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6
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4
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2
0
z 27 Pa 0
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60
80
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T p,('(57(03(5$7853/$60(1 Beobachtung
Elektrode Kaskadenplatte seitliche Beobachtung
A
A
Schnitt A-A Beobachtung
(a)
Kühlwasser und elektrischer Anschluss
Gaszufuhr
Plasmabrenner Graphitelektrode
Kühlwasser Bogen
Gasauslass
Schmelze
Abflussöffnung für Schmelze Austrittsdüse (b)
Elektrode
(c)
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cB0TK 2'(5 ./(,1(5 JSRZ cB0TK (/(.75,6&+(5 u7520',&+7( $86%,/'(7P y(,7(5 817(56&+(,O '(7 0$1 x$.880%?*(1N p,('(5'58&.%?*(1 JSR2S A SRU r$K 0,7 (,1(5 326,7,9(1 u>8/(N ,1 '(5 v( + vRNv1 *,/7 81' '(5 k21,6$7,216*5$' +2&+ ,67N j2&+'58&.%?*(1 JSRU A SRX r$K 0,7 v( W vR W v1 J7+(50,6&+(6 r/$60$K 81' g17/$'81*(1 %(, 6(+5 +2+(0 J/ SRY r$K f58&.N 9(5*/(,&+6:(,6( 1,('5,*(5 v(03(5$785 81' 1,('5,*(0 k21,6$7,216O *5$' ,0 nvi 81' 0,7 +2+(5 c%675$+/81*6/(,6781*P l( 1$&+ '(5 c57N :,( 81' :2+,1 ',( =8*()@+57( (/(.75,6&+( g1(5*,( =8O 2'(5 $%*()@+57 :,5'N &+$5$.7(5,6,(57 0$1 :$1'67$%,/,6,(57(N (/(.752'(167$%,/,6,(57(N :,5%(/67$%,/,6,(57( 81' )5(,%5(11(1'( n,&+7%?*(1P f,( '85&+ c8)75,(% %(',1*7( %2*(1)?50,*( g56&+(,181*6)250 /(7=7(5(5 +$7 '(5 g17/$'81* ,+5(1 p$0(1 *(*(%(1P g,1,*( )@5 ',( i581'/$*(1)256&+81* 81' ',( *52M7(&+1,6&+( c1:(1'81* :,&+7,*( d$8)250(1 6,1' ,1 '(1 c%%P TPTX$ A & =8O 6$00(1*(67(//7P k1 '(5 n,&+7%2*(1)256&+81* +$7 '(5 :$1'67$%,/,6,(57( m$6.$'(1O %2*(1 1$&+ o$(&.(5 Jc%%P TPTX$K %(621'(5( d('(8781* (5/$1*7P g,16&+1@581*(1 '(6 n,&+7%2*(16 0,7 /2.$/ @%(5+?+7(5 (/(.75,6&+(5 u7520',&+7( W )@+5(1 =P dP $1 '(5 m$7+2'( =8 (,1(5 0$*1(7,6&+(1 m5$)7:,5.81* 81' '$0,7 =8 (,1(0 r803(5(.7N '(5 (,1(1 m$7+2'(1-(7 0,7 i(6&+:,1',*.(,7(1 921 &$P SRR 0B6 ,1'8=,(57P k1 (,1(0 >8M(5(1 o$*1(7)(/' 5R %(:(*7 6,&+ (,1 d2*(1 +>87* ,1 AJ W 4 5RK Ot,&+781*N 0$1 635,&+7 921 5(752*5$'(5 d(:(*81*P u,( .2007 =867$1'(N :(,/ ',( r803:,5.81* '85&+ ',( ,11(5(1 o$*1(7)(/'(5 ',( '(6 >8M(5(1 5ROh(/'(6 @%(575,57P
TPZPTPT f,( d2*(16>8/( f,(6(5 ,0 y(6(17/,&+(1 '85&+ ',( *(20(75,6&+( c125'181* '(5 g/(.752'(1 81' ',( *(.@+/7( w0*(%81* '(71,(57( d(5(,&+ =(,&+1(7 6,&+ '85&+ (,1(1 +2+(1 n(,6781*6O 23000 200 A
21000
15000
Argon R E = 0.15 cm
200 A
Stickstoff R E = 1 cm
100 A 30 A
19000
10000
150 A
20 A 15 A
17000
T/K 100 A
15000 13000 11000 (a)
19 A
T/K 5000
50 A
0
0.2
0.4 ρ
0.6
0.8
0 (b)
0
0.2
0.4
ρ
0.6
0.8
1.0
c%%P TPTY t$',$/( v(03(5$7853527/( ,1 J$K (,1(0 c5*21Om$6.$'(1%2*(1 J0,7 tg 3 RPSW &0 1250,(57KN J%K (,1(0 pTOm$6.$'(1%2*(1 J0,7 tg 3 S &0 1250,(57K %(, p250$/'58&. )@5 9(5O 6&+,('(1( c&+67(03(5$785(1 Ju752067>5.(1 ,1 cKN 1$&+ LUWbP
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806$7= $86P n(*7 0$1 =P dP %(, p250$/'58&. (,1( h(/'67>5.( 921 g 3 SRV xB0 81' (,1( u752067>5.( k 3 TRR c =8*581'(N 62 %(75>*7 ',( 352 n>1*(1(,1+(,7 (,1(6 =
20
Argon 200 A
10
200 A
100 A
5 3 2
50 A
1 0.5 (a)
Helium
400 A
5 3 2 ne /1022 m-3
ne /1022 m-3
10
100 A
400 A
300 A 200 A
1 100 A
0.5 0.3 0.2 0.1
8
10
12 14 Te /103 K
16
18
20
12
22 (b)
14
16
18 20 Te /103 K
22
24
26
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-g 3 1 JvN 3Kg T 3 2
JTPTZ[K
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t
R
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k 3 T@g g 1 5 '5 81' n8 3 T@ g 8 5 '5 P
JTPT[RK
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T p,('(57(03(5$7853/$60(1 120 Argon
σ /102Ω -1m-1
100 80 60 40 20
11
13
15 T/103 K
17
19
21
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Argon
2.8 2.4
W (mK)
1.6
λ
2.0
1.2 0.8 0.4 0
0
2
4
6
8 10 12 14 Temperatur T/103 K
16
18
20
22
24
6
8 10 12 14 Temperatur T/103 K
16
18
20
22
24
(a) 6 Stickstoff
5
λ
W (mK)
4 3 2 1 0 (b)
0
2
4
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g,1( 6,03/( $1$/<7,6&+( d(+$1'/81* ,67 ,1 '(5 p>+(581* 1 3 1JuRK 3 &2167P @%(5 '(1 *$1=(1 d2*(1%(5(,&+ 0,7 8 3 R 0?*/,&+P f,( h81.7,21 uJ5K ,67 '$11 (,1( r$5$%(/ '(5 h250 uJ5K 3 uR JS A J5BtgKTK 0,7 '(0 c&+6(1:(57 uRP k1 3$5$0(75,6&+(5 c%+>1O *,*.(,7 /$87(7 ',( d2*(1&+$5$.7(5,67,. k g 3 V@ uR 81' kBg 3 @ tTg 1JuRKP o,7 '(0 c16$7= 1JuRK 6 JuRK0 1,007 ',( d2*(1&+$5$.7(5,67,. ',( h250 $1\ g 6 k2J02SKBJ01SKP u,( ,67 0,7 k $%)$//(1' )@5 0 / SN d(5(,&+ Y ,1 c%%P JTPSXKP g,1( %(66(5( d(6&+5(,%81* /,()(57 '$6 m$1$/02'(// (,1(6 d2*(16N %(, '(0 1 & R 185 ,0 +(,M(1 d2*(1%(5(,&+ *,/7N ,0 .>/7(5(1 c8M(1%(5(,&+ :,5' '$*(*(1 1 3 R *(6(7=7P u7$7,21>5( n,&+7%2*(13/$60(1 ,1 m$6.$'(1%?*(1 J6P c%%P TPTX$K 6,1' :(*(1 ,+5(5 *87(1 |,1'(56<00(75,(N t(352'8=,(5%$5.(,7N |8*>1*/,&+.(,7 81' '(5 o?*/,&+.(,7N '85&+ x(5/>1*(581* '(5 d2*(16>8/( 6(+5 *(1$8( h(/'0(6681*(1 9251(+0(1 =8 .?1O 1(1N %(621'(56 *((,*1(7N v5$163257.2(5,=,(17(1N $%(5 $8&+ ',( g,*(16&+$)7(1 (0,7O 7,(57(5 n,1,(1O 81' m217,1880675$+/81* :,( %(5*$1*6:$+56&+(,1/,&+.(,7(1 81' n,1,(1%5(,7(1 (;3(5,0(17(// =8 (50,77(/1P k1 jT 81' j( /$66(1 6,&+ 817(5 p250$/O '58&. /(,&+7 v(03(5$785(1 %,6 URRRR m (55(,&+(1N ,1 6&+:(5(5(1 c5%(,76*$6(1 %(O *5(1=7 ',( c%675$+/81* ',( v(03(5$785:(57( $8) 7<3,6&+ TRRRR mP k1 ',(6(1 g17/$O '81*(1 ,67 '(5 u75$+/81*675$163257 *$1= :(6(17/,&+ 81' '(5 v(50 8 JvN3K ,67 ,1 '(5 g/(1%$$6Oj(//(5Oi/(,&+81* JTPTZ[K '85&+ Z
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TP[ |(,7$%+>1*,*( g17/$'81*63/$60(1 81' ,+5( c1:(1'81*(1 TP[PS %(5%/,&. k1 '(1 c%6&+1,77(1 TPX A TPZ :85'(1 ',( x25*>1*( ,0 x2/80(1N ,1 u&+,&+7(1 81' h$//5>80(1 62:,( $1 q%(59>&+(1 921 feOg17/$'81*(1 921 6(+5 1,('5,*(1 %,6 =8 6(+5 +2+(1 (/(.75,6&+(1 u752067>5.(1 ',6.87,(57 81' ',( *581'/(*(1'(1 c63(.7( =85 g1767(+81* (,1(6 r/$60$6 (5?57(57P u,( %,/'(1 ',( i581'/$*(1 $8&+ =80 x(5O 67>1'1,6 '(5 ,1 ',(6(0 c%6&+1,77 %(+$1'(/7(1 g17/$'81*(1 ,1 =(,7$%+>1*,*(1 (/(.7O 5,6&+(1 h(/'(51N :2%(, -('2&+ =$+/5(,&+( 1(8( i(6,&+76381.7( =8 %($&+7(1 6,1'P h@5 ',( ,1'8675,(//( r5$;,6 Jd(/(8&+781*6,1'8675,(N u&+$/7(5%$8N o(7$//85*,( (7&PK 6,1' %(621'(56 WRO %=:P XROj=Og17/$'81*(1 :,&+7,*P |$+/5(,&+( 3/$60$7(&+12/2*,6&+ ,17(5(66$17( g17/$'81*(1 $5%(,7(1 5(3(7,(5(1' 0,7 *(38/67(1 h(/'(51N =85 r/$60$O
TXR
T p,('(57(03(5$7853/$60(1
+(,=81* :(5'(1 $%(5 $8&+ u(1'(5 0,7 t$',2)5(48(1=(1 JthOi(1(5$725(1N =P dP SUPWX oj=KN o,.52:(//(1*(1(5$725(1 JRP[SW ij=N TPT A U ij=K 2'(5 n$6(5 JeqTOn$O 6(5 %(, TPZU 6 SRSU j=K (,1*(6(7=7P f,( 62 (5=(8*7(1 =(,7$%+>1*,*(1 r/$60(1 9(5+$/7(1 6,&+ %(=@*/,&+ ,+5(5 i(20(7O 5,(N '(6 n(,6781*6%('$5)6N '(5 5>80/,&+(1 x(57(,/81* '(5 r/$60$.(11*5?M(1N ,+5(6 i/(,&+*(:,&+76=867$1'6N ,+5(5 u7$%,/,7>7N t(352'8=,(5%$5.(,7 86:P 921 '(5 feOg17O /$'81* $%:(,&+(1'P c%(5 $8&+ 817(5(,1$1'(5 :(,6(1 6,( w17(56&+,('( $8)P v<3,6&+( ,0 r/$60$ $%/$8)(1'( x25*>1*( :,( y(//(1$86%5(,781* 81' h/8.78$7,21(1N v5$16O 3257N c%675$+/81*N u&+,&+7%,/'81*N y$1'352=(66(N &+(0,6&+( t($.7,21(1 (7&P 6,1' ,1 '(1 ',9(56(1 g17/$'81*6)250(1 6(+5 9(56&+,('(1 $86*(35>*7P f,( c86:$+/ 81' c86/(*81* (,1(6 r/$60$(;3(5,0(176 5,&+7(7 6,&+ 1$&+ '(1 63(O =,(//(1 3+<6,.$/,6&+(1N &+(0,6&+(1 2'(5 7(&+1,6&+(1 h5$*(67(//81*(1 81' +$7 9,(/( h$&(77(1P d(=@*/,&+ '(5 5>80/,&+(1 c%0(6681* 6,1' u.$/,(581*6*(6(7=( =8 %($&+7(1N +,(5 6,1' +>87* 02'8/$5( n?681*(1 '(5 g567(//81* (,1(5 *52M(1 c1/$*( 925=8=,(+(1P f,( |(,76.$/(1 '(5 '85&+ ',( (,1=(/1(1 r/$60$.20321(17(1 %(:,5.7(1 r52=(66( :(,O &+(1 6(+5 67$5. 921(,1$1'(5 $% 81' /,(*(1 )@5 x25*>1*(N $1 '(1(1 g/(.7521(1 %(O 7(,/,*7 6,1'N %(, p250$/'58&. ,0 d(5(,&+ 36 %,6 16N k21(1352=(66( %(, SR 16 %,6 SR =6N 81' r52=(66( =:,6&+(1 1(875$/(1 v(,/&+(1 %(, SR =6 %,6 SR 06P f85&+ ',( f$8(5 *(O 38/67(5 g17/$'81*(1 81' ,+5( y,('(5+2/)5(48(1=N $%(5 $8&+ '85&+ ',( h5(48(1= '(5 $1*(/(*7(1 h(/'(5 ,67 $/62 (,1( u7(8(581* '(5 r52=(66$%/>8)( 0?*/,&+N 1$7@5/,&+ $8&+ '85&+ ',( f,&+7( 81' g1(5*,( '(5 %(7(,/,*7(1 r52=(663$571(5P k0 j,1%/,&. $8) '(1 7(&+1,6&+(1 g,16$7= 6,1' q37,0,(581*(1 %(=@*/,&+ g1(5*,($8):$1'N y,5.81*6O *5$'N i$69(5%5$8&+N s8$/,7>7 '(5 r52'8.7(N u7$1'=(,7(1 81' u,&+(5+(,7 '(5 c1/$*(N x$.880%(',1*81*(1N w0:(/79(575>*/,&+.(,7N m267(1 81' h2/*(.267(1 (7&P 925=8O 1(+0(1P y(11 $8&+ ,1 '(1 /(7=7(1 l$+5(1 ',( r/$60$02'(//,(581* (5+(%/,&+( h257O 6&+5,77( *(0$&+7 +$7N ,67 0$1 =85 g5=,(/81* 237,0$/(5 g5*(%1,66( ,00(5 12&+ $8) g;3(5,0(17( 0,7 $1*(0(66(1(5 ',$*1267,6&+(5 c8667$7781* $1*(:,(6(1N ',( 1$&+ (,1(0 NN75,$/O$1'O(5525DDOx(5)$+5(1 '85&+*()@+57 :(5'(1P
TP[PT t$',2)5(48(1=OJthOKg17/$'81*(1 TP[PTPS k1'8.7,9( g,1.233/81* j2+(5 f58&.P d(, ',(6(0 thOg17/$'81*67<3 J6&+(0$7,6&+(5 c8)%$8 ,1 c%%P TPUS$K :,5' (,1 r/$60$ %(, +2+(0 f58&. J3 W SRW r$K '85&+ ,1'8.7,9 (,1*(.233(/7( (/(.7O 520$*1(7,6&+( h(/'(5 1$&+ '(0 v5$16)250$72535,1=,3 9251(+0/,&+ ,0 >8M(5(1 g17O /$'81*6%(5(,&+ $8)*(+(,=7P thOi(1(5$725(1 )@5 t$',2)5(48(1=(1 J) 3 S ASRR oj=N r(/ ] S oyK 67(//(1 ',( (5)25'(5/,&+( n(,6781* =85 x(5)@*81*P x257(,/+$)7 6,1' ',( k1'8675,()5(48(1=(1 ) 3 TPXW oj= 2'(5 ) 3 SUPWX oj=P f(5 237,0$/( g17/$'81*6O 5$',86 tg %(, ,1'8.7,9(5 g,1.233(/81* 6.$/,(57 1$&+ i/P JTPZYK )@5 6 * -0N 63N( 0,7 '(5 g,1'5,1*7,()( %N *(1$8(5 *,/7 tg 3 JTPS A TPZK % 3 JTPS A TPZK J@ B =R ) K2SBTP |$+/(1%(,63,(/P c5*21 0,7 3 3 SRW r$N 1 3 SZRR /2S 02SN v W [RRR mN ) 3 UPW oj= (5*,%7 tg 3 JSPU A SPZK 6 SR2T 0 $/6 237,0$/(1 g17/$'81*65$',86P f,( =80 w17(5+$/7 '(5 g17/$'81* (5)25'(5/,&+( o,1,0$//(,6781* '(5 thOs8(//( )>//7 0,7 '(0 f58&. 81' 0,7 67(,*(1'(5 h5(48(1= $%P u,( ,67 %(621'(56 1,('5,* )@5 '$6 +>87* (,1*(6(7=7( c5%(,76*$6 c5*21P
TP[ |(,7$%+>1*,*( g17/$'81*63/$60(1 81' ,+5( c1:(1'81*(1
TXS
c1:(1'81*(1P k0 x(5*/(,&+ =8 (,1(0 n,&+7%2*(1 %(6,7=7 ',( thOg17/$'81* (,1(1 *52M(1 f85&+0(66(5N 'P +P $8&+ %(, +2+(0 i$6'85&+6$7= ,67 ',( x(5:(,/=(,7 921 v(,/&+(1 ,0 g17/$'81*65$80 *52MP f,(6( */(,&+*(:,&+761$+(1 g17/$'81*(1 6,1' '$O +(5 =85 g,1/(,781* &+(0,6&+(5 t($.7,21(1N =80 c8)6&+0(/=(1N x(5'$03)(1 81' d(6&+,&+7(1 1$&+ k1-(.7,21 921 )(67(1N 9@66,*(1 2'(5 *$6)?50,*(1 r5(.85625(1 6(+5 *((,*1(7N %(621'(56 $8&+ :(,/ 6,( .(,1( g/(.752'(1 %(6,7=(1P d(,63,(/+$)7 6(,(1 ',( f,662=,$7,21 921 pjU 81' u<17+(6( 921 pTjVN ',( g5=(8*81* 921 u,UpVOu&+,&+7(1 ,1 pjUOu,jVOi$6*(0,6&+(1N g5=(8*81* 921 eO 81' dpOx(5O 6&+/(,M6&+,&+7(1N g5=(8*81* )(,1.?51,*(5 p$1238/9(5 J|5qTN e8Bu,eOe(50(76K 81' ',( j(567(//81* +2&+7(03(5$7856835$/(,7(1'(5 {deqOu&+,&+7(1 LUZN YZN Y[b (5:>+17P thOg17/$'81*(1 ,1 i/$65?+5(1 ',(1(1 :(*(1 '(5 NN6,'(O21DD d(2%$&+781*60?*O /,&+.(,7 '85&+ ',( 75$163$5(17(1 y>1'(N '(5 t(,1+(,7 '(6 r/$60$6N '(5 67$%,/(1 d5(11)250 $8&+ %(, c70263+>5(1'58&.N '(5 0?*/,&+(1 *52M(1 237,6&+(1 f,&.( %(, c%62537,216(;3(5,0(17(1 81' :(*(1 '(5 9(5*/(,&+6:(,6( *52M(1 c86'(+181* '(5 u75(&.(N $8) '(5 g0,66,21 $86 237,6&+ '@11(5 u&+,&+7 (5)2/*7N =80 (0371'/,&+(1 p$&+:(,6 &+(0,6&+(5 g'8.7( 81' r52'8.7( 0,7+,/)( '(5 u3(.75$/$1$/<6(P o2'(//,(581*P f,( g17/$'81*(1 %(, SRW r$ 6,1' */(,&+*(:,&+761$+ 81' i/P JTPSXVK A JTPSXZK :(5'(1 ,1 |,1'(5.225',1$7(1 J5N =K 6,08/7$1 0,7 (,1(5 i/(,&+81* )@5 '$6 x(.725327(17,$/ 4N (4 3 - ,R 1 6 4 81' '(1 */(,&+*(:,&+761$+(1 v5$163257.2(5,=,(17(1 1$&+ c%6&+1P TPVPU *(/?67P f,( d(6(7=81*6',&+7(1 )2/*(1 $86 (,1(0 u72MOu75$+/81*6Oo2'(// J6P c%6&+1P TPWPTPSKN '$ ,1 '(1 0(,67(1 g17/$'81*(1 185 rnvi 925$86*(6(7=7 :(5'(1 .$11P x25*(*(%(1 :(5'(1 '(5 u7520 ,1 '(5 u38/( 2'(5 ',( *(6$07( ,0 r/$60$ ',66,3,(57( n(,6781*P k0 f58&.%(5(,&+ 3 . SRW r$ 0@66(1 o(+59@66,*.(,7(1*/(,&+81*(1 =85 o2'(//,(581* +(5$1*(=2*(1 :(5'(1 Jd(,63,(/( ,1 LUbKP f,( c%%P TPUS% =(,*7 ',( o2'(//,(581* '(5 v(03(5$7859(57(,/81* 81' c%%P TPUS& '(6 u75?081*6)(/'(6 ,1 (,1(5 thOg17/$'81* 0,7 '(1 ,0 d,/' 63(=,7=,(57(1 g,*(1O 6&+$)7(1P e+$5$.7(5,67,6&+ 6,1' '$6 v(03(5$785+2+/3527/ 81' '(5 g,1/$8):,5%(/P f$6 j2+/3527/ ,0 d(5(,&+ R . ; . TPW 00 (1767(+7 '85&+ '(1 .$/7(1 v5>*(5*$667520 Jc%%P TPUS$KP f,(6( 67?5(1'(1 g5(.7( %(+,1'(51 '(1 g,16$7= '(5 g17/$'81* =80 x(5'$03)(1 +2&+6&+0(/=(1'(5 o$7(5,$/,(1P v<3,6&+( y(57( '(5 |867$1'6*5?M(1 6,1' v( W vR o SRV mN 1( W SRTS A SRTT 02UN >+1/,&+ '(1(1 921 feOn,&+7%2*(13/$6O 0(1 1,('5,*(5 n(,6781*6',&+7(P p,('5,*(5 f58&.P thOg17/$'81*(1 +$%(1 $8&+ ,0 p,('(5'58&.%(5(,&+ Jc%%P TPUTK )@5 63(=,(//( c1:(1'81*(1 *52M( x(5%5(,781* *()81'(1P k1 ',(6(1 g17/$'81*(1 (1767(+7 925 u8%675$7(1 ,0 x(5*/(,&+ =85 .$3$=,7,9(1 thO g17/$'81* J%(6&+5,(%(1 ,1 c%6&+1P TP[PTPTK 185 (,1( 1,('5,*( u&+,&+763$1181*P f,( g1(5*,( '(5 $8) (,1 v$5*(7 $85$//(1'(1 k21(1 %(75>*7 1$&+ i/P JTPTVVK +?&+67(16 SR A TR (xN ',(6(5 g17/$'81*67<3 (5=(8*7 $/62 (,1 NN0,/'(6 r/$60$DDP f85&+ x2563$1181* '(6 u8%675$7(6 Jd,$663$1181*K />667 6,&+ ',( g1(5*,( '(5 k21(1 ,1 '(5 u&+,&+7 925 '(0 u8%675$7 81$%+>1*,* 921 '(5 thOn(,6781* *(=,(/7 %((,1O 9866(1P g,1 :(,7(5(5 x257(,/ ,67 ',( 9(5*/(,&+6:(,6( +2+( g/(.7521(1',&+7( JSRSZ 02UK 81' '$0,7 9(5%81'(1 (,1( +2+( c.7,9,7>7 81' t($.7,9,7>7 '(6 r/$60$6P f,( ,1'8.7,9(
TXT
T p,('(57(03(5$7853/$60(1
Mantelgasstrom Zentralgasstrom Trägergasstrom
(a)
Spule
15 slm Ar Sonde Trägergas: 5 slm Ar 150 (b)
130
110
90 z /mm
70
48
Spule
(c)
150
130
110
90 70 z /mm
30 25 20 15 10 5 0
x /mm
Mantelgas: 120 slm Ar Zentralgas:
T /K
Spule
0
30
30 25 120 slm Ar 20 Zentralgas: 15 15 slm Ar 10 5 Sonde 0 Trägergas: 5 slm Ar Mantelgas:
48
30
x /mm
Quarzrohr
10000 8000 6000 4000 2000 0
0
c%%P TPUS thOg17/$'81*P J$K u&+(0$ '(5 i$6675?081*N J%K k627+(50(1)(/'N J&K u7520/,1,(1O )(/' %(, (,1(0 f58&. 921 3 3 WRR +r$ 81' (,1(5 (,1*(.233(/7(1 jhOn(,6781* 921 ST .yP
m233/81* (50?*/,&+7 1>0/,&+ (,1(1 (/(.75,6&+(1 h(/'9(5/$8)N '(5 5,1*)?50,* ,1 6,&+ *(6&+/266(1 ,67 81' ',( y$1' 1,&+7 6&+1(,'(7P f,( '(1 h(/'/,1,(1 0(+5 2'(5 :(1,*(5 )2/*(1'(1 g/(.7521(1 *(+(1 '$+(5 1,&+7 $1 '(5 y$1' 9(5/25(1P |86>7=/,&+ 6(7=7 0$1 $8&+ 0$*1(7,6&+( o8/7,32/)(/'(5 =85 t('8.7,21 '(5 n$'81*675>*(59(5/867( (,1P |:,6&+(1 =:(, y,1'81*(1 '(5 j(,=638/( %$87 6,&+ $8&+ (,1 .$3$=,7,9(6 (/(.75,6&+(6 h(/' $8)N '$6 ,16%(621'(5( %(, 1,('5,*(0 f58&. :,5.6$0 :,5'P f(5 67?5(1'( g,19866 ',(6(6 h(/'(6 .$11 '85&+ y$+/ :(1,*(5N :(,7 *(:,&.(/7(5 y,1'81*(1 81' '85&+ *(6&+/,7=7(N 0(7$//,6&+( c%6&+,5081* 5('8=,(57 :(5'(1P d(, '(5 3/$1$5(1 thOg17/$'81* J6P c%%P TPUT%K :,5' '$6 thOh(/' @%(5 (,1( (%(1(N 63,5$/)?50,*( u38/( (,1*(.233(/7P u,( />667 6,&+ 0,7 x257(,/ =85 */(,&+0>M,*(1 d(O 6&+,&+781* (,1(6 *52M(1 u8%675$7(6 9(5:(1'(1P |$+/(1%(,63,(/P g17/$'81*(1 %(, 3 3 S A SR r$ %(6,7=(1 1(Oy(57( o SRSZ 02UP v( /,(*7 %(, SRRRRAWRRRR mN :>+5(1' vR W URR m 7<3,6&+ ,67P f,( g/(.7521(1',&+7( .$11
TP[ |(,7$%+>1*,*( g17/$'81*63/$60(1 81' ,+5( c1:(1'81*(1
TXU
Gaseinlass
~ ~ Plasma Substrat (a)
Pumpe
Plasma Biasspannung
(b)
Gaseinlass
Elektrode Plasma Elektrode
(c)
Elektrode
Anpassung
~
Plasma
RF-Generator C
Elektrode
Pumpe
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Kurzschlussschieber
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MW-Fenster
Zirkularpolarisator RechteckMagnetron Rund-Hohlleiteradapter
Gaseinlass
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Beobachtungsschächte
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(a)
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Substrat
Φ Bias
EZREntladung
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Isolator (Dielektrikum) (a)
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(b)
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Dielektrikum
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Dielektrikum
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Gaszufuhr
Plasma Ionisation Radikalenbildung Elektronen negative Ionen zur Pumpe chemische Reaktionen Transport zur Oberfläche Oberflächenreaktionen (Adsorption, Desorption)
+
Ätzprodukte
+
Fotolack Metall
Schutzschicht
Substrat Elektrode Biasspannung
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TZR
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=21(P f,( *(1$8( d(6&+5(,%81* J0$7+(0$7,6&+(6 o2'(//K ',(6(6 h/$00(17<36 (5O )25'(57 (,1( 0,1'(67(16 =:(,',0(16,21$/( d(+$1'/81* Jn?681* '(5 p$9,(5Ou72.(6O i/(,&+81*(1N 6P c%6&+1P UPTPUKP |81>&+67 62//(1 +,(5 $%(5 6&+21 (,1,*( g5*(%1,66( 925:(**(1200(1 81' (;(03/$5,6&+ '$5*(67(//7 :(5'(1P f,( j?+( (,1(5 u75$+/9$00( />667 6,&+ 1>+(581*6:(,6( 0,77(/6 (,1(5 9(5(,1)$&+(1O '(1 d(75$&+781* $%6&+>7=(1 LSRbP f(5 u75$+/5$',86 6(, 5N ',( h/$00(1+?+( = 81' ',( i(6&+:,1',*.(,7 ,1 u75$+/5,&+781* 9 J6P c%%P UPTKP k0 |(17580 '(6 |,1'(56 />667 6,&+ ',( |(,7N ',( '(5 d5(116725 %(1?7,*7N 80 %,6 =85 u75$+/63,7=( =8 *(/$1*(1N $86 '(5 j?+( '(5 1,&+7O925*(0,6&+7(1 h/$00( 81' '(5 g,1675?0*(6&+:,1',*.(,7 %(5(&+1(1N 7 3 =B9P f,( |(,7 7 (17635,&+7 '(5 |(,7N ',( )@5 ',( x(50,6&+81* 921 d5(11O 6725 81' n8)7 %(1?7,*7 :,5'P u,( />667 6,&+ $86 '(0 g,167(,1I6&+(1 x(56&+,(%81*66$7= )@5 ',( g,1'5,1*7,()( '85&+ f,586,21 0,7 '(0 f,586,216.2(5,=,(17(1 f =8 5T 3 T f 7 %(67,00(1N :25$86 = 3 5T 9BJT fK )2/*7P f85&+ g,16(7=(1 '(6 x2/80(19866(6 I 3 @ 5T 9 (5+>/7 0$1 = 3 IBJT @ fK %=:P = 3 ) IBJ@ fKN 817(5 d(5@&.6,&+7,*81* '(5 |
URX
U x(5%5(1181*
UPTPU o$7+(0$7,6&+( o2'(//,(581*\ g5+$/781*6*/(,&+81*(1 i581'/$*( )@5 (,1( 0$7+(0$7,6&+( d(6&+5(,%81* /$0,1$5(5 5($.7,9(5 u75?081*(1 A 81' '$0,7 $8&+ '(5 d816(1%5(11(59$00( 81' $1'(5(5 h/$00(1 A 6,1' ',( p$O 9,(5Ou72.(6Oi/(,&+81*(1 Jg5+$/781*6*/(,&+81*(1 )@5 o$66(N k038/6N g1(5*,( 81' u3(=,(60$66(1KP c1 ',(6(5 u7(//( :,5' $8) ',( j(5/(,781* ',(6(5 i/(,&+81*(1 9(5O =,&+7(7 J)@5 f(7$,/6 6,(+( =P dP LSSN STbK 81' 185 '$6 g5*(%1,6 $1*(*(%(1\ X0 1 0 6 J0 cK 3 R N X7
JUPSK
X0, 1 0 6 J0, cK 1 0 6 W , 3 o, 6, N X7
JUPTK
XJ0cK 1 0 6 J0 ccK 1 0 6 ] 3 R N X7
JUPUK
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JUPVK
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Abgas Flammenfront poröse Platte
vu Brennstoff + Luft
c%%P UPU
u&+(0$7,6&+( f$567(//81* (,1(5 /$0,1$5(1 9$&+(1 x250,6&+9$00(P
UPT i581'/$*(1 '(5 x(5%5(1181*
URY
c16&+$8/,&+(5 $/6 '(5 2%,*( $//*(0(,1( h$// ,67 -('2&+ '$6 d(,63,(/ (,1(5 /$0,1$5(1 9$&+(1 x250,6&+9$00( Jc%%P UPUKP j,(5 ,67 '85&+ ',( u<00(75,( '(6 r52%/(06 (,1( 5>80/,&+ (,1',0(16,21$/( d(+$1'/81* 0?*/,&+P c86 i/P JUPSK :,5' X0 XJ09K 1 3R X7 X=
JUPWK
81' ',( u3(=,(6*/(,&+81*(1 :(5'(1 '$0,7 =8 0
X:, X: X1 09 , 1 0 , 3 6, P X7 X= X=
JUPXK
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0 1 0
1
Xv X Xv Xv 3 2} +- 6- P + 2 09&3 1 } -- &3N X= X= X7 X= -
JUPYK
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Xv N X=
JUPZK
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JUPSRK
0(,67 +,15(,&+(1' *(1$8P j,(5 %(=(,&+1(7 f,o '(1 f,586,216.2(5,=,(17 '(5 v(,/&+(1O 6257( , ,1 '(5 o,6&+81* '(5 5(67/,&+(1 v(,/&+(1P f,( 9(5(,1)$&+7( h2508/,(581* i/P JUPSRK ,67 )@5 %,1>5( o,6&+81*(1 81' )@5 u725(N ',( 185 ,1 u385(1 925/,(*(1 J:, S RKN >48,9$/(17 =8 i/P JUP[KP f,( c11$+0( (,1(5 67$5.(1 x(5'@1181* ,1 (,1(5 %(56&+866O .20321(17( ,67 =P dP ,1 h/$00(1 0,7 '(0 q;,'$7,2160,77(/ n8)7N :2 u7,&.6725 ,1 *52M(0 %(56&+866 925+$1'(1 ,67N *87 (5)@//7P k67 0$1 185 $1 67$7,21>5(1 h/$00(1 ,17(5(66,(57N .?11(1 ',( g5+$/781*6*/(,&+81*(1 :(,7(5 9(5(,1)$&+7 :(5'(1P i/P JUPWK :,5' =8 X J09K 3 R %=:P 09 3 &2167P X=
URZ
U x(5%5(1181*
f(5 f58&. .$11 %(, h/$00(1 $/6 .2167$17 $1*(1200(1 :(5'(1N '$ 5>80/,&+( f58&.6&+:$1.81*(1 2'(5 *$5 u72M:(//(1 1,&+7 $8)75(7(1 81' ',( f,&+7( 0 $86 '(0 ,'($/(1 i$6*(6(7= %(5(&+1(7 :(5'(1 .$11P f$0,7 .$11 ',( i(6&+:,1',*.(,7 9 ,1 -('(0 r81.7 '(5 h/$00( %(, 925*(*(%(1(0 o$66(19866 J09K8 '(6 819(5%5$117(1 i$6(6 (55(&+1(7 :(5'(1 $86 J09K8 3 J09KN 62 '$66 ',( k038/6*/(,&+81* JUPUK (17)>//7P f,( ,1 i/P JUPXK 81' JUPYK 925.200(1'(1 v(50( 62//(1 181 1>+(5 (5./>57 :(5'(1P f,( v(50( '(5 h250 XBX7 %(=(,&+1(1 ',( -(:(,/,*( =(,7/,&+( }1'(581* '(5 9(56&+,(O '(1(1 i5?M(1 $0 q57 =N ',( =:(,7(1 c%/(,781*(1 1$&+ '(0 q57 %(6&+5(,%(1 '(1 v5$163257 Jf,586,21N y>50(/(,781*K 81' ',( (567(1 c%/(,781*(1 1$&+ '(0 q57 ',( u75?081* J,1 i/P JUPYK ,67 s -- &3N - 12&+ (,1 m255(.7857(50N '(5 v5$163257 921 y>50( '85&+ f,586,21 921 v(,/&+(1 %(5@&.6,&+7,*7KP f,( $%/(,781*6)5(,(1 v(50( %(6&+5(,O %(1 ',( /2.$/( }1'(581* '85&+ ',( &+(0,6&+( t($.7,21P f(5 g,19866 '(5 9(56&+,(O '(1(1 v(50( />667 6,&+ $0 %(67(1 (5.(11(1N :(11 0$1 9(5(,1)$&+7( u<67(0( %(O 75$&+7(7N %(, '(1(1 0$1 (,1=(/1( r52=(66( 9(51$&+/>66,*(1 .$11P d(75$&+7(7 0$1 (,1 58+(1'(6N &+(0,6&+ 1,&+7 5($*,(5(1'(6 J,1(57(6K i(0,6&+N '$11 9(56&+:,1'(1 62:2+/ ',( u75?081*6O $/6 $8&+ ',( s8(//7(50(P p,007 0$1 $1N '$66 + 81' f,o 0 1,&+7 920 q57 = $%+>1*(1N 62 (5+>/7 0$1 $/6 9(5(,1)$&+7( i/(,&+81*(1 '$6 TP h,&.I6&+( 81' '$6 TP h285,(5I6&+( i(6(7=\ Xv + X Tv X T: X:, 3 f,o T, 81' 3 P X7 0&3 X=T X7 X=
JUPSSK
d(,'( i(6(7=( %(6&+5(,%(1 '$6 c86(,1$1'(5/$8)(1 921 r527/(1 '85&+ ',586,9( r52O =(66(N :2%(, ',( =(,7/,&+( }1'(581* 3523257,21$/ =85 m5@0081* J=:(,7( c%/(,781*K '(5 r527/( ,67 81' /(7=7/,&+ =8 (,1(5 i/(,&+9(57(,/81* )@+57P i/(,&+81*(1 '(5 h250 JUPSSK /$66(1 6,&+ /(,&+7 $1$/<7,6&+ /?6(1P g,1( 63(=,(//( n?681* '(5 f,586,216*/(,O &+81*N ',( '$6 c86(,1$1'(5/$8)(1 '(5 r527/( 9(5'(87/,&+7N ,67 ,1 c%%P UPV$ '$5*(67(//7P c/6 =:(,7(6 d(,63,(/ 62// 181 (,1 i(0,6&+ %(75$&+7(7 :(5'(1N ,1 '(0 .(,1( &+(O 0,6&+( t($.7,21 81' .(,1( v5$163257925*>1*( 67$7771'(1P o$1 (5+>/7 $86 '(1 i/P JUPXK 2'(5 JUPYK X{ X{ 3 29 X7 X=
J{ 3 :,N vK P
w0
JUPSTK
t =0
D =1
t =0 t =1/16 w
t =2 Y
t =1
t =1/4 0 (a)
-1
z
0
1
(b)
z
c%%P UPV J$K v<3,6&+(5 x(5/$8) (,1(6 ',586,9(1 r52=(66(6 J,1 ',0(16,216/26(1 g,1+(,7(1KP d(, 7 3 R /,(*7 (,1( %Oh81.7,21 925P J%K u&+(0$7,6&+( f$567(//81* (,1(6 m219(.7,216352=(66(6P
UPT i581'/$*(1 '(5 x(5%5(1181*
UR[ CO
0.25 0.20
OH 0.15
Reaktionszone
Frischgas CH4/O2
Vorheizzone
T
Abgas CO2/H2O
x
0.10 0.05
CH3 (a)
CH
Ort
0 (b)
0
5 z /mm
10
15
H2 C4H2(× 50) H2O CO2 C2H2 O2
c%%P UPW v<3,6&+( u758.785 '(5 h/$00(1)5217P J$K 6&+(0$7,6&+( f$567(//81*P f85&+ ',( e+(O 0,/80,1(6=(1= +2&+$1*(5(*7(5 ejOt$',.$/( 75,77 ,1 '(5 t($.7,216=21( %/$8(6 h/$00(1/(8&+O 7(1 $8)P f$6 (%(1)$//6 $8)75(7(1'( qjOn(8&+7(1 ,0 w/75$9,2/(77(1 ,67 816,&+7%$5P J%K u,08/,(57( o2/(1%5@&+( '(5 j$837.20321(17(1 ,1 (,1(5 9$&+(1 g7+,1 Jc&(7(1KBu$8(56725Oh/$00( J9(5'@117 0,7 c5*21N w17(5'58&. LSUbKP
f,( i/(,&+81* %(6&+5(,%7 m219(.7,21 0,7 '(5 i(6&+:,1',*.(,7 9P f,( =(,7/,&+( }1O '(581* ,67 -(:(,/6 3523257,21$/ =85 u7(,*81* J(567( c%/(,781*K '(6 r527/6P c8&+ ',(6( i/(,&+81* />667 6,&+ (;$.7 /?6(1N :2%(, ',( n?681* '85&+ {J=N7K 3 {JJ= A 9 7KNRK *(O *(%(1 ,67P y>+5(1' '(5 |(,7 7 71'(7 $/62 (,1( x(56&+,(%81* '(6 r527/6 80 '(1 y(* 9 7 67$77P f,( h250 '(6 r527/6 >1'(57 6,&+ +,(5%(, 1,&+7 Jc%%P UPVN 5(&+76KP f,( 2%(1 '$5*(67(//7(1 g5+$/781*6*/(,&+81*(1 (50?*/,&+(1 817(5 x(5:(1'81* '(5 127:(1',O *(1 f$7(1 Jv5$163257.2(5,=,(17(1N &+(0,6&+( t($.7,216'$7(1N 7+(502'<1$0,6&+( f$7(1K (,1( 92//67>1',*( d(5(&+181* '(5 v(03(5$785 81' '(5 m21=(175$7,2163527/( ,1 /$0,1$5(1 9$&+(1 h/$00(1 ,1 c%+>1*,*.(,7 920 c%67$1' = =80 d5(11(5P u2/&+( %(5(&+1(7(1 r527/( /$66(1 6,&+ 0,7 (;3(5,0(17(//(1 g5*(%1,66(1 9(5*/(,&+(1P g,1 7<3,6&+(6 d(,63,(/ )@5 (,1( g7+,1 JeTjTKBu$8(56725Oh/$00( %(, w17(5'58&. ,67 ,1 c%%P UPW '$5*(67(//7P
UPTPV i581'/$*(1 '(5 m,1(7,. f(5 &+(0,6&+( w06$7= %(, x(5%5(1181*65($.7,21(1 %(58+7 $8) (,1(5 .203/,=,(57(1 c%)2/*( 921 62 *(1$117(1 &+(0,6&+(1 g/(0(17$55($.7,21(1P f,( i(6$07*(6&+:,1O ',*.(,7 '(5 t($.7,21 +>1*7 '$11 (,1(56(,76 921 '(1 '58&.O 81' 7(03(5$785$%+>1O *,*(1 t($.7,216*(6&+:,1',*.(,7(1 '(5 (,1=(/1(1 t($.7,2166&+5,77( 81' $1'(5(56(,76 920 k1(,1$1'(5*5(,)(1 '(5 9(56&+,('(1(1 h2/*(O 81' r$5$//(/5($.7,21(1 $%P
USR
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f 1g 1h 1 P P P
JUPSUK
9(567(+7 0$1 (,1(1 (03,5,6&+(1 c16$7= )@5 ',( t($.7,216*(6&+:,1',*.(,7N 'P +P ',( i(6&+:,1',*.(,7N 0,7 '(5 (,1 $1 '(5 t($.7,21 %(7(,/,*7(5 u725 *(%,/'(7 2'(5 9(5O %5$8&+7 :,5'P f$%(, 6,1' cN dN e P P P 9(56&+,('(1( $1 '(5 t($.7,21 %(7(,/,*7( u725(P d(75$&+7(7 0$1 =P dP '(1 u725 cN 62 />667 6,&+ ',( t($.7,216*(6&+:,1',*.(,7 ,1 '(5 h250 'Lcb 3 2 .J)K Lcb$ Ldb% Leb& 6 P P P JUPSVK '7 '$567(//(1P $N %N &P P P6,1' ',( t($.7,21625'181*(1 %(=@*/,&+ '(5 u725( cN dN e P P P 81' .J)K ,67 '(5 i(6&+:,1',*.(,76.2(5,=,(17 '(5 &+(0,6&+(1 t($.7,21P f,( u800( $//(5 g;321(17(1 $N %N &P P P ,67 ',( i(6$075($.7,21625'181* '(5 t($.7,21P LcbN LdbN P P P %(6&+5(,%(1 ',( m21=(175$7,21(1 '(5 u725( cN dN P P P q)7 /,(*(1 (,1,*( u725( ,0 %(56&+866 925P k1 ',(6(0 h$// >1'(51 6,&+ ,+5( m21O =(175$7,21(1 185 810(5./,&+P d/(,%(1 =P dP LdbN LebP P P :>+5(1' '(5 t($.7,21 $11>O +(51' .2167$17N 62 />667 6,&+ $86 '(0 i(6&+:,1',*.(,76.2(5,=,(17(1 81' '(1 m21O =(175$7,21(1 '(5 u725( ,0 %(56&+866 (,1 1(8(5 i(6&+:,1',*.(,76.2(5,=,(17 '(7O 1,(5(1N 81' 0$1 (5+>/7 =P dP 0,7 .t 3 .J)K Ldb% Leb& 6 P P P 'Lcb 3 2 .t Lcb$ P '7
JUPSWK
c86 ',(6(0 |(,7*(6(7= />667 6,&+ '85&+ k17(*5$7,21 Jn?681* '(5 f,5(5(17,$/*/(,&+81*K /(,&+7 '(5 =(,7/,&+( x(5/$8) '(5 m21=(175$7,21 '(6 u725(6 c %(67,00(1P h@5 t($.7,21(1 SP q5'181* J$ 3 SK (5*,%7 6,&+ '85&+ k17(*5$7,21 $86 i/P JUPSWK '$6 |(,7*(6(7= SP q5'181* J'85&+ g,16(7=(1 921 i/P JUPSXK ,1 JUPSWK /(,&+7 1$&+=8O 35@)(1K Lcb7 3 2 .t J7 27RK N JUPSXK /1 LcbR :2%(, LcbR 81' Lcb7 ',( m21=(175$7,21(1 '(6 u725(6 c =85 |(,7 7R %=:P 7 %(=(,&+1(1P c8) *$1= (17635(&+(1'( y(,6( (5*,%7 6,&+ )@5 t($.7,21(1 TP q5'181* J$ 3 TK '$6 |(,7*(6(7= S S 2 3 .t J7 2 7RK P JUPSYK Lcb7 LcbR y,5' '(5 =(,7/,&+( x(5/$8) '(5 m21=(175$7,21 :>+5(1' (,1(5 &+(0,6&+(1 t($.7,21 (;3(5,0(17(// %(67,007N 62 .$11 0$1 '$5$86 ',( t($.7,21625'181* (50,77(/1\ g,1( /2*$5,7+0,6&+( c8)75$*81* '(5 m21=(175$7,21 *(*(1 ',( |(,7 )@5 t($.7,21(1 SP q5'O 181* %=:P (,1( c8)75$*81* 921 SBLcb7 *(*(1 ',( |(,7 )@5 t($.7,21(1 TP q5'181* (5*(%(1 /,1($5( x(5/>8)( Jc%%P UPXKP h@5 ',( t@&.5($.7,21 921 t($.7,21 JUPSUK *,/7 $1$/2* =8 i/P JUPSVK '$6 |(,7*(6(7= 'Lcb 3 .J5K Lfb' Lgb( Lhb) 6 P P P '7
JUPSZK
UPT i581'/$*(1 '(5 x(5%5(1181* In
[A]t
1 [A]t
Reaktion 1. Ordnung
[A]0 0
USS
Reaktion 2. Ordnung
1 [A]0 (a)
c%%P UPX
t
(b)
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