPYKTYPbI C pe3KHMH nepeXO)l,aMH. BH)l,HO, "ITO Ha o6eHx· rpaHHlI.ax pa3)l,eJIa Me)K)l,Y nOJIynpOBO)l,HHKaMH )l,BYX THnOB B03HHKJIH nOTeHlI.HaJIbHble 6apbepbI, npenHTCTBYIOIlI.He nOna)l,aHHIO CB060)l,HbIX 3apH)l,OB B aKTHBHYIO 06JIaCTb. Ha pHC.

4.10,6

npe)l,CTaBJIeHbI aHaJIOrHqHble )l,HarpaMMbI )l,JIH )l,BOHHOH

reTepocTpYKTypbI C rpa)l,HeHTHbIMH nepeXO)l,aMH. 113 30HHOH )l,HarpaMMbI CJIe)l,yeT, "ITO B 3TOM CJIyqae nOTeHlI.HaJIbHble 6apbepbl 3HaqHTeJIbHO YMeHb-

I~v

II1HJIHCb. He60JIbIIlHe B03MYllI.eHHH, Ha6JIIO)l,aeMble Ha rpaHHlI.e )l,BYX noJIynpOBO)l,HHKOB, 06bHCHHIOTCH TeM, "ITO XHMHqeCKHH COCTaB nepeXO)l,HOH

L-l_'--_ _ _

06JIaCTH H3MeHHJICH JIHHeHHO. B CJIyqae napa60JIHqeCKOrO H3MeHeHHH COCTaBa OT 3THX B03MYIlI.eHHH qaCTO Y)l,aeTCH nOJIHOCTbIO H36aBHTbCH. B 061l1.eM CJIyqae CqHTaeTCH, "ITO nepeHOC HOCHTeJIeH B reTepOCTpYKTypax npOHCXO)l,HT

PHC.

4.11.

aaua6amUtteCKu, T. e. TaKoH npoll.ecc BHyTpH nOJIY-

npOBO)l,HHKa He COnpOBO)K)l,aeTCH BbI)l,eJIeHHeM H36bITOQHOrO TenJia. ,lI.JIH MOIll.HblX CBeTO)l,HO)l,OB 3TO YCJIOBHe npaKTHqeCKH nOJIHOCTbIO BbIllO;/lHHeTCH, "ITO OqeHb Ba)KHO, nOCKOJIbKY nOBblIIIeHHe pa60qeH TeMnepaTypbl MO)KeT

Ev

npoueccbI MHrpaUHH HOCHTeJIeH B .lI.BOHHblX reTepocTpYKTypax H pacrrpe.ll.eJIeHHe HOCHTeJIeH B aKTHBHOH 06JIaCTH

JIaCTH, npeBblIIIaeT BeJIHqHHY 3Toro 6apbepa. KOHlI.eHTpall.HH HOCHTeJIeH, 06JIa)l,aIOIlI.HX TaKoH 3HepmeH, 3a)l,aeTCH COOTHOIIleHHeM

npHBeCTH K YXY)l,II1eHHIO pa60qHX xapaKTepHCTHK.

I

00

CJIe)l,yeT TaK)Ke OTMeTHTb, "ITO )l,JIH Bcex reTepOCTpYKTYP )KeJIaTeJIbHO

nB =

nO)l,6HpaTb MaTepHaJibi C O)l,HHaKOBbIMH napaMeTpaMH KpHCTaJIJIHqeCKOH

EB

peIIleTKH, nOCKOJIbKY BbillOJIHeHHe 3Toro YCJIOBHH n03BOJIHeT YMeHbIIlHTb nJIOTHOCTb )l,HCJIOKall.HH HeCOOTBeTCTBHH, HrpaIOIlI.HX pOJIb lI.eHTPOB 6e3bI3r)l,e

JIyqaTeJIbHOH peKOM6HHall.HH.

(4.23)

PDOS· !FD(E) dE,

!FD

epMH-,lI.HpaKa,

EB -

BblCOTa nOTeH-

lI.HaJIbHOrO 6apbepa. ,lI.JIH o6beMHoH nJIOTHOCTH COCTOHHHH KOHlI.eHTpall.HH HOCHTeJIeH C 3HeprHeH 60JIbIIle

4.8.

EB ,

onpe)l,eJIHeTCH Bblpa)KeHHeM

nOTepH HOCHTeJIeH B )J,BOHHbIX reTepOCTpYKTYPax

(4.24)

B H)l,eaJIbHOM CBeTO)l,HO)l,e 6apbepHble CJIOH He )l,aIOT HH)KeKTHpOBaHHbIM HOCHTeJIHM B03MO)KHOCTH nOKH)l,aTb aKTHBHyIO. 06JIaCTb. 3TO n03BOJIHeT )l,06HBaTbCH 60JIbIIlQH KOHlI.eHTpall.HH HOCHTeJIeH B 3TOH 06JIaCTH, "ITO Be)l,eT K nOBblIIIeHHIO 3
kT.

TeM He MeHee, HeKOTopblM HOCHTeJIHM Y)l,aeTCH

nOCKOJIbKY Hac HHTepeCYIOT HOCHTeJIH

C 3HepmHMH,

npeBblIIIaIOIlI.HMH

3HeprHIO Cl>epMH, pacnpe)l,eJIeHHe Cl>epMH-,lI.HpaKa MO)KHO 3aMeHHTb pacnpe)l,eJIeHHeM DOJIbll.MaHa

npeO)l,OJIeTb 3TOT nOTeHlI.HaJIbHbIH 6apbep H nOKHHYTb aKTHBHyIO 06JIaCTb.

(4.25)

KOHlI.eHTpall.HH TaKHX HOCHTeJIeH B 6apbepHblX CJIOHX OqeHb HH3Ka, n03TOMy KBaHTOBbIH BbIXO)l,H3JIYQeHHH 3THX CJIOeB TO)Ke HeBbICOK. Pacnpe)l,eJIeHHe CBo60)l,HbIX HOCHTeJIeH B aKTHBHOH 06JIaCTH nO)l,qHHHeTCH CTaTHCTHKe Cl>epMH-,lI.HpaKa, H3 KOTOPOH CJIe)l,yeT, QTO HeKOTopaH qaCTb HOCHTeJIeH 06JIa)l,aeT 3HepmeH, npeBblIIIaIOllI.eH BbICOTY nOTeHlI.HaJIbHOrO 6apbepa.

Ha pHC.

4.11.

nOKa3aHo,

"ITO

HMeHHO

3Ta qaCTb HOCHTeJIeH

nepeXO)l,HT B 6apbepHble CJIOH H3 aKTHBHOH 06JIaCTH.

Nc - 3
lI.e pa3)l,eJIa aKTHBHaH 06JIaCTb -

6apbepHbIH CJIOH. HeocHoBHble HOCHTeJIH,

HaXO)l,HIlI.HeCH Ha KpaIO 6apbepHblx CJIOeB, nepeMelll.aIOTCH 3a CqeT )l,H
PaCCMOTpHM nOBe)l,eHHe 3JIeKTpOHOB B aKTHBHOH 06JIaCTH )l,BOHHOH reTePOCTPYKTYPbI. npH 3TOM 6Y)l,eM CqHTaTb, "ITO 06JIaCTb OrpaHHqeHa CJIOHMH C BbICOTOH nOTeHlI.HaJIbHOrO 6apbepa flEe (CM. pHC.

r)l,e

HeHHe

4.11).

Pacnpe)l,eJIeHHe

3HepmH HOCHTeJIeH onpe)l,eJIHeTCH cTaTHcTHKOH Cl>epMH-,lI.HpaKa, n03ToMY· 3HeprHH onpe)l,eJIeHHOH qaCTH HOCHTeJIeH, HaX0.ll.HIlI.HXCH B aKTHBHoH 06-

°

KOHlI.eHTpall.HeH nB H )l,H
Ln.

CqHTaH Ha-

qaJIOM KOOp)l,HHaT X = KpaH 6apbepHoro CJIOH, pacnpe)l,eJIeHHe HOCHTeJIeH MO)KHO onHcaTb Bblpa)KeHHeM

n~(x) = nB(O) . e- x / Ln = N e • e-(EB-Epn)/kT . e- x / Ln ,

(4.26)

Til. 4. 3ileKmpU'leCKUeCBoucmBa cBemOaUOaOB

102

4.9. Hs6blmO'lltafl KOIt/1eltmpa/1ufl ItOCUmeileu B aKmUBltOuo6ilacmu Ln

r.n:e

= (Dn

· Tn)1/2 - .n:H
.n:JIHHa,

Tn -

BpeMSI

)KH3HH

Dn - K03
HeOCHOBHbIX HOCHTeJIeH, COOTHOllIeHHSI

H3

nJIOTHOCTefi TOKOB .ll.HO.ll.a CJIe.ll.yeT, 'lTO TOKH YTe'lKH MorYT npHBO.ll.HTb K 60JIbIIlHM nOTepHM B CHCTeMax C MaJIofi BbiCOTOfi 6apbepHblx CJIOeB.

IIJIOTHOCTb .n:H
Jnl

= -eDn' dn;;x) x~

I

= ....:.eDn .

x~

103

n~(O).

=

0:

(4.27)

n

Bo Bcex paccY)K.n:eHHSlx 3Toro pa3.n:eJIa MbI CqHTaJIH, qTO 3JIeKTpOHbI .n:H
y.n:eJIbHbIM

corrpOTHBJIeHHeM,

Heo6xo.n:HMO

YQHTbIBaTb

.n:peH
3JIeKTpOHoB, rrOCKOJIbKY OH rrpHBo.n:HT K YBeJIHQeHHIO TOKa. DOJlee Toro, Ha rrpaKTHKe Tpe6yeTcSI Y'lHTbIBaTb H BJIHSlHHe 3J1eKTpHQeCKHX KOHTaK-

TOK YTeqKH orrpe.n:eJISleTCSI KOHueHTpaUHeH HOCHTeJIeH Ha KpaIO 6apbepHoro CJIOSI. IIo3ToMY .n:JISI ero CHH)KeHHSI Heo6xo.n:HMO rrOBbIllIaTb rroTeHUHaJIbHbIH 6apbep 3Toro CJIOSI. OqeBH.n:Ho, qTO .n:JISI 3
kT.

HeKoTopble CHCTeMbI MaTepHaJIOB, HarrpHMep AIGaN/GaN

H AIGaAs/GaAs, 06JIa.n:aIOT OTHOCHTeJIbHO 60JIbllIOH BbICOTOH 6apbepoB H,

CJIe.n:OBaTeJIbHO,

HH3KHMH TOKaMH YTeqKH

3JIeKTpOHoB H3 aKTHBHoH

06JIaCTH. 'uPyrHe CHCTeMbI -

TaKHe, KaK AlinGaP / AlinGaP, H3JIyqaIOII1.He

CBeT B .n:Harra30He .n:JIHH BOJIH

600-650

TOB. IIpH BbICOKOH CKOPOCTH rroBepxHocTHOH peKoM6HHaUHH Ha rpaHHue KOHTaKT-rrOJlyrrpoBo.n:HHK KOHueHTpaUHSI HOCHTeJleH Ha HeH MO)KeT CQHTaTbCSI paBHoH HYJlIO. B pa60Te 96eJlHHra (Ebeling,

rrpHBe.n:eHa Me-

Me)K.n:y KOHTaKTOM H rpaHHueH aKTHBHaSl 06J1aCTb -

6apbepHbIH CJlOH paBHO

X P ' BeJIHQHHa TOKa YTeQKH orrpe.n:eJlSleTCSI Bblpa)KeHHeM

1

I

Ln

Lnl

~+ -2-

HM, HMeIOT HH3KHe rrOTeHUHaJIbHble

6apbepbI H .n:OBOJIbHO 60JIbllIHe TOKH YTeqKH qepe3 3TH 6apbepbJ. OTMeTHM, qTO C POCTOM TeMrrepaTypbI YTeqKa 3JIeKTpOHOB YBeJIHqHBa-

1993)

To.n:HKa paCQeTa TOKa YTeQKH C YQeTOM 3THX 3
·coth

1 +-2I -2 Ln Lnl

1 ) , 'Xp+y;-

nl

(4.28)

r.n:e

eTCSI rro 3KcrrOHeHUHaJIbHOMY 3aKOHY. IIo3TOMY rrOBbIllIeHHe TeMrrepaTypbI

(4.29)

Be.n:eT K rra.n:eHHIO KBaHTOBoro BbIxo.n:a H3JIyqeHHSI CBeTo.n:Ho.n:OB. ,UJISI CHH)KeHHSI TeMrrepaTypHoH 3aBHCHMOCTH HHTeHCHBHOCTH H3JIyqeHHSI Heo6xo.n:HMO rrpoeKTHpoBaTb CBeTo.n:Ho.n:bI, HMeIOII1.He 60JIbllIYIO BbICOTY rrOTeHUHaJIbHbIX 6apbepoB B CJIOSlX, orpaimqHBaIOII1.HX aKTHBHYIO 06JIaCTb. O.n:HaKo

3.n:eCb ap - rrpOBo.n:HMOCTb 6apbepHoro CJlOSl p-THrra, MapHoro TOKa Qepe3 .n:HO.n:.

Jtot

-

rrJlOTHOCTb CYM-

rrOMHMO TOKOB YTeqKH cYII1.eCTBYIOT H .n:pyme SlBJIeHHSI, CHH)KaIOII1.He KBaHTOBbIH BbIXO.n: H3JIyqeHHSI CBeTo.n:Ho.n:OB rrpH BbICOKHX TeMrrepaTypax.

K Ta-

KHM SlBJIeHHSlM OTHOCHTCSI, HarrpHMep, 6e3bI3JIyqaTeJIbHaSl peKoM6HHaUHSI

4.9.

1136bITOQHaB KOHu;eHTpau,H.HHOCHTeJIeH B aKTHBHOH 06JIaCTH ,lI;BOHHbIX reTepOCTpYKTYP

llloKJIH-PH.n:a.

YnpaJKHeHHe. OnpeaeileltUe mOKa yme'lKU 'lepes nomelt/1uailbltblU 6apbep ,UpymM HCTOQHHKOM rrOTepb KBaHTOBoro Bblxo.n:a H3JIYQeHHSI B .n:BOHHbIX

KOHII.eHTpaIl.HH aJIeKTpOHOB B aKTHBHofi 06JIaCTH CTPYKTYPbI GaAs paBHa CM- . Tpe6yeTcH onpe.ll.eJIHTb nJIOTHOCTb TOKaYTe'lKH HOCHTeJIefi H3 aKTHBHOfi 06JIaCTH B CJIOH, 06JIa.ll.aIOlII.He nOTeHII.HaJIbHbIMH 6apbepaMH 200 MaB 2 H 300 MaE. TIO.ll.BH)!{HOCTb aJIeKTpOHOB C'lHTaTb paBHofi 2000 CM a BpeMH )!{H3HH

OHHoro TOKa. IIpH YBeJlHQeHHH TOKa HH)KeKUHH rrpOHcxo.n:HT POCT KOH:

HeOCHOBHbIX HOCHTeJIefi 5 HC. CpaBHHTb nOJIY'leHHble 3Ha'leHHH TOKa YTe'lKH C THnH'lHblMH 3Ha'leHHHMH HH)!{eKII.HOHHOro TOKa CBeTO.ll.HO.ll.OB, JIe)!{alIl.HMH B .ll.Hana30He

IIpH .n:OCTaTOQHO BbICOKHX rrJlOTHOCTSlX TOKa rrOJlO)KeHHe ypOBHSI
0,1-10 KA/cM2.

.n:OCTHraeT BepXHero KpaSl rrOTeHUHaJlbHOrO 6apbepa. IIpH 3TOM aKTHBHaSl

2 . 10 18

/B,

PemeHHe. YpoBeHb ¢epMH B GaAs npH nJIOTHOCTH HOCHTeJIefi 2 . 1018 CM- 3 JIe)!{HT Ha paccToHHHH

77

MaB OT KpaH 30HbI npOBO.ll.HMOCTH. C'lHTaH, 'lTO acpcpeKTHBHble

reTepOCTpYKTypax SlBJlSleTCSI u36blmOliftafl KOftL{eftmpaL{Ufl ftOCUmeileu B aKTHBHOH 06J1aCTH, QTO rrpOHcxo.n:HT rrpH BbICOKHX rrJlOTHOCTSlX HH)KeKUHueHTpaUHH HOCHTeJleH B aKTHBHOH 06J1aCTH H rro.n:beM ypOBHSI
06J1aCTb BCSI 3arrOJIHSleTCSI HOCHTeJlSlMH H .n:aJlbHeHllIee YBeJlHQeHHe rrJlOTHOCTH ~H)KeKUHOHHoro TOKa He rrpHBo.n:HT K POCTY KOHueHTpaUHH HOCHTeJleH

nJIOTHOCTH COCTOHHHfi B 6apbepHblx CJIOHX HaKTHBHofi 06JIaCTH paBHbl, HaXO.ll.HM

B HeH. B pe3YJIbTaTe 3Toro HHTeHCHBHOCTb H3J1YQeHHSI BbIXO.n:HT Ha HaCbI-

KOHII.eHTpaIl.HH HOCHTeJIefi Ha KpaHx 6apbepHblx CJIOeB C nOTeHII.HaJIbHbIMH 6apbepa200 MaB H 300 MaB: 3,9.10 15 CM- 3 H 8,3.10 13 CM- 3. KoacpcpHII.HeHT .ll.HcpcpY3HH no COOTHOIIleHHIO 3fiHillTefiHa paBeH Dn 51,7 CM 2/ c. 'uHCPCPY3HoHHaH .ll.JIHHa

II1.eHHe. ,Ua)Ke rrpH .n:OBOJlbHO BbICOKHX rrOTeHUHaJlbHbIX 6apbepax CHJlbHOe

MH

=

Ln = (Dn . Tn)I/2 = 5,1 MKM. TOKH YTe'lKH, Bbl'lHCJIeHHble no (4.27), paBHbI 63 KA/cM 2 .ll.JIH 6apbepa B 200 MaB H 1,3 KA/cM 2

onpe.ll.eJIHeTcH KaK Bblpa)!{eHHIO .ll.JIH

300

MaE. 113 cpaBHeHHH nOJIY'leHHbIX .ll.aHHblX C THnH'lHbIMH 3Ha'leHHHMH

rrOBbIllIeHHe rrJIOTHOCTH TOKa HH)KeKUHH BbI3blBaeT 3arrOJlHeHHe aKTHBHOH 06J1aCTH HOCHTeJlSlMH 3apSl.n:a. B

TaKHX cJlYQaSlX YTeQKaMH HOCHTeJleH B

6apbepHble CJIOH rrpH MaJibIX rrJlOTHOCTSlX HH)KeKUHOHHoro TOKa MO)KHO rrpeHe6pe'lb. u

PaCCMOTp~M

CBeTo.n:HO.n: Ha OCHOBe .n:BOHHOH reTepOCTpYKTypbI C TOJlII1.H-

HOH aKTHBHOH 06J1aCTH WDH (pHC.

4.12).

YpaBHeHHe cKopoCTeH rrocTyrrJle-

4.9. H36btmO'l1taR IC01tu,e1tmpau,UR 1tOCumeJleu B aICmUB1tOU o6Jlacmu

Til. 4. 3JleICmpu'leCicue cBoucmBa cBemOaUOaOB

·104 a

70

6

.L t---------jr---

M

........ 60

~::;!

Fn -Eo

F

~

....... 50

-E=O

1:.

--E=O

C,lJ; 1 1 Ino,16GaO,84As/GaAs 1 T= 300 K 1

fr

~ ___.---_E - - Ee

f

e

E Fn-- E

1-

My

nL-___

f

:<:

(EFn)


B .lI.BOHHOH reTepocTpYKType

H ypoBeHb

(a)

pa3MepHoro KBaHTOBaHHlI

H B cTpyKType C KBaHToBoH lIMOH

IQ

(Eo)

20

~

10

1

c.>

4)

~

B-

K03cpcpHII.HeHT

6HMOJIeKYJIlIpHOH

1

rrJIOTHOCTlIX TOKa HH2KeKII.HH HO

n

n

= p.

)l.JIlI cTaII.HOHapHblx YCJIOBliH

Peillall ypaBHeHHe

(dn/ dt = 0),

(4.30)

o1

OTHOCHTeJIb-

pe-

3YJIbTaTe 3Toro pacTeT 3HeprHlI epMH. B YCJIOBHlIX BbICOKHX rrJIOTHOCTeH HOCHTeJIeH )l.JIlI ypOBHlI epMH M02KHO 3arrHcaTb CJIe)l.YJOIII.ee rrpH6JIH2KeH.

(

EF - Ec = kT

8

10

4~13.

12 1, MA

14

16

18

20

MHTeHCHBHOCTb H3JIyqeHHlI CBeTO.ll.HO.ll.OB Ino,16GaO.84AsjGaAs C aK-

THBHOH 06JIaCTblO, CocTollllleH H3 O.ll.HOH, qeTblpex, meCTH H BOCbMH KBaHTOBbIX liM

(KH)

H TeOpeTHqeCKH paCCqHTaHHall HHTeHCHBHOCTb H.lI.eaJIbHOrO H30TpOIIHoro

A.

CTH WDH = 500 Tpe6yeTclI paCCqHTaTb ypOBeHb TOKa, IIpH KOTOPOM IIPOH30H.lI.eT 3aIIOJIHeHHe KBaHTOBOH liMb!.

PemeHHe. ITPH

Nc

= 4,4 • 1017

3 10 3 CM jc, H B = 10Jmax = 3990 AjCM2.

CM-

HaX0.ll.HM HCKOMYIO IIJIOTHOCTb TOKa

H3 ypaBHeHHlI (4.33)

np06JIeMa H36bITOqHOH KOHII.eHTpaII.HH HOCHTeJIeH HaH60JIee OCTpO CTOHT B CTpYKTypax C MaJibIM 06beMOM aKTHBHOH 06JIaCTH, oc06eHHO B CTPYK-

) 2/3

3.;7r -. !:.. 4

6

H3JIyqaTeJIlI (UlTpHXOBall JIHHHlI) (Hunt, 1992)

(4.31)

POCTOM TOKa HH2KeKII.HH rrJIOTHOCTb HOCHTeJIeH YBeJIHqHBaeTClI. B

. Hoe Bblpa2KeHHe:

4

rrOJIyqaeM Bblpa2KeHHe

n=" / J Ve·B.WDH·

C

BbICOKHX

1 lUI

1

TOK .lI.Ho,!\a PHC.

npH

1

1

0

(4.30)

peKOM6HHaII.HH.

1 1

:<:

(6)

HHlI HOCHTeJIeH B aKTHBHYJO 06JIaCTb (3a CtIeT HH2KeKII.HH) H HX Y)l.aJIeHHlI

r)l.e

~ ~,

§!

is:

H3 :)TOH 06JIaCTH (3a CqeT peKOM6HHaII.HH) orrpe)l.eJIlIeTClI Bblpa2KeHHeM

dn J = W - B· n· p dt e· DH

$ $>'

g 30 0

YpoBeHb

!'j &' '$'~.§lI1

~

is:

y

1

1

~~I

!¥ 40 E

8 lUI

1/

~

:<:

PHc.4.12.

105

(4.32)

Nc

Typax C O)l.HOI1: KBaHToBOH lIMOH H C aKTHBHoH 06JIaCTbJO THrra KBaHTOBbIX TOqeK. npH orrpe)l.eJIeHHOH rrJIOTHOCTH TOKa aKTHBHall 06JIaCTb 3arrOJIHlIeTClI

npH BbICOKHX ypOBHlIX HH2KeKII.HH rrOJI02KeHHe ypOBHlI epMH M02KeT )1.0-

HOCHTeJIlIMH, H )l.aJIbHeHillaK HX HH2KeKII.HlI He rrpHBO)l.HT K YBeJIHqeHHJO HHTeHCHBHOCTH H3JIyqeHHlI.

EF - Ee = !lEe. (4.32) M02KHO HaHTH

HHTeHCHBHOCTH H3JIyqeHHlI OT TOKa )l.JIlI CTPYKTYP CBeTO)l.HO)l.OB C O)l.HOH,

CTHqb BeJIHqHHbI rrOTeHII.HaJIbHOrO 6apbepa, B 3TOH TOqKe I1crrOJIb3YlI 3TO 3HaqeHHe, H3 ypaBHeHHH

(4.31)

H

rrJIOTHOCTb TOKa, rrpH KOTOPOH rrpOHCXO)l.HT 3arrOJIHeHHe aKTHBHOH 06JIaCTH HOCHTeJIlIMH 3apll)l.OB:

4.13

rrOKa3aHbI 3KcrrepHMeHTaJIbHO rrOJIyqeHHble 3aBHCHMOCTH

qeTblpbMlI, IlleCTbJO H BOCbMbJO KBaHTOBbIMH lIMaMH (Hurrt et a1.,

1992).

BH)l.HO, 'ITO HHTeHCHBHOCTb H3JIyqeHHlI B CTpYKType C O)l.HOH KBaHTOBOH

4N)2 _ c • (!lE __ c ")3 .e.B.WDH J= ( _ ~.;7r. kT .. l..{TO rreperrOJIHHTClI CHaqaJIa -

Ha pHC.

lIMOH BbIXO)l.HT Ha HaCbIIII.eHHe rrpH )l.OBOJIbHO HH3KOM TOKe. YBeJIHqeHHe

(4.33)

30Ha rrpOBO)l.HMOCTH HJIH BaJIeHTHall 30Ha

qHCJIa KBaHTOBbIX liM Be)l.eT K POCTY TOKa, rrpH KOTOPOM rrpOHCXO)l.HT BbIXO)l. Ha HaCbIIII.eHHe.

npH 3TOM TaK2Ke YBeJIHqHBaeTClI ypOBeHb HaCbIIII.eHHlI

HHTeHCHBHOCTH.

nOKa3aHHoe Ha pHC.

4.13

HaCbIIII.eHHe HHTeHCHBHOCTH

(Ne , N v )

H3JIyqeHHlI HarrpllMYJO CBlI3aHO C H36bITKOM HOCHTeJIeH B aKTHBHOH 06JIaCTH CBeTO)l.HO)l.a.

YnpalKHeHHe. OnpeaeJle1tue mOICa, npu IComopOM npouCXoaum nOJl1toe 3anOJl1te1tue 1tOCUmeJlRMU 3apIlaa aICmUB1tOU o6Jlacmu aBOU1tOU aemepocmpyICmYPbt

HOCHTeJIlIMH, )l.JIlI CTPYKTYP C KBaHTOBbIMH lIMaMH H 06beMHblx CTPYKTYP

PaCCMaTpHBaeTClI IIOBe.ll.eHHe 3JIeKTpOHOB B .lI.BOHHOH reTepOCTpYKType GaAs

paCCqHTbIBaeTClI rro-pa3HOMY. .l{JIlI CTPYKTYP C KBaHTOBbIMH lIMaMH, KaK

KBaHToBoi;j lIMbl 3aBHCHT OT 3cpcpeKTHBHOH rrJIOTHOCTH COCTOllHHH H OT pa3pbIBOB 30H

(!lEe, !lEv).

C BbICOTOH IIOTeHll,HaJIbHOrO 6apbepa

!lEc

= 200 M3B H TOJIlllHHOH aKTHBHOH o6JIa-

YpoBeHb TOKa, rrpH KOTOPOM rrpOHCXO)l.HT HaCbIIII.eHHe aKTHBfiOH 06JIaCTH

rrpaBHJIO, HCrrOJIb3YJOT He TpexMepHYJO

(3D)

rrJIOTHOCTb COCTOllHHH, a )l.BY-

TA. 4. 3AeKmpU'leClcue CBoucmBa cBemOaUOaOB

106 MepHylO

(2D).

YpoBeHb
ypoBHeM C :meprHeH

Eo

T

107

4.10. OepanU'lUBalOUJ,ue CAOU

i

qepe3 KOTopble oCYIll.eCTBJIHeTCH HH)KeKUHH HOCHTeJIeH. YqeT 3TH X rrapa-

orrpe)1.eJIHeTCH H3 cJIe)1.YIOIll.ero Bblpa)KeHHH:

MeTpOB rrpH pa3pa60TKe CBeTO)1.HO)1.0B rr03BOJIHeT H36e)KaTb rreperrOJIHeHHH 2D

EFkT - Eo = 1n [exp ( N~D n ) - 1] r)1.e n 2D -

(4.34)

aKTHBHOH 06JIaCTH rrpH 3a)1.aHHOH pa60qeH rrJIOTHOCTH TOKa.

4.10.

(2D) rrJIOTHOCTb HOCHTeJIeH Ha 1 CM2, a N;D(2D) rrJIOTHOCTb COCTOHHHH, 3a)1.aBaeMaH ypaB-

)1.BYMepHaH

OrpaHHIIHBalOID.He CJIOH

3
HOCHTeJIH 3apH)1.0B BCer)1.a CTpeMHTCHrrepeCKOqHTb H3 aKTHBHOH 06JIa-

N 2D c

=

m*

7r(hj27r)2

.kT.

(4.35)

CTH CBeTO)1.HO)1.a B rpaHHqaIll.He C HeH CJIOH. B )1.BOHHbIX reTepOCTpYKTypax qHCJIO HOCHTeJIeH,

«c6e)KaBIIIHX»

H3 aKTHBHoro CJIOH B COCe)1.HHe CJIOH,

B03paCTaeT rrpH YMeHbIIIeHHH BbICOTbI rrOTeHUHaJIbHOrO 6apbepa Ha rpaHHIloCKOJIbKY paccMaTpHBalOTcH BblCOKHe rrJIOTHOCTH HOCHTeJIeH, MO)KHO rrpHMeHHTb rrpH6JIH)KeHHe )1.JIH rrOJIyrrpOBO)1.HHKOB C BbICOKOH CTerreHblO BblPO)K)1.eHHH, TOr)1.a

uax Me)K)1.y 3THMH CJIOHMH. IlOBblIIIeHHe TeMrrepaTypbI rrpHBO)1.HT K pOCTy TerrJIOBOH 3HeprHH HOCHTeJIeH, qTO TaK)Ke crroc06cTByeT rrpoueccy YTeqKH HOCHTeJIeH H3 aKTHBHOH 06JIaCTH.

(4.36)

B rrOJIyrrpOBO)1.HHKaX THrra A HIBV K03
Terrepb 3arrHIIIeM ypaBHeHHe )1.JIH CKOPOCTH H3MeHeHHH KOHueHTpaUHH HO-

rr03TOMY TOK YTeqKH

3JIeKTpOHOB rrpaKTHqeCKH BCer)1.a 60JIhIIIe TOKa YTeqKH )1.blpOK . .llJIH CHH)Ke-

CHTeJIeH B KBaHTOBOH HMe 3a CqeT HX HH)KeKUHH B aKTHBHYIO 06JIaCTb H

HHH YTeqKH HOCHTeJIeH H3 aKTHBHOH 06JIaCTH rrpHMeHHIOTcH )1.0rrOJIHHTeJIb-

y)1.aJIeHHH (BCJIe)1.CTBHe peKoM6HHaUHH) H3 aKTHBHoH 06JIaCTH:

Hble 3arrHpalOIll.He CJIOH. Bo MHOrHX cTpyKTypax CBeTO)1.HO)1.0B HCrrOJIb3YIOT-

2D

dt r)1.e B

B2D

~ B

/WQW -

2D-CTEYKTyp e.

n 2D = p2

ro CJIyqaH

BbICOKHX

.PeIIIaH ypaBHeHHe

dn

2D

/

dt = 0), n 2D

(4.37)

e

(4.37)

6HMOJIeKYJIHpHOH

rrJIOTHOCTHX OTHOCHTeJIbHO

n 2D

Ha pHC.

peKoM6HHaUHH

HH)KeKUHOHHoro

TOKa:

)1.JIR cTaUHoHapHo-

4.14

rrOKa3aHa 30HHaH )1.HarpaMMa CBeTO)1.HO)1.a IrrGaN C 3arrH-

palOIll.HM CJIOeM. TaKoH CBeTO)1.HO)1. COCTOHT H3 aKTHBHoH 06JIaCTH C MHO)KeCTBeHHbIMH

KBaHTOBbIMH

HMaMH

IrrGaN/GaN

H

6apbepHbIMH

MH AIGaN. Ha rpaHHue pa3)1.eJIa aKTHBHaH 06JIaCTb -

rrOJIyqaeM

=

aKTHBHOH 06JIaCTblO H 6apbepHbIMH CJIOHMH H 06JIa)1.a1OT 60JIbIIIeH IIIHPHHOH 3arrpeIll.eHHOH 30HbI.'

K03
IlpH

CH cJtOU, oepaHUttUBalOU{ue 3JteKmpoHbl, KOTopble pacrrOJIaralOTCH Me)K)1.y

=!.... _ B2D . n2D . p2D

dn

J =J J eB2D

CJIOH-

6apbepHbIH CJIOH

p-THrra BCTpaHBaeTcH 6apbepHbIH CJIOH AIGaN, 3arrHpalOIll.HH 3JIeKTpOHbI.

J . WQw . eB·

(4.38)

Ha pHC.

4.14, a

rrOKa3aHa HeJIerHpOBaHHaH cTpyKTypa, HJIJIIOCTpHpYIOIll.aH

C03)1.aHHe 3arrHpalOIll.HM CJIOeM AIGaN rrperrHTcTBHH )1.JIH OTTOKa HOCHTeJIeH KaK B BaJIeHTHYIO 30HY, TaK H B 30HY rrpOBO)1.HMOCTH.

IlpH BbICOKOM ypoBHe HH)KeKUHH rrOJIO)KeHHe ypOBHH epMH CTaHOBHTCH paBHbIM MaKCHMaJIbHOH 3HeprHH 6apbepHoro CJIOH, )1.JIH KOTOPOH CrrpaBe)1.JIHBO COOTHOIIIeHHe B ypaBHeHHe

(4.36)

EF - Eo = l1Ec - Eo. Ilo)1.cTaBHB n 2D H3 ypaBHeHHH (4.36)

H HCKJIlOqHB

HaHTH rrJIOTHOCTb TOKa,

rrpH

3TO Bblpa)KeHHe H

(4.38),

KOTOPOH rrpOHCXO)1.HT rrOJIHOe

MO)KHO

O)1.HaKO H3 pHC. rrperrHTCTBHH )1.JIH

y13

-m* _. ( 7r (h)2

(l1Ec - Eo)

)2 .(D.c)3 kT E

BH)1.HO, qTO B JIerHpOBaHHoH CTpyKType HeT

p-THrra qepe3 3arrHpalOIll.HH CJIOH. 3HaqHT Bce pa3pbIBbI B 30HHOH )1.HarpaMMe COCpe)1.0TOqeHbI B 30He rrpOBO)1.HMOCTH, T. e.

3arrOJIHeHHe BbICOTa rrOTeHUHaJIbHOrO _ 6apbepa )1.JIH 3JIeKTpOHOB -

aKTHBHOH 06JIaCTH HOCHTeJIHMH 3apH)1.0B:

J =

4.14,6

OTTOKa )1.blPOK B BaJIeHTaylO 30HY 6apbepHoro CJIOH

e·B WQW'

(4.39)

Bcero CKa3aHHoro CJIe)1.yeT, qTO rreperrOJIHeHHe aKTHBHOH 06JIaCTH HO-

r)1.e

l1Eg

-

E

E C,6.c. -

C,a.c.

+

l1E g,

(4.40)

pa3HOCTb Me)K)1.y IIIHPHHOH 3arrpeIll.eHHOH 30HbI 6apbepHOrO

H 3arrHpalOIll.erOCJIOeB, 6.c. Ha pHC.

4.14

6apbepHbIH CnOH, a.o. -

aKTHBHaH 06JIaCTb.

TaK)Ke rrOKa3aH B YBeJIHqeHHOM MaCIIITa6e KpaH Ba-

CHTeJIHMH 3apH)1.a HBJIHeTCH He)KeJIaTeJIbHbIM HBJIeHHeM B )1.BOHHbIX reTe-

JIeHTHOH 30HbI CJIOH, 3arrHpalOIll.erO 3JIeKTpOHbl. BH)1.HO, qTO Ha rpaHHue

pOCTpyKTypax H B CTpyKTypax C KBaHTOBbIMH HMaMH. Il03TOMY MOIll.Hble

pa3)1.eJIa 6apbepHoro H 3arrHpalOIll.erO CJIOeB, B 6apbepHOM CJIoe p-THrra

CBeTO)1.HO)1.bI )1.0JI)KHbI HMeTb JIH60 60JtbUlylO moJtU{UHy aKTHBHOH 06JIa-

Ha6JIIO)1.aeTCH 3HepreTHqeCKHH rrpOBaJI, qTO CBH)1.eTeJIbCTByeT o HaKOrrJIe-

CTH B )1.BOHHbIX reTepocTpyKTypax, JIH60 6oJtbUloe ttucJto KBaHmOBblX flM

HHH B 3TOH 06JIaCTH )1.blPOK, a B 3arrHpalOIll.eM CJIoe, Ha060poT, BCrrJIeCK

B aKTHBHOH 06JIaCTH, JIH60 60JtbUlylO nJtoU{aOb KOHmaKmHblX nJtoU{aOOK,

rrOTeHUHaJIa -

CBH)1.eTeJIbCTBO He)1.0CTaTKa TaM )1.blPOK. Il03TOMY )1.blpKaM

)1.JIH rrOrra)1.aHHH B aKTHBHYIO 06JIaCTb rrpHXO)1.HTCH rrpeO)1.0JIeBaTb rrOTeHUH-

108

4.11. Hq,npfl:J/CeHue Ha auoae

Til. 4. 3lleKmpU'lecKue CBoucmBa cBemOaUOaOB

a

6aphepHl>Iii

Terrepb paccMoTpHM rrpHqHHbI Toro, qTO peaJIbHOe HarrpHLKeHHe CMelll.eHHH

3aIIHpaJO~

cnOR

109

~

aKTHBHali

CBeTO.ll.HO.ll.a HeCKOJIbKO OTJIHqaeTCH OT 3HaqeHHH, rrOJIyqaeMbIX H3 9TOH

o6naCTh": MI0I

cpOpMyJIbJ.

Bo-nep8blx,

Ha rrOCJIe.ll.OBaTeJIbHOM corrpOTHBJIeHHH .lI.HO.ll.a rrpOHCXO.ll.HT

.lI.OrrOJIHHTeJIbHOe rra.ll.eHHe HarrpHLKeHHH. HCTOqHHKaMH .lI.OrrOJIHHTeJIbHOrO

L-.---.-_ _ Ey

corrpOTHBJIeHHH HBJIHIOTCH conpOmU8JleHUe Ha ICOHmalCmax, conpOmU8JleHue Ha pe3ICUx epaHu~ax pa3aeJla 8 eemepocmpYICmypax H 06~eMHOe conpOmU8JleHUe, xapaKTepHoe .lI.JIH MaTepHaJIOB C HH3KHMH KOHu:eHTpaU:HH-

-

MH HOCHTeJIeH HJIH MaJIOH rrO.ll.BHLKHOCTblO HOCHTeJIeH. I1a.ll.eHHe HarrpHLKeHHH

AIGaN

I . Rs

Ha rrOCJIe.ll.OBaTeJIbHOM corrpOTHBJIeHHH rrpHBO.ll.HT K He06xo.ll.HMO-

CTH YBeJIHqeHHH HarrpHLKeHHH B036YLK.lI.eHHH.

6

BO-8mopblx,

rrpH HHLKeKu:HH HOCHTeJIeH B CTpyKTYPbI C KBaHTOBbIMH

HMaMH HJIH B .lI.BOHHble reTepOCTpYKTypbI OHH MoryT TepHTb qaCTb CBoeH 9HepmH. 3TO HJIJIIOCTpHpyeT rrpHMep Hea.ll.Ha6aTHqeCKOH HHLKeKu:HH HOCHTeJIeH Ha pHC.

4,12,

r.ll.e rrOKa3aHa Y3KaH KBaHTOBaH HMa rrpH rrO.ll.aqe Ha

CBeTO.ll.HO.ll. rrpHMoro HarrpHLKeHHH. BH.lI.HO,qTO rrpH HHLKeKU:HH HOCHTeJIeH B 9Ty HMy rroTepH 9HeprHH 9JIeKTpOHaMH COCTaBJIHIOT

flEe

n-TIill

~ pa3pbIB 30HbI rrpOBO.ll.HMOCTH,

Eo -

KBaHTOBaHHH B 30He rrpOBO.ll.HMOCTH.

Eo -

BaJIeHTHOH 30HbI, a

r.ll.e

AHaJIOmqHO 9TOMY rrOTepH 9Hep-

rHH .lI.b1pKaMH orrpe.ll.eJIHIOTCH BbipaLKeHHeM

L..-.---Ey -

flEe - Eo,

9HeprHH caMoro HH3Koro ypOBHH

flEv - Eo,

r.ll.e

flEv -

pa3pbIB

9HepmH caMoro HH3Koro ypOBHH KBaHTOBaHHH

.lI.JIH .lI.b1POK B BaJIeHTHOH 30He. I1pH HHLKeKu:HH HOCHTeJIeH B KBaHTOBYIO

-----_

HMy qaCTb HX 9HeprHH TpaTHTCH Ha ....

ucnYClCaHue ¢OHOH08, T. e. rrpe06Heaaua6amuliecICou

pa3yeTcH B TerrJIOBYIO 9HeprHIO. I10TepH 9HeprHH rrpH

PMC. 4.14. BBe.u.eHMe B AIGaN/GaNAnGaN CTPYKTYPY CBeTo.u.Mo.u.a C MHO)!{eCTBeHHblMM KBaHTOBhIMM HMaMM 3aIIMpa10Iu:ero CJIOH AIGaN: a - 30HHaH .u.MarpaMMa CTPYKTYPhI 6e3 JIerMpOBaHMH; 6 - 30HHaH .u.MarpaMMa CTPYKTYPbI C JIempOBaHMeM. Co.u.ep)!{aHMe Al B 3anMpalOmeM CJIoe BbIllIe, qeM B 6apbepHoM CJIoe p-TMlIa

UHJlCelC~UU

HOCUmeJleu

xapaKTepHbI .lI.JIH rroJIyrrpOBO.ll.HHKOB C 60JIbIIIHMH

3HaqeHHHMH pa3pbIBOB30H OCHOBe HHTPH.lI.OB

III

flEe

H

flEv -

GaN H .lI.pymx MaTepHaJIOB Ha

rpyrrrrbJ.

H3 CKa3aHHoro CJIe.ll.yeT, qTO rrOJIHOe rra.ll.eHHe HarrpHLKeHHH Ha CBeTO.lI.HO.ll.e rrpH rrpHMOM CMelll.eHHH orrpe.ll.eJIHeTCH BblpaLKeHHeM

aJIbHbIH 6apbep. O.ll.HaKO CJIe.ll.yeT OTMeniTb, qTO B cJIyqae rpa.ll.HeHTHOro

v=

H3MeHeHHH XHMHqeCKOrO COCTaBa rrpH rrpH6JIHLKeHHH K rpaHHu:e pa3.l1.eJIa 6apbepHoro H 3arrHpalOllI.erO CJIOeB Y.ll.aeTCH rrOJIHOCTblO H36aBHTbcH OT

Eg e

+ IRs + D.Ec e

Eo

+ D.Ev -

Eo ,

(4.42)

e

BCrrJIeCKOB H rrpOBaJIOB KpaH BaJIeHTHOH 30HbJ. I1PH 9TOM 3arrHpalOllI.HH CJIOH

r.ll.e rrepBoe CJIaraeMOe HBJIHeTCH TeOpeTHqeCKHM MHHHMYMOM HarrpHLKeHHH,

COBceM He 6Y.ll.eT rrperrHTCTBOBaTb TOKY .lI.b1pOK.

BTopoe 3aBHCHT or rrOCJIe.ll.OBaTeJIbHOrO corrpOTHBJIeHHH YCTpoHcTBa, a Tpe/Tbe H qeTBepToe rrOHBJIHIOTCH BCJIe.ll.CTBHe Hea.ll.Ha6aTHqeCKOH HHLKeKu:HH / HOCHTeJIeH B aKTHBHYIO 06JIaCTb. 3KcrrepHMeHTaJIbHO 6bIJIO rrOKa3aHO, qTO HarrpHLKeHHe Ha .lI.HO.ll.e MOLKeT

4.11. HanpBlKeHHe Ha AHOAe B

6bITb

XO.ll.e peKoM6HHaU:HH 9JIeKTpOHHO-.lI.bIPOqHbIX rrap rrpOHCXO.ll.HT rrpe-

06pa30BaHHe 9HepmH HHLKeKTHpOBaHHbIX 9JIeKTpOHOB B 9HeprHIO KBaHTOB

HanpRJlCeHUe HanpRJlCeHUe npRJ1.0eO cMeU1eHUR C8emOaUOaa .lI.OJILKHO

CBeTa • .LJ.JIH OCYlll.eCTBJIeHHH TaKoro rrpe06pa30BaHHH 9HepmH

8036YJlCaeHUR

HJIH

6bITb 60JIbIIIe HJIH paBHO IIIHpHHe 3arrpelll.eHHOH 30HbI, T. e. HarrpHLKeHHe Ha

HeCICOJlblCO HUJlCe MUHUMaJlbHOeO 3HalieHUR,

MOlll.H BbipaLKeHHH

9HeprHH KaK 9JIeKTpOHoB, TaK H .lI.b1POK

rrOJIyqeHHOrO rrpH rro-

Eg/e ~ hv/e. paBHa kT. I1pH

(4.41)

Cpe.ll.HHH TerrJIOBaH rrpHMoM CMelll.eHHH

p-n-rrepexo.ll.a HOCHTeJIH, 06JIa.ll.alOllI.He BbICOKOH 9HepmeH, 6bICTpee .lI.HcpCPYH.lI.HpylOT B 06JIaCTb C rrpoTHBOrrOJIOLKHOH rrpOBO.ll.HMOCTblO, qeM HOCHTeJIH C HH3KOH 9HepmeH, rr09ToMY HMeHHO OHH qalll.e yqaCTBYIOT B rrpou:eccax HarrpHLKeHHIO

hv/e ~ Eg/e.

T.e. MeHbIIIe

peKoM6HHaU:HH. I1PH KOMHaTHOH TeMrrepaType 9HeprHH

.lI.HO.ll.e orrpe.ll.eJIHeTCH BblpaLKeHHeM

v=

(4.42),

f"V

100

4kT

COOTBeTcTByeT

MB. B CBeTO.ll.HO.ll.e C He60JIbIIIHM corrpOTHBJIeHHeM Ha-

rrpHLKeHHe Ha .lI.HO.ll.e MOLKeT 6bITb Ha

100-200

MB

HUJlCe hv/e.

HarrpHMep,

a

4.11, Bu611uozpatjJU'leCKUU cnUCOK

Til. 4. 311eKmpU'leClwe cBoucmBa cBemo8uo8oB

110 ,is:

12

6apLepHbrli: ClIOR

aKTHBHlllI 06lIaCTL

6apLepHLrli: ClIOR

BH6JIHOrpactlHQeCKHH cnHCOK

>-t L - - - - - - - - - - - . r " - v - - - - - - " - - - - -

g~

~ ~

::!i is:

~

0

<>

6

YMeHbmeHHe 3Hepnrn 3a

!lEe ~

Ee

cqer HCrryCKaHHJI «pOHOHOB e

E0

E

If (T) ==

!lEv

Ehh 0 YMeHbmeHHe 3Hepnrn 3a

cqer HCrryCKaHHJI «pOHOHOB

Ev

PHc.4.15. XHMHtIeCKHH COCTaB CTpyKTYPbI (a); 30HHall ,nHarpaMMa CTpyKTYPbI C KBaHTOBOH lIMOH, HJIJIIOCTpHpYlOmall 3HepteTHtIeCKHe nOTepH HOCHTeJIeH npH .HX nona,naHHH B KBaHTOBYIO liMy (6)

(Eg = 1,42 3B) rrpH rrpHMoM CMemeHHH reHepaUHH CPOTOHOB C hv = 1,42 3B HaqHHaeTCH rrpH HarrpH)KeHHH

B CBeTO.ll.HO.ll.e GaAs HeKoTopoH qaCTH Ha .lI.HO.ll.e

1,32 B,

111

'ITO HH)Ke 3HeprHH cpOTOHa 1).

Onpe8elleltue ltanpJlJICeltUJl B036YJIC8eltuJl. cBemo8uo8a PaCCtIHTaTb npH6JIH3HTeJIbHble 3HatIeHHlI npllMoro HanplllKeHHlI CBeTO.z(Ho,nOB, H3JIytIalOmHX B cHHeM, 3eJIeHOM H KpaCHOM ,nHana30Hax BH,nHMoro cneKTpa. Onpe,neJIHTb npllMoe HanplllKeHHe .cBeTo,nHo,nOB, H3JIytIalOmHX CBeT C ,nJIHHaMH BOJIH 870 HM H 1,55 MKM.

YnpalKHeHHe.

PemeHHe

UBeT H3JIytIeHHlI

,llJIHHa BOJIHbI, HM

3HeprHlI cpoToHa, 3B

HanplllKeHHe B036YlK,neHHlI, B

CHHHH

470

2,6

2,6

3eJIeHbIH

550

2,2

2,2

KpacHbIH

650

1,9

1,9

MHcppaKpacHbIH

870

1,4

1,4

MHcppaKpacHbIH

1550

0,8

0,8

1) 3TOT cpaKT He npOTHBOpetIHT BTOPOMY 3aKOHY TepMo,nHHaMHKH, TaK KaK HHTerpaJIbHO no BceMY cneKTpy BHYTpeHHHH KBaHTOBbIH BbIXO,n H3JIytIeHHlI MeHbllIe 100%. '

Ebeling K. J. Integrated Opto-Electronics Chapter 9 (Springer, Berlin, 1993). Emerson D" Abare A., Bergmann M" Slater D" and Edmond J. "Development of deep UV IIItN optical sources" 7th International Workshop on WideBandgap IIItNitrides, Richmond VA, March (2002). Hunt N.E.J., Schubert E.F" Sivco D.L., Cho A. Y., and Zydzik G.J. "Power and efficiency limits in single-mirror light-emitting diodes with enhanced intensity" Electron. Lett. 28, 2169 (1992). Krames M. R. et al. "High-brightness AIGaInP light-emitting diodes" Proceedings ofSPIE 3938, 2 (2000). Rhoderick E. H. and Williams R. H. Metal-Semiconductor Contacts (Clarendon Press, Oxford, UK, 1988). Schubert E. F.; Tu L.-W., Zydzik G. J., Kopf R. F., Benvenuti A., and Pinto M. R. "Elimination of heterojunction band discontinuities by modulation doping" Appl. Phys. Lett. 60, 466 (1992). Shah J. M., Li Y.-L., Gessmann Th., and Schubert E. F. "Experimental analysis and theoretical model for anomalously high ideality factors (n ~ 2,0) in AIGaN/GaN p-n junction diodes" 1. Appl. Phys. 94, 2627 (2003). ,l(onOJIHeHHe pe,Zl.aKTOpa 1. JIe6e,neB A.M. CPH3HKa nOJIynpOBo,nHHKOBbIX npH6opoB. - M.: CPH3MaTJIHT, 2007. - 420 c .. 2. TYHHeJIbHbIe 3cpcpeKTbI B CBeTo,nHo,nax Ha OCHOBe reTepocTpYKTYP InGaNI AIGaN/GaN C KBaHTOBbIMH lIMaMH I B. E. Ky,nPllllIOB, K. f. 30JIHHa, A. H. KoBaJIeB, cp.M. MaHlIxHH, A. H. TYPKHH, A.3. IOHOBHtI II cpTIl 1997. T.31, M 11. C. 1304-1309. 3. 3JIeKTpOJIIOMHHeCileHUHlI reTepOCTpYKTYP InGaNI AIGaN/GaN npH HOHH3aIlHOHHOM npo6oe I A. H. KOBaJIeB, cp.M. MaHlIxHH, B. E. Ky,nPllllIOB, A. H. TypKHH, A.3. IOHOBHtI II CPTIT. 1998. T.32, N'21. C. 63-66. 4. JIIOMHHecueHTHble H 3JIeKTpHtIeCKHe CBOHCTBa CBeTo,nHo,nOB InGaNI AIGaNI GaN C MHOlKeCTBeHHbIMH KBaHTOBbIMH lIMaMH I B. E. Ky,nPllllIOB, A. H. TYPKHH, A.3. IOHOBHtI, A.H. KOBaJIeB, cp.M. MaHlIxHH II CPTIT. 1999. T.33, N'24. C. 445-450. 5. TYHHeJIbHO-peKoM6HHaIlHOHHble TOKH H 3cpcpeKTHBHoCTb 3JIeKTpOJIIOMHHeClleHIlHH InGaN/GaN CBeTo,nHo,nOB I H.M. EOtIKapeBa, E. A. )KHPHOB, A. A. EcppeMOB, 10. T. Pe6aHe, P.M. fop6YHOB, 10. r. llipeTep II CPTIT. 2005. T.39, N'25. C. 627-632.

113

5.2. CneKmp U3J1.Y'leHUR

KaK OTHOIlIeHHe qHCJIa
.. fJIaBa 5

_ PI (hv)

1Jextract -

OllTHQECKHE XAPAKTEPHCTHKH

r.ll.e

P-

(5.2)

Fint! (hv) ,

MOIII.HOCTb onTHqeCKOrO H3JIyqeHHH, BhlXO.ll.HIII.ero 3a npe.ll.eJIbI CBe-

TO.ll.HO.ll.a.

CBETO,nHO,nOB

3TOT

napaMeTp

OTpa)KaeT

KaqeCTBO

CBeTO.ll.HO.ll.a.

De3

npHMeHeHHH

CJIO)KHbIX H .lI.0POfHX TeXHOJIOfHqeCKHX npOII.eCCOB npaKTHqeCKH HeB03MO)KHO C.lI.eJIaTb CBeTO.ll.HO.ll. C 1Jextract

> 50 %.

BfleUlflUU KBaflmOBblU BblXOa U3JtytteflUR. cBemOaUOaa onpe.ll.eJIHeTCH OTHOIlIeHHeM qHCJIa
5.1.

THpOBaHHbIX 3JIeKTpOHOB B e.ll.HHHII.Y BpeMeHH (ceKYH.lI.Y):

BHYTpeHHHH H BHemHHH KBaHToBbIH BbIXO,ll;

H3JIyqeHHB,

KoacpcpH~HeHT nOJIe3HOrO ,Il;eHCTBHB (K. n. ,Il;.) 1Jext

=

PI (hv)

~

(5.3)

= 1Jint . 1Jextract·

AKTHBHaH 06JIaCTb H.lI.eaJIbHOrO CBeTO.ll.HO.ll.a HcnYCKaeT OaUfl cpomofl fla

Ka3ICablU ufl3ICeKmupoBaflflblu B flee 3JteKmpOfl, T. e. Ka)K.lI.bIH 3JIeKTpOH reHepHpyeT O.ll.HH CBeTOBOH KBaHT (
K03CPCPUI1Ueflm noJte3floeo aeUCmBUR. (K. n. a.) CBemOaUOaa onpe.ll.eJIHeTCH KaK

P

U3JtytteflUR. aKTHBHOH 06JIaCTH H.lI.eaJIbHOrO CBeTO.ll.HO.ll.a paBeH e.ll.HHHII.e. peflflR.R. 3cpcpeKmuBflocmb) onpe.ll.eJIHeTCH OTHOIlIeHHeM qHCJIa pO)K.lI.eHHbIX B ero aKTHBHOH 06JIaCTH
1Jint r.ll.e Pint -

=

Fint/(hv) [Ie '

r.ll.e

I .V -

3JIeKTpHqeCKaH MOIII.HOCTb, nO.ll.Be.ll.eHHaH K CBeTO.ll.HO.ll.Y.

YnpaJKHeHHe. OnpeaeJl.eHUe K8aHm08oeo 8blXOaa U3J1.Y'leHUR C8emOaUOaa PaccMaTpHBaeTcH

= Egle = 2

(5.1)

MOIII.HOCTb OnTHqeCKOrO H3JIyqeHHH H3 aKTHBHOH 06JIaCTH CBe-

TO.ll.HO.ll.a, 1- TOK HH)KeKII.HH. )KeJIaTeJIbHO, qT06bI Bce
(5.4)

1Jpower = [. V'

Bflympeflfluu KBaflmOBblU BblXOa u3JtytteflUR.CBemOaUOaa (HJIH ero Bflym-

aMilepHaH

CBeTO,l(HO,l(

C

noporOBblM

HanpH)KeHHeM,

B, H ,l(HljlljlepeHII.HaJIbHblM conpOTHBJIeHHeM

xapaKTepHCTHKa

TaKOrO

CBeTO,l(HO,l(a

IIpH

paBHblM

Rs = 20

IIPHMOM

Vih

OM. BOJlbT-

CMemeHHH

HMeeT

= Vih + [Rs . ITpH IIpOIlYCKaHHH qepe3 ,l(HO,l( TOKa [ = 20 MA ero OIlTHQeCKaH MOmHOCTb COCTaBJIHeT P = 4 MBT IIpH hv = E g • Tpe6yeTcH OIlpe,l(eJlHTb BHYTpeHBH,l(: V

HHH H BHellIHHH KBaHToBblH BblXO,l( H3JIYQeHHH CBeTO,l(HO,l(a, a TaK)Ke ero K. II.,l(. ITpe,l(IIOJlaraeTCH, QTO 1}extract

= 50 %.

BbIX0.ll.HJIH 3a npe.ll.eJIbI CBeTO.ll.HO.ll.a. I1MeHHo TaK H .lI.OJI)KHO npOHCXO.ll.HTb B H.lI.eaJIbHbIX CBeTO.ll.HO.ll.aX, BfleUlflUU KBaflmOBblU BblXOa U3JtytteflUR. KOTO-

5.2.

pbIX paBeH e.ll.HHHII.e. O.ll.HaKO B peaJIbHhlX CBeTO.ll.HO.ll.aX qaCTb
OHH MorYT 6bITb nOrJIOIII.eHbI nO.ll.JIO)KKOH CBeTO.ll.HO.ll.a, eCJIH OHa 06JIa.lI.aeT cnoc06HoCTbIO nOrJIOIII.aTb H3JIyqeHHe .lI.aHHOH .lI.JIHHbI BOJIHbI.

MexaHH3M CH

B

CBeqeHHH

H3JIyqeHHH

CneKTp H3JIYQeHHB nOJIynpOBO.ll.HHKOBbIX CBeTO.ll.HO.ll.OB


3JIeKTpOHHO-.lI.bIPOqHhlX

nap.

B

pe3YJIbTaTE!

CnOHTaHHble

cnOHTaHHOH npOII.eCChi

3aKJIIOqaeT-

peKOM6HHaII.HH

H3JIyqeHHH

CBeTa

npHHII.HnHaJIbHO OTJIHqaIOTCH OT npOII.eCCOB BbIHY)K.lI.eHHorO (HH.lI.YII.HpOBaH•

OHH MorYT CTOJIKHYTbCH C MeTaJIJIHqeCKOH nOBepxHocTbIO KOHTaKTa H TaK)Ke nOrJIOTHTbCH eIO, qTO HeMHHyeMo Be.ll.eT K CHH)KeHHIO KBaHTOBoro BhlXO.ll.a. KpoMe Toro, cYIII.eCTByeT noJtfloe Bflympeflflee ompa3ICeflue, 3aKJIIOqa-

IOIII.eeCH B JIOKaJIH3aII.HH CBeTa BHYTPH CTPYKTYPbl, qTO TaK)Ke CHH)KaeT BepOHTHOCTb BbIXO.ll.a
HOro) H3JIyqeHHH, xapaKTepHbIX .lI.JIH nOJIynpOBO.ll.HHKOBhlX JIa3epOB H CYnepJIIOMHHeCII.eHTHbIX .lI.HO.ll.OB. OnTHqeCKHe napaMeTpbI CBeTO.ll.HO.ll.OB HenoCpe.ll.CTBeHHO CBH3aHhI C npOII.eCCaMH cnOHTaHHOH H3JIYQaTeJIbHOH peKOM6HHaII.HH. Il03ToMY B 3TOM pa3.l1.eJIe 6Y.lI.YT 06CY)K.lI.aTbCH xapaKTepHCTHKH cnOHTaHHoro H3JIYQeHHH CBeTO.ll.HO.ll.OB. Ha pHC.

5.1

CXeMaTHQHO nOKa3aH npoII.ecc peKOM6HHaII.HH 3JIeKTpOHHO-

.lI.bIPOQHbIX nap. Ilpe.ll.nQJIaraeTcH, QTO 3aBHCHMOCTH 3HeprHH 3JIeKTpOHoB

Fit. 5. Onmutteclwe xapaKmepucmUKU cBemo8uo8oB

114

5.2. CneKmp U3JlytteHUJl

115

Tenepb cpaBHIiM Cpe.ll.HIiH: KBa31iliMnYJIbC HOCIiTeJISI 3apSl.ll.a C IiMnYJIbCOM
Ee

]~g-

kT

p = m*·

---

m*

Ii 3
KBa31iliMnYJIbC .lI.e BpoH:JISI:

1/

<poToHa

onpe.ll.eJISleTCSI BbIpa)KeHlieM

= V2m* . 4m*. 1/2 = V2m* . kT.

p= (hI27f) . k Ev

---

.

E = Ev -f/2k2 /(2mh *)

Eg

C 3HeprlieH:

¥l3 paCQeTOB no BbIpa)KeHIiSiM

(5.8)

Ii

MO)KHO

(5.8)

BbIBeCTIi

1i3


= hI/Ie = Egle. (5.9)

(5.9)

CJIe.ll.yeT, QTO B OnTIiQeCKOM .lI.lia-

na30He IiMnyJIbC <poToHa HaMHoro MeHbwe IiMnyJIbCa HOCIiTeJIeH: 3apSl.ll.a, T. e. nOCJIe aKTa peKOM6IiHaI.I.1i1i C Bb!.lI.eJIeHlieM <poToHa 3JIeKTpOH nepeXO.ll.liT 1i3 30HbI npOBO.ll.liMOCTIi B BaJIeHTHYIO 30HY npaKTIiQeCKIi 6e3 1i3MeHeHliSi

KBa:m:BOJIHOBOH BeKTOp k

KBa31i1iMnYJIbca. ¥lMeHHO TaKlie nepeXO.ll.b1 npe.ll.CTaBJIeHbI Ha pliC.

5.1

Bep-

TIiKaJIbHbIMIi JIIiHIiSiMIi, nOKa3bIBalOlll.IiMIi, QTO 3JIeKTpOHbI peKoM6liHliPYlOT PHc.5.1.

llapa6oJIHQeCKHH: 3aKOH .lI.HCrrepCHH 3JIeKTpOHoB H .lI.b1POK H rrplIMble

Me)f{30HHble rrepeXO.ll.bI, COOTBeTCTBYIOIII.He aKTaMH3JIYQaTeJIbHOH: peKOM6HHall.HH

TOJIbKO C TeMIi .lI.bIpKaMIi, y KOTOPbIX TaKOH: )Ke, KaK y HIiX, KBa31iliMnYJIbC IiJIIi BeJIIiQIiHa KBa3liBOJIHOBOrO BeKTopa

k.

¥l3 YCJIOBIiSi paBeHcTBa KBa31iliMnYJIbCOB 3JIeKTpOHoB Ii .lI.bIPOK BbITeKaeT B 30He npOBO.ll.liMOCTIi Ii 3Heprlili .lI.bIPOK B BaJIeHTHOH: 30He OT BOJIHOBOrO BeKTopa

k

CJIe.ll.YIOlll.ee COOTHoweHlie, n03BOJISIIOlll.ee paCCQIiTaTb ~meprHlO <poToHa:

IiMelOT napa60JIliqeCKIiH: xapaKTep, T. e.

2

= E + (n)2 . k _ E + (n)2 . k2 = E + (n)2 . k2

h .lI.JISI 3JIeKTpOHoB B 30He npOBO.ll.IiMOCTIi,

(5.5)

.lI.JISI 3JIeKTpOHoB B BaJIeHTHOH: 30He,

(5.6)

1/

r.ll.e m; -

r.ll.e

m:

Ii

HJIaHKa,

mit k-

c

2me*

2mh*

v

2mr* ,

9

npliBe.ll.eHHaSi Macca, onpe.ll.eJISIeMaSi KaK

1

1

1

(5.11 )

-*=-*+-*. mr me mh 3
KBa3IiBOJIHOBOH: BeKTop,

Ec

Ii

Ev -

h-

nOCTOSlHHaSi

3Heprlili 3KCTpeMYMoB

30HbI npOBO.ll.liMOCTIi Ii BaJIeHTHOH: 30HbI.

(5.10)

¥lCilOJIb3YSl lWM,6uflUpOBaflflbtU 3a1Wfl aucnepcuu

(5.10),

MO)KHO HaH:TIi

KOM6liHlipOBaHHYlO IIJIOTHOCTb 3HepreTliQeCKliX COCTOSlHIiH: B 3aBliCliMOCTIi OT 3Heprlili:

3aKoHbI coxpaHeHIiSi 3HeprHIi Ii KBa31iliMnYJIbCa nOMoralOT npliH:TIi K

1

p(E) = 271"2·

60JIee rJIy6oKoMY nOHIiMaHli1O MexaHIi3MOBIi3JIyqaTeJIbHOH: peKOM6IiHaI.I.lili.

(2m;) (n)2

3/2

. J E - Eg .

(5.12)

¥l3 pacnpe.ll.eJIeHIiSi DOJIbI.I.MaHa BIi.ll.HO, QTO Cpe.ll.HSISI KIiHeTIiQeCKaSi 3HeprHSi 3JIeKTpOHoB Ii .lI.bIPOK paBHa

kT.

¥l3 3aKOHa coxpaHeHIiSi 3HeprHIi CJIe.ll.yeT,

QTO 3HeprHSi
Ee

Ii .lI.bIpKIi

Eh:

PaCIIpe.ll.eJIeHlie HOCIiTeJIeH: B pa3peweHHbIx 30Hax HeBbIPO)K.lI.eHHOro nOJIyIIPOBO.ll.HIiKa OIIpe.ll.eJISleTCSI pacnpe.ll.eJIeHlieM DOJIbI.I.MaHa

JB(E) =

(5.7) ECJIIi TenJIOBaSi 3HeprliSi MaJia no cpaBHeHli10 C rrmpliHOH: 3anpelll.eHHOH: 30HbI

Eg,

T. e.

kT

~

E g,

3HeprHSi <poToHa npli6JIli3liTeJIbHO paBHa

Eg.

e-E/(kT).

(5.13)

3aBliCliMOCTb UflmeflCUBflocmu U3JlytteflUR OT 3HeprHIi SlBJISleTCSI
I(E)

OTClO.lI.a CJIe.ll.yeT, qTO npli BbI60pe nOJIynpOBO.ll.HIiKa C COOTBeTCTBYIOlll.eH:

N

(5.12)

JE - Eg . e-E/(kT).

Ii

(5.13): (5.14)

3anpelll.eHHOH: 30HOH: MO)KHO C03.l1.aTb CBeTO.ll.Ii0.ll., 1i3JIyqalOlll.liH: CBeT C Tpe-

5.2 IIOKa3aH CIIeKTp 1i3JIYQeHliSi CBeTO.ll.IiO.ll.OB, onpe.ll.eJISIeMbIH: <pop(5.14). MaKcliMYM cIIeKTpa 1i3JIYQeHliSi COOTBeTcTByeT 3Heprlili

6yeMOH: .lI.JIIiHOH: BOJIHbI. HanpliMep, .lI.JISI GaAs npli KOMHaTHOH: TeMnepaType

Ha pliC.

Eg

MYJIOH:

= 1,42 3B, n03ToMY CBeT0.ll.Ii0.ll.bI GaAs C03.l1.alOT IiH
qeHlie C .lI.JIIiHOH: BOJIHbI

870

HM.

(5.15)

FIt. 5.

116

OnmU'leC1We xapaKmepucmuKu c8emOaUOa08

5.3. Yaoll

8bt80aa U3IlY'leH.UfI.

117

BpeMH :lKH3HH HOCHTeJIeH rrpH crrOHTaHHOM H3JIyqeHHH CBeTO.11.HO.11.0B

~

"",''''~

B rrpHM030HHbIX rrOJIyrrpOBO.11.HHKax orrpe.11.eJIHeTcH KOHIJ.eHTpaIJ.HeH rrpHMeIIJIOTHOCTh COCTolIHHii 0<

ceH B aKTHBHoH 06JIaCTH (HJIH KOHIJ.eHTpalI.HeH HOCHTeJIeH), a TaK:lKe Kaqe-

(E - Eg)1I2

CTBOM MaTepHaJIa, H 06bIqHO JIe:lKHT B .11.Harra30He 1-100 HC, 'ITO rr03BOJIHeT .11.06HTbCH CKopOCTeH MO.11.YJIHIJ.HH BrrJIOTb .11.0 1 r6HT/C.

5.3.

YrOJI BbIBO,ll;a H3JI~eHHJI

ECJIH CBeT Ha rpaHHIJ.e Me:lK.11.Y rrOJIyrrpOBO.11.HHKOM H B03.11.YXOM HcrrbITbIBaeT rrOJIHOe BHyTpeHHee OTpa:lKeHHe, H3JIyqeHHe H3 rrOJIyrrpOBO.11.HHKa He BbIXO.11.HT Hapy:lKy. CBeT MO:lKeT BbIHTH 3a rrpe.11.eJIbI rrOJIyrrpOBO.11.HHKa, eCJIH yrOJI rra.11.eHHH JIyqeH Ha rpaHHlI.Y pa3.11.eJIa 6JIH30K K 90 0

•

nOJIHOe BHYTpeH-

Hee OTpa:lKeHHe B03MO:lKHO .11.JIH JIyqeH, rra.11.alOlII.HX He rro.11. rrpHMbIM yrJIOM,

E g +kT12

a TaK:lKe rrpH HX rrOqTH CKOJIb3HlII.eM rra.11.eHHH. nOJIHOe BHyTpeHHee OTpa-

3HepIWI E

:lKeHHe CHJIbHO CHH:lKaeT BHellIHHH KBaHTOBbIH BbIXO.11. H3JIyqeHHH, oco6eHHO PHC.

5.2.

TeOpeTHlJeCKHH CIIeKTp H3JIYlJeHHH CBeTO)l.HO)l.OB. IllHpHHa pacnpe)l.eJIeHHH Ha nOJIOBHHe HHTeHCHBHOCTH, onpe)l.eJIHeTCH BeJIHlJHHOH 1,8kT

.D.JIH CBeTO.11.HO.11.0B H3 MaTepHaJIOB C BbICOKHMH 3HaqeHHHMH rrOKa3aTeJIeH rrpeJIOMJIeHHH.

lIlHpHHa crreKTpaJIbHOH JIHHHH orrpe.11.eJIHeTCH Ha ypoBHe, paBHoM rrOJIO-

npe.11. rrOJIO:lKHM, 'ITO